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    • 5. 发明申请
    • CALIBRATION STANDARD MEMBER, METHOD FOR MANUFACTURING THE MEMBER AND SCANNING ELECTRONIC MICROSCOPE USING THE MEMBER
    • 校准标准会员,使用会员制造会员和扫描电子显微镜的方法
    • US20110210250A1
    • 2011-09-01
    • US13127912
    • 2009-10-22
    • Yoshinori NakayamaTakashi TaseJiro Yamamoto
    • Yoshinori NakayamaTakashi TaseJiro Yamamoto
    • H01J37/28G01D18/00H01J9/00
    • H01J37/28B82Y35/00G01B3/004G01B3/30G01B15/00H01J37/263H01J37/265H01J2237/2826
    • This invention provides a standard member allowing magnification calibration for use in an electron microscope to be performed with high precision. A (110) or (100) oriented silicon substrate including a magnification calibration pattern comprised of a constant pitch periodic pattern and a (110) or (100) oriented silicon substrate not including the constant pitch periodic pattern are bonded together by means of bonding without using an adhesive agent, while aligning the plane directions of the surfaces of the two substrates in the same orientation. Then, the thus bonded substrates are cleaved or diced so that their (111) surfaces or (110) surfaces become cross-section surfaces. Further, by selectively etching one side of the constant pitch periodic pattern, a standard member with no level difference and no damage to superlattice patterns and having a constant pitch concavity and convexity periodic pattern in a cross-section surface vertical to the substrate surface is created.
    • 本发明提供了允许以高精度执行在电子显微镜中使用的放大校准的标准构件。 包括由恒定间距周期性图案和不包括恒定间距周期图案的(110)或(100)定向硅衬底组成的放大校准图案的(110)或(100)定向硅衬底通过粘合而结合而没有 使用粘合剂,同时以相同的取向对准两个基板的表面的平面方向。 然后,如此粘合的基材被切割或切割,使得它们的(111)表面或(110)表面变成横截面。 此外,通过选择性地蚀刻恒定间距周期性图案的一侧,产生在与基板表面垂直的横截面中没有电平差并且不损坏超晶格图案并具有恒定的间距凹凸周期图案的标准构件 。
    • 7. 发明授权
    • Fan guard for blower unit
    • 鼓风机组风扇护罩
    • US07172387B2
    • 2007-02-06
    • US10504271
    • 2003-11-07
    • Jiro YamamotoZhiming Zheng
    • Jiro YamamotoZhiming Zheng
    • F04D29/70
    • F04D29/703
    • A fan guard includes a plurality of extending ribs extending from a blocking plate to an outer frame, a plurality of inner ribs arranged between the extending ribs and extending from the blocking plate to the substantial center in the radial direction, and a plurality of outer ribs arranged between the extending ribs and extending from the substantial center in the radial direction to the outer frame. The number of the inner ribs is set smaller than the number of the outer ribs. Hence, strength to prevent bending of the fan guard due to load application in the axial direction is ensured and increase in ventilating resistance of forced airflow (W) from a blower fan is suppressed.
    • 风扇护罩包括从阻挡板延伸到外框架的多个延伸肋,布置在延伸肋之间并从阻挡板沿径向方向延伸到大致中心的多个内肋,以及多个外肋 布置在延伸肋之间并且从径向方向上的大致中心延伸到外框。 内肋的数量被设定为小于外肋的数量。 因此,确保了防止由于轴向施加负载引起的风扇护罩弯曲的强度,并且抑制了来自风扇的强制气流(W)的通风阻力的增加。