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1. 发明授权

US06521024B1 Seal plate and pressure adjusting mechanism for the seal plate 失效
标题翻译：密封板密封板和压力调节机构
公开(公告)号：US06521024B1
公开(公告)日：2003-02-18
申请号：US09674521
申请日：2000-11-20
申请人： Masami Akahori , Jo Matsune , Koichi Ohno , Zituhiko Hayashi , Koichi Yokose , Yuichi Kuroki
发明人： Masami Akahori , Jo Matsune , Koichi Ohno , Zituhiko Hayashi , Koichi Yokose , Yuichi Kuroki
IPC分类号： B01D5322
CPC分类号： H01M2/1241
摘要： To prevent a pressure container of a battery, a condenser or the like from exploding due to an abnormal increase of a pressure within the pressure container without having a rubber breaking plate with which it is hard to control the breaking pressure, there is provided a breaking plate integrally formed with a resin seal plate main body for closing an opening portion of a pressure container, a thin portion integrally formed between the seal plate main body and the breaking plate and being thinner than the breaking plate, and an inclined surface portion formed to be gradually thicker from a thickness of the thin portion and provided in a peripheral edge portion of the breaking plate.
摘要翻译：为了防止电池，冷凝器等的压力容器由于压力容器内的压力的异常增加而爆炸而不具有难以控制破裂压力的橡胶破坏板，因此提供了断裂与用于封闭压力容器的开口部分的树脂密封板主体一体地形成的板，在密封板主体和断裂板之间一体形成并且比破碎板更薄的薄壁部分，以及形成为从薄壁的厚度逐渐变厚并设置在断裂板的周边部分。

2. 发明授权

US5418643A Mirror assembly for use in automobile having water drops removing apparatus 失效
标题翻译：用于具有水滴去除装置的汽车的镜组件
公开(公告)号：US5418643A
公开(公告)日：1995-05-23
申请号：US957379
申请日：1992-10-07
申请人： Morihiko Ogasawara , Koichi Ohno
发明人： Morihiko Ogasawara , Koichi Ohno
IPC分类号： B60S1/60 , B60R1/06 , G02B5/08 , G02B7/18
CPC分类号： B60R1/0602
摘要： A mirror assembly for use in an automobile having a water drops removing apparatus. A mirror glass is held by a back holder which includes a flange engaging a front surface of an edge of the mirror glass. The flange has a plurality of projections extending from the flange to contact the glass surface. The projections maintain a predetermined gap between the inner surface of the flange and the glass surface so that the pumping action and cavitation of the water drops in the gap are prevented.
摘要翻译：一种用于具有水滴去除装置的汽车中的反射镜组件。镜玻璃由后保持器保持，该后保持器包括与镜玻璃的边缘的前表面接合的凸缘。凸缘具有从凸缘延伸以接触玻璃表面的多个突起。突起在凸缘的内表面和玻璃表面之间保持预定的间隙，从而防止水中的泵送作用和气蚀在间隙中滴落。

3. 发明授权

US4965630A Projection exposure apparatus 失效
标题翻译：投影曝光装置
公开(公告)号：US4965630A
公开(公告)日：1990-10-23
申请号：US451166
申请日：1989-12-15
申请人： Kinya Kato , Kazuo Ushida , Toshiyuki Namikawa , Koichi Matsumoto , Kyoichi Suwa , Koichi Ohno
发明人： Kinya Kato , Kazuo Ushida , Toshiyuki Namikawa , Koichi Matsumoto , Kyoichi Suwa , Koichi Ohno
IPC分类号： G03F7/20 , H01L21/027 , H01L21/30
CPC分类号： G03F7/70241
摘要： The present invention provides a projection exposure apparatus comprising: a reticle stage; an illumination optical system for illuminating a reticle on the reticle stage; a stage on which a substrate is supported; and a projection optical system having a predetermined numerical aperture to project a pattern formed on the reticle and illuminated by the illumination optical system onto the substrate, and in which a longitudinal spherial aberration thereof regarding the focusing of the pattern formed on the reticle onto the substrate are excessively corrected.
摘要翻译：本发明提供一种投影曝光装置，包括：标线片台; 照明光学系统，用于照亮标线片台上的掩模版; 支撑衬底的阶段; 以及具有预定数值孔径的投影光学系统，以将形成在标线上的图案投影并由照明光学系统照射到基板上，并且其中将关于在掩模版上形成的图案聚焦到基板上的纵向球面像差被过度纠正。

4. 发明授权

US5381411A Apparatus for controlling ATM cell generation rate 失效
标题翻译：用于控制ATM信元产生速率的装置
公开(公告)号：US5381411A
公开(公告)日：1995-01-10
申请号：US189057
申请日：1994-01-31
申请人： Koichi Ohno , Tetsuo Tachibana
发明人： Koichi Ohno , Tetsuo Tachibana
IPC分类号： H04Q3/00 , H04L12/801 , H04L12/815 , H04L12/911 , H04L12/917 , H04Q11/04 , H04J3/16 , H04L12/66
CPC分类号： H04Q11/0478 , H04L2012/5616 , H04L2012/5652
摘要： A bit rate control circuit of the present invention includes a timer controller and a memory. In one aspect of the present invention, words stored in the memory are addressed by addresses corresponding to data channels. Each of the words includes an enable flag, a set value and an operation value. The set values are determined based on bit rates assigned to the corresponding data channels. The words are scanned at constant intervals. The operation values are updated by adding one when the enable flag is active, in each scan, and if the updated operation value reaches the set value, a command to generate an ATM cell for the corresponding data channel is issued.
摘要翻译：本发明的比特率控制电路包括定时器控制器和存储器。在本发明的一个方面，存储在存储器中的字由与数据通道对应的地址寻址。每个字包括使能标志，设定值和操作值。基于分配给相应数据信道的比特率确定设定值。这些词以恒定的间隔进行扫描。在每次扫描中，当使能标志有效时，通过增加操作值来更新操作值，并且如果更新的操作值达到设定值，则发出生成相应数据通道的ATM信元的命令。

5. 发明授权

US4871237A Method and apparatus for adjusting imaging performance of projection optical apparatus 失效
标题翻译：用于调整投影光学装置成像性能的方法和装置
公开(公告)号：US4871237A
公开(公告)日：1989-10-03
申请号：US120232
申请日：1987-11-12
申请人： Satoru Anzai , Koichi Ohno
发明人： Satoru Anzai , Koichi Ohno
IPC分类号： G02B7/04 , G03F7/20
CPC分类号： G03F7/70241 , G02B7/04 , G03F7/70825 , G03F7/70858 , G03F7/70883 , Y10S359/90
摘要： In a method and apparatus for highly precisely adjusting the optical performance including the imaging plane and the magnification factor of a projection lens in a projection optical apparatus, adjustment of the projection lens is achieved by changing the barometric pressure, i.e., the refractive index of at least one space which is located on an optical path and which is shielded from the outer atmosphere is changed by changing the barometric pressure therein. At this space, a space or gap present between any two adjacent elements of a plurality of lens elements or a group of lenses constituting a projection lens is preferably selected. The selected space is independent from and is shielded from the outer atmosphere by the lenses defining itself and a housing supporting these lenses, and is filled with air or a gas. The pressure of the air or gas inside the independent space is controlled by a barometric controller.
摘要翻译：在用于在投影光学装置中高精度地调整包括成像平面和投影透镜的放大倍数的光学性能的方法和装置中，通过改变大气压（即，通过改变其中的大气压来改变位于光路上并且被外部大气屏蔽的至少一个空间。在该空间中，优选地选择存在于多个透镜元件的任意两个相邻元件之间的空间或间隙或构成投影透镜的一组透镜。所选择的空间与限定自身的透镜和支撑这些透镜的壳体独立于外部空气并被外部空间屏蔽，并且被空气或气体填充。独立空间内的空气或气体的压力由气压控制器控制。

6. 发明授权

US4803524A Method of and apparatus for detecting the accuracy of superposition exposure in an exposure apparatus 失效
标题翻译：用于检测曝光装置中叠加曝光精度的方法和装置
公开(公告)号：US4803524A
公开(公告)日：1989-02-07
申请号：US60021
申请日：1987-06-09
申请人： Koichi Ohno , Kenji Higashi , Hiroki Tateno
发明人： Koichi Ohno , Kenji Higashi , Hiroki Tateno
IPC分类号： G03F7/20 , G03F9/00 , G03B27/42
CPC分类号： G03F9/7076 , G03F7/70358
摘要： An apparatus having stage means on which a substrate is placed, holding means for holding a mask formed with at least one mark, and exposing means for exposing the image of said at least one mark on the exposure surface of the substrate which is coated with photoresist includes displacing means for imparting relative displacement between the stage means and the holding means, control means for controlling the exposing means and the displacing means and executing first exposure and second exposure successively, the control means executing the first and the second exposure of exposing the image of said at least one mark on a plurality of predetermined areas of the exposure surface of the substrate placed on the stage means, and controlling the exposing means and the displacing means so that the amount of deviation between the position of the image of said at least one mark in each of the predetermined areas during the first exposure and the position of said image during the second exposure assumes a predetermined value, developing means for developing the substrate in response to the termination of the second exposure, deviation amount detecting means for detecting the amount of deviation between the position of the image of said at least one mark in each of the predetermined areas of the developed substrate during the first exposure and the position of said image during the second exposure and making a detection signal, and determining means for determining the accuracy of the apparatus in accordance with the detection signal and the predetermined value.
摘要翻译：一种装置，具有放置基板的载置装置，用于保持形成有至少一个标记的掩模的保持装置，以及用于将涂覆有光致抗蚀剂的基板的曝光表面上的所述至少一个标记的图像曝光的曝光装置包括用于在平台装置和保持装置之间施加相对位移的移位装置，用于控制曝光装置和移动装置的控制装置，并且连续执行第一曝光和第二曝光，控制装置执行曝光图像的第一和第二曝光所述至少一个标记在放置在所述台装置上的所述基板的所述曝光表面的多个预定区域上，并且控制所述曝光装置和所述移动装置，使得所述至少一个图像的图像位置之间的偏差量在第一曝光期间的每个预定区域中的一个标记以及在第二曝光期间所述图像的位置重新设定预定值，响应于第二曝光的终止而显影衬底的显影装置，用于检测每个预定区域中的所述至少一个标记的图像的位置之间的偏离量的偏差量检测装置在第一次曝光期间显影的衬底和在第二次曝光期间所述图像的位置并产生检测信号，以及确定装置，用于根据检测信号和预定值确定装置的精度。

7. 发明授权

US4676614A Apparatus for regulating the optical characteristics of a projection optical system 失效
标题翻译：用于调节投影光学系统的光学特性的装置
公开(公告)号：US4676614A
公开(公告)日：1987-06-30
申请号：US744175
申请日：1985-06-13
申请人： Koichi Ohno
发明人： Koichi Ohno
IPC分类号： H01L21/30 , G03F1/62 , G03F7/20 , H01L21/027 , G03B3/10
CPC分类号： G03F7/70241 , G03F7/70883
摘要： An optical apparatus for projecting a pattern on a first plane onto a second plane comprises a projection optical system disposed between the first plane and the second plane to form an imaging optical path, a structure for forming a space independent from the ambient space and filled with a gas between the first plane and the second plane in such a manner that the imaging optical path passes therethrough, the structure including a first transparent flat member perpendicular to the optic axis of the projection optical system and forming the entrance surface of the imaging light beam to the independent space and a second transparent flat member parallel to the first transparent flat member and forming the exit surface of the imaging light beam from the independent space, the gas filling the independent space having a refractive index different from the refractive index of the ambient space, and a device for regulating the distance between the first transparent flat member and the second transparent flat member and varying the thickness of the independent space in the direction of the optic axis.
摘要翻译：一种用于将第一平面上的图案投影到第二平面上的光学装置包括设置在第一平面和第二平面之间的投影光学系统，以形成成像光路，用于形成与环境空间无关的空间并填充有第一平面和第二平面之间的气体，使得成像光路穿过其中，该结构包括垂直于投影光学系统的光轴的第一透明平面构件并且形成成像光束的入射表面独立空间和平行于第一透明平板部件的第二透明平板部件，并且从独立空间形成成像光束的出射表面，填充独立空间的气体具有不同于环境的折射率的折射率空间和用于调节第一透明平板构件与第二透明平板构件之间的距离的装置透明的平坦构件，并且在光轴的方向上改变独立空间的厚度。

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