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    • 1. 发明授权
    • Shape measuring device and shape measuring method
    • 形状测量装置和形状测量方法
    • US07078688B2
    • 2006-07-18
    • US10927536
    • 2004-08-27
    • Masato KazuiMitsuji IkedaAtsushi Takane
    • Masato KazuiMitsuji IkedaAtsushi Takane
    • H01J37/28G01N23/203
    • G01B15/04H01J2237/2816
    • This invention is to provide a shape measuring device and a shape measuring method that can accurately measure a cross-sectional shape or a three-dimensional shape of a sample without using matching of characteristics. A shape measuring apparatus comprises a charged particle beam apparatus comprising a processor for measuring detected charged particles signal generated from the sample. The charged particle beam is irradiated to sample at first angle to generate a first signal and second angle to generate second signal. The processor selects a parameter indicating a relation between the first signal and a height of the sample or an inclination angle of the specimen until the first signal which achieves the second signal.
    • 本发明提供一种形状测量装置和形状测量方法,其可以在不使用特性匹配的情况下精确地测量样品的横截面形状或三维形状。 一种形状测量装置包括带电粒子束装置,其包括用于测量从样本产生的检测到的带电粒子信号的处理器。 带电粒子束以第一角度照射到样品上以产生第一信号和第二角度以产生第二信号。 处理器选择指示第一信号和样本高度之间的关系的参数或样本的倾斜角,直到实现第二信号的第一信号为止。
    • 2. 发明申请
    • Shape measuring device and shape measuring method
    • 形状测量装置和形状测量方法
    • US20050061973A1
    • 2005-03-24
    • US10927536
    • 2004-08-27
    • Masato KazuiMitsuji IkedaAtsushi Takane
    • Masato KazuiMitsuji IkedaAtsushi Takane
    • G01B15/04H01J37/28
    • G01B15/04H01J2237/2816
    • This invention is to provide a shape measuring device and a shape measuring method that can accurately measure a cross-sectional shape or a three-dimensional shape of a sample without using matching of characteristics. A shape measuring apparatus comprises a charged particle beam apparatus comprising a processor for measuring detected charged particles signal generated from the sample. The charged particle beam is irradiated to sample at first angle to generate a first signal and second angle to generate second signal. The processor selects a parameter indicating a relation between the first signal and a height of the sample or an inclination angle of the specimen until the first signal which achieves the second signal.
    • 本发明提供一种形状测量装置和形状测量方法,其可以在不使用特性匹配的情况下精确地测量样品的横截面形状或三维形状。 一种形状测量装置包括带电粒子束装置,其包括用于测量从样本产生的检测到的带电粒子信号的处理器。 带电粒子束以第一角度照射到样品上以产生第一信号和第二角度以产生第二信号。 处理器选择指示第一信号和样本高度之间的关系的参数或样本的倾斜角,直到实现第二信号的第一信号为止。
    • 3. 发明授权
    • Shape measurement method and apparatus
    • 形状测量方法和装置
    • US06756590B2
    • 2004-06-29
    • US10421140
    • 2003-04-23
    • Masato KazuiMitsuji IkedaAtsushi Takane
    • Masato KazuiMitsuji IkedaAtsushi Takane
    • G01N23203
    • G01B15/08G01N23/2251H01J2237/2817
    • An electron beam applied from an electron gun 1 and reflected off a surface of a specimen 7 placed on a stage 2 that is tilted at a tilt angle &phgr;=0 is detected, and a signal intensity thereof is measured by an electron detector 3. Based upon the measurement, an image processing unit 6 calculates a slope angle &thgr; of the surface of the specimen, and determines candidates for cross-sectional shape of the specimen. Signal intensity of the electromagnetic wave that would be reflected from a surface having a cross-sectional shape of each of the candidates if the tilt angle &phgr; were changed into &phgr;=&phgr;0 are estimated, and compared with a signal intensity actually measured by the electron detector 3 with the tilt angle 100 being changed into &phgr;=&phgr;0. Consequently, cross sectional shape and three-dimensional shape can be determined based upon a result of comparison, without utilizing a matching process of feature points.
    • 检测从电子枪1施加并从放置在倾斜角度为phi = 0的台2上的试样7的表面反射的电子束,并且通过电子检测器3测量其信号强度。基于 在测量时,图像处理单元6计算样本表面的倾斜角θ,并确定样本的横截面形状的候选。 如果将倾斜角度phi改变为phi = phi0,则从具有每个候选的横截面形状的表面反射的电磁波的信号强度被估计,并且与由电子检测器实际测量的信号强度进行比较 3,其中倾斜角100被改变成phi = phi0。 因此,可以基于比较的结果来确定截面形状和三维形状,而不利用特征点的匹配处理。
    • 9. 发明授权
    • Video image monitoring system
    • 视频图像监控系统
    • US08294765B2
    • 2012-10-23
    • US12714655
    • 2010-03-01
    • Masaya ItohMasanori MiyoshiMasato KazuiHiromasa FujiiShun'ichi KanekoHidenori Takauji
    • Masaya ItohMasanori MiyoshiMasato KazuiHiromasa FujiiShun'ichi KanekoHidenori Takauji
    • H04N7/18
    • G08B13/19604G06K9/00771G06K2009/3291G06T7/254G06T2207/10016G06T2207/30196
    • This is a video image monitoring system which can effectively detect a mobile object appearing in a captured video image even if a background image and other camera condition change continuously. The video image monitoring system comprises: a video-image-capturing section 100 for putting out image data based on a video image signal obtained by using a camera 10; a mobile-object-candidate-area-detecting section 101 for extracting a candidate area of a mobile object from the image data; and a mobile-object-detecting section 102 for determining whether the candidate area is the mobile object. The mobile-object-candidate-area-detecting section 101 quantizes a brightness gradient direction of the image data, and calculates a spatio-temporal histogram which represents the frequency of a direction code appearing in a predetermined spatio-temporal space. After that, the mobile-object-candidate-area-detecting section 101 calculates a statistical spatio-temporal space evaluation value of the spatio-temporal histogram. The mobile-object-detecting section 102 uses the spatio-temporal space richness to determine whether the candidate area is the mobile object.
    • 这是即使背景图像和其他照相机条件不断变化,也可以有效地检测出现在拍摄的视频图像中的移动物体的视频图像监视系统。 视频图像监视系统包括:基于通过使用照相机10获得的视频图像信号来输出图像数据的视频图像捕获部分100; 移动对象候选区域检测部分101,用于从图像数据中提取移动对象的候选区域; 以及用于确定候选区域是移动对象的移动对象检测部分102。 移动对象候选区域检测部101对图像数据的亮度梯度方向进行量化,并且计算表示出现在预定空间 - 时间空间中的方向代码的频率的时空直方图。 之后,移动对象候选区域检测部101计算时空直方图的统计时空空间评价值。 移动对象检测部102使用空间 - 时间空间丰富度来确定候选区域是否是移动对象。
    • 10. 发明授权
    • Image processing apparatus, image processing system and recording medium for programs therefor
    • 图像处理装置,图像处理系统及其程序记录介质
    • US07668345B2
    • 2010-02-23
    • US11392688
    • 2006-03-30
    • Masahiro KiyoharaMasato KazuiKazunori Takahashi
    • Masahiro KiyoharaMasato KazuiKazunori Takahashi
    • G06K9/00
    • G06K9/00281G06K9/00771G07C9/00G07C11/00G08B13/19671G08B13/19686
    • An image processing apparatus, for example, a multi-camera monitoring system is provided for processing images with the intention of protecting the individuals' privacies in accordance with the type of customers in a store which is equipped with the multi-camera monitoring system, and for deleting or modifying individuals' privacy information to protect the individuals' privacies while permitting the identity of a person to be determined among a plurality of cameras. The image processing apparatus processes an image captured by an imager device to output the resulting image. A processor detects a person from an image, and an image database stores feature information on the person. The processor extracts features from the detected person and the database, processes the extracted feature amount in the stored feature information, and generates an output image based on the processed features.
    • 提供图像处理装置,例如多相机监视系统,用于处理图像,目的是根据装备有多摄像机监视系统的商店中的顾客的类型来保护个人的私有,以及 用于删除或修改个人的隐私信息以保护个人的私人,同时允许在多个照相机之间确定人的身份。 图像处理装置处理由成像器装置拍摄的图像以输出所得到的图像。 处理器从图像中检测人物,并且图像数据库存储关于人的特征信息。 处理器从检测到的人和数据库中提取特征,处理所存储的特征信息中提取的特征量,并且基于处理的特征生成输出图像。