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    • 1. 发明专利
    • VERTICAL FINE FEED GEAR
    • JP2000150623A
    • 2000-05-30
    • JP32695598
    • 1998-11-17
    • MITSUI SHIPBUILDING ENG
    • TANAKA SHINGOKUWABARA TAKAYOSHI
    • H01L21/68
    • PROBLEM TO BE SOLVED: To provide a vertical fine feed gear which does not tilt any object to be fed even when the gear elevates and lowers the object. SOLUTION: A vertical fine feed gear 20 is provided with a stage 24 which can carry a semiconductor wafer 22 on its top face 28 and has a plurality of spiral slopes 32 on its bottom face, an elevating/lowering ring 26 which is provided under the stage 24 and on which spiral elevating/lowering guides 38 which slide on the slopes 32 are formed, a stepping motor 48 which is connected to the ring 26 and rotates the ring 26 around the center of the guides 38, and anchor pins which are vertically inserted into the stage 24 and prevent the rotation of the stage 24 in company with the rotation of the ring 26. Since the stage 24 can receive the load of the wafer 22 in a state where the load is scattered to the slopes, the stage 24 does not tilt and the gear 20 can surely elevate/lower the wafer 22.
    • 2. 发明专利
    • DRYING METHOD FOR FIRE FIGHTING HOSE
    • JPH04152955A
    • 1992-05-26
    • JP27778290
    • 1990-10-18
    • MITSUI SHIPBUILDING ENGTAKATORI SEISAKUSHIYO KK
    • WATANABE MASAHIKOTANAKA SHINGOYAMAMOTO MASAKAZUKINUGAWA TETSUO
    • A62C33/02F26B9/06F26B21/00
    • PURPOSE:To efficiently execute the drying by constituting the device of a dehumidifier and a drying box, supporting a fire fighting hose meanderingly in the drying box, and thereafter, supplying dry air dehumidified by the dehumidifier into the drying box. CONSTITUTION:A fire fighting hose 9 used for a fire is washed by a wasting device, wound round to a reel 12, and attached to a fitting base 13. Subsequently, by allowing a supporting frame 21 to ascend, the fire fighting hose 9 is allowed to pass through between rotary rollers 19-1-19-5, and its tip part is gripped by a hook provided on the wall part of a drying box 7. Next, the supporting frame 21 is allowed to descend and pinch rollers 20-1-20-5 attached thereto are pressed against the rotary rollers 19-1-19-5 and the fire fighting hose 9 is gripped between both the rollers. Thereafter, by driving a driving machine 16-1, a meandering part 9a of the fire fighting hose 9 is formed. Subsequently, by driving a driving machine 16-2, a meandering part 9b is formed, and in the same way meandering, parts 9c, 9d and 9e are formed. Next, when a booster fan 5 is driven, the open air sucked into a dehumidifier 1 is dehumidified and dried, supplied plied into a chamber in which the fire fighting hose 9 is contained, and exhausted from an exhaust port 10. In such a way, the fire fighting hose can be dried at a low temperature.
    • 3. 发明专利
    • SUBSTRATE GLASS INSPECTION PROCESSING SYSTEM
    • JPH1179389A
    • 1999-03-23
    • JP26925497
    • 1997-09-16
    • MITSUI SHIPBUILDING ENG
    • TAKASHIMA TOSHIROTANAKA SHINGOTSUBOKAWA HITOSHI
    • B65G1/00B65G49/06
    • PROBLEM TO BE SOLVED: To smoothly put glasses in and out of a cassette and to treat sheets between the cassette and an inspection processing part by delivering substrate glasses by the sheet unit to the inspection processing part by a roller and storing the substrate glasses delivered by the sheet unit after inspection processing in the cassette in multistages. SOLUTION: An exclusive cassette 12 is transferred, a cassette moving roller means 36 is lowered from a table surface, and carrier surface height of an outside carrier conveyor and a roller carrier means 20 arranged in the inside of an elevating table is matched with each other. Thereafter, the roller carrier means 20 is driven from a substrate glass 10 on the lowest stage in the carrier direction, the substrate glass 10 is transferred from the exclusive cassette 10 to the outside carrier conveyor, and a sheet of it is carried to an inspection processing part. As regards taking out of the second substrate glass 10, cassette height is lowered by one stage by driving an elevating device of the elevating table, the substrate glass 10 at the second stage from the bottom is carried outside, and the substrate glass 10 delivered by the sheet unit after finishing inspection processing is stored in multistages in the cassette.