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    • 3. 发明授权
    • Touch panel substrate having transparent conductive film
    • 具有透明导电膜的触摸屏基板
    • US06473235B2
    • 2002-10-29
    • US09783331
    • 2001-02-15
    • Takayuki ToyoshimaDaisuke AraiToshiaki AnzakiEtsuo Ogino
    • Takayuki ToyoshimaDaisuke AraiToshiaki AnzakiEtsuo Ogino
    • G02B110
    • G06F3/045B32B17/10018B32B17/10174
    • A transparent touch panel substrate comprising a transparent substrate and deposited thereon a transparent conductive metal oxide film which contains zinc, indium, and tin as metallic elements and is soluble in acids. The transparent conductive metal oxide film preferably contains zinc in an amount of from 40 to 65 atomic % based on all metals and contains indium in an amount of from 0.25 to 1.3 times the amount of tin on an atomic basis. The film preferably has a thickness of from 100 to 160 nm. Unlike the conventional substrate for resistive film type transparent touch panels which comprises a glass plate coated with a transparent conductive ITO film, the touch panel substrate of the invention combines three properties: high light transmittance; ease of processing in forming a transparent electrode by acid etching; and the transparent conductive film has a moderate sheet resistance of from 500 to 5,000&OHgr;. It therefore realizes a touch panel which combines the three functions of having satisfactory display quality, being of the power-saving type, and enabling touch switch operations to be conducted without fail.
    • 一种透明触摸面板基板,包括透明基板并且在其上沉积有透明导电金属氧化物膜,其包含锌,铟和锡作为金属元素并且可溶于酸。 透明导电性金属氧化物膜优选含有相对于所有金属为40〜65原子%的量的锌,其含有锡原子量的0.25〜1.3倍的铟。 该膜优选具有100至160nm的厚度。 不同于传统的电阻膜型透明触摸屏基板,其包括涂有透明导电ITO膜的玻璃板,本发明的触摸面板基板结合了三种性能:高透光率; 通过酸蚀刻形成透明电极的易加工性; 并且透明导电膜具有500至5,000OMEGA的适度的薄层电阻。 因此,实现了具有令人满意的显示质量,省电型的功能和能够不间断地进行触摸开关操作的三个功能的触摸面板。
    • 5. 发明授权
    • Electromagnetic wave filter for plasma display panel
    • 等离子显示面板用电磁波滤波器
    • US06316110B1
    • 2001-11-13
    • US09265417
    • 1999-03-10
    • Toshiaki AnzakiEtsuo OginoTerufusa Kunisada
    • Toshiaki AnzakiEtsuo OginoTerufusa Kunisada
    • B32B1500
    • H05K9/0096H01J11/10H01J11/44H01J29/868H01J2211/446Y10T428/24942Y10T428/24975Y10T428/265Y10T428/28Y10T428/2804
    • An electromagnetic wave filter for a plasma display panel which is effective in preventing incorrect actions of a remote control of appliances, comprising a transparent substrate, a light transmitting electromagnetic wave shield film, and a resin protective film, wherein the electromagnetic wave shield film is a 7-layered laminate in which a dielectric layer and a metal layer containing silver as the principal ingredient are laminated alternately with the dielectric layer being the first to be provided on the transparent substrate, the dielectric layer has a refractive index of 1.6 to 2.8 at 550 nm, and the metal layer containing silver as the principal ingredient contains 0.1 atomic % or more and less than 0.5 atomic % of palladium based on silver and has a thickness of 5 to 25 nm, whereby the electromagnetic wave shield film has a sheet resistance of 3 &OHgr;/□ or lower and a near infrared transmission of 20% or lower at 850 nm.
    • 一种用于等离子体显示面板的电磁波滤波器,其有效地防止了包括透明基板,透光电磁波屏蔽膜和树脂保护膜的电器遥控器的不正确动作,其中电磁波屏蔽膜是 电介质层和含有银作为主要成分的金属层与首先被设置在透明基板上的电介质层交替叠层,其电介质层的折射率为1.6至2.8,550 nm,以银为主要成分的金属层含有0.1原子%以上且小于0.5原子%的基于银的钯,其厚度为5〜25nm,电磁波屏蔽膜的薄层电阻为 3欧米伽/平方或更低,在850nm处的近红外透射率为20%以下。
    • 6. 发明授权
    • Method for forming coating on substrate and sputtering apparatus used for the method
    • 在基板上形成涂层的方法和用于该方法的溅射装置
    • US06328857B1
    • 2001-12-11
    • US09632617
    • 2000-08-04
    • Toshiaki AnzakiEtsuo Ogino
    • Toshiaki AnzakiEtsuo Ogino
    • C23C1434
    • C23C14/3464H01J37/34
    • Sputtering method and apparatus for forming a coating on both sides of a flat substrate or on the entire surface of a bulky substrate without involving rotation of the substrate. At least one pair of sputtering cathodes each having a target attached thereto are arranged in a film-forming chamber capable of controlling a vacuum atmosphere with their target sides facing each other, and a substrate is disposed in front of the targets. A voltage is applied to the sputtering cathodes in such a manner that the polarity alternates between the sputtering cathodes making the pair to induce a glow discharge between the sputtering cathodes. The target on each sputtering cathode is thereby sputtered and deposited on the substrate.
    • 溅射方法和装置,用于在平坦基板的两侧或在庞大的基板的整个表面上形成涂层,而不涉及基板的旋转。 每个具有附着靶的至少一对溅射阴极布置在能够控制其目标侧面对的真空气氛的成膜室中,并且将基板设置在靶的前方。 以这样的方式将溅射阴极施加电压,使得溅射阴极之间的极性交替地使得该溅射阴极在溅射阴极之间引起辉光放电。 因此,溅射阴极上的靶被溅射并沉积在衬底上。