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1. 发明申请

US20070097558A1 Current-perpendicular-to-the-plane spin-valve (CPP-SV) sensor with current-confining apertures concentrated near the sensing edge 失效
标题翻译：电流垂直于平面的自旋阀（CPP-SV）传感器，电流限制孔径集中在感应边缘附近
公开(公告)号：US20070097558A1
公开(公告)日：2007-05-03
申请号：US11268275
申请日：2005-11-03
申请人： Matthew Carey , Jeffrey Childress , Stefan Maat , Neil Smith
发明人： Matthew Carey , Jeffrey Childress , Stefan Maat , Neil Smith
IPC分类号： G11B5/127 , G11B5/33
CPC分类号： G11B5/398 , B82Y25/00 , G01R33/093 , G11B5/3906
摘要： A current-perpendicular-to-the-plane spin-valve (CPP-SV) magnetoresistive sensor has an insulating layer with at least one aperture that confines the flow of sense current through the active region. The apertures are located closer to the sensing edge of the sensor than to the back edge of the sensor. The aperture (or apertures) are patterned by e-beam lithography, which enables the number, size and location of the apertures to be precisely controlled. The insulating layer may be located inside the electrically conductive nonmagnetic spacer layer, or outside of the magnetically active layers of the spin-valve. More than one insulating layer may be included in the stack to define conductive current paths where the apertures of the insulating layers overlap. The apertures are filled with electrically conductive material, typically the same material as that used for the spacer layer.
摘要翻译：电流 - 垂直于平面的自旋阀（CPP-SV）磁阻传感器具有绝缘层，其具有至少一个限制感应电流通过有源区域的孔径。孔比传感器的后边缘更靠近传感器的感测边缘。孔（或孔）通过电子束光刻被图案化，这使得能够精确地控制孔的数量，尺寸和位置。绝缘层可以位于导电非磁性间隔层内部，或位于自旋阀的磁性有效层的外部。堆叠中可以包括多于一个绝缘层，以限定绝缘层的孔重叠的导电电流路径。孔被填充有导电材料，通常与用于间隔层的材料相同。

2. 发明申请

US20070253119A1 CURRENT-PERPENDICULAR-TO-THE-PLANE (CPP) MAGNETORESISTIVE SENSOR WITH ANTIPARALLEL-FREE LAYER STRUCTURE AND LOW CURRENT-INDUCED NOISE 失效
标题翻译：具有无阻抗层结构和低电流感应噪声的电流 - 平面（CPP）磁传感器
公开(公告)号：US20070253119A1
公开(公告)日：2007-11-01
申请号：US11380625
申请日：2006-04-27
申请人： Matthew Carey , Jeffrey Childress , Stefan Maat , Neil Smith
发明人： Matthew Carey , Jeffrey Childress , Stefan Maat , Neil Smith
IPC分类号： G11B5/33 , G11B5/127
CPC分类号： G11B5/3932 , B82Y10/00 , B82Y25/00 , G01R33/093 , G11B5/3912 , G11B2005/3996
摘要： A current-perpendicular-to-the-plane (CPP) magnetoresistive sensor has an antiparallel free (APF) structure as the free layer and a specific direction for the applied bias or sense current. The (APF) structure has a first free ferromagnetic (FL1), a second free ferromagnetic layer (FL2), and an antiparallel (AP) coupling (APC) layer that couples FL1 and FL2 together antiferromagnetically with the result that FL1 and FL2 have substantially antiparallel magnetization directions and rotate together in the presence of a magnetic field. The thicknesses of FL1 and FL2 are chosen to obtain the desired net free layer magnetic moment/area for the sensor, and the thickness of FL1 is preferably chosen to be greater than the spin-diffusion length of the electrons in the FL1 material to maximize the bulk spin-dependent scattering of electrons and thus maximize the sensor signal. The CPP sensor operates specifically with the conventional sense current (opposite the electron current) directed from the pinned ferromagnetic layer to the APF structure, which results in suppression of current-induced noise.
摘要翻译：电流垂直平面（CPP）磁阻传感器具有作为自由层的反向平行自由（APF）结构和施加的偏置或感测电流的特定方向。（APF）结构具有第一自由铁磁（FL1），第二自由铁磁层（FL2）和反FL-FL2与FL2耦合的反并联（AP）耦合（APC）层，其结果是FL1和FL2具有实质上反平行磁化方向，并且在存在磁场的情况下一起旋转。选择FL1和FL2的厚度以获得用于传感器的期望的净自由层磁矩/面积，并且FL1的厚度优选地选择为大于FL1材料中的电子的自旋扩散长度以使电子的体自旋依赖散射，从而使传感器信号最大化。 CPP传感器与从钉扎铁磁层引导到APF结构的常规感测电流（与电子电流相反）特别地工作，这导致电流引起的噪声的抑制。

3. 发明申请

US20060221515A1 Magnetic read sensor employing oblique etched underlayers for inducing uniaxial magnetic anisotropy in a self biased free layer 失效
标题翻译：使用倾斜蚀刻底层的磁性读取传感器，用于在自偏压自由层中诱导单轴磁各向异性
公开(公告)号：US20060221515A1
公开(公告)日：2006-10-05
申请号：US11177990
申请日：2005-07-07
申请人： Matthew Carey , Jeffrey Childress , James Nix , Stefan Maat , Ian McFadyen
发明人： Matthew Carey , Jeffrey Childress , James Nix , Stefan Maat , Ian McFadyen
IPC分类号： G11B5/127 , G11B5/33
CPC分类号： H01F10/3272 , B82Y25/00 , B82Y40/00 , G11B5/3932 , H01F10/16 , H01F10/30 , H01F41/306 , H01L43/08 , H01L43/12
摘要： A magnetoresistive sensor having a self biased free layer. The free layer is constructed upon an underlayer that has been treated by a surface texturing process that configures the underlayer with an anisotropic roughness that induces a magnetic anisotropy in the free layer. The treated layer underlying the free layer can be a spacer layer sandwiched between the free layer and pinned layer or can be a separate underlayer formed opposite the spacer layer. Alternatively, the texturing of an underlayer can be used to induce a magnetic anisotropy in a bias layer that is separated from the free layer by an orthogonal coupling layer. This self biasing of the free layer induced by texturing can also be used in conjunction with biasing from a hard-bias structure.
摘要翻译：具有自偏置自由层的磁阻传感器。自由层被构造在已经通过表面纹理化处理处理的底层上，该表面构造过程用在各自自由层中引起磁各向异性的各向异性粗糙度来构造底层。自由层下面的处理层可以是夹在自由层和被钉扎层之间的间隔层，或者可以是与间隔层相对形成的单独的下层。或者，底层的纹理化可以用于在通过正交耦合层与自由层分离的偏压层中引起磁各向异性。由纹理引起的自由层的这种自偏压也可以与来自硬偏压结构的偏压结合使用。

4. 发明申请

US20060218775A1 Method for manufacturing a magnetic read sensor employing oblique etched underlayers for inducing uniaxial magnetic anisotropy in a hard magnetic pinning layer 失效
标题翻译：用于制造在硬磁性钉扎层中诱导单轴磁各向异性的倾斜蚀刻底层的磁读取传感器的方法
公开(公告)号：US20060218775A1
公开(公告)日：2006-10-05
申请号：US11097546
申请日：2005-03-31
申请人： Matthew Carey , Jeffrey Childress , Eric Fullerton , Stefan Maat
发明人： Matthew Carey , Jeffrey Childress , Eric Fullerton , Stefan Maat
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3909 , G11B5/3932 , G11B2005/3996 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49048 , Y10T29/49052
摘要： A magnetoresistive sensor having a hard magnetic pinning layer with an engineered magnetic anisotropy in a direction substantially perpendicular to the medium facing surface. The hard magnetic pinning layer may be constructed of CoPt, CoPtCr, or some other magnetic material and is deposited over an underlayer that has been ion beam etched. The ion beam etch has been performed at an angle with respect to normal in order to induce anisotropic roughness for example in form of oriented ripples or facets oriented along a direction parallel to the medium facing surface. The anisotropic roughness induces a strong uniaxial magnetic anisotropy substantially perpendicular to the medium facing surface in the hard magnetic pinning layer deposited there over.
摘要翻译：磁阻传感器具有在基本上垂直于介质相对表面的方向上具有工程磁各向异性的硬磁性钉扎层。硬磁性钉扎层可以由CoPt，CoPtCr或一些其他磁性材料构成，并且被沉积在已被离子束蚀刻的底层上。离子束蚀刻已经以相对于法线成一定角度进行，以便引起各向异性粗糙度，例如沿着平行于面向介质的表面的方向取向的定向波纹或面的形式。各向异性粗糙度引起基本上垂直于沉积在其上的硬磁性钉扎层中的面向介质的表面的强单轴磁各向异性。

5. 发明申请

US20070281079A1 MAGNETORESISTIVE SENSOR HAVING A MAGNETICALLY STABLE FREE LAYER WITH A POSITIVE MAGNETOSTRICTION 有权
标题翻译：具有磁性电磁感应的磁性稳定的自由层的磁传感器
公开(公告)号：US20070281079A1
公开(公告)日：2007-12-06
申请号：US11737701
申请日：2007-04-19
申请人： Matthew Carey , Jeffrey Childress , Stefan Maat , James Nix
发明人： Matthew Carey , Jeffrey Childress , Stefan Maat , James Nix
IPC分类号： B05D5/12
CPC分类号： G11B5/3166 , G11B5/3163 , G11B5/3196 , G11B5/3932 , G11C11/14 , H01L43/12
摘要： A magnetoresistive sensor having a magnetically stable free layer fabricated from a material having a positive magnetostriction such as a Co—Fe—B alloy. Although the free layer is fabricated from a material that has a positive magnetostriction, which would ordinarily make the free layer unstable, the magnetization of the free layer remains stable because of an induced magnetic anisotropy that has an easy axis of magnetization oriented parallel to the Air-bearing Surface (ABS). This magnetic anisotropy of the free layer is induced by an anisotropic texturing of the surface of the free layer. The resulting anisotropic surface texture is produced by an ion milling process that utilizes an ion beam directed at an acute angle relative to the normal to the surface of the wafer whereon the sensor is fabricated while the wafer is held on a stationary chuck. This angled, static ion milling produces an anisotropic surface texture, or roughness, of the free layer, which results in the above described magnetic anisotropy with an easy axis of magnetization in a desired orientation.
摘要翻译：具有由具有正磁致伸缩性的材料制成的磁稳定自由层的磁阻传感器，例如Co-Fe-B合金。尽管自由层由具有正磁致伸缩的材料制成，这通常会使自由层不稳定，但是由于具有易磁化轴平行于空气的诱导磁各向异性，自由层的磁化保持稳定（ABS）。自由层的磁各向异性由自由层表面的各向异性纹理引发。产生的各向异性表面纹理是通过离子研磨工艺产生的，该离子铣削工艺利用相对于晶片表面法线的锐角定向的离子束，其中制造传感器，同时将晶片保持在静止卡盘上。这种成角度的静态离子铣削产生自由层的各向异性表面纹理或粗糙度，这导致上述磁各向异性，并且在所需方向上具有容易的磁化轴。

6. 发明申请

US20070139826A1 MAGNETICALLY ANISOTROPIC SHIELD FOR USE IN MAGNETIC DATA RECORDING 失效
标题翻译：用于磁数据记录的磁性异相屏蔽
公开(公告)号：US20070139826A1
公开(公告)日：2007-06-21
申请号：US11615840
申请日：2006-12-22
申请人： Matthew Carey , Jeffrey Childress , Stefan Maat
发明人： Matthew Carey , Jeffrey Childress , Stefan Maat
IPC分类号： G11B5/33 , G11B5/127
CPC分类号： G11B5/3166 , G11B5/3163 , G11B5/3196 , G11B5/3932 , G11C11/14 , H01L43/12 , Y10T29/49021 , Y10T29/49044 , Y10T29/49046
摘要： A magnetic shield for use in a magnetic head. The magnetic shield has a magnetic anisotropy associated with a magnetic easy axis of magnetization oriented substantially parallel with the air bearing surface. The magnetic anisotropy of the shield is induced by an anisotropic surface texture. This anisotropic surface texture can be formed in a surface of one or more magnetic layers of the shield, or can be formed in a surface of an under-layer on which the shield is deposited. The shield could also be constructed as a lamination of magnetic layers separated by non-magnetic layers, with the anisotropic surface texture being formed on one or more of the non-magnetic layers.
摘要翻译：用于磁头的磁屏蔽。磁屏蔽具有与磁性易磁化轴相关联的磁各向异性，该磁性易磁化轴基本上平行于空气轴承表面定向。屏蔽的磁各向异性由各向异性表面纹理引起。这种各向异性表面纹理可以形成在屏蔽的一个或多个磁性层的表面中，或者可以形成在其上沉积有屏蔽层的下层的表面中。屏蔽也可以被构造为由非磁性层分离的磁性层的叠层，各向异性表面纹理形成在一个或多个非磁性层上。

7. 发明申请

US20070139820A1 MAGNETIC WRITE HEAD HAVING A MAGNETICALLY ANISOTROPIC WRITE POLE 失效
标题翻译：磁性书写头具有磁性的非均匀写入点
公开(公告)号：US20070139820A1
公开(公告)日：2007-06-21
申请号：US11615837
申请日：2006-12-22
申请人： Matthew Carey , Jeffrey Childress , Stefan Maat
发明人： Matthew Carey , Jeffrey Childress , Stefan Maat
IPC分类号： G11B5/147 , G11B5/33 , H04R31/00
CPC分类号： G11B5/3166 , G11B5/3163 , G11B5/3196 , G11B5/3932 , G11C11/14 , H01L43/12 , Y10T29/49021 , Y10T29/49044 , Y10T29/49046
摘要： A magnetic write head for magnetic data recording. The magnetic write head has a write pole with a magnetic anisotropy induced by an angled, directional ion milling of a seed layer. The magnetic anisotropy is such that a magnetic easy axis of magnetization is oriented substantially parallel with the air bearing surface (ABS) of the write head. This orientation of the easy axis of magnetization increases the write speed and data rate of the write head by increasing the speed with which the magnetization of the write pole can switch from one direction to another writing.
摘要翻译：用于磁数据记录的磁写头。磁写头具有由种子层的倾斜的定向离子铣削引起的具有磁各向异性的写极。磁各向异性使得易磁化磁化轴取向为大致平行于写入头的空气轴承表面（ABS）。易磁化轴的这种取向通过增加写磁极的磁化从一个方向转换到另一个写入的速度来增加写入头的写入速度和数据速率。

8. 发明申请

US20070138002A1 END POINT DETECTION FOR DIRECT ION MILLING TO INDUCE MAGNETIC ANISOTROPY IN A MAGNETIC LAYER 有权
标题翻译：用于直接离子研磨以在磁性层中诱导磁性异相的终点检测
公开(公告)号：US20070138002A1
公开(公告)日：2007-06-21
申请号：US11615865
申请日：2006-12-22
申请人： Matthew Carey , Jeffrey Childress , Stefan Maat
发明人： Matthew Carey , Jeffrey Childress , Stefan Maat
IPC分类号： C23C14/00
CPC分类号： G11B5/3166 , G11B5/3163 , G11B5/3196 , G11B5/3932 , G11C11/14 , H01L43/12 , Y10T29/49021 , Y10T29/49044 , Y10T29/49046
摘要： A method for manufacturing a magnetic layer with a magnetic anisotropy. The method includes an endpoint detection process for determining an end point to carefully control the final thickness of the magnetic layer. The method includes depositing a magnetic layer and then depositing a sacrificial layer over the magnetic layer. A low power angled ion milling is then performed until the magnetic layer has been reached. The angled ion milling can be performed at an angle relative to normal and without rotation in order to form an anisotropic surface texture that induces a magnetic anisotropy in the magnetic layer. An indicator layer may be included between the magnetic layer and the sacrificial layer in order to further improve endpoint detection.
摘要翻译：一种制造具有磁各向异性的磁性层的方法。该方法包括用于确定终点的端点检测过程以仔细地控制磁性层的最终厚度。该方法包括沉积磁性层，然后在磁性层上沉积牺牲层。然后执行低功率角度离子铣削，直到达到磁性层。角度离子铣削可以相对于法线成角度而不旋转地进行，以形成在磁性层中引起磁各向异性的各向异性表面纹理。为了进一步改善端点检测，可以在磁性层和牺牲层之间包括指示层。

9. 发明申请

US20070133251A1 Magnetic random access memory (MRAM) having increased reference layer anisotropy through ion beam etch of magnetic layers 有权
标题翻译：磁性随机存取存储器（MRAM）通过磁性层的离子束蚀刻具有增加的参考层各向异性
公开(公告)号：US20070133251A1
公开(公告)日：2007-06-14
申请号：US11542086
申请日：2006-10-02
申请人： Matthew Carey , Jeffrey Childress , Stefan Maat
发明人： Matthew Carey , Jeffrey Childress , Stefan Maat
IPC分类号： G11C11/00
CPC分类号： G11B5/3166 , G11B5/3163 , G11B5/3196 , G11B5/3932 , G11C11/14 , H01L43/12 , Y10T29/49021 , Y10T29/49044 , Y10T29/49046
摘要： A Magnetic Random Access Memory (MRAM) cell and array for storing data. The MRAM array includes a memory cell having a magnetic pinned layer, a magnetic free layer and a non-magnetic spacer or barrier layer sandwiched between the pinned and free layer. The pinned layer has magnetization that is pinned, and the free layer has a magnetization that is free to rotate but is stable in directions that are parallel or antiparallel with the magnetization of the pinned layer. The free layer has a magnetic anisotropy the maintains the stability of the free layer magnetization. The free layer anisotropy is induced by a surface roughness either in the surface of the free layer itself, or in the surface of the underling barrier/spacer layer. This anisotropic roughness is induced by an angled direct ion milling.
摘要翻译：用于存储数据的磁随机存取存储器（MRAM）单元和阵列。 MRAM阵列包括具有磁性被钉扎层，磁性自由层和夹在被钉扎层和自由层之间的非磁性间隔物或阻挡层的存储单元。钉扎层具有被钉扎的磁化，并且自由层具有自由旋转的磁化，但是在与被钉扎层的磁化平行或反平行的方向上是稳定的。自由层具有磁各向异性，保持自由层磁化的稳定性。自由层各向异性由自由层本身的表面或下层阻挡层/间隔层的表面中的表面粗糙度引起。这种各向异性的粗糙度是由倾斜的直接离子铣削引起的。

10. 发明申请

US20060092580A1 Current-perpendicular-to-the-plane (CPP) magnetoresistive sensor with improved antiparallel-pinned structure 失效
标题翻译：电流垂直平面（CPP）磁阻传感器具有改进的反平行销钉结构
公开(公告)号：US20060092580A1
公开(公告)日：2006-05-04
申请号：US10977300
申请日：2004-10-29
申请人： Matthew Carey , Jeffrey Childress , Stefan Maat
发明人： Matthew Carey , Jeffrey Childress , Stefan Maat
IPC分类号： G11B5/33 , G11B5/127
CPC分类号： G01R33/093 , B82Y25/00 , G11B5/3906
摘要： A current-perpendicular-to-the-plane spin-valve (CPP-SV) magnetoresistive sensor has an improved antiparallel (AP) pinned structure. The AP-pinned structure has two ferromagnetic layers separated by a nonmagnetic antiparallel coupling (APC) layer and with their magnetization directions oriented antiparallel. One of the ferromagnetic layers in the AP-pinned structure is the reference layer in contact with the CPP-SV sensor's nonmagnetic electrically conducting spacer layer. In the improved AP-pinned structure each of the ferromagnetic layers has a thickness greater than 30 Å, preferably greater than approximately 50 Å, and the APC layer is either Ru or Ir with a thickness less than 7 Å, preferably about 5 Å or less. The ultrathin APC layer, especially if formed of iridium (Ir), provides significant coupling strength to allow the thick ferromagnetic layers to retain their magnetization directions in a stable antiparallel orientation.
摘要翻译：电流垂直于平面的自旋阀（CPP-SV）磁阻传感器具有改进的反平行（AP）钉扎结构。 AP钉扎结构具有由非磁性反平行耦合（APC）层分离并且其磁化方向反平行取向的两个铁磁层。 AP钉扎结构中的一个铁磁层是与CPP-SV传感器的非磁性导电间隔层接触的参考层。在改进的AP钉扎结构中，每个铁磁层的厚度大于30埃，优选大于约400埃，APC层是厚度小于7埃，优选约5埃或更小的Ru或Ir 。超薄APC层，特别是如果由铱（Ir）形成，则提供显着的耦合强度，以使厚的铁磁层保持其稳定的反向平行取向的磁化方向。

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