会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明授权
    • Method for integrated mass flow controller fabrication
    • 集成质量流量控制器制造方法
    • US6063645A
    • 2000-05-16
    • US97359
    • 1998-06-15
    • Ming-Jye TasiKuo-Ming ChangChien-Hung ChenMin-Chieh Chou
    • Ming-Jye TasiKuo-Ming ChangChien-Hung ChenMin-Chieh Chou
    • H01L21/308
    • G01F1/684G01F1/6845G05D7/0694
    • A manufacturing method of an integrated mass flow controller (MFC) module is disclosed. The integrated MFC module is comprising top, middle and bottom parts. The middle part of the integrated MFC module which is consist of both the microvalve and sensing regions that is the key feature of the present invention. The microvalve is formed by depositing a heating element in a microbridge suspended on a mesa to control the movement of the valve. On the other hand, a series of sensing elements of the sensing region are in the mass flow path to detect the mass flow. The top and bottom parts are used for mass flow channel, mass entrance, mass exit and signal output terminals. There are bumps in the interface between middle and bottom parts to support the microvalve mesa. All three parts are first fabricated on a semiconductor wafer separately and then engaged together to complete the integrated MFC module formation.
    • 公开了一种集成质量流量控制器(MFC)模块的制造方法。 集成的MFC模块包括顶部,中部和底部。 集成MFC模块的中间部分由作为本发明的关键特征的微型阀和感测区组成。 通过将悬浮在台面上的微桥中的加热元件沉积以控制阀的运动而形成微型阀。 另一方面,感测区域的一系列感测元件位于质量流动路径中以检测质量流量。 顶部和底部用于质量流通道,质量入口,质量出口和信号输出端子。 中部和底部之间的界面有凸起,以支撑微型台面。 首先将三个部分分别在半导体晶片上制造,然后接合在一起以完成集成的MFC模块形成。