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    • 2. 发明授权
    • Scanning-type probe microscope
    • 扫描型探针显微镜
    • US08181267B2
    • 2012-05-15
    • US13073735
    • 2011-03-28
    • Kanji KobayashiHideo Nakajima
    • Kanji KobayashiHideo Nakajima
    • G01Q20/00
    • G01Q30/14
    • To provide a scanning probe microscope wherein the scanning means is not damaged by fluids, the scanning probe microscope 30 comprises a cantilever support part 2 for supporting a cantilever 1; displacement measurement parts 3, 4, 5 and 6 for measuring the displacement of the cantilever 1; a specimen container 11 comprising sidewalls 19 and bottom surface 18 and containing a fluid 10 and a specimen S; a carrying stage 40 on which the specimen container 11 is placed; and a scanning means 7 for moving and scanning the carrying stage 40. While the cantilever 1 is immersed in the fluid 10 that is contained in the specimen container 11, the carrying stage 40 is moved, and the displacement of the cantilever 1 is measured. The scanning probe microscope 30 further comprises a ring-shaped protective mat 50 that is capable of absorbing the fluid 10. A mounting mechanism 43 is formed on the outer peripheral surface of the carrying stage 40 for removably attaching the protective mat 50 by its inner peripheral area.
    • 为了提供其中扫描装置不被流体损坏的扫描探针显微镜,扫描探针显微镜30包括用于支撑悬臂1的悬臂支撑部分2; 用于测量悬臂1的位移的位移测量部件3,4,5和6; 包括侧壁19和底表面18并包含流体10和样本S的样本容器11; 载置台40,其上放置有检体容器11; 以及用于移动和扫描承载台40的扫描装置7.当悬臂1浸没在容纳在样本容器11中的流体10中时,运送载物台40移动,并且测量悬臂1的位移。 扫描探针显微镜30还包括能够吸收流体10的环状保护垫50.安装机构43形成在承载台40的外周面上,用于通过其内周部可拆卸地安装保护垫50 区。