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    • 1. 发明授权
    • Multilayer permanent magnet films
    • 多层永磁薄膜
    • US07050274B2
    • 2006-05-23
    • US10012829
    • 2001-12-10
    • Michael A. SeiglerIsabel G. TrindadePaul E. Anderson
    • Michael A. SeiglerIsabel G. TrindadePaul E. Anderson
    • G11B5/39G11B5/127
    • B82Y25/00B82Y10/00G01R33/093G11B5/3903G11B5/3909G11B5/3932G11B2005/3996H01F10/324
    • Multilayer permanent magnet films comprising at least two permanent magnet layers separated by an interlayer are disclosed. In one embodiment, the multilayer permanent magnet film includes an interlayer deposited on a first permanent magnet layer, a seed layer deposited on the interlayer, and a second permanent magnet layer deposited on the seed layer. The permanent magnet layers may comprise a material such as CoPt, while the seed layer may comprise a material such as TiW. The interlayer may comprise a material such as Ta. The multilayer permanent magnet films possess favorable properties such as high magnetic coercivity (Hc) and high remnant magnetization (MR) at thicknesses which yield high magnetic fields. The films may be used in applications such as current perpendicular to the plane (CPP) magnetic sensors in which the multilayer permanent magnet film is used to magnetically bias the sensor.
    • 公开了包括由中间层分离的至少两个永磁体层的多层永磁体膜。 在一个实施例中,多层永磁体膜包括沉积在第一永磁体层上的层间,沉积在中间层上的晶种层和沉积在晶种层上的第二永磁体层。 永磁体层可以包括诸如CoPt的材料,而种子层可以包括诸如TiW的材料。 中间层可以包括诸如Ta的材料。 多层永磁体膜具有在产生高磁场的厚度方面具有良好的性能,例如高磁矫顽力(HCC)和高剩余磁化强度(M SUB R S)。 这些膜可以用于诸如垂直于平面(CPP)磁传感器的电流的应用,其中多层永磁体膜用于磁偏置传感器。