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    • 4. 发明授权
    • Ultrasonic flaw detecting apparatus for inspecting multi-layer structure
and method thereof
    • 用于检查多层结构的超声波探伤仪及其方法
    • US5681995A
    • 1997-10-28
    • US614184
    • 1996-03-12
    • Takehiro OouraKazunori KogaFuminobu TakahashiNorio Awamura
    • Takehiro OouraKazunori KogaFuminobu TakahashiNorio Awamura
    • G01N29/00G01N29/04G01N29/11G01N29/34G01N29/44G01N29/48G01N29/06G01N29/10
    • G01N29/343G01N29/11G01N29/348G01N29/48G01N2291/0231G01N2291/044G01N2291/103
    • An ultrasonic flaw detecting apparatus for efficiently detecting a flaw existing in a deep portion of a multi-layer structure includes a first sensor arranged so as to transmit an ultrasonic wave into a different property layer surrounded by a medium having a different acoustic impedance in the multi-layer structure, a function generator for generating a pulse-shaped sine wave, a power amplifier for amplifying and supplying the pulse-shaped sine wave to the first sensor, a second sensor arranged so as to receive a boundary echo from the different property layer, a first amplifier for amplifying the boundary echo received by the second sensor, an intensity detector for judging the intensity of an amplified signal of the boundary echo, a third sensor arranged so as to receive an echo from a flaw inside a layer in a deep portion of the different property layer, a second amplifier for amplifying the flaw echo received by the third sensor, a recorder for recording the amplified flaw echo signal, and a control unit for reading data from the intensity detector and outputting commands to the function generator and the recorder.
    • 一种用于有效检测存在于多层结构的深部中的缺陷的超声波探伤装置,包括:第一传感器,被布置成将超声波传输到由多重声音阻抗不同的介质围绕的不同特性层 层结构,用于产生脉冲形正弦波的函数发生器,用于将脉冲形正弦波放大并提供给第一传感器的功率放大器,布置成接收来自不同特性层的边界回波的第二传感器 用于放大由第二传感器接收的边界回波的第一放大器,用于判断边界回波的放大信号的强度的强度检测器,布置成从深度上的层内的缺陷接收回波的第三传感器 不同属性层的部分,用于放大由第三传感器接收的缺陷回波的第二放大器,用于记录放大的缺陷回波信号si 以及用于从强度检测器读取数据并将命令输出到功能发生器和记录器的控制单元。
    • 9. 发明申请
    • Cluster-Free Amorphous Silicon Film, and Method and Apparatus for Producing the Same
    • 无簇无定形硅膜及其制造方法和装置
    • US20080008640A1
    • 2008-01-10
    • US11661053
    • 2005-08-17
    • Yukio WatanabeMasaharu ShirataniKazunori Koga
    • Yukio WatanabeMasaharu ShirataniKazunori Koga
    • H01L21/205C01B33/027H01L31/04C23C16/24
    • C23C16/24C23C16/45502C23C16/509H01L21/0245H01L21/02532H01L21/0262H01L31/03767H01L31/202Y02E10/50Y02P70/521
    • The intention is to clarify characteristics of a cluster-free amorphous silicon film which is practically produceable without incorporation of large clusters having a size of 1 nm or more, and provide a method and an apparatus for producing the amorphous silicon film. In the cluster-free amorphous silicone (a-Si:H) film, an in-film Si—H2 bond density is 10−2 atomic % or less, and an in-film volume fraction of the large clusters is 10−1% or less. The a-Si:H film is produced by depositing, on a substrate, a deposition material in a plasma flow of any one of a silane gas, a disilane gas and a gas obtained by diluting a silane or disilane gas with one or a combination of two or more selected from the group consisting of hydrogen, Ar, He, Ne and Xe. The a-Si:H film has prominent characteristics, such that: a light-induced defect density is reduced from 2×1016 cm−3 or more in conventional a-Si:H films to substantially zero; a stabilized efficiency (%), i.e., a light-energy conversion efficiency, is increased from 9% at the highest in existing a-Si:H films up to 14% or more; and a light-induced degradation rate, i.e., [(initial efficiency−stabilized efficiency)/initial efficiency]×100%, is reduced from 20% at the lowest in the existing a-Si:H films to substantially zero.
    • 本发明是为了阐明实际上可产生的无簇非晶硅膜的特征,而不引入具有1nm或更大尺寸的大簇的聚簇,并提供一种制造非晶硅膜的方法和装置。 在无簇无定形硅氧烷(a-Si:H)膜中,膜内Si-H 2键密度为原子百分比的10%以下, 大簇的膜内体积分数为10〜1%以下。 a-Si:H膜通过在硅烷气体,乙硅烷气体和通过用一种或组合稀释硅烷或乙硅烷气体获得的气体中的任何一种的等离子体流中沉积在基板上的沉积材料来制备 选自氢,Ar,He,Ne和Xe中的两种或更多种。 a-Si:H膜具有突出的特性,使得:在常规a-Si:H膜中,光诱导缺陷密度从2×10 16 cm -3以下降低, H电影基本为零; 稳定效率(%),即光能转换效率从现有a-Si:H膜最高的14%增加到14%以上; 并且光诱导的降解速率,即[(初始效率稳定效率)/初始效率]×100%从现有的a-Si:H膜中最低的20%降低到基本上为零。