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1. 发明申请

WO2006055223A1 THERMAL MASS FLOW RATE SENSOR HAVING BYPASS RATIO 审中-公开
标题翻译：具有旁路比例的热流量传感器
公开(公告)号：WO2006055223A1
公开(公告)日：2006-05-26
申请号：PCT/US2005/039151
申请日：2005-10-26
申请人： MKS INSTRUMENTS, INC. , SHAJII, Ali , MENEGHINI, Paul , SMITH, Daniel, Alexander
发明人： SHAJII, Ali , MENEGHINI, Paul , SMITH, Daniel, Alexander
IPC分类号： G01F5/00 , G01F1/684
CPC分类号： G01F1/6847 , G01F5/00
摘要： A flow rate sensor includes a main conduit, a sensor tube and a bypass tube connecting an upstream portion of the main conduit to a downstream portion of the main conduit such that flow through the main conduit is divided through the sensor tube and the bypass tube, and at least one heater element for heating the sensor tube. A first flow restrictor of porous media is positioned between the upstream portion of the main conduit and the sensor tube, and a second flow restrictor of porous media is positioned between the upstream portion of the main conduit and the bypass tube. The flow restrictors provide the flow rate sensor with a fixed bypass ratio so that the sensor can operate independently of the type of gas being measured.
摘要翻译：流量传感器包括主导管，传感器管和旁通管，其将主管道的上游部分连接到主管道的下游部分，使得通过主管道的流经传感器管和旁通管分开，以及用于加热传感器管的至少一个加热器元件。多孔介质的第一限流器位于主管道的上游部分和传感器管之间，并且多孔介质的第二限流器位于主管道的上游部分和旁路管之间。流量限制器为流量传感器提供固定旁路比，使得传感器可以独立于所测量气体的类型进行操作。

2. 发明申请

WO2008014076A2 CRITICAL FLOW BASED MASS FLOW VERIFIER 审中-公开
标题翻译：基于关键流量的大流量验证器
公开(公告)号：WO2008014076A2
公开(公告)日：2008-01-31
申请号：PCT/US2007/072186
申请日：2007-06-27
申请人： MKS INSTRUMENTS, INC. , DING, Junhua , ZARKAR, Kaveh , SHAJLL, Ali , SMITH, Daniel, Alexander
发明人： DING, Junhua , ZARKAR, Kaveh , SHAJLL, Ali , SMITH, Daniel, Alexander
CPC分类号： G01F25/0038 , G01F25/0053
摘要： A flow verifier for verifying measurement by a fluid delivery device under test (DUT) includes a chamber configured to receive a flow of the fluid from the DUT, at least one temperature sensor to provide gas temperature in the chamber, at least one pressure transducer to provide gas pressure in the chamber, and a critical flow nozzle located upstream of the chamber along a flow path of the fluid from the DUT to the chamber. The critical flow nozzle and the flow verification process are configured to maintain the flow rate of the fluid through the nozzle at the critical flow condition such that the flow rate through the nozzle is substantially constant and substantially insensitive to any variation in pressure within the chamber downstream of the nozzle. Therefore, the varying chamber pressure during the flow verification period has substantially no impact on the downstream pressure of the DUT, and the external volume between the flow verifier and the DUT is substantially irrelevant to the flow verification calculation.
摘要翻译：用于验证被测流体输送装置（DUT）的测量的流量检验器包括：腔室，被配置为从DUT接收流体流;至少一个温度传感器，用于在腔室中提供气体温度;至少一个压力传感器，在腔室中提供气体压力，以及临界流动喷嘴，其沿着流体从DUT到腔室的流动路径位于腔室的上游。临界流喷嘴和流量验证过程被配置为保持流体通过喷嘴处于临界流动状态的流速，使得通过喷嘴的流速基本上恒定，并且对腔室下游的任何压力变化基本上不敏感的喷嘴。因此，流动验证期间的变化室压力对DUT的下游压力基本上没有影响，并且流体验证器和DUT之间的外部体积与流动验证计算基本上无关。

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