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    • 9. 发明申请
    • Optical properties restoration apparatus, the restoration method, and an optical system used in the apparatus
    • 光学性能恢复装置,恢复方法以及该装置中使用的光学系统
    • US20050242379A1
    • 2005-11-03
    • US10833998
    • 2004-04-29
    • Satoshi SakaiShigenori TsurugaHideo YamakoshiShizuma KuribayashiMinoru DannoHiroshi FutamiNoriko Yamazaki
    • Satoshi SakaiShigenori TsurugaHideo YamakoshiShizuma KuribayashiMinoru DannoHiroshi FutamiNoriko Yamazaki
    • B08B7/00B08B17/00G02B27/00H01L29/76
    • G02B27/0006B08B7/0035B08B17/00G02B1/14
    • The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH− ions, ozone, O2− ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals. More specifically, the method according to this invention is characterized by the step of supplying active energy while supplying a flow of gases containing oxygen atoms such as water gas or oxidizing gas (for example, water vapor, oxygen, hydrogen peroxide, ozone or mixtures of said gases with inactive gases (including air)) into the near vacuum zone, thereby removing or reducing the accumulated carbon which deposits on the lighting surface by exciting the oxidation reaction of the accumulated carbon with the supplied active energy.
    • 本发明的目的是防止或抑制光学系统的劣化,这些光学系统确定了传递诸如光透射,衍射,反射,光谱产生和干扰的效果的光学装置的寿命,以及这些组合。 ,减少窗户更换等维护操作的频率,降低这种操作的成本。 本发明的特征在于产生具有活性能量的近真空区以激发碳的氧化反应的步骤,其中近真空区面向光学系统的照明表面; 在近真空区域产生负离子或自由基,例如含有氧原子的不稳定的化学种子,例如OH基,OH - ,O 2 - , - O - 离子,O-自由基; 以及通过使沉积的碳与负离子或自由基反应来除去或减少沉积在照明表面上的积累的碳。 更具体地说,根据本发明的方法的特征在于,在供给含有氧原子的气体流(例如水气或氧化气体(例如水蒸气,氧气,过氧化氢,臭氧或混合气体 所述具有惰性气体(包括空气)的气体)进入近真空区域,从而通过激发累积的碳与所提供的活性能的氧化反应去除或减少沉积在照明表面上的积聚的碳。
    • 10. 发明申请
    • OPTICAL PROPERTIES RESTORATION APPARATUS, THE RESTORATION METHOD, AND AN OPTICAL SYSTEM USED IN THE APPARATUS
    • 光学性质恢复装置,恢复方法和装置中使用的光学系统
    • US20070158598A1
    • 2007-07-12
    • US11682776
    • 2007-03-06
    • Satoshi SakaiShigenori TsurugaHideo YamakoshiShizuma KuribayashiMinoru DannoHiroshi FutamiNoriko Yamazaki
    • Satoshi SakaiShigenori TsurugaHideo YamakoshiShizuma KuribayashiMinoru DannoHiroshi FutamiNoriko Yamazaki
    • G01J3/10
    • G02B27/0006B08B7/0035B08B17/00G02B1/14
    • The objectives of the present invention are to prevent or inhibit the deterioration of optical systems that determine the longevity of an optical apparatus which delivers effects such as light transmission, diffraction, reflection, spectrum generation, and interference, and these combinations, and by so doing, decrease the frequency of maintenance operations such as window replacement and to reduce the costs for such operations. This invention is characterized by steps of creating a near vacuum zone with a presence of active energy to excite an oxidation reaction of carbon wherein the near vacuum zone faces the lighting surfaces of the optical system; generating negative ions or radicals in the near vacuum zone such as unstable chemical seeds containing oxygen atoms, such as OH radicals, OH− ions, ozone, O2− ions, O-radicals; and removing or reducing the accumulated carbon which deposits on the lighting surface, by reacting the deposited carbon with the negative ions or radicals. More specifically, the method according to this invention is characterized by the step of supplying active energy while supplying a flow of gases containing oxygen atoms such as water gas or oxidizing gas (for example, water vapor, oxygen, hydrogen peroxide, ozone or mixtures of said gases with inactive gases (including air)) into the near vacuum zone, thereby removing or reducing the accumulated carbon which deposits on the lighting surface by exciting the oxidation reaction of the accumulated carbon with the supplied active energy.
    • 本发明的目的是防止或抑制光学系统的劣化,这些光学系统确定了传递诸如光透射,衍射,反射,光谱产生和干扰的效果的光学装置的寿命,以及这些组合。 ,减少窗户更换等维护操作的频率,降低这种操作的成本。 本发明的特征在于产生具有活性能量的近真空区以激发碳的氧化反应的步骤,其中近真空区面向光学系统的照明表面; 在近真空区域产生负离子或自由基,例如含有氧原子的不稳定的化学种子,例如OH基,OH - ,O 2 - , - O - 离子,O-自由基; 以及通过使沉积的碳与负离子或自由基反应来除去或减少沉积在照明表面上的积累的碳。 更具体地说,根据本发明的方法的特征在于,在供给含有氧原子的气体流(例如水气或氧化气体(例如水蒸气,氧气,过氧化氢,臭氧或混合气体 所述具有惰性气体(包括空气)的气体)进入近真空区域,从而通过激发累积的碳与所提供的活性能的氧化反应去除或减少沉积在照明表面上的积聚的碳。