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1. 发明申请

US20100281679A1 FABRICATING METHOD FOR MULTI-LAYER ELECTRIC PROBE 审中-公开
标题翻译：多层电动探针的制作方法
公开(公告)号：US20100281679A1
公开(公告)日：2010-11-11
申请号：US12841176
申请日：2010-07-22
申请人： Meng-Chi Huang , Min-Chieh Chou , Fuh-Yu Chang , Ching-Ping Wu
发明人： Meng-Chi Huang , Min-Chieh Chou , Fuh-Yu Chang , Ching-Ping Wu
IPC分类号： H05K13/00
CPC分类号： G01R1/06711 , G01R1/06761 , G01R3/00 , Y10T29/49002 , Y10T29/49117
摘要： A method of fabricating a multi-layer electric probe. The method includes forming a first strip layer. The first strip layer has a first conductivity and a first mechanical strength. Then, a second strip layer is solidly adhered to a surface of the first strip layer to form a structural body, wherein the second strip layer has a second conductivity and a second mechanical strength. The combination of the second conductivity and the second mechanical strength with the first conductivity and the first mechanical strength produces the desired capabilities of enduring current and mechanical strength.
摘要翻译：一种制造多层电探针的方法。该方法包括形成第一带状层。第一带状层具有第一导电性和第一机械强度。然后，第二带状层牢固地附着到第一带状层的表面，形成结构体，其中第二带状层具有第二导电性和第二机械强度。第二导电性和第二机械强度与第一导电性和第一机械强度的组合产生持久电流和机械强度的期望能力。

2. 发明申请

US20080094084A1 MULTI-LAYER ELECTRIC PROBE AND FABRICATING METHOD THEREOF 审中-公开
标题翻译：多层电动探头及其制造方法
公开(公告)号：US20080094084A1
公开(公告)日：2008-04-24
申请号：US11616892
申请日：2006-12-28
申请人： Meng-Chi Huang , Min-Chieh Chou , Fuh-Yu Chang , Ching-Ping Wu
发明人： Meng-Chi Huang , Min-Chieh Chou , Fuh-Yu Chang , Ching-Ping Wu
IPC分类号： G01R31/02 , H01R43/00
CPC分类号： G01R1/06711 , G01R1/06761 , G01R3/00 , Y10T29/49002 , Y10T29/49117
摘要： A multi-layer electric probe, suitable for testing a to-be-tested device, includes a first strip layer and a second strip layer. The first strip layer has a first conductivity and a first mechanical strength. The second strip layer has a second conductivity and a second mechanical strength. The first strip layer and the second strip layer are solidly adhered together as a structural body so as to produce at least one of the desired capabilities of enduring current and mechanical strength. The multi-layer electric probe can further include at least a third strip layer having the capability of enduring current and the desired mechanical strength.
摘要翻译：适用于测试待测试装置的多层电探针包括第一条带层和第二条带层。第一带状层具有第一导电性和第一机械强度。第二带状层具有第二导电性和第二机械强度。第一带层和第二带层作为结构体牢固地粘合在一起，以便产生持久电流和机械强度的期望能力中的至少一个。多层电探针还可以包括具有耐久电流和期望的机械强度的能力的至少第三带状层。

3. 发明申请

US20090246717A1 METHOD FOR FORMING A PATTERNED PHOTORESIST LAYER 审中-公开
标题翻译：形成图案光栅层的方法
公开(公告)号：US20090246717A1
公开(公告)日：2009-10-01
申请号：US12187334
申请日：2008-08-06
申请人： Meng-Chi Huang , Cheng-Hsuan Lin , Fuh-Yu Chang
发明人： Meng-Chi Huang , Cheng-Hsuan Lin , Fuh-Yu Chang
IPC分类号： G03F7/20
CPC分类号： G03F7/7035
摘要： A photoresist layer is disclosed. Utilizing light diffraction properties, a transparent layer is disposed between a light-shielding layer and a photoresist layer during an exposure step, such that the patterned photoresist layer has non-vertical sidewalls. The method of the invention can be applied during front side exposure or back side exposure, and is also practical for positive type photoresists or negative photoresists.
摘要翻译：公开了一种光致抗蚀剂层。利用光衍射特性，在曝光步骤期间，在遮光层和光致抗蚀剂层之间设置透明层，使得图案化的光致抗蚀剂层具有非垂直侧壁。本发明的方法可以在正面曝光或背面曝光中应用，并且对于正型光致抗蚀剂或负型光致抗蚀剂也是实用的。

4. 发明申请

US20100018421A1 ROLLER WITH MICROSTRUCTURE AND THE MANUFACTRUING METHOD THEREOF 审中-公开
标题翻译：具有微结构的滚子及其制造方法
公开(公告)号：US20100018421A1
公开(公告)日：2010-01-28
申请号：US12571734
申请日：2009-10-01
申请人： Kun-Chih Pan , Fuh-Yu Chang , Min-Chieh Chou
发明人： Kun-Chih Pan , Fuh-Yu Chang , Min-Chieh Chou
IPC分类号： B41F13/10
CPC分类号： G03F7/0002 , B41C1/025 , B82Y10/00 , B82Y40/00 , H05K3/1275 , H05K2203/0108 , H05K2203/0143
摘要： The present invention discloses a method for manufacturing a roller with microstructure, comprising the steps of: forming a protective metal layer on a roller; defining specific imprint patterns on an imprint stamp by processing the imprint stamp with a flexible mold; forming an etch mask on the embossed imprint stamp after the imprint stamp is released from the mold; wetting the imprint stamp and the etch mask thereof; adhering the etch mask onto the roller by rolling the roller on the imprint stamp; etching the roller at the portion thereof uncovered by the etch mask; and forming the roller with specific microstructure by removing the etch mask and the protective metal layer.
摘要翻译：本发明公开了一种具有微结构的辊的制造方法，包括以下步骤：在辊上形成保护金属层; 通过用柔性模具处理印记印章来在印记印章上定义特定印记图案; 在压印印模从模具中释放之后，在压纹印记印模上形成蚀刻掩模; 润湿印记印模及其蚀刻掩模; 通过将辊压在压印标记上来将蚀刻掩模粘附到辊上; 在由蚀刻掩模未覆盖的部分处蚀刻辊; 并通过去除蚀刻掩模和保护金属层来形成具有特定微结构的辊。

5. 发明授权

US07479237B2 Method of fabricating vertical probe head 有权
标题翻译：垂直探针头的制作方法
公开(公告)号：US07479237B2
公开(公告)日：2009-01-20
申请号：US11641880
申请日：2006-12-20
申请人： Jiu-Shu Tsai , Min-Chieh Chou , Fuh-Yu Chang
发明人： Jiu-Shu Tsai , Min-Chieh Chou , Fuh-Yu Chang
IPC分类号： B44C1/22
CPC分类号： G01R1/07371 , G01R1/07357 , G01R3/00 , Y10T29/49002 , Y10T29/49004 , Y10T29/49117
摘要： The present invention relates to a method of fabricating a vertical probe head, whereas the vertical probe head is formed by the combination of at least a probe, a bottom guide plate and a top guide plate having at least a hole matching the probe. The probe is fabricated by a LIGA-like process combining with the processes of photolithography, etching and electroforming, and so on, so that the probe is equipped with comparatively better precision, strength and reliability and yet can be custom-made for satisfying various demands. In addition, both the top and bottom guide plates are made by a means of non-mechanical machining, which respectively is fabricated by processing a substrate using means of photolithography, etching and mask so as to fabricate holes for matching with the aforesaid probe. The vertical probe head of the invention is a breakthrough over the current probe head and thus breaks the bottleneck limiting the process of fabricating the same, such that the method disclosed in the invention enables the probe head to be fabricated by a cheaper and less complicated process with more probes to be arranged in a unit area.
摘要翻译：本发明涉及一种制造垂直探头的方法，而垂直探针头由至少探针，底部引导板和至少具有与探针相匹配的孔的顶部引导板的组合形成。该探针通过与光刻，蚀刻和电铸等工艺相结合的LIGA工艺制造，使得探针具有相对更好的精度，强度和可靠性，并且可以定制以满足各种需求。此外，顶部和底部引导板都是通过非机械加工制成的，它们分别通过使用光刻，蚀刻和掩模的方法处理基板来制造，以便制造用于与上述探针匹配的孔。本发明的垂直探针头是当前探头的突破，从而破坏了限制其制造过程的瓶颈，使得本发明公开的方法使探针头能够通过更便宜且更不复杂的工艺制造在一个单位区域内安排更多的探针。

6. 发明申请

US20080190889A1 Roller with microstructure and the manufactruing method thereof 审中-公开
标题翻译：具有微结构的滚筒及其制造方法
公开(公告)号：US20080190889A1
公开(公告)日：2008-08-14
申请号：US12081360
申请日：2008-04-15
申请人： Kun-Chih Pan , Fuh-Yu Chang , Min-Chieh Chou
发明人： Kun-Chih Pan , Fuh-Yu Chang , Min-Chieh Chou
IPC分类号： B44C1/22
CPC分类号： G03F7/0002 , B41C1/025 , B82Y10/00 , B82Y40/00 , H05K3/1275 , H05K2203/0108 , H05K2203/0143
摘要： The present invention discloses a method for manufacturing a roller with microstructure, comprising the steps of: forming a protective metal layer on a roller; defining specific imprint patterns on an imprint stamp by processing the imprint stamp with a flexible mold; forming an etch mask on the embossed imprint stamp after the imprint stamp is released from the mold; wetting the imprint stamp and the etch mask thereof; adhering the etch mask onto the roller by rolling the roller on the imprint stamp; etching the roller at the portion thereof uncovered by the etch mask; and forming the roller with specific microstructure by removing the etch mask and the protective metal layer.
摘要翻译：本发明公开了一种具有微结构的辊的制造方法，包括以下步骤：在辊上形成保护金属层; 通过用柔性模具处理印记印章来在印记印章上定义特定印记图案; 在压印印模从模具中释放之后，在压花印记印模上形成蚀刻掩模; 润湿印记印模及其蚀刻掩模; 通过将辊压在压印标记上来将蚀刻掩模粘附到辊上; 在由蚀刻掩模未覆盖的部分处蚀刻辊; 并通过去除蚀刻掩模和保护金属层来形成具有特定微结构的辊。

7. 发明申请

US20070167022A1 Method of fabricating vertical probe head 有权
标题翻译：垂直探针头的制作方法
公开(公告)号：US20070167022A1
公开(公告)日：2007-07-19
申请号：US11641880
申请日：2006-12-20
申请人： Jiu-Shu Tsai , Min-Chieh Chou , Fuh-Yu Chang
发明人： Jiu-Shu Tsai , Min-Chieh Chou , Fuh-Yu Chang
IPC分类号： H01L21/302
CPC分类号： G01R1/07371 , G01R1/07357 , G01R3/00 , Y10T29/49002 , Y10T29/49004 , Y10T29/49117
摘要： The present invention relates to a method of fabricating a vertical probe head, whereas the vertical probe head is formed by the combination of at least a probe, a bottom guide plate and a top guide plate having at least a hole matching the probe. The probe is fabricated by a LIGA-like process combining with the processes of photolithography, etching and electroforming, and so on, so that the probe is equipped with comparatively better precision, strength and reliability and yet can be custom-made for satisfying various demands. In addition, both the top and bottom guide plates are made by a means of non-mechanical machining, which respectively is fabricated by processing a substrate using means of photolithography, etching and mask so as to fabricate holes for matching with the aforesaid probe. The vertical probe head of the invention is a breakthrough over the current probe head and thus breaks the bottleneck limiting the process of fabricating the same, such that the method disclosed in the invention enables the probe head to be fabricated by a cheaper and less complicated process with more probes to be arranged in a unit area.
摘要翻译：本发明涉及一种制造垂直探头的方法，而垂直探针头由至少探针，底部引导板和至少具有与探针相匹配的孔的顶部引导板的组合形成。该探针通过与光刻，蚀刻和电铸等工艺相结合的LIGA工艺制造，使得探针具有相对更好的精度，强度和可靠性，并且可以定制以满足各种需求。此外，顶部和底部引导板都是通过非机械加工制成的，它们分别通过使用光刻，蚀刻和掩模的方法处理基板来制造，以便制造用于与上述探针匹配的孔。本发明的垂直探针头是当前探头的突破，从而破坏了限制其制造过程的瓶颈，使得本发明公开的方法使探针头能够通过更便宜且更不复杂的工艺制造在一个单位区域内安排更多的探针。

8. 发明申请

US20060201909A1 Roller with microstructure and the manufacturing method thereof 审中-公开
标题翻译：具有微结构的滚子及其制造方法
公开(公告)号：US20060201909A1
公开(公告)日：2006-09-14
申请号：US11258020
申请日：2005-10-26
申请人： Kun-Chih Pan , Fuh-Yu Chang , Min-Chieh Chou
发明人： Kun-Chih Pan , Fuh-Yu Chang , Min-Chieh Chou
IPC分类号： C23F1/00
CPC分类号： G03F7/0002 , B41C1/025 , B82Y10/00 , B82Y40/00 , H05K3/1275 , H05K2203/0108 , H05K2203/0143
摘要： The present invention discloses a method for manufacturing a roller with microstructure, comprising the steps of: forming a protective metal layer on a roller; defining specific imprint patterns on an imprint stamp by processing the imprint stamp with a flexible mold; forming an etch mask on the embossed imprint stamp after the imprint stamp is released from the mold; wetting the imprint stamp and the etch mask thereof; adhering the etch mask onto the roller by rolling the roller on the imprint stamp; etching the roller at the portion thereof uncovered by the etch mask; and forming the roller with specific microstructure by removing the etch mask and the protective metal layer.
摘要翻译：本发明公开了一种具有微结构的辊的制造方法，包括以下步骤：在辊上形成保护金属层; 通过用柔性模具处理印记印章来在印记印章上定义特定印记图案; 在压印印模从模具中释放之后，在压花印记印模上形成蚀刻掩模; 润湿印记印模及其蚀刻掩模; 通过将辊压在压印标记上来将蚀刻掩模粘附到辊上; 在由蚀刻掩模未覆盖的部分处蚀刻辊; 并通过去除蚀刻掩模和保护金属层来形成具有特定微结构的辊。

9. 发明申请

US20120130682A1 REAL-TIME DETECTION SYSTEM AND THE METHOD THEREOF 有权
标题翻译：实时检测系统及其方法
公开(公告)号：US20120130682A1
公开(公告)日：2012-05-24
申请号：US13113844
申请日：2011-05-23
申请人： Jia Wang , Fuh-Yu Chang
发明人： Jia Wang , Fuh-Yu Chang
IPC分类号： G06F15/00
CPC分类号： G01M13/028 , G01R23/16 , G06F17/18 , G06K9/00496 , G06K9/00536
摘要： The invention discloses a real-time detection system for detecting the real-time machining by a rotating machine or rotating quality of a rotating machine. The real-time detection system of the invention comprises a signal capture module, a preprocessor, a processor and a comparison module. The signal capture module is used to capture a time-sequence signal of the rotating machine. The preprocessor is coupled to the signal capture module for receiving the time-sequence signal and generating a stationary time-sequence signal by a Fourier Transform. The processor is coupled to the preprocessor for receiving the stationary time-sequence signal and calculating a plurality of entropy of the stationary time-sequence signal by a predetermined way. The comparison module with an entropy table or a feature judgment mechanism of the entropy variation is coupled to the processor for receiving the plurality of entropy and comparing the plurality of entropy according to the entropy table or the feature judgment of the entropy variation and generating a quality signal.
摘要翻译：本发明公开了一种用于检测旋转机器的实时加工或旋转机器的旋转质量的实时检测系统。本发明的实时检测系统包括信号捕获模块，预处理器，处理器和比较模块。信号捕获模块用于捕获旋转机器的时间序列信号。预处理器耦合到信号捕捉模块，用于接收时间序列信号，并通过傅里叶变换产生一个平稳的时间序列信号。处理器耦合到预处理器，用于接收固定的时间序列信号，并以预定的方式计算固定时间序列信号的多个熵。具有熵表的熵表的比较模块或熵变的特征判断机制耦合到处理器，用于接收多个熵，并根据熵变表或熵变的特征判断来比较多个熵，并产生质量信号。

10. 发明申请

US20090142710A1 METHOD FOR PATTERNING A PHOTORESIST LAYER 审中-公开
标题翻译：用于绘制光电层的方法
公开(公告)号：US20090142710A1
公开(公告)日：2009-06-04
申请号：US12106837
申请日：2008-04-21
申请人： Cheng-Hsuan Lin , Chao-Chun Huang , Fuh-Yu Chang
发明人： Cheng-Hsuan Lin , Chao-Chun Huang , Fuh-Yu Chang
IPC分类号： G03F7/20
CPC分类号： G03F7/2018
摘要： The disclosed is a method for patterning a photoresist layer. An object is provided, a photoresist layer is formed on the object, and an ink pattern is printed on the photoresist layer. Shielded by the ink pattern, the photoresist is exposed and developed to be patterned. In addition, a layered material is optionally formed between the object and the photoresist layer.
摘要翻译：所公开的是用于图案化光致抗蚀剂层的方法。提供了一个目的，在物体上形成光致抗蚀剂层，并且在光致抗蚀剂层上印刷油墨图案。由油墨图案屏蔽，光刻胶被曝光和显影以进行图案化。此外，可选地在物体和光致抗蚀剂层之间形成层状材料。

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