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    • 3. 发明授权
    • Method for improving sensitivity of resist
    • 提高抗蚀剂敏感性的方法
    • US08178281B2
    • 2012-05-15
    • US13059877
    • 2009-08-20
    • Hirofumi OhkiAyako NishiokaTakashi Ohkubo
    • Hirofumi OhkiAyako NishiokaTakashi Ohkubo
    • G03C5/00
    • G03F7/093G03F7/0757G03F7/168G03F7/2059Y10S430/143
    • It is an object of the present invention to improve sensitivity of a resist made from hydrosilsesquioxane when a pattern is formed in the resist by irradiation with a charged particle beam. The method for improving sensitivity of a resist of the present invention is a method to improve sensitivity of a resist formed from hydrosilsesquioxane to a charged particle beam when a pattern is formed in the resist by irradiation with a charged particle beam, and is characterized by including prebaking a resist formed from hydrosilsesquioxane and applied onto a substrate at t° C. (20≦t≦300), applying a composition containing a water-soluble conductive polymer compound to a charged particle beam irradiation surface of the prebaked resist, baking the thus applied composition at T° C. (0≦T
    • 本发明的目的是提高当用带电粒子束照射在抗蚀剂中形成图案时由氢硅倍半氧烷制成的抗蚀剂的灵敏度。 提高本发明的抗蚀剂的灵敏度的方法是当通过照射带电粒子束在抗蚀剂中形成图案时,提高由氢化硅倍半氧烷形成的抗蚀剂对带电粒子束的敏感性的方法,其特征在于包括 预烘烤由氢化倍半硅氧烷形成的抗蚀剂,并在t℃(20℃和100℃; 300℃)下涂布在基材上,将含有水溶性导电聚合物化合物的组合物涂布到预焙抗蚀剂的带电粒子束照射表面上, (0≦̸ T
    • 6. 发明授权
    • Antistatic treatment agent, and antistatic film, coated article and pattern forming method using the agent
    • 抗静电处理剂,抗静电膜,涂层制品和使用该剂的图案形成方法
    • US09023247B2
    • 2015-05-05
    • US12977693
    • 2010-12-23
    • Takashi OhkuboYoshihiro Saida
    • Takashi OhkuboYoshihiro Saida
    • H01B1/00H01B1/12C09K3/16G03F7/09G03F1/00G03F7/00
    • C09K3/16C08G2261/312G03F7/093Y10T428/31855
    • The invention provides an antistatic treatment agent having an ability of preventing resist film thinning phenomenon in a chemically amplified resist, an antistatic film, a coated article and a pattern forming method using such antistatic treatment agent, in particular, the invention provides an antistatic treatment agent comprising an aqueous solvent-soluble electroconductive polymer, a diamine (divalent) or polyamine (polyvalent) aliphatic basic compound and an anionic surfactant, an antistatic film, a coated article and a pattern forming method using such antistatic treatment agent. As the aqueous solvent-soluble electroconductive polymer, a π-conjugated electroconductive polymer having a Brönsted acid group is a sulfonic acid group is preferred and it is preferable that the amount of the diamine (divalent) or polyamine (polyvalent) aliphatic basic compound be from 0.1 to 75 mol % based on the total number of moles of the basic compounds.
    • 本发明提供一种具有防止化学放大型抗蚀剂,抗静电膜,涂布制品和使用这种抗静电处理剂的图案形成方法中的抗蚀剂薄膜化现象的抗静电处理剂,特别是本发明提供一种抗静电处理剂 包含水性溶剂可溶性导电聚合物,二胺(二价)或多胺(多价)脂族碱性化合物和阴离子表面活性剂,抗静电膜,涂布制品和使用这种抗静电处理剂的图案形成方法。 作为水性溶剂可溶性导电性聚合物,优选具有布朗斯台德酸基团的共轭导电性聚合物为磺酸基,优选二胺(二价)或多胺(多价)脂肪族碱性化合物的量为 相对于碱性化合物的总摩尔数为0.1〜75摩尔%。
    • 8. 发明申请
    • Information processing device and program
    • 信息处理装置和程序
    • US20060126449A1
    • 2006-06-15
    • US10525965
    • 2003-09-02
    • Makoto UrushiharaKeisuke HiroiHideyuki AgataTakashi Ohkubo
    • Makoto UrushiharaKeisuke HiroiHideyuki AgataTakashi Ohkubo
    • G11B21/08
    • G11B27/034G11B27/032G11B2220/213G11B2220/216G11B2220/218G11B2220/2545G11B2220/2562G11B2220/2575G11B2220/90H04N5/765H04N5/781H04N5/84H04N5/85
    • The present invention relates to an information processing apparatus and a program for executing a sequence of processing operations including the recording of video data recorded to a first recording medium in a first format to a second recording medium in a second format without user's manual intervention. If the information processing apparatus determines that the recording time of a frame just reproduced by a predetermined reproduction device is earlier than the recording time of a frame reproduced by said reproduction device immediately before the above-mentioned frame (step S89) or an unrecorded area has been reproduced by the reproduction device for more than a predetermined period of time (step S90), the information processing apparatus stops the acquisition of the data recorded to a digital video tape reproduced by the reproduction device (step S92), thereby stopping the reproduction of the digital video tape (step S93). The present invention is applicable to information processing apparatus for recording data from digital cassette video tape to DVD, for example.
    • 本发明涉及一种信息处理装置和程序,用于执行一系列处理操作,包括以第一格式将记录到第一记录介质的视频数据以第二格式以第二格式记录到第二记录介质中,无需用户的手动干预。 如果信息处理设备确定由预定再现设备刚刚再现的帧的记录时间早于紧接在上述帧之前的所述再现设备再现的帧的记录时间(步骤S89)或未记录区域 已经被再现装置重放了超过预定时间段(步骤S90),信息处理装置停止对记录到由再现装置再现的数字视频磁带的数据的获取(步骤S92),从而停止 数字录像带的再现(步骤93)。 本发明可应用于例如从数字盒式磁带录制数据到DVD的信息处理装置。