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    • 1. 发明申请
    • PATTERN CHECK DEVICE AND PATTERN CHECK METHOD
    • 图案检查装置和图案检查方法
    • US20110278452A1
    • 2011-11-17
    • US13129201
    • 2009-10-15
    • Mari NozoeHiroshi MiyaiMitsuru OkamuraMakoto SuzukiYusuke Ominami
    • Mari NozoeHiroshi MiyaiMitsuru OkamuraMakoto SuzukiYusuke Ominami
    • H01J37/26H01J37/285
    • H01J37/28H01J37/244H01J2237/0048H01J2237/2008H01J2237/24564H01J2237/2817H01L22/12H01L22/20H01L2924/0002H01L2924/00
    • Provided is a pattern inspection apparatus including: a charge formation means which forms charge on a surface of a substrate (7) by generating an electron beam from a second electron source (20) which is different from an electron source (I) which generates an electron beam before irradiating an electron beam (3), a current measuring means (34) which measures a value of current flowing in the substrate while the charge is formed on the surface of the substrate by the charge formation means; and an adjustment means (37) which adjusts the charge formed by the charge formation means so that the value of the current measured by the current measuring means is a predetermined target value. Provided is also a pattern inspection method which uses the pattern inspection apparatus. Thus, it is possible to easily set an optimal condition of precharge executed before inspection of a pattern formed by a semiconductor apparatus manufacturing process and automatically inspection whether the precharge is good. Then, the inspection result is fed back to the operation afterward. This prevents lowering of the reliability of the inspection result and always enables a stable inspection.
    • 提供了一种图案检查装置,包括:电荷形成装置,其通过从不同于电子源(I)的第二电子源(20)产生电子束,在基板(7)的表面上形成电荷, 电子束(3)之前的电子束;电流测量装置(34),其通过电荷形成装置测量在基板的表面上形成电荷时在基板中流动的电流值; 以及调整装置,其调整由电荷形成装置形成的电荷,使得由电流测量装置测量的电流的值是预定的目标值。 还提供了使用图案检查装置的图案检查方法。 因此,可以容易地设定在由半导体装置制造工艺形成的图案的检查之前执行的预充电的最佳状态,并且自动检查预充电是否良好。 然后,检查结果反馈给操作。 这防止了检查结果的可靠性降低,并且始终能够进行稳定的检查。
    • 2. 发明授权
    • Pattern check device and pattern check method
    • 图案检查装置和图案检查方法
    • US08421008B2
    • 2013-04-16
    • US13129201
    • 2009-10-15
    • Mari NozoeHiroshi MiyaiMitsuru OkamuraMakoto SuzukiYusuke Ominami
    • Mari NozoeHiroshi MiyaiMitsuru OkamuraMakoto SuzukiYusuke Ominami
    • H01J37/26H01J37/304G01N23/00
    • H01J37/28H01J37/244H01J2237/0048H01J2237/2008H01J2237/24564H01J2237/2817H01L22/12H01L22/20H01L2924/0002H01L2924/00
    • Provided is a pattern inspection apparatus including: a charge formation means which forms charge on a surface of a substrate (7) by generating an electron beam from a second electron source (20) which is different from an electron source (1) which generates an electron beam before irradiating an electron beam (3), a current measuring means (34) which measures a value of current flowing in the substrate while the charge is formed on the surface of the substrate by the charge formation means; and an adjustment means (37) which adjusts the charge formed by the charge formation means so that the value of the current measured by the current measuring means is a predetermined target value. Provided is also a pattern inspection method which uses the pattern inspection apparatus. Thus, it is possible to easily set an optimal condition of precharge executed before inspection of a pattern formed by a semiconductor apparatus manufacturing process and automatically inspection whether the precharge is good. Then, the inspection result is fed back to the operation afterward. This prevents lowering of the reliability of the inspection result and always enables a stable inspection.
    • 提供了一种图案检查装置,其包括:电荷形成装置,其通过从不同于电子源的电子源(1)产生来自第二电子源(20)的电子束,从而在基板(7)的表面上形成电荷, 电子束(3)之前的电子束;电流测量装置(34),其通过电荷形成装置测量在基板的表面上形成电荷时在基板中流动的电流值; 以及调整装置,其调整由电荷形成装置形成的电荷,使得由电流测量装置测量的电流的值是预定的目标值。 还提供了使用图案检查装置的图案检查方法。 因此,可以容易地设定在由半导体装置制造工艺形成的图案的检查之前执行的预充电的最佳状态,并且自动检查预充电是否良好。 然后,检查结果反馈给操作。 这防止了检查结果的可靠性降低,并且始终能够进行稳定的检查。
    • 8. 发明授权
    • Recording medium, ink composition and recording method using the same
    • 记录介质,油墨组成和使用其的记录方法
    • US07923083B2
    • 2011-04-12
    • US11157078
    • 2005-06-21
    • Kaoru TojoToshiki TaguchiYoshiharu YabukiMakoto Suzuki
    • Kaoru TojoToshiki TaguchiYoshiharu YabukiMakoto Suzuki
    • B41M5/40
    • C09D11/40B41M5/5227B41M2205/28C09D11/32C09D11/322
    • A recording medium containing a substantially colorless compound in which at least 10 atoms having conjugate π electrons are present on a per-molecule basis, wherein it is especially preferable that the compound has at least two aromatic ring groups and/or shows no fluorescence. An ink composition used for printing in image form on media, with the composition containing a dye and controlling a hue change caused in the printed images over a period of one hour immediately after the printing to 5 or below in color-difference terms. And a method of recording images on media by printing an ink composition in image form, wherein the ink composition contains a dye and a hue change caused in the printed images over a period of one hour immediately after the printing is controlled to 5 or below in color-difference terms.
    • 含有基本上无色的化合物的记录介质,其中至少10个具有共轭键的原子; 电子在每个分子的基础上存在,其中特别优选该化合物具有至少两个芳环基和/或不显示荧光。 用于在介质上以图像形式印刷的油墨组合物,其组合物含有染料,并且在印刷后立即将印刷图像中的色调变化控制在5或更低的色差条件下。 以及通过以图像形式印刷油墨组合物来在介质上记录图像的方法,其中在打印被控制到5或更低之后,油墨组合物在短时间内将打印图像中的染料和色调变化在1小时内引起 色差项。