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    • 7. 发明授权
    • Displacement sensor having a phase variation of an impedance
    • 具有阻抗相位变化的位移传感器
    • US07304292B2
    • 2007-12-04
    • US11188602
    • 2005-07-25
    • Tsuyoshi NakamotoNorihisa ShibayamaMasakazu MatsuiKazuhiko Matsuzaki
    • Tsuyoshi NakamotoNorihisa ShibayamaMasakazu MatsuiKazuhiko Matsuzaki
    • H01J40/14
    • G01D3/036G01D5/2013
    • A displacement sensor comprising: a detecting portion including a coil arranged in such manner that a relative position to a magnetic response substance varies in correspondence to a displacement of an object to be measured; an oscillating circuit to supply an alternating-current signal with a prescribed frequency to the detecting portion; an externally attached circuit connected to the detecting portion; and a displacement detecting means to detect the displacement of the object to be measured based on an amount of phase variation of an impedance in the detecting portion and the externally attached circuit, wherein parameters of the externally attached circuit are set in such manner that the amount of the phase variation by the displacement becomes larger than the amount of the phase variation by temperature variation.
    • 1.一种位移传感器,包括:检测部,其包括线圈,所述线圈以使得与磁性响应物质的相对位置对应于待测量物体的位移而变化的方式布置; 振荡电路,用于向所述检测部分提供具有规定频率的交流信号; 连接到检测部分的外部附接电路; 以及位移检测装置,用于基于检测部分和外部附接电路中的阻抗的相位变化量来检测被测量物体的位移,其中外部附加电路的参数被设定为使得量 通过位移的相位变化大于通过温度变化的相位变化量。