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1. 发明申请

US20080113155A1 Nano transfer and nanoreplication using deterministically grown sacrificial nanotemplates 有权
标题翻译：使用确定性生长的牺牲纳米模板进行纳米转移和纳米应用
公开(公告)号：US20080113155A1
公开(公告)日：2008-05-15
申请号：US11985551
申请日：2007-11-13
申请人： Anatoli Melechko , Timothy McKnight , Michael Guillorn , Bojan Ilic , Vladimir Merkulov , Mitchel Doktycz , Douglas Lowndes , Michael Simpson
发明人： Anatoli Melechko , Timothy McKnight , Michael Guillorn , Bojan Ilic , Vladimir Merkulov , Mitchel Doktycz , Douglas Lowndes , Michael Simpson
IPC分类号： B32B3/10
CPC分类号： B01D67/0062 , B01D67/0069 , B01D67/0072 , B01D71/02 , B01D71/027 , B01D2323/24 , B01D2325/08 , B01J23/755 , B01J35/0013 , B01J35/006 , B01J37/0238 , B01J37/342 , B01L3/5027 , B01L2300/0663 , B01L2300/0896 , B81B2201/058 , B81B2203/0361 , B81C1/00119 , B82Y30/00 , Y10S977/70 , Y10S977/781 , Y10S977/784 , Y10T428/13 , Y10T428/1303 , Y10T428/1352 , Y10T428/1359 , Y10T428/139 , Y10T428/24174 , Y10T428/24273 , Y10T428/24322 , Y10T428/2902 , Y10T428/2991 , Y10T428/31504 , Y10T428/31678
摘要： Methods, manufactures, machines and compositions are described for nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates. An apparatus, includes a substrate and a nanoconduit material coupled to a surface of the substrate. The substrate defines an aperture and the nanoconduit material defines a nanoconduit that is i) contiguous with the aperture and ii) aligned substantially non-parallel to a plane defined by the surface of the substrate.
摘要翻译：使用确定性生长的牺牲纳米模板描述了用于纳米转移和纳米应用的方法，制造商，机器和组合物。一种装置，包括耦合到衬底的表面的衬底和纳米管材料。衬底限定孔径，并且纳米管材料限定纳米管，其是i）与孔相邻并且ii）基本上不平行于由衬底的表面限定的平面排列。

2. 发明申请

US20060076867A1 Individually electrically addressable carbon nanofibers on insulating substrates 有权
公开(公告)号：US20060076867A1
公开(公告)日：2006-04-13
申请号：US11268061
申请日：2005-11-07
申请人： Michael Guillorn , Timothy McKnight , Vladimir Merkulov , Anatoli Melechko , Michael Simpson
发明人： Michael Guillorn , Timothy McKnight , Vladimir Merkulov , Anatoli Melechko , Michael Simpson
IPC分类号： H01J9/24
CPC分类号： D01F9/127 , B82Y30/00 , G01N27/308 , G01N33/48707 , H01J1/3042 , H01J9/025 , H01J2201/30469 , Y10S977/939
摘要： Systems and methods are described for individually electrically addressable carbon nanofibers on insulating substrates. A method includes forming an electrically conductive interconnect on at least a part of an insulating surface on a substrate; and growing at least one fiber that is coupled to the electrically conductive interconnect.

3. 发明申请

US20050176245A1 Nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates 有权
标题翻译：使用确定性生长的牺牲纳米模板进行纳米转移和纳米应用
公开(公告)号：US20050176245A1
公开(公告)日：2005-08-11
申请号：US10774699
申请日：2004-02-09
申请人： Anatoli Melechko , Timothy McKnight , Michael Guillorn , Bojan Ilic , Vladimir Merkulov , Mitchel Doktycz , Douglas Lowndes , Michael Simpson
发明人： Anatoli Melechko , Timothy McKnight , Michael Guillorn , Bojan Ilic , Vladimir Merkulov , Mitchel Doktycz , Douglas Lowndes , Michael Simpson
IPC分类号： B01D67/00 , B01D71/02 , B01J23/755 , B01L3/00 , H01L21/44
CPC分类号： B01D67/0062 , B01D67/0069 , B01D67/0072 , B01D71/02 , B01D71/027 , B01D2323/24 , B01D2325/08 , B01J23/755 , B01J35/0013 , B01J35/006 , B01J37/0238 , B01J37/342 , B01L3/5027 , B01L2300/0663 , B01L2300/0896 , B81B2201/058 , B81B2203/0361 , B81C1/00119 , B82Y30/00 , Y10S977/70 , Y10S977/781 , Y10S977/784 , Y10T428/13 , Y10T428/1303 , Y10T428/1352 , Y10T428/1359 , Y10T428/139 , Y10T428/24174 , Y10T428/24273 , Y10T428/24322 , Y10T428/2902 , Y10T428/2991 , Y10T428/31504 , Y10T428/31678
摘要： Methods, manufactures, machines and compositions are described for nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates. A method includes depositing a catalyst particle on a surface of a substrate to define a deterministically located position; growing an aligned elongated nanostructure on the substrate, an end of the aligned elongated nanostructure coupled to the substrate at the deterministically located position; coating the aligned elongated nanostructure with a conduit material; removing a portion of the conduit material to expose the catalyst particle; removing the catalyst particle; and removing the elongated nanostructure to define a nanoconduit.
摘要翻译：使用确定性生长的牺牲纳米模板描述了用于纳米转移和纳米应用的方法，制造商，机器和组合物。一种方法包括在衬底的表面上沉积催化剂颗粒以限定确定性定位的位置; 在衬底上生长对准的细长纳米结构，对准的细长纳米结构的端部在确定性位置处耦合到衬底; 用导管材料涂覆对准的细长纳米结构; 去除所述导管材料的一部分以暴露所述催化剂颗粒; 除去催化剂颗粒; 并移除细长的纳米结构以限定纳米管。

4. 发明申请

US20050167651A1 Controlled alignment catalytically grown nanostructures 失效
标题翻译：受控比对催化生长的纳米结构
公开(公告)号：US20050167651A1
公开(公告)日：2005-08-04
申请号：US11089099
申请日：2005-03-24
申请人： Vladimir Merkulov , Anatoli Melechko , Michael Guillorn , Douglas Lowndes , Michael Simpson
发明人： Vladimir Merkulov , Anatoli Melechko , Michael Guillorn , Douglas Lowndes , Michael Simpson
IPC分类号： A61K9/14 , B82B1/00 , C01B31/02 , C23C16/26 , D01F9/127 , G01N33/543 , H01J1/304 , H01J1/62 , H01J37/32 , H01L21/44 , H01L21/8234 , H01L21/8244 , H01L29/06 , H01L31/0328 , H01L31/0336 , H01L31/072 , H01L31/109
CPC分类号： G01N33/5438 , B82Y30/00 , B82Y40/00 , C01B32/162 , C01B2202/08 , D01F9/127 , Y10S977/843 , Y10S977/891 , Y10S977/943 , Y10T428/24628
摘要： Systems and methods are described for controlled alignment of catalyticaly grown nanostructures in a large-scale synthesis process. A composition includes an elongated nanostructure including a first segment defining a first axis and a second segment coupled to the first segment, the second segment defining a second axis that is substantially nonparallel to the first axis. A method includes: generating an electric field proximate an edge of a protruding section of an electrode, the electric field defining a vector; and forming an elongated nanostructure located at a position on a surface of a substrate, the position on the surface of the substrate proximate the edge of the protruding section of the electrode, at least one tangent to the elongated nanostructure i) substantially parallel to the vector defined by the electric field and ii) substantially non-parallel to a normal defined by the surface of the substrate.
摘要翻译：描述了用于在大规模合成过程中催化生长的纳米结构的受控比对的系统和方法。组合物包括细长纳米结构，其包括限定第一轴线的第一区段和联接到第一区段的第二段，第二区段限定基本上不平行于第一轴线的第二轴线。一种方法包括：在电极的突出部分的边缘附近产生电场，所述电场限定矢量; 以及形成位于基底表面上的位置处的细长纳米结构，所述基底表面上靠近所述电极的突出部分的边缘的位置，至少一个细长纳米结构的切线i）基本上平行于所述载体由电场限定，ii）基本上不平行于由衬底的表面限定的法线。

5. 发明申请

US20050103993A1 Vertically aligned nanostructure scanning probe microscope tips 失效
标题翻译：垂直取向的纳米结构扫描探针显微镜技巧
公开(公告)号：US20050103993A1
公开(公告)日：2005-05-19
申请号：US10716770
申请日：2003-11-19
申请人： Michael Guillorn , Bojan Ilic , Anatoli Melechko , Vladimir Merkulov , Douglas Lowndes , Michael Simpson
发明人： Michael Guillorn , Bojan Ilic , Anatoli Melechko , Vladimir Merkulov , Douglas Lowndes , Michael Simpson
IPC分类号： G01Q70/12 , G01Q70/16 , G12B21/02
CPC分类号： G01Q70/16 , G01Q70/12
摘要： Methods and apparatus are described for cantilever structures that include a vertically aligned nanostructure, especially vertically aligned carbon nanofiber scanning probe microscope tips. A method includes A method, includes fabricating a cantilever structure having a vertically aligned nanostructure including: forming a doped layer at a first side of a substrate; depositing an etch mask layer on a second side of the substrate; forming a plurality of alignment marks that are coupled to the first side of the substrate; depositing a catalyst nanoparticle at a deterministic site that is coupled to the doped layer; growing the vertically aligned nanostructure at the deterministic site with the catalyst nanoparticle; depositing a first protective layer that surrounds at least a portion of the vertically aligned nanostructure; patterning the first protective layer to define an outline of a cantilever body; transferring the outline of the cantilever body from the first protective layer into the doped layer to form the cantilever body from the doped layer; depositing a second protective layer that coats at least a portion of a surface of the cantilever body; patterning the etch mask layer to define an outline of a relieved volume; transferring the outline of the relieved volume from the etch mask layer into the second side of the substrate to remove the relieved volume from the substrate, where the cantilever body is not removed.
摘要翻译：描述了包括垂直排列的纳米结构，特别是垂直排列的碳纳米纤维扫描探针显微镜尖端的悬臂结构的方法和装置。一种方法包括一种方法，包括制造具有垂直排列的纳米结构的悬臂结构，包括：在衬底的第一侧形成掺杂层; 在所述衬底的第二侧上沉积蚀刻掩模层; 形成耦合到所述基板的第一侧的多个对准标记; 在耦合到掺杂层的确定性位点沉积催化剂纳米颗粒; 用催化剂纳米颗粒在确定性位点生长垂直排列的纳米结构; 沉积围绕所述垂直排列的纳米结构的至少一部分的第一保护层; 图案化第一保护层以限定悬臂体的轮廓; 将悬臂体的轮廓从第一保护层转移到掺杂层中以从掺杂层形成悬臂体; 沉积涂覆悬臂体表面的至少一部分的第二保护层; 图案化蚀刻掩模层以限定释放体积的轮廓; 将缓冲体积的轮廓从蚀刻掩模层转移到衬底的第二侧，以从衬底移除释放体积，其中悬臂体不被去除。

6. 发明申请

US20050170553A1 Apparatus for controlled alignment of catalytically grown nanostructures 有权
标题翻译：用于催化生长的纳米结构的受控比对的装置
公开(公告)号：US20050170553A1
公开(公告)日：2005-08-04
申请号：US11089098
申请日：2005-03-24
申请人： Vladimir Merkulov , Anatoli Melechko , Michael Guillorn , Douglas Lowndes , Michael Simpson
发明人： Vladimir Merkulov , Anatoli Melechko , Michael Guillorn , Douglas Lowndes , Michael Simpson
IPC分类号： A61K9/14 , B82B1/00 , C01B31/02 , C23C16/26 , D01F9/127 , G01N33/543 , H01J1/304 , H01J1/62 , H01J37/32 , H01L21/44 , H01L21/8234 , H01L21/8244 , H01L29/06 , H01L31/0328 , H01L31/0336 , H01L31/072 , H01L31/109
CPC分类号： G01N33/5438 , B82Y30/00 , B82Y40/00 , C01B32/162 , C01B2202/08 , D01F9/127 , Y10S977/843 , Y10S977/891 , Y10S977/943 , Y10T428/24628
摘要： Systems and methods are described for controlled alignment of catalyticaly grown nanostructures in a large-scale synthesis process. An apparatus includes an electrode including: a protruding section defining an edge; and a nonprotruding section coupled to the protruding section, where the edge is adapted to deflect an electric field generated with the electrode and at least one section selected from the group consisting of the protruding section and the nonprotruding section is adapted to support a substrate for the growth of elongated nanostructures.
摘要翻译：描述了用于在大规模合成过程中催化生长的纳米结构的受控比对的系统和方法。一种设备包括：电极，包括：限定边缘的突出部分; 以及联接到突出部分的非侵入部分，其中边缘适于偏转由电极产生的电场，并且从由突出部分和非侵入部分组成的组中选择的至少一个部分适于支撑用于细长纳米结构的生长。

7. 发明申请

US20060068127A1 Nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates 有权
标题翻译：使用确定性生长的牺牲纳米模板进行纳米转移和纳米应用
公开(公告)号：US20060068127A1
公开(公告)日：2006-03-30
申请号：US11273316
申请日：2005-11-14
申请人： Anatoll Melechko , Timothy McKnight , Michael Guillorn , Bojan Ilic , Vladimir Merkulov , Mitchel Doktycz , Douglas Lowndes , Michael Simpson
发明人： Anatoll Melechko , Timothy McKnight , Michael Guillorn , Bojan Ilic , Vladimir Merkulov , Mitchel Doktycz , Douglas Lowndes , Michael Simpson
IPC分类号： H01L21/00 , C23F1/00 , H05H1/24 , H01L21/311
CPC分类号： B01D67/0062 , B01D67/0069 , B01D67/0072 , B01D71/02 , B01D71/027 , B01D2323/24 , B01D2325/08 , B01J23/755 , B01J35/0013 , B01J35/006 , B01J37/0238 , B01J37/342 , B01L3/5027 , B01L2300/0663 , B01L2300/0896 , B81B2201/058 , B81B2203/0361 , B81C1/00119 , B82Y30/00 , Y10S977/70 , Y10S977/781 , Y10S977/784 , Y10T428/13 , Y10T428/1303 , Y10T428/1352 , Y10T428/1359 , Y10T428/139 , Y10T428/24174 , Y10T428/24273 , Y10T428/24322 , Y10T428/2902 , Y10T428/2991 , Y10T428/31504 , Y10T428/31678
摘要： Methods, manufactures, machines and compositions are described for nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates. A method includes depositing a catalyst particle on a surface of a substrate to define a deterministically located position; growing an aligned elongated nanostructure on the substrate, an end of the aligned elongated nanostructure coupled to the substrate at the deterministically located position; coating the aligned elongated nanostructure with a conduit material; removing a portion of the conduit material to expose the catalyst particle; removing the catalyst particle; and removing the elongated nanostructure to define a nanoconduit.
摘要翻译：使用确定性生长的牺牲纳米模板描述了用于纳米转移和纳米应用的方法，制造商，机器和组合物。一种方法包括在衬底的表面上沉积催化剂颗粒以限定确定性定位的位置; 在衬底上生长对准的细长纳米结构，对准的细长纳米结构的端部在确定性位置处耦合到衬底; 用导管材料涂覆对准的细长纳米结构; 去除所述导管材料的一部分以暴露所述催化剂颗粒; 除去催化剂颗粒; 并移除细长的纳米结构以限定纳米管。

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