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1. 发明申请

WO2015063727A1 IMPROVED QUADRATURE COMPENSATION 审中-公开
标题翻译：改进的平衡补偿
公开(公告)号：WO2015063727A1
公开(公告)日：2015-05-07
申请号：PCT/IB2014/065727
申请日：2014-10-31
申请人： MURATA MANUFACTURING CO., LTD.
发明人： BLOMQVIST, Anssi , RYTKÖNEN, Ville-Pekka , PIIRAINEN, Tommi
IPC分类号： G01C19/5719
CPC分类号： G01C19/5719 , G01C19/56 , G01C19/5726
摘要： A microelectromechanical sensor device that comprises a seismic mass, and a spring structure that defines for the seismic mass a drive direction, and a sense direction that is perpendicular to the drive direction. A capacitive transducer structure includes a stator to be anchored to a static support structure, and a rotor mechanically connected to the seismic mass. The capacitive transducer structure is arranged into a slanted orientation where a non-zero angle is formed between the drive direction and a tangent of the stator surface. The slated capacitive transducer structure creates an electrostatic force to decrease quadrature error of the linear oscillation.
摘要翻译：一种微机电传感器装置，其包括地震块，以及弹簧结构，其为地震质量定义驱动方向，以及垂直于驱动方向的感测方向。电容式换能器结构包括固定在静止支撑结构上的定子和机械连接到地震块的转子。电容换能器结构被布置成倾斜方位，其中在驱动方向和定子表面的切线之间形成非零角。平面电容式换能器结构产生静电力以减小线性振荡的正交误差。

2. 发明申请

WO2016128871A1 MICROMECHANICAL SENSOR OF ANGULAR VELOCITY 审中-公开
标题翻译：微观速度传感器
公开(公告)号：WO2016128871A1
公开(公告)日：2016-08-18
申请号：PCT/IB2016/050632
申请日：2016-02-08
申请人： MURATA MANUFACTURING CO., LTD.
发明人： PIIRAINEN, Tommi
IPC分类号： G01C19/5747
CPC分类号： G01C19/5712 , G01C19/5747
摘要： A micromechanical device includes four open drive frames and four detection masses for double differentially detecting angular velocity about a single axis aligned with the plane of the micromechanical device. A coupling frame system couples the four open drive frames into a synchronized anti-phase driving motion. In each four pairs of adjacent open drive frames, two adjacent open drive frames move in phases opposite to each other. Axes of linear driving motion of each of the drive frames are aligned. Anti-phase synchronized driving motion of the open drive frames is relayed through a spring arrangement to an anti¬ phase synchronized driving motion of the four detection masses. An inner coupling lever system couples the four detection masses into a synchronized anti-phase detection motion. In each four pairs of adjacent detection masses, phases of two adjacent detection masses are opposite. Axes of the linear detection motion of the detection masses are aligned.
摘要翻译：微机械装置包括四个开放驱动框架和四个检测质量，用于双重差分检测围绕与微机械装置的平面对准的单个轴线的角速度。耦合框架系统将四个开放驱动框架耦合到同步的反相驱动运动。在每对四对相邻的开放式驱动框架中，两个相邻的开放驱动框架以彼此相对的相位移动。每个驱动框架的线性驱动运动的轴对准。开放驱动框架的反相同步驱动运动通过弹簧装置中继到四个检测质量块的反相同步驱动运动。内耦合杆系统将四个检测质量耦合到同步的反相检测运动中。在每对四对相邻的检测质量中，两个相邻检测质量的相位相反。检测质量的线性检测运动的轴对齐。

3. 发明申请

WO2016128872A1 MICROMECHANICAL SENSOR OF ANGULAR VELOCITY 审中-公开
标题翻译：微观速度传感器
公开(公告)号：WO2016128872A1
公开(公告)日：2016-08-18
申请号：PCT/IB2016/050633
申请日：2016-02-08
申请人： MURATA MANUFACTURING CO., LTD.
发明人： PIIRAINEN, Tommi
IPC分类号： G01C19/5747
CPC分类号： G01C19/5712 , G01C19/5747
摘要： A micromechanical device includes four open drive frames and four detection masses for double differentially detecting angular velocity about an axis perpendicular to a plane of the micromechanical device. A coupling frame system couples the four open drive frames into a synchronized anti-phase driving motion. Phases of each of the four pairs of adjacent open drive frames are opposite, and amplitude of the linear primary motion of the four open drive frames are equal. Axes of linear driving motions of the open drive frames are aligned. Anti-phase synchronized driving motion of the open drive frames is relayed through a spring arrangement to an anti-phase synchronized driving motion of the four detection masses. An inner coupling lever system couples the four detection masses into a synchronized anti-phase detection motion. Phases of each of the four pairs of adjacent detection masses are opposite. Axes of linear detection motion of each of the detection masses are aligned.
摘要翻译：微机械装置包括四个开放驱动框架和四个检测质量，用于双重差分检测围绕垂直于微机械装置的平面的轴的角速度。耦合框架系统将四个开放驱动框架耦合到同步的反相驱动运动。四对相邻打开驱动框架中的每一对的相位相反，并且四个开放驱动框架的线性主运动的幅度相等。打开的驱动框架的线性驱动运动的轴线对准。开放驱动框架的反相同步驱动运动通过弹簧装置中继到四个检测质量块的反相同步驱动运动。内耦合杆系统将四个检测质量耦合到同步的反相检测运动中。四对相邻检测质量块中的每一个的相位相反。每个检测质量的线性检测运动的轴对齐。

4. 发明申请

WO2016166654A1 THREE AXIS GYROSCOPE 审中-公开
标题翻译：三轴陀螺仪
公开(公告)号：WO2016166654A1
公开(公告)日：2016-10-20
申请号：PCT/IB2016/052058
申请日：2016-04-12
申请人： MURATA MANUFACTURING CO., LTD.
发明人： PIIRAINEN, Tommi
IPC分类号： G01C19/5733 , G01C19/5747
CPC分类号： G01C19/5733 , G01C19/5747
摘要： The present invention relates to a micro-electro-mechanical device for detecting angular velocity and especially to a three axis gyroscope. The three axis gyroscope comprises a two axis gyroscope structure (200) and a one axis gyroscope structure (100). The gyroscope further comprises a lever spring system (300) coupling a linear drive mode oscillation of the two axis gyroscope structure (200) and a linear drive mode oscillation of the one axis gyroscope structure (100) into one combined primary motion. The lever spring system (300) causes the one and two axis gyroscope structures to have equal drive mode oscillation amplitudes. A symmetrical arrangement of the lever spring system causes any reactive forces created in the lever spring system to cancel each other.
摘要翻译：微机电装置技术领域本发明涉及一种用于检测角速度的微机电装置，特别涉及三轴陀螺仪。三轴陀螺仪包括双轴陀螺仪结构（200）和单轴陀螺仪结构（100）。陀螺仪还包括将双轴陀螺仪结构（200）的线性驱动模式振荡和单轴陀螺仪结构（100）的线性驱动模式振荡耦合成一个组合的初级运动的杠杆弹簧系统（300）。杠杆弹簧系统（300）使一轴和两轴陀螺仪结构具有相等的驱动模式振荡幅度。杠杆弹簧系统的对称布置导致在杠杆弹簧系统中产生的任何反作用力彼此抵消。

5. 发明公开

EP3256813A1 MICROMECHANICAL SENSOR OF ANGULAR VELOCITY 有权
标题翻译：微小机械角速度传感器
公开(公告)号：EP3256813A1
公开(公告)日：2017-12-20
申请号：EP16704706.7
申请日：2016-02-08
申请人： Murata Manufacturing Co., Ltd.
发明人： PIIRAINEN, Tommi
IPC分类号： G01C19/5747
CPC分类号： G01C19/5712 , G01C19/5747
摘要： A micromechanical device includes four open drive frames and four detection masses for double differentially detecting angular velocity about a single axis aligned with the plane of the micromechanical device. A coupling frame system couples the four open drive frames into a synchronized anti-phase driving motion. In each four pairs of adjacent open drive frames, two adjacent open drive frames move in phases opposite to each other. Axes of linear driving motion of each of the drive frames are aligned. Anti-phase synchronized driving motion of the open drive frames is relayed through a spring arrangement to an anti-phase synchronized driving motion of the four detection masses. An inner coupling lever system couples the four detection masses into a synchronized anti-phase detection motion. In each four pairs of adjacent detection masses, phases of two adjacent detection masses are opposite. Axes of linear detection motion of the detection masses are aligned.

6. 发明授权

EP3283845B1 THREE AXIS GYROSCOPE 有权
公开(公告)号：EP3283845B1
公开(公告)日：2019-06-26
申请号：EP16716911.9
申请日：2016-04-12
申请人： Murata Manufacturing Co., Ltd.
发明人： PIIRAINEN, Tommi
IPC分类号： G01C19/5733 , G01C19/5747

7. 发明公开

EP3256814A1 MICROMECHANICAL SENSOR OF ANGULAR VELOCITY 有权
公开(公告)号：EP3256814A1
公开(公告)日：2017-12-20
申请号：EP16704707.5
申请日：2016-02-08
申请人： Murata Manufacturing Co., Ltd.
发明人： PIIRAINEN, Tommi
IPC分类号： G01C19/5747
摘要： A micromechanical device includes four open drive frames (100) and four detection masses (105) for double differentially detecting angular velocity about an axis perpendicular to a plane of the micromechanical device. A coupling frame system (110, 111, 120, 121, 112, 122) couples the four open drive frames (100) into a synchronized anti-phase driving motion. Phases of each of the four pairs of adjacent open drive frames are opposite, and amplitude of the linear primary motion of the four open drive frames (100) are equal. Axes of linear driving motions of the open drive frames are aligned. Anti-phase synchronized driving motion of the open drive frames (100) is relayed through a spring arrangement (106) to an anti-phase synchronized driving motion of the four detection masses (105). An inner coupling lever system (115, 127, 128) couples the four detection masses into a synchronized anti-phase detection motion. Phases of each of the four pairs of adjacent detection masses (105) are opposite. Axes of linear detection motion of each of the detection masses (105) are aligned.

8. 发明授权

EP3256814B1 MICROMECHANICAL SENSOR OF ANGULAR VELOCITY 有权
公开(公告)号：EP3256814B1
公开(公告)日：2020-08-05
申请号：EP16704707.5
申请日：2016-02-08
申请人： Murata Manufacturing Co., Ltd.
发明人： PIIRAINEN, Tommi
IPC分类号： G01C19/5747 , G01C19/5712

9. 发明公开

EP3283845A1 THREE AXIS GYROSCOPE 有权
标题翻译：三轴陀螺仪
公开(公告)号：EP3283845A1
公开(公告)日：2018-02-21
申请号：EP16716911.9
申请日：2016-04-12
申请人： Murata Manufacturing Co., Ltd.
发明人： PIIRAINEN, Tommi
IPC分类号： G01C19/5733 , G01C19/5747
CPC分类号： G01C19/5733 , G01C19/5747
摘要： A micro-electro-mechanical device detects angular velocity, for example relating to a three axis gyroscope. The three axis gyroscope includes a two axis gyroscope structure and a one axis gyroscope structure. The gyroscope further includes a lever spring system coupling a linear drive mode oscillation of the two axis gyroscope structure and a linear drive mode oscillation of the one axis gyroscope structure into one combined primary motion. The lever spring system causes the one and two axis gyroscope structures to have equal drive mode oscillation amplitudes. A symmetrical arrangement of the lever spring system causes any reactive forces created in the lever spring system to cancel each other.

10. 发明授权

EP3256813B1 MICROMECHANICAL SENSOR OF ANGULAR VELOCITY 有权
公开(公告)号：EP3256813B1
公开(公告)日：2019-04-10
申请号：EP16704706.7
申请日：2016-02-08
申请人： Murata Manufacturing Co., Ltd.
发明人： PIIRAINEN, Tommi
IPC分类号： G01C19/5712 , G01C19/5747

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