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1. 发明申请

WO2017051241A1 SEMI-FLEXIBLE PROOF-MASS 审中-公开
标题翻译：半柔性防护质量
公开(公告)号：WO2017051241A1
公开(公告)日：2017-03-30
申请号：PCT/IB2016/001352
申请日：2016-09-22
申请人： MURATA MANUFACTURING CO., LTD.
发明人： BLOMQVIST, Anssi , RYTKÖNEN, Ville-Pekka , LIUKKU, Matti
IPC分类号： G01P15/08 , G01P15/125 , B81C1/00 , B81B3/00 , B81B7/00
CPC分类号： G01M7/08 , B81B3/001 , B81B3/0013 , B81B7/0016 , B81B2201/0235 , B81C1/00968 , G01P15/0802 , G01P15/125 , G01P2015/0814 , G01P2015/0874
摘要： The present invention relates to a microelectromechanical device including a semi-flexible proof-mass comprising at least one primary part, at least one secondary part and at least one stiff spring suspending the at least one primary part and the at least one secondary part of the semi-flexible proof-mass. The stiff spring substantially causes the at least one primary part and the at least one secondary part to move as a single, rigid entity when the device is in its normal operation range. The device further includes at least one first stopper structure configured to stop the at least one primary part. The semi-flexible proof-mass is configured to deform through deflection of the at least one stiff spring, when the device is subjected to a shock that impacts the device with a force that is beyond the normal operation range of the device. While the shock causes a motion of the semi-flexible proof-mass at least in one direction along an axis of movement, the at least one stiff spring is further configured to cause a restoring force causing at least the at least one secondary part of the semi-flexible proof-mass to be driven into a restoring motion in a direction opposite to the motion along the axis of movement caused by the shock, wherein momentum of the at least one secondary part in the restoring motion further causes the at least one primary part to dislodge from the first stopper structure.
摘要翻译：本发明涉及一种微机电装置，其包括半柔性防弹块，其包括至少一个主要部分，至少一个次要部分和至少一个刚性弹簧，其将所述至少一个主要部分和所述至少一个次要部分半柔性防爆质量。当设备处于其正常操作范围时，刚性弹簧基本上使得至少一个主要部件和至少一个次要部件作为单个刚性实体移动。该装置还包括至少一个构造成停止至少一个主要部分的第一止动结构。半柔性防弹质构造成通过使至少一个刚性弹簧的偏转而变形，当该装置受到以超过装置的正常工作范围的力冲击装置的冲击时。尽管冲击导致至少沿着运动轴线的一个方向的半柔性防弹块的运动，但是至少一个刚性弹簧被进一步构造成引起恢复力，至少使至少一个次要部分半柔性证明物质被驱动到与由冲击引起的运动轴线的运动相反的方向上的恢复运动，其中恢复运动中的至少一个次要部分的动量进一步使至少一个主要部分从第一止动结构移开。

2. 发明申请

WO2015063727A1 IMPROVED QUADRATURE COMPENSATION 审中-公开
标题翻译：改进的平衡补偿
公开(公告)号：WO2015063727A1
公开(公告)日：2015-05-07
申请号：PCT/IB2014/065727
申请日：2014-10-31
申请人： MURATA MANUFACTURING CO., LTD.
发明人： BLOMQVIST, Anssi , RYTKÖNEN, Ville-Pekka , PIIRAINEN, Tommi
IPC分类号： G01C19/5719
CPC分类号： G01C19/5719 , G01C19/56 , G01C19/5726
摘要： A microelectromechanical sensor device that comprises a seismic mass, and a spring structure that defines for the seismic mass a drive direction, and a sense direction that is perpendicular to the drive direction. A capacitive transducer structure includes a stator to be anchored to a static support structure, and a rotor mechanically connected to the seismic mass. The capacitive transducer structure is arranged into a slanted orientation where a non-zero angle is formed between the drive direction and a tangent of the stator surface. The slated capacitive transducer structure creates an electrostatic force to decrease quadrature error of the linear oscillation.
摘要翻译：一种微机电传感器装置，其包括地震块，以及弹簧结构，其为地震质量定义驱动方向，以及垂直于驱动方向的感测方向。电容式换能器结构包括固定在静止支撑结构上的定子和机械连接到地震块的转子。电容换能器结构被布置成倾斜方位，其中在驱动方向和定子表面的切线之间形成非零角。平面电容式换能器结构产生静电力以减小线性振荡的正交误差。

3. 发明申请

WO2015170260A1 IMPROVED GYROSCOPE STRUCTURE AND GYROSCOPE DEVICE 审中-公开
标题翻译：改进的GYROSCOPE结构和陀螺仪设备
公开(公告)号：WO2015170260A1
公开(公告)日：2015-11-12
申请号：PCT/IB2015/053295
申请日：2015-05-06
申请人： MURATA MANUFACTURING CO., LTD.
发明人： BLOMQVIST, Anssi
IPC分类号： G01C19/5762 , G01C19/5747
CPC分类号： G01C19/5762 , B81B2201/0242 , B81B2201/033 , G01C19/5712 , G01C19/5747
摘要： A microelectromechanical gyroscope structure for detecting angular motion about an axis of angular motion (Z). A drive element (102) is suspended for one-dimensional motion in a direction of a drive axis (X), and a sense body (100) carries one or more sense rotor electrodes (200) and is coupled to the drive element (102) with a first directional spring structure (104) that forces the sense body (100) to move with the drive element (102) and has a preferred direction of motion in a direction of a sense axis (Y). The drive element (102) includes an actuation body (114) and a drive frame (116) wherein the first spring structure (104) couples the sense body (100) directionally to the drive frame (116), and a second directional spring structure (118) that couples the drive frame (116) to the actuation body (114) and has a preferred direction of motion in the direction of the sense axis (Y).
摘要翻译：一种用于检测角运动轴线（Z）的角运动的微机电陀螺仪结构。驱动元件（102）悬挂在驱动轴线（X）的方向上进行一维运动，并且感测体（100）承载一个或多个感测转子电极（200）并耦合到驱动元件（102））具有第一定向弹簧结构（104），其强制感测体（100）与驱动元件（102）一起移动，并且在感测轴线（Y）的方向上具有优选的运动方向。驱动元件（102）包括致动体（114）和驱动框架（116），其中第一弹簧结构（104）将感测体（100）定向地联接到驱动框架（116），第二定向弹簧结构（118），其将所述驱动框架（116）联接到所述致动体（114），并且在所述感测轴线（Y）的方向上具有优选的运动方向。

4. 发明申请

WO2015036924A1 Improved gyroscope structure and gyroscope 审中-公开
标题翻译：改进的陀螺仪结构和陀螺仪
公开(公告)号：WO2015036924A1
公开(公告)日：2015-03-19
申请号：PCT/IB2014/064376
申请日：2014-09-10
申请人： MURATA MANUFACTURING CO., LTD.
发明人： BLOMQVIST, Anssi , RUOHIO, Jaakko
IPC分类号： G01C19/5712
CPC分类号： B81B7/0058 , B81B2201/0242 , G01C19/5712
摘要： A microelectromechanical gyroscope that comprises two seismic masses suspended to form a plane of masses. The seismic masses are excited into rotary oscillation about a common primary axis that is in the plane of masses. Detected angular motion causes a rotary oscillation of the first seismic mass about a first detection axis, and of the second seismic mass about a second detection axis. The detection axes are perpendicular to the plane of masses and separated by a non-zero distance.
摘要翻译：一种微电子陀螺仪，其包括悬挂形成质量平面的两个地震块。围绕质量平面的公共主轴，地震质量被激发成旋转振荡。检测到的角运动导致围绕第一检测轴线的第一地震质量块的旋转振荡，以及围绕第二检测轴线的第二地震质量块的旋转振荡。检测轴垂直于质量平面并分离非零距离。

5. 发明申请

WO2014207709A1 CAPACITIVE MICROMECHANICAL ACCELERATION SENSOR 审中-公开
标题翻译：电容式微机械加速传感器
公开(公告)号：WO2014207709A1
公开(公告)日：2014-12-31
申请号：PCT/IB2014/062649
申请日：2014-06-27
申请人： MURATA MANUFACTURING CO., LTD.
发明人： LIUKKU, Matti , RYTKÖNEN, Ville-Pekka , BLOMQVIST, Anssi
IPC分类号： G01P15/125 , G01P15/18 , G01P15/08
CPC分类号： G01P15/18 , G01P15/00 , G01P15/08 , G01P15/0802 , G01P15/125 , G01P2015/0828 , G01P2015/0837
摘要： The invention relates to a capacitive micromechanical acceleration sensor comprising a first sensor (2), a second sensor (4), and a third sensor (5). The first sensor (2) comprises a rotor electrode (6) and stator electrode (7). The sensor comprises a first beam (8) that is connected to a rotor electrode support structure (19) and that is connected to the rotor electrode (6). The sensor comprises a second beam (12) that is connected to the rotor electrode support structure (19) and that is connected to the rotor electrode (6). The second sensor (4) is situated in a first space (17) circumscribed by the first beam (8), the first sensor (2), and the rotor electrode support structure (19).The third sensor (5) is situated in a second space (18) circumscribed by the second beam (12), the first sensor (2), and the rotor electrode support structure (19).
摘要翻译：本发明涉及包括第一传感器（2），第二传感器（4）和第三传感器（5）的电容微机械加速度传感器。第一传感器（2）包括转子电极（6）和定子电极（7）。传感器包括连接到转子电极支撑结构（19）并且连接到转子电极（6）的第一梁（8）。传感器包括连接到转子电极支撑结构（19）并连接到转子电极（6）的第二梁（12）。第二传感器（4）位于由第一梁（8），第一传感器（2）和转子电极支撑结构（19）外接的第一空间（17）中。第三传感器（5）位于由第二梁（12）外接的第二空间（18），第一传感器（2）和转子电极支撑结构（19）。

6. 发明申请

WO2022090955A1 MEMS GYROCOMPASS 审中-公开
公开(公告)号：WO2022090955A1
公开(公告)日：2022-05-05
申请号：PCT/IB2021/059924
申请日：2021-10-27
申请人： MURATA MANUFACTURING CO., LTD.
发明人： AALTONEN, Lasse , BLOMQVIST, Anssi
IPC分类号： G01C19/38 , G01C19/56
摘要： The present invention relates to the field of MEMS (microelectromechanical systems) and, in particular, to the use of MEMS gyroscopes for in a gyrocompass for finding a geographical heading. By including at least three MEM gyroscopes with offset sense axes arranged at known orientations, the gyrocompass of the present invention does not require precise mechanical turning of the gyroscopes in order to determine the heading of the gyrocompass or to compensate for bias errors.

7. 发明申请

WO2015114531A1 IMPROVED GYROSCOPE STRUCTURE AND GYROSCOPE 审中-公开
标题翻译：改进的GYROSCOPE结构和GYROSCOPE
公开(公告)号：WO2015114531A1
公开(公告)日：2015-08-06
申请号：PCT/IB2015/050641
申请日：2015-01-28
申请人： MURATA MANUFACTURING CO., LTD.
发明人： RUOHIO, Jaakko , BLOMQVIST, Anssi
IPC分类号： G01C19/574
CPC分类号： G01C19/5712 , B81B3/0043 , B81B2201/0242 , B81B2207/012 , G01C19/574
摘要： A gyroscope structure with a specific arrangement of drive and sense structures and coupling spring structures, which allows orthogonally directed motions of larger scale drive and sense structures in a very limited surface area.
摘要翻译：具有驱动和感测结构和耦合弹簧结构的特定布置的陀螺仪结构，其允许在非常有限的表面积中进行更大规模的驱动和感测结构的正交引导的运动。

8. 发明申请

WO2014001646A1 IMPROVED VIBRATORY GYROSCOPE 审中-公开
标题翻译：改进振动陀螺仪
公开(公告)号：WO2014001646A1
公开(公告)日：2014-01-03
申请号：PCT/FI2013/050712
申请日：2013-06-27
申请人： MURATA MANUFACTURING CO., LTD.
发明人： BLOMQVIST, Anssi
IPC分类号： G01C19/5726 , G01C19/5776
CPC分类号： G01C19/56 , G01C19/5726 , G01C19/5776 , G01C25/00 , Y10T29/49002
摘要： A sensing device comprising a micromechanical gyroscope, the gyroscope comprising: An improved sensing device with a micromechanical gyroscope (51 ), where the resonance frequency of the first mechanical resonator (52) and the resonance frequency of the second mechanical resonator (53) are adjusted to essentially coincide. The device comprises a feed-back loop connected to the second mechanical resonator (53), the quality factor of the combination of the feed-back loop and the second mechanical resonator (53) being less than 10. More accurate sensing is achieved without essentially adding complexity to the sensor device configuration.
摘要翻译：一种包括微机械陀螺仪的感测装置，所述陀螺仪包括：具有微机械陀螺仪（51）的改进的感测装置，其中调节所述第一机械谐振器（52）的共振频率和所述第二机械谐振器（53）的共振频率基本上重合。该装置包括连接到第二机械谐振器（53）的反馈回路，反馈回路和第二机械谐振器（53）的组合的品质因数小于10.更精确的感测实现上没有基本上增加传感器设备配置的复杂性。

9. 发明申请

WO2015036923A1 GYROSCOPE STRUCTURE AND GYROSCOPE WITH IMPROVED QUADRATURE COMPENSATION 审中-公开
标题翻译：具有改进的平衡补偿的陀螺结构和陀螺仪
公开(公告)号：WO2015036923A1
公开(公告)日：2015-03-19
申请号：PCT/IB2014/064375
申请日：2014-09-10
申请人： MURATA MANUFACTURING CO., LTD.
发明人： RINKIÖ, Marcus , BLOMQVIST, Anssi , RUOHIO, Jaakko
IPC分类号： G01C19/5712 , G01C19/5755 , G01C19/5776
CPC分类号： G01C19/5712 , B81B7/02 , G01C19/5755 , G01C19/5776
摘要： A microelectromechanical gyroscope structure that comprises a seismic mass, a body element, and a spring structure suspending the seismic mass to the body element. In primary oscillation at least part of the seismic mass oscillates in out-of-plane direction. A first conductor is arranged to move with the seismic mass, and a second conductor is attached to the body element. The conductors include adjacent surfaces that extend in the first direction and the third direction. A voltage element is arranged to create between the first surface and the second surface a potential difference and thereby induce an electrostatic force in the second direction and modulated by the primary oscillation of the seismic mass.
摘要翻译：一种微机电陀螺仪结构，其包括将地震质量块，身体元件和将地震块悬挂在身体元件上的弹簧结构。在主振荡中，至少部分地震质量在平面外方向振荡。第一导体被布置成与抗震块一起移动，并且第二导体附接到主体元件。导体包括在第一方向和第三方向上延伸的相邻表面。电压元件布置成在第一表面和第二表面之间产生电位差，从而在第二方向上产生静电力并通过地震块的主振荡进行调制。

10. 发明公开

EP4215922A1 THREE-AXIS ACCELEROMETER WITH TWO MASSES 审中-实审
公开(公告)号：EP4215922A1
公开(公告)日：2023-07-26
申请号：EP22213813.3
申请日：2022-12-15
申请人： Murata Manufacturing Co., Ltd.
发明人： Rytkönen, Ville-Pekka , BLOMQVIST, Anssi , LIUKKU, Matti
IPC分类号： G01P15/18 , G01P15/125
摘要： An accelerometer comprising a first proof mass and a second proof mass which are coupled to each other with a coupling structure which extends from the first proof mass to the second proof mass. The coupling structure synchronizes the movement of the first and second proof masses so that the first and second proof masses may be linearly displaced from their rest position in the x-direction, rotationally displaced in opposite in-plane directions and rotationally displaced in opposite out-of-plane directions.

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