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    • 1. 发明授权
    • Control apparatus for capacitive electromechanical transducer, and method of controlling the capacitive electromechanical transducer
    • 用于电容式机电换能器的控制装置,以及控制电容式机电换能器的方法
    • US09238250B2
    • 2016-01-19
    • US13500284
    • 2010-11-16
    • Atsushi KandoriMakoto TakagiMasao MajimaKenichi Nagae
    • Atsushi KandoriMakoto TakagiMasao MajimaKenichi Nagae
    • G01S3/80B06B1/00B06B1/02G01S3/808
    • H02N1/006B06B1/0246B06B1/0292G01S3/8083
    • Provided is a control apparatus and control method for a capacitive electromechanical transducer with small decrease in transmission/reception efficiency, and with sets of transmission/reception characteristics with different frequency ranges. The apparatus has cells each including first and second electrodes facing each other via a gap; includes a driving/detecting unit and an external stress applying unit. The driving/detecting unit performs at least one of causing the second electrode to vibrate and transmit elastic waves by generating an AC electrostatic attractive force between the electrodes, and detecting a change of capacity between the electrodes, the change being caused by the second electrode vibrating upon receipt of elastic waves. The external stress applying unit changes the external stress applied to the second electrode. The driving/detecting unit adjusts frequency characteristics by changing a parameter defining the frequency domain used in a transmitting/receiving operation, corresponding to the change of the external stress.
    • 提供了一种用于容量式机电换能器的控制装置和控制方法,其具有小的发送/接收效率的降低以及具有不同频率范围的发送/接收特性的集合。 该装置具有各自包括经由间隙彼此面对的第一和第二电极的单元; 包括驱动/检测单元和外部应力施加单元。 驱动/检测单元执行以下至少一种:使第二电极通过在电极之间产生AC静电吸引力而振动并传播弹性波,并且检测电极之间的容量变化,由第二电极振动引起的变化 收到弹性波。 外部应力施加单元改变施加到第二电极的外部应力。 驱动/检测单元通过改变与发生/接收操作中使用的频域相对应的外部应力变化的参数来调整频率特性。
    • 3. 发明申请
    • CONTROL APPARATUS FOR CAPACITIVE ELECTROMECHANICAL TRANSDUCER, AND METHOD OF CONTROLLING THE CAPACITIVE ELECTROMECHANICAL TRANSDUCER
    • 电容式电磁传感器的控制装置及其控制电容式电磁传感器的方法
    • US20120194107A1
    • 2012-08-02
    • US13500284
    • 2011-11-16
    • Atsushi KandoriMakoto TakagiMasao MajimaKenichi Nagae
    • Atsushi KandoriMakoto TakagiMasao MajimaKenichi Nagae
    • H02N1/00
    • H02N1/006B06B1/0246B06B1/0292G01S3/8083
    • Provided is a control apparatus and control method for a capacitive electromechanical transducer with small decrease in transmission/reception efficiency, and with sets of transmission/reception characteristics with different frequency ranges. The apparatus has cells each including first and second electrodes facing each other via a gap; includes a driving/detecting unit and an external stress applying unit. The driving/detecting unit performs at least one of causing the second electrode to vibrate and transmit elastic waves by generating an AC electrostatic attractive force between the electrodes, and detecting a change of capacity between the electrodes, the change being caused by the second electrode vibrating upon receipt of elastic waves. The external stress applying unit changes the external stress applied to the second electrode. The driving/detecting unit adjusts frequency characteristics by changing a parameter defining the frequency domain used in a transmitting/receiving operation, corresponding to the change of the external stress.
    • 提供了一种用于容量式机电换能器的控制装置和控制方法,其具有小的发送/接收效率的降低以及具有不同频率范围的发送/接收特性的集合。 该装置具有各自包括经由间隙彼此面对的第一和第二电极的单元; 包括驱动/检测单元和外部应力施加单元。 驱动/检测单元执行以下至少一种:使第二电极通过在电极之间产生AC静电吸引力而振动并传播弹性波,并且检测电极之间的容量变化,由第二电极振动引起的变化 收到弹性波。 外部应力施加单元改变施加到第二电极的外部应力。 驱动/检测单元通过改变与发生/接收操作中使用的频域相对应的外部应力变化的参数来调整频率特性。
    • 4. 发明授权
    • Angular velocity sensor
    • 角速度传感器
    • US08176780B2
    • 2012-05-15
    • US12371530
    • 2009-02-13
    • Makoto TakagiAtsushi Kandori
    • Makoto TakagiAtsushi Kandori
    • G01C19/56
    • G01C19/5755G01C19/5762
    • An angular velocity sensor includes a supporting substrate, a detecting portion, a displacement detecting portion, a first driving portion, and a second driving portion. The detecting portion is supported by the supporting substrate movably in at least a free direction. The displacement detecting portion detects a displacement of the detecting portion in the free direction. The first driving portion excites a first reference oscillation of at least a portion of the detecting portion so that a first Coriolis' force in the free direction is generated in response to an angular velocity about a first axis. The second driving portion excites a second reference oscillation of at least a portion of the detecting portion so that a second Coriolis' force in the free direction is generated in response to an angular velocity about a second axis.
    • 角速度传感器包括支撑基板,检测部分,位移检测部分,第一驱动部分和第二驱动部分。 检测部分由至少沿自由方向可移动地由支撑基板支撑。 位移检测部分检测检测部分在自由方向上的位移。 第一驱动部分激发检测部分的至少一部分的第一参考振荡,使得响应于关于第一轴的角速度产生沿自由方向的第一科里奥利力。 第二驱动部分激发检测部分的至少一部分的第二基准振荡,使得响应于关于第二轴的角速度产生在自由方向上的第二科里奥利力。
    • 6. 发明授权
    • Capacitive detection type electro-mechanical transducer
    • 电容式检测型机电换能器
    • US08754660B2
    • 2014-06-17
    • US12973733
    • 2010-12-20
    • Atsushi KandoriMakoto TakagiMasao Majima
    • Atsushi KandoriMakoto TakagiMasao Majima
    • G01R27/26G01D5/24
    • G01R27/2605B06B1/0292B81C1/00246G01D5/24G01N29/2406G01N29/2412G01R27/26
    • A capacitive detection type electro-mechanical transducer comprises; a cell formed by a first electrode arranged on a substrate and a second electrode arranged on a vibration film, and a detection circuit for detecting a displacement of the vibration film, based on a capacity change between the first and second electrodes, wherein a plurality of the cells are classified into a plurality of groups, each one includes at least two cells, and the first electrodes or the second electrodes of the cells of the same one group are commonly connected to the same one detection circuit, and an addition circuit for adding, into single information, signals from the plurality of detection circuits corresponding to the plurality of groups, and for outputting the information, and a capacitive load for each one of the detectors are formulated to be dispersedly arranged.
    • 电容式检测型机电换能器包括: 由布置在基板上的第一电极和布置在振动膜上的第二电极形成的单元,以及基于第一和第二电极之间的电容变化来检测振动膜的位移的检测电路,其中多个 单元被分成多个组,每个组包括至少两个单元,并且同一组单元的第一电极或第二电极共同连接到同一个检测电路,以及一个加法电路 分解为单个信息,来自与多个组对应的多个检测电路的信号,并且用于输出信息,并且将每个检测器的电容性负载配置为分散布置。
    • 7. 发明申请
    • ANGULAR VELOCITY SENSOR
    • 角速度传感器
    • US20090205423A1
    • 2009-08-20
    • US12371530
    • 2009-02-13
    • Makoto TakagiAtsushi Kandori
    • Makoto TakagiAtsushi Kandori
    • G01C19/56
    • G01C19/5755G01C19/5762
    • An angular velocity sensor includes a supporting substrate, a detecting portion, a displacement detecting portion, a first driving portion, and a second driving portion. The detecting portion is supported by the supporting substrate movably in at least a free direction. The displacement detecting portion detects a displacement of the detecting portion in the free direction. The first driving portion excites a first reference oscillation of at least a portion of the detecting portion so that a first Coriolis' force in the free direction is generated in response to an angular velocity about a first axis. The second driving portion excites a second reference oscillation of at least a portion of the detecting portion so that a second Coriolis' force in the free direction is generated in response to an angular velocity about a second axis.
    • 角速度传感器包括支撑基板,检测部分,位移检测部分,第一驱动部分和第二驱动部分。 检测部分由至少沿自由方向可移动地由支撑基板支撑。 位移检测部分检测检测部分在自由方向上的位移。 第一驱动部分激发检测部分的至少一部分的第一参考振荡,使得响应于关于第一轴的角速度产生沿自由方向的第一科里奥利力。 第二驱动部分激发检测部分的至少一部分的第二基准振荡,使得响应于关于第二轴的角速度产生在自由方向上的第二科里奥利力。