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    • 6. 发明申请
    • High-resolution, patterned-media master mask
    • 高分辨率,图案化媒体主面具
    • US20090170010A1
    • 2009-07-02
    • US12006433
    • 2007-12-31
    • James G. BellesonMichael A. ParkerRobert O. Schwenker
    • James G. BellesonMichael A. ParkerRobert O. Schwenker
    • G03F1/00A61N5/00
    • H01J37/3174B82Y10/00B82Y40/00G03F7/0002G11B5/855Y10S430/143
    • A high-resolution, patterned-media master mask is disclosed. The high-resolution, patterned-media master mask includes an electron-absorption substrate for absorbing electrons from an electron beam (e-beam) during an e-beam exposure by an e-beam lithography process and suppressing a backscattering of the electrons based on an electron-backscattering-suppressing atomic number associated with a constituent atomic species of the electron-absorption substrate, wherein the electron-absorption substrate comprises a material composed of greater than fifty atomic percent of the constituent atomic species, and wherein the electron backscattering-suppressing atomic number is less than an atomic number eight. The high-resolution, patterned-media master mask further includes a patterned portion coupled with the electron-absorption substrate, wherein the patterned portion is patterned by the e-beam lithography process, and wherein a resolution of the patterned portion is increased in response to the electron-absorption substrate suppressing the backscattering of the electrons.
    • 公开了高分辨率图案化媒体主掩模。 高分辨率图案化媒体主掩模包括用于通过电子束光刻工艺在电子束曝光期间从电子束(电子束)吸收电子的电子吸收基板,并且基于以下原因抑制电子的反向散射 与电子吸收衬底的构成原子种类相关联的电子后向散射抑制原子序数,其中电子吸收衬底包括由组分原子种类大于50原子%组成的材料,并且其中电子后向散射抑制 原子数小于原子数8。 高分辨率图案化媒体主掩模还包括与电子吸收衬底耦合的图案部分,其中通过电子束光刻工艺对图案化部分进行构图,并且其中图案化部分的分辨率响应于 电子吸收衬底抑制电子的后向散射。
    • 7. 发明授权
    • Getter layer lead structure for eliminating resistance increase
phenomena and embrittlement and method for making the same
    • 吸收层铅结构,用于消除电阻增加现象和脆化及其制造方法
    • US5828532A
    • 1998-10-27
    • US941774
    • 1997-09-30
    • Richard H. AhlertJames K. HowardMichael A. Parker
    • Richard H. AhlertJames K. HowardMichael A. Parker
    • G11B5/00G11B5/39G11B5/40
    • G11B5/3903G11B5/00G11B5/40
    • A thin film lead structure resistant to resistance increase phenomenon resulting from contamination by mobile impurities. A thin film lead is disposed proximate to a getter layer material having a higher affinity for mobile impurities that the thin film lead. The getter layer material captures mobile impurities and prevents their migration into the thin film lead. The getter layer material may be formed over and in contact with the thin film lead, may be encapsulated within the thin film lead, or both. The getter layer material comprises a rare earth metal selected from the group consisting of yttrium, scandium, lanthanum, cerium, praseodymium, neodymium, samarium, gadolinium, terbium, dysprosium, holmium, erbium, and ytterbium. The thin film lead is preferably tantalum, but may be selected from the group consisting of niobium, vanadium, chromium, molybdenum, tungsten and iron. An alternate embodiment of the invention includes a transition metal comprising titanium, zirconium, or hafnium as the getter layer. The capture of mobile impurities by the getter layer prevents resistance increase phenomenon and embrittlement to the thin film lead. The thin film lead may be used as a thin film lead to an electrical circuit, the sensor structure in a magnetic head.
    • 一种薄膜引线结构,抵抗由移动杂质污染导致的电阻增加现象。 薄膜引线靠近吸附剂层材料设置,该吸气剂层材料对薄膜引线的移动杂质具有更高的亲和力。 吸气层材料捕获移动杂质并防止其迁移到薄膜引线中。 吸气剂层材料可以形成在薄膜引线之上并与薄膜引线接触,可以封装在薄膜引线内,或两者都被封装。 吸气剂层材料包括选自钇,钪,镧,铈,镨,钕,钐,钆,铽,镝,钬,铒和镱的稀土金属。 薄膜引线优选为钽,但可以选自铌,钒,铬,钼,钨和铁。 本发明的替代实施方案包括包含钛,锆或铪作为吸气剂层的过渡金属。 通过吸气层捕获移动杂质防止了电阻增加现象和薄膜引线的脆化。 薄膜引线可用作薄膜引线到电路,传感器结构在磁头中。
    • 8. 发明授权
    • Method and apparatus for conveying information signals
    • 传送信息信号的方法和装置
    • US4903125A
    • 1990-02-20
    • US134774
    • 1988-01-25
    • Michael A. Parker
    • Michael A. Parker
    • H04N7/015H04N7/01H04N7/08H04N7/081H04N7/24H04N7/26H04N7/34H04N11/04H04N11/20
    • H04N21/4382H04N19/436H04N19/593H04N21/2383H04N19/30H04N19/39
    • Video signals from a source are digitized and applied to a source coder which segregates the signals into four channels (CH1 to CH4) of progressively less visual significance. CH1 carries basic picture information at a relatively low resolution. CH2 to CH4 carry differential information at progressively higher resolutions. The four channels signals are applied to respective coders and the digital outputs are combined in a matrix with voltage levels falling off as visual significance decreases. Received signals, transmitted say by way of a satellite, are applied to a first, high level decoder which extracts the digital waveform for CH1 as DCH1. This is recoded and subtracted from the input to provide a signal to a decoder which recovers CH2 as DCH2, and so on. DCH1 to DCH4 are applied to a source decoder complementary to the coder to recover the source signal. Low significant channels can be omitted at the transmitter, or not be recovered at the receiver to adapt to the prevailing signal to noise performance.
    • PCT No.PCT / GB86 / 00783 Sec。 371日期:1988年1月25日 102(e)日期1988年1月25日PCT提交1986年12月19日PCT公布。 公开号WO87 / 06418 日期为1987年10月22日。来自源的视频信号被数字化并应用于源信号编码器,该信号编码器将信号分为四个逐渐减少视觉意义的信道(CH1至CH4)。 CH1以相对较低的分辨率携带基本图像信息。 CH2至CH4以逐渐更高的分辨率携带差分信息。 四通道信号被施加到相应的编码器,并且数字输出被组合成矩阵,其中电压电平随着视觉显着性减小而下降。 接收到的通过卫星传输的信号被应用于将CH1的数字波形提取为DCH1的第一高级解码器。 这被重新编码并从输入中减去以向解码器提供信号,该解码器将CH2恢复为DCH2,等等。 DCH1至DCH4被施加到与编码器互补的源解码器以恢复源信号。 在发射机可以省略低重要信道,或者在接收机处不能恢复低重要信道,以适应当前的信噪比性能。