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1. 发明授权

US08417394B2 Substrate processing apparatus, semiconductor device manufacturing method and temperature controlling method 有权
标题翻译：基板加工装置，半导体装置的制造方法以及温度控制方法
公开(公告)号：US08417394B2
公开(公告)日：2013-04-09
申请号：US12609541
申请日：2009-10-30
申请人： Masashi Sugishita , Masaaki Ueno , Tsukasa Iida , Susumu Nishiura , Masao Aoyama , Kenichi Fujimoto , Yoshihiko Nakagawa , Hiroyuki Mitsui
发明人： Masashi Sugishita , Masaaki Ueno , Tsukasa Iida , Susumu Nishiura , Masao Aoyama , Kenichi Fujimoto , Yoshihiko Nakagawa , Hiroyuki Mitsui
IPC分类号： H01L21/67
CPC分类号： H01L21/67248
摘要： Provided are a substrate processing apparatus, a semiconductor device manufacturing method, and a temperature controlling method, which are adapted to improve equipment operational rate. A calculation parameter computing unit computes a calculation parameter using at least a first calculation parameter correction value determined by a first calculation parameter setting unit based on an accumulated film thickness on a reaction vessel, a second calculation parameter correction value determined by a second calculation parameter setting unit based on an accumulated film thickness on a filler wafer, and a third calculation parameter correction value determined by a third calculation parameter setting unit based on the number of filler wafers. Product and filler wafers are accommodated and heat-treated in the reaction vessel while controlling a heating unit using calculation results obtained using at least the calculation parameter and deviation between a set temperature and a temperature detected in the heating unit by a temperature detector.
摘要翻译：提供了适于提高设备运行速率的基板处理装置，半导体装置制造方法和温度控制方法。计算参数计算单元使用由第一计算参数设定单元确定的至少第一计算参数校正值，基于反应容器上累积的膜厚计算计算参数，由第二计算参数设定确定的第二计算参数校正值基于填充晶片上的累积膜厚的单位和由第三计算参数设定单元基于填充晶片的数量确定的第三计算参数校正值。使用至少计算参数获得的计算结果和通过温度检测器在加热单元中检测到的设定温度和温度之间的偏差来控制加热单元，从而在反应容器中容纳和热处理产物和填料晶片。

2. 发明申请

US20100124726A1 SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND TEMPERATURE CONTROLLING METHOD 有权
标题翻译：基板加工装置，半导体装置制造方法及温度控制方法
公开(公告)号：US20100124726A1
公开(公告)日：2010-05-20
申请号：US12609541
申请日：2009-10-30
申请人： Masashi Sugishita , Masaaki Ueno , Tsukasa Iida , Susumu Nishiura , Masao Aoyama , Kenichi Fujimoto , Yoshihiko Nakagawa , Hiroyuki Mitsui
发明人： Masashi Sugishita , Masaaki Ueno , Tsukasa Iida , Susumu Nishiura , Masao Aoyama , Kenichi Fujimoto , Yoshihiko Nakagawa , Hiroyuki Mitsui
IPC分类号： H01L21/477
CPC分类号： H01L21/67248
摘要： Provided are a substrate processing apparatus, a semiconductor device manufacturing method, and a temperature controlling method, which are adapted to improve equipment operational rate. A calculation parameter computing unit computes a calculation parameter using at least a first calculation parameter correction value determined by a first calculation parameter setting unit based on an accumulated film thickness on a reaction vessel, a second calculation parameter correction value determined by a second calculation parameter setting unit based on an accumulated film thickness on a filler wafer, and a third calculation parameter correction value determined by a third calculation parameter setting unit based on the number of filler wafers. Product and filler wafers are accommodated and heat-treated in the reaction vessel while controlling a heating unit using calculation results obtained using at least the calculation parameter and deviation between a set temperature and a temperature detected in the heating unit by a temperature detector.
摘要翻译：提供了适于提高设备运行速率的基板处理装置，半导体装置制造方法和温度控制方法。计算参数计算单元使用由第一计算参数设定单元确定的至少第一计算参数校正值，基于反应容器上累积的膜厚计算计算参数，由第二计算参数设定确定的第二计算参数校正值基于填充晶片上的累积膜厚的单位和由第三计算参数设定单元基于填充晶片的数量确定的第三计算参数校正值。使用至少计算参数获得的计算结果和通过温度检测器在加热单元中检测到的设定温度和温度之间的偏差来控制加热单元，从而在反应容器中容纳和热处理产物和填料晶片。

3. 发明授权

US08271119B2 Substrate processing apparatus and substrate processing system 有权
标题翻译：基板加工装置及基板处理系统
公开(公告)号：US08271119B2
公开(公告)日：2012-09-18
申请号：US12382350
申请日：2009-03-13
申请人： Yoshihiko Nakagawa
发明人： Yoshihiko Nakagawa
IPC分类号： G06F19/00
CPC分类号： H01L21/67276 , G05B2219/24159 , G05B2219/45031 , H01L21/67005
摘要： To provide a substrate processing system which can cause different display portions to output different displays, and cause different operations to be carried out from different operation screens. A substrate processing system, on login information of a user being input from a main display device, refers to the login information, a user group parameter, with which is set a group to which the user belongs, and an authority parameter, which sets an authority of the group, and causes the main display device to display a main operation screen corresponding to the user, while it, on login information of a user being input from an external operating apparatus, causes an external display device to display an external parameter setting screen for setting an authority parameter of a group to which the user belongs, or to display an external operation screen corresponding to the group to which the user belongs.
摘要翻译：提供一种能够导致不同显示部分输出不同显示器的基板处理系统，并且导致从不同的操作屏幕执行不同的操作。在从主显示装置输入的用户的登录信息上的基板处理系统参照登录信息，设定了用户所属的组的用户组参数，以及设定用户组参数并且使得主显示装置显示与用户相对应的主操作画面，同时在从外部操作装置输入的用户的登录信息上使外部显示装置显示外部参数设置用于设置用户所属的组的权限参数的屏幕，或者显示与用户所属的组对应的外部操作画面。

4. 发明授权

US08712568B2 Substrate processing apparatus and display method of substrate processing apparatus 有权
标题翻译：基板处理装置及基板处理装置的显示方法
公开(公告)号：US08712568B2
公开(公告)日：2014-04-29
申请号：US12713585
申请日：2010-02-26
申请人： Yoshihiko Nakagawa
发明人： Yoshihiko Nakagawa
IPC分类号： G06F19/00
CPC分类号： G06F11/0766 , G06F11/073 , G06F11/0736
摘要： A substrate processing apparatus gives a user notice to prevent removal of a storage medium and provides a screen for determining whether the storage medium is removable. The apparatus controls display of the screen for manipulating substrate processing information and includes a part to which an external storage device is attached. The screen includes: a title panel displayed at an upper region of the screen; an information panel controlling or monitoring a task; and a navigation panel at a lower region of the screen. When the external storage device is attached to the part, an external storage device remove button is enabled by displaying the remove button on the navigation panel to indicate the external storage device is attached to the part. When the external storage device is not attached to the part, the remove button is disabled by displaying the remove button in a like color as the background.
摘要翻译：基板处理装置给用户注意防止存储介质的移除，并提供用于确定存储介质是否可移除的屏幕。该装置控制用于操纵基板处理信息的屏幕的显示，并且包括附接有外部存储装置的部分。屏幕包括：在屏幕的上部区域显示的标题面板; 控制或监视任务的信息面板; 以及在屏幕的下部区域处的导航面板。当外部存储设备连接到部件时，通过在导航面板上显示移除按钮来指示外部存储设备连接到部件，启用外部存储设备移除按钮。当外部存储设备未连接到该部件时，通过以与背景相似的颜色显示删除按钮来禁用删除按钮。

5. 发明申请

US20090235865A1 Substrate processing apparatus and substrate processing system 有权
标题翻译：基板加工装置及基板处理系统
公开(公告)号：US20090235865A1
公开(公告)日：2009-09-24
申请号：US12382350
申请日：2009-03-13
申请人： Yoshihiko Nakagawa
发明人： Yoshihiko Nakagawa
IPC分类号： B05C11/00
CPC分类号： H01L21/67276 , G05B2219/24159 , G05B2219/45031 , H01L21/67005
摘要： To provide a substrate processing system which can cause different display portions to output different displays, and cause different operations to be carried out from different operation screens. A substrate processing system, on login information of a user being input from a main display device, refers to the login information, a user group parameter, with which is set a group to which the user belongs, and an authority parameter, which sets an authority of the group, and causes the main display device to display a main operation screen corresponding to the user, while it, on login information of a user being input from an external operating apparatus, causes an external display device to display an external parameter setting screen for setting an authority parameter of a group to which the user belongs, or to display an external operation screen corresponding to the group to which the user belongs.
摘要翻译：提供一种能够导致不同显示部分输出不同显示器的基板处理系统，并且导致从不同的操作屏幕执行不同的操作。在从主显示装置输入的用户的登录信息上的基板处理系统参照登录信息，设定了用户所属的组的用户组参数，以及设定用户组参数并且使得主显示装置显示与用户相对应的主操作画面，同时在从外部操作装置输入的用户的登录信息上使外部显示装置显示外部参数设置用于设置用户所属的组的权限参数的屏幕，或者显示与用户所属的组对应的外部操作画面。

6. 发明授权

US4039358A Method of manufacturing an insulated gate type field effect semiconductor device 失效
标题翻译：绝缘栅型场效应半导体器件的制造方法
公开(公告)号：US4039358A
公开(公告)日：1977-08-02
申请号：US721211
申请日：1976-09-08
申请人： Motohiro Kitajima , Yoshihiko Nakagawa
发明人： Motohiro Kitajima , Yoshihiko Nakagawa
IPC分类号： H01L29/78 , H01L21/28 , H01L21/306 , H01L21/316 , H01L21/336 , H01L21/22
CPC分类号： H01L29/66575 , H01L21/02238 , H01L21/02255 , H01L21/30604 , H01L21/31662 , Y10S438/974
摘要： A method of manufacturing an insulated gate type field effect semiconductor device, wherein before an oxide film for the gate is formed, the surface portion of the silicon substrate is removed which includes defect such as scar, crack, distortion, dislocation or the like which tends to cause pin-holes to be formed in said oxide film.
摘要翻译：一种制造绝缘栅型场效应半导体器件的方法，其中在形成用于栅极的氧化物膜之前，去除硅衬底的表面部分，其包括诸如疤痕，裂纹，变形，位错等缺陷，其倾向于以在所述氧化膜中形成针孔。

7. 发明申请

US20110055438A1 SUBSTRATE PROCESSING APPARATUS AND DISPLAY METHOD OF SUBSTRATE PROCESSING APPARATUS 有权
标题翻译：基板加工装置及基板加工装置显示方法
公开(公告)号：US20110055438A1
公开(公告)日：2011-03-03
申请号：US12713585
申请日：2010-02-26
申请人： Yoshihiko Nakagawa
发明人： Yoshihiko Nakagawa
IPC分类号： G06F13/00 , G06F11/07
CPC分类号： G06F11/0766 , G06F11/073 , G06F11/0736
摘要： A substrate processing apparatus is capable of giving notice to a user to prevent an improper removal of a removable storage medium and providing a manipulation screen through which it can be determined whether the removable storage medium can be removed. The substrate processing apparatus comprising: a controller configured to control display of a manipulation screen through which substrate processing information is manipulated; and an attachment/detachment part to which a removable external storage device is attached, wherein when an external storage device is attached to the attachment/detachment part, the controller disposes and enables an external storage device remove button, and when an external storage device is not attached to the attachment/detachment part, the controller disables the button.
摘要翻译：基板处理装置能够向用户通知以防止可移除的存储介质的不正确的移除并提供可以确定是否可以移除可移动存储介质的操作屏幕。该基板处理装置包括：控制器，被配置为控制操纵屏幕的显示，通过该操作屏幕操纵基板处理信息; 以及安装有可拆卸的外部存储装置的安装/拆卸部，其中，当外部存储装置附接到所述安装/拆卸部时，所述控制器配置并使得外部存储装置移除按钮，并且当外部存储装置为不附加到附件/拆卸部分，控制器禁用按钮。

8. 发明授权

US07583264B2 Apparatus and program for image generation 失效
标题翻译：用于图像生成的装置和程序
公开(公告)号：US07583264B2
公开(公告)日：2009-09-01
申请号：US11512752
申请日：2006-08-29
申请人： Yoshihiko Nakagawa , Michinari Terada , Daisuke Ogawa
发明人： Yoshihiko Nakagawa , Michinari Terada , Daisuke Ogawa
IPC分类号： G06T15/00 , G06T15/50 , G09G5/00
CPC分类号： G06T15/50
摘要： An image processing program creates a gradation of a sharp edge shadow and a gradation of subtle colors. The program causes a computer to perform a step in which a diffuse reflection from a first and second object and a shadow of the first object on the second object in a lighting information texture which are generated by a virtual light hitting the first and second object are superimposed onto a base texture which represents details of the object so that a target object is mapped; a step in which a mirror reflection which is generated by the virtual light hitting the first and second object is calculated so that a specular reflection is generated to surfaces of the first and second object; and a step in which the specular reflection is masked based on mask information provided in the lighting information texture which is mapped to the second object.
摘要翻译：图像处理程序创建锐利边缘阴影和微妙颜色的渐变的渐变。该程序使计算机执行步骤，其中通过由第一和第二对象的虚拟光产生的照明信息纹理中的来自第一和第二对象的漫反射和第二对象上的第一对象的阴影是叠加到表示对象的细节的基本纹理上，从而映射目标对象; 计算由虚拟光产生的撞击第一和第二物体的镜面反射，以便对第一和第二物体的表面产生镜面反射的步骤; 以及基于映射到第二对象的照明信息纹理中提供的掩码信息来屏蔽镜面反射的步骤。

9. 发明授权

US08768502B2 Substrate processing apparatus and substrate processing system 有权
标题翻译：基板加工装置及基板处理系统
公开(公告)号：US08768502B2
公开(公告)日：2014-07-01
申请号：US13571418
申请日：2012-08-10
申请人： Yoshihiko Nakagawa
发明人： Yoshihiko Nakagawa
IPC分类号： G06F19/00
CPC分类号： H01L21/67276 , G05B2219/24159 , G05B2219/45031 , H01L21/67005
摘要： To provide a substrate processing system which can cause different display portions to output different displays, and cause different operations to be carried out from different operation screens. A substrate processing system, on login information of a user being input from a main display device, refers to the login information, a user group parameter, with which is set a group to which the user belongs, and an authority parameter, which sets an authority of the group, and causes the main display device to display a main operation screen corresponding to the user, while it, on login information of a user being input from an external operating apparatus, causes an external display device to display an external parameter setting screen for setting an authority parameter of a group to which the user belongs, or to display an external operation screen corresponding to the group to which the user belongs.
摘要翻译：提供一种能够导致不同显示部分输出不同显示器的基板处理系统，并且导致从不同的操作屏幕执行不同的操作。在从主显示装置输入的用户的登录信息上的基板处理系统参照登录信息，设定了用户所属的组的用户组参数，以及设定用户组参数并且使得主显示装置显示与用户相对应的主操作画面，同时在从外部操作装置输入的用户的登录信息上使外部显示装置显示外部参数设置用于设置用户所属的组的权限参数的屏幕，或者显示与用户所属的组对应的外部操作画面。

10. 发明申请

US20130046403A1 Substrate Processing Apparatus and Substrate Processing System 有权
标题翻译：基板加工装置及基板加工系统
公开(公告)号：US20130046403A1
公开(公告)日：2013-02-21
申请号：US13571418
申请日：2012-08-10
申请人： Yoshihiko Nakagawa
发明人： Yoshihiko Nakagawa
IPC分类号： G06F19/00
CPC分类号： H01L21/67276 , G05B2219/24159 , G05B2219/45031 , H01L21/67005
摘要： To provide a substrate processing system which can cause different display portions to output different displays, and cause different operations to be carried out from different operation screens. A substrate processing system, on login information of a user being input from a main display device, refers to the login information, a user group parameter, with which is set a group to which the user belongs, and an authority parameter, which sets an authority of the group, and causes the main display device to display a main operation screen corresponding to the user, while it, on login information of a user being input from an external operating apparatus, causes an external display device to display an external parameter setting screen for setting an authority parameter of a group to which the user belongs, or to display an external operation screen corresponding to the group to which the user belongs.
摘要翻译：提供一种能够导致不同显示部分输出不同显示器的基板处理系统，并且导致从不同的操作屏幕执行不同的操作。在从主显示装置输入的用户的登录信息上的基板处理系统参照登录信息，设定了用户所属的组的用户组参数，以及设定用户组参数并且使得主显示装置显示与用户相对应的主操作画面，同时在从外部操作装置输入的用户的登录信息上使外部显示装置显示外部参数设置用于设置用户所属的组的权限参数的屏幕，或者显示与用户所属的组对应的外部操作画面。

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