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    • 1. 发明授权
    • Aminotriazine polymers and method of preparing same
    • 氨基三嗪聚合物及其制备方法
    • US5023308A
    • 1991-06-11
    • US378914
    • 1989-07-12
    • Masayuki KawaguchiYasushi KitaKayoko YamamotoKoji Nozaki
    • Masayuki KawaguchiYasushi KitaKayoko YamamotoKoji Nozaki
    • C08G73/06C09K11/06C10M107/44H01B1/12
    • H01B1/128C08G73/065C09K11/06C10M107/44C10M2217/042C10M2217/043
    • A polymeric compound, named poly(amino-s-triazine), which has a layer structure with a structural unit represented by (C.sub.3 N.sub.3).sub.2 N.sub.x H.sub.y, where 2.ltoreq.x.ltoreq.4 and 0.ltoreq.y.ltoreq.8, is obtained by reaction of cyanuric trichloride with ammonia or melamine. This compound is stable in the air up to about 400.degree. C. and exhibits fluorescence by excitation at wavelength of 365 nm. When the above reaction is carried out at a temperature ranging from room tempertaure to about 400.degree. C. the product is an oligomeric compound (C.sub.3 N.sub.3).sub.a (NH).sub.b (NH.sub.2).sub.c Cl.sub.d, where 2.ltoreq.a.ltoreq.10, 1.ltoreq.b.ltoreq.10, 0.ltoreq.c.ltoreq.11 and 1.ltoreq.d.ltoreq.12, and poly(amino-s-triazine) is obtained by heating the oligomeric compound at 400.degree.-600.degree. C. in an inactive gas. The oligomeric compound too exhibits fluorescence and is higher in fluorescence intensity. An alkali metal ion can be introduced into poly(amino-s-triazine) by treatment with an alkali metal hydroxide solution, or hydroxyl group can be introduced by treatment with a mineral acid. In either case the modified polymer is very higher in fluorescence intensity and narrower in the width of flurorescence peak.
    • 具有由(C3N3)2NxHy表示的结构单元的层结构的聚(氨基-s-三嗪)的聚合化合物,其中2≤x≤4且0≤y≤8 通过氰尿酰三氯化物与氨或三聚氰胺的反应得到。 该化合物在高达约400℃的空气中是稳定的,并且在365nm的波长下通过激发显示荧光。 当上述反应在室温至约400℃的温度下进行时,产物是低聚化合物(C 3 N 3)a(NH)b(NH 2)c C d1,其中2
    • 3. 发明授权
    • Lithium secondary battery using hydric boron carbonitride as electrode
material
    • 锂二次电池使用碳氮化硼作为电极材料
    • US5139901A
    • 1992-08-18
    • US617652
    • 1990-11-26
    • Masayuki KawaguchiKoji NozakiYasushi Kita
    • Masayuki KawaguchiKoji NozakiYasushi Kita
    • H01M4/587
    • H01M4/587H01M10/052H01M10/0525H01M4/58H01M4/5815H01M4/13H01M4/60Y02P70/54
    • The invention provides a lithium secondary battery using hydric boron carbonitride which is a layered compound represented by BC.sub.x N.sub.y H.sub.z, where 0.5.ltoreq.x.ltoreq.12, 0.7.ltoreq.y.ltoreq.1.5, and 0.01.ltoreq.z.ltoreq.3, as the active material of the negative electrode. This compound is obtained by a CVD process. The electrolyte is a solution of a lithium salt in an organic solvent. The material of the positive electrode is an oxide such as MnO.sub.2 or V.sub.2 O.sub.5, a sulfide such as MoS.sub.2 or TiS.sub.2 or a conductive organic polymer such as polyaniline. In this secondary battery Li is smoothly intercalated in and released from the hydric boron carbonitride of the negative electrode, and the energy density with respect to the active material of the negative electrode is sufficiently high. This battery bears a fairly large number of charge-discharge cycles. Also it is possible to use hydric boron carbonitride as the active material of the positive electrode of a lithium secondary battery in combination with negative electrode of metallic Li or hydric boron carbonitride with intercalation of a larger amount of Li.
    • 本发明提供一种锂二次电池,其使用碳氮化硼,其是由BCxNyHz表示的层状化合物,其中0.5≤x≤12,0.7≤y≤1.5,和0.01≤z= 3,作为负极的活性物质。 该化合物通过CVD法获得。 电解质是锂盐在有机溶剂中的溶液。 正极的材料是诸如MnO 2或V 2 O 5的氧化物,诸如MoS 2或TiS 2的硫化物或诸如聚苯胺的导电有机聚合物。 在该二次电池中,Li被平滑地插入负极的碳氮化硼中并从其释放,并且相对于负极的活性物质的能量密度足够高。 该电池的充放电次数相当多。 另外,可以使用氢碳氮化硼作为锂二次电池的正极的活性物质与金属Li或碳氮化硼的负极结合,并插入更多量的Li。
    • 9. 发明授权
    • Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for producing the same
    • 抗蚀剂图案增厚材料和用于形成抗蚀剂图案的工艺,半导体器件及其制造方法
    • US08198009B2
    • 2012-06-12
    • US12856001
    • 2010-08-13
    • Miwa KozawaKoji NozakiTakahisa Namiki
    • Miwa KozawaKoji NozakiTakahisa Namiki
    • G03F7/004G03F7/032
    • G03F7/40Y10S430/106Y10S430/128
    • The object of the present invention is to provide a process for forming a resist pattern that is capable to utilize excimer laser beam, the thickening level of the resist pattern is controllable uniformly, constantly and precisely, without being affected substantially by environmental changes such as temperatures and humidity, and storage period, and space pattern of resist may be formed with a fineness exceeding exposure limits or resolution limits of available irradiation sources. The process for producing a semiconductor device is characterized in that forming a resist pattern on a surface of workpiece, coating a resist pattern thickening material on the resist pattern, thickening the resist pattern to form a thickened resist pattern, and patterning the surface of workpiece by etching using the thickened resist pattern as a mask, wherein the resist pattern thickening material comprises a resin, and exhibits a pH value of above 7 and not over 14 at coating or after coating on the resist pattern.
    • 本发明的目的是提供一种形成能够利用准分子激光束的抗蚀剂图案的方法,抗蚀剂图案的增稠水平可以均匀,均匀且可控地被控制,而不会受到温度等环境变化的影响 并且可以形成具有超过可用照射源的暴露限度或分辨率极限的细度的抗蚀剂的空间图案。 半导体器件的制造方法的特征在于,在工件的表面上形成抗蚀剂图案,在抗蚀剂图案上涂布抗蚀剂图案增厚材料,使抗蚀剂图案变厚,形成增厚的抗蚀剂图案,并通过 使用增厚的抗蚀剂图案作为掩模进行蚀刻,其中抗蚀剂图案增厚材料包含树脂,并且在涂覆或涂布在抗蚀剂图案上时,其pH值高于7且不超过14。