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    • 7. 发明授权
    • Method of producing metal ball and semiconductor package
    • 金属球和半导体封装的生产方法
    • US06290746B1
    • 2001-09-18
    • US09448447
    • 1999-11-24
    • Masaharu Yamamoto
    • Masaharu Yamamoto
    • B22P702
    • B22F1/0048H05K3/3478
    • The purpose of the present invention is to improve releasability from the jig of a method of producing a minute metal ball by heating and melting and then cooling a metal piece of specific dimensions and further, to present a metal ball with very good dimensional accuracy and sphericity, even though diameter is minute. By means of the above-mentioned method, very good releasability between the metal ball and jig after melting and cooling is obtained and long-term use of the tool becomes possible by placing a metal piece on a jig with a layer of fine powder of BN, AlN or C having low wettability with the metal piece in between, or by making a layer of fine powder adhere to the surface of the metal piece and then placing this metal piece on the jig or shaking and arranging individual metal pieces in holes in the same. Moreover, the layer of fine powder on the jig or the surface of the metal piece used in the method of the present invention does not prevent spheroidising of the metal piece under surface tension during melting, and there is no deterioration of surface properties of the metal ball that is obtained and it is thereby possible to markedly improve dimensional accuracy and sphericity of the metal ball.
    • 本发明的目的是通过加热和熔化然后冷却特定尺寸的金属片来提高制造微小金属球的方法的夹具的脱模性,并且进一步提供具有非常好的尺寸精度和球形度的金属球 ,即使直径是微小的。 通过上述方法,获得熔融冷却后金属球和夹具之间非常好的剥离性,并且通过将金属片放置在具有BN的细粉末层的夹具上,可以长期使用该工具 ,与金属片之间具有低润湿性的AlN或C,或者通过使金属片的表面附着细小的粉末层,然后将该金属片放置在夹具上或摇动并将各个金属片排列在孔中 相同。 此外,在本发明的方法中使用的夹具或金属片表面上的细粉末层在熔融期间不能防止金属片在表面张力下的球化,并且金属的表面性质不会劣化 球,从而可以显着提高金属球的尺寸精度和球形度。
    • 8. 发明授权
    • High breakdown voltage semiconductor device and method of fabricating
the same
    • 高击穿电压半导体器件及其制造方法
    • US5512769A
    • 1996-04-30
    • US312671
    • 1994-09-27
    • Masaharu Yamamoto
    • Masaharu Yamamoto
    • H01L27/06H01L29/78H01L29/94H01L31/062H01L31/113H01L31/119
    • H01L29/7835H01L27/0629
    • A high breakdown voltage semiconductor device is constituted, in either a semiconductor substrate or a lightly doped well diffused layer having deep diffusion depth, of a heavily doped diffused layer as a heavily doped drain diffused layer, a lightly doped diffused layer having deeper diffusion depth that the heavily doped diffused layer, and a lightly doped diffused layer adjacent to the heavily doped diffused layer called as an offset diffused layer. The heavily doped diffused layer functions as a part of the drain diffused layer, and has depth around 0.3 to 0.6 micron meter, and impurity concentration of 10.sup.19 to 10.sup.20 impurities/cm.sup.3. The width of the heavily doped diffused layer is set to 4 to 5 micron meters or greater. If the width of the heavily doped diffused layer is set less than this value, the breakdown voltage at an edge is lowered, and thereby impairment of the breakdown voltage occurs. The lightly doped diffused layer also functions as a part of the drain diffused layer. The lightly doped diffused layer is arranged, in particular, to relax the gradient of the impurity concentration of the drain diffused layer due to the heavily doped diffused layer. If the impurity concentration of the lightly doped diffused layer is too low, the resistance becomes high, so that adequate current can not be obtained. In the high breakdown voltage transistor, a gate electrode is formed above the edge of the lightly doped diffused layer. The breakdown voltage of the device is determined by the size of the offset diffused layer and its impurity concentration.
    • 在作为重掺杂漏极扩散层的重掺杂扩散层的半导体衬底或具有深扩散深度的轻掺杂阱扩散层中的高击穿电压半导体器件构成具有较深扩散深度的轻掺杂扩散层, 重掺杂扩散层以及与重掺杂扩散层相邻的轻掺杂扩散层称为偏移扩散层。 重掺杂扩散层作为漏极扩散层的一部分起作用,其深度约为0.3至0.6微米,杂质浓度为1019至1020杂质/ cm3。 重掺杂扩散层的宽度设定为4〜5微米或更大。 如果重掺杂扩散层的宽度被设定为小于该值,则边缘处的击穿电压降低,从而发生击穿电压的损坏。 轻掺杂扩散层还用作漏极扩散层的一部分。 特别地,轻掺杂扩散层被布置为由于重掺杂扩散层而放宽了漏极扩散层的杂质浓度的梯度。 如果轻掺杂扩散层的杂质浓度太低,则电阻变高,不能获得足够的电流。 在高击穿电压晶体管中,在轻掺杂扩散层的边缘上方形成栅电极。 器件的击穿电压由偏移扩散层的尺寸及其杂质浓度决定。