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    • 1. 发明专利
    • Method of manufacturing solar panel
    • 太阳能电池板的制造方法
    • JP2010118707A
    • 2010-05-27
    • JP2010043189
    • 2010-02-26
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • SONOBE HIROYUKITAKANO AKIMINAWATA YOSHIICHIUCHIHASHI KAZUMASAOGAWA KAZUHIKOYAMANE TSUKASAYAMASHITA NOBUKI
    • H01L31/042
    • H01L31/186H01L31/046H02S50/00H02S50/15Y02E10/50Y02P70/521
    • PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar panel capable of carrying out measurement upon power generation inspection without causing variations of a result and at high precision. SOLUTION: This method of manufacturing the solar panel includes: a module formation step of forming a solar battery module by laminating solar battery films on a translucent substrate; a module inspection step of carrying out the power generation inspection in the solar battery module; a panellization step of forming the solar battery panel by panellizing the solar battery module; a panel cleaning step of cleaning the light incident surface of the solar panel; and a panel inspection step of carrying out the power generation inspection in the solar panel. The panel cleaning step is carried out immediately before the panel power generation inspection step. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种能够在发电检查时进行测量而不引起结果的变化和高精度的太阳能电池板的制造方法。 太阳能电池板的制造方法包括:通过将太阳能电池膜层叠在透光性基板上而形成太阳能电池模块的模块形成工序; 在太阳能电池模块中进行发电检测的模块检查步骤; 通过将所述太阳能电池模块分组来形成所述太阳能电池面板的整理步骤; 清洁太阳能电池板的光入射面的面板清洗工序; 以及在太阳能电池板中进行发电检查的面板检查步骤。 面板清洁步骤在面板发电检测步骤之前进行。 版权所有(C)2010,JPO&INPIT
    • 2. 发明专利
    • GAS GENERATOR
    • JP2003096587A
    • 2003-04-03
    • JP2001288655
    • 2001-09-21
    • MITSUBISHI HEAVY IND LTD
    • YAMANE TSUKASAHASHIZAKI KATSUO
    • C25B15/02C25B1/12C25B9/00C25B15/08
    • PROBLEM TO BE SOLVED: To pressurize a water electrolyzing section of a gas generator by liquid (water) without using a pressurized vessel. SOLUTION: The gas generator which is furnished with the water electrolyzing section 1 for manufacturing hydrogen and oxygen by electrolyze pure water, a hydrogen storage tank 2 for storing the first pure water and the hydrogen, a hydrogen pressure gage 6 for measuring the pressure of the hydrogen storage tank 2 and outputting the measured value of the hydrogen pressure, a first liquid level gage 8 for measuring a first water level which is the water level of the first pure water, an oxygen storage tank 3 for storing the second pure water and the oxygen and an oxygen pressure gage 7 for measuring the pressure of the oxygen storage tank 3 and outputting the measured value of the oxygen pressure, is further furnished with a control section 19 for controlling at least either of the first water level which is the water level of the first pure water and the second water level which is the water level of the second pure water in order to eliminate the difference between the first pressure which is the pressure on the negative electrode side of the water, electrolyzing section 1 and the second pressure which is the pressure on the positive electrode side based on the measured value of the hydrogen pressure, the measured value of the oxygen pressure and the first water level, in which the water electrolyzing section 1 is submerged in the water in the hydrogen storage tank is used.
    • 3. 发明专利
    • FUEL CELL
    • JP2003092130A
    • 2003-03-28
    • JP2001280677
    • 2001-09-14
    • MITSUBISHI HEAVY IND LTD
    • YAMANE TSUKASAKUDOME OSAOTANI TOSHIHIRO
    • H01M8/24
    • PROBLEM TO BE SOLVED: To suppress the stay of excess water in an inclined state. SOLUTION: A cell assembly formed by stacking a plurality of cells is fixed to the inside of a body casing 1 inclinable against a reference plane H. The body casing 1 is equipped with an inlet 3 from which humidified gas enters a gas passage between a plurality of cells; a first outlet 4 through which the humidified gas comes out from the gas passage; and a second outlet 5 through which the humidified gas comes out from the gas passage. The inlet 3 is arranged in the upper portion of the body casing 1, the first outlet 4 is arranged in the lower portion of the body casing 1, and the second outlet 5 is arranged in the lower portion of the body casing 1. The reference plane H is absolute to a coordinate system fixed to the globe. When the body casing 1 is inclined against the reference plane H, water introduced into the bottom 8 flows toward the second outlet 5 opposite to the first outlet 4 and is rapidly exhausted to the outside through an on-off valve 6 to avoid staying as the excess water in the gas passage, and deterioration in power generating performance is effectively suppressed.
    • 4. 发明专利
    • Manufacturing method of multi-junction photoelectric conversion apparatus
    • 多功能光电转换装置的制造方法
    • JP2012253078A
    • 2012-12-20
    • JP2011122513
    • 2011-05-31
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • TAKEUCHI YOSHIAKIYAMANE TSUKASANAKANO SHINYA
    • H01L31/04
    • Y02E10/50
    • PROBLEM TO BE SOLVED: To provide a manufacturing method of a multi-junction photoelectric conversion apparatus which achieves high battery performance while inhibiting stripe shaped defects from occurring from a recessed part to a photoelectric conversion layer.SOLUTION: In a multi-junction photoelectric conversion apparatus 100, a transparent electrode layer 2, a power generation cell layer 91, an intermediate contact layer 5, another power generation cell layer 92, and a rear surface electrode layer 4 are formed on a translucent substrate 1 in sequence. In a manufacturing method of the multi-junction photoelectric conversion apparatus 100, an irregular shape is formed on an upper surface of the power generation cell layer 91, and the intermediate contact layer 5 is selectively formed in a recessed part on the upper surface of the power generation cell layer 91.
    • 要解决的问题:提供一种在抑制从凹部到光电转换层的条纹缺陷的同时实现高电池性能的多结光电转换装置的制造方法。 解决方案:在多结光电转换装置100中,形成透明电极层2,发电单元层91,中间接触层5,另一发电单元层92和背面电极层4 在半透明基板1上。 在多结光电转换装置100的制造方法中,在发电单元层91的上表面上形成不规则形状,中间接触层5选择性地形成在 发电池层91.版权所有(C)2013,JPO&INPIT
    • 5. 发明专利
    • Silicon-based thin film production apparatus, photoelectric conversion device equipped with the same, silicon-based thin film production method and photoelectric conversion device manufacturing method using the same
    • 基于硅的薄膜生产装置,具有相同的光电转换装置,基于硅的薄膜生产方法和使用其的光电转换装置的制造方法
    • JP2012234950A
    • 2012-11-29
    • JP2011102146
    • 2011-04-28
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • TAKEUCHI YOSHIAKIYAMANE TSUKASANAKANO SHINYA
    • H01L21/205C23C16/24C23C16/509H01L31/04
    • Y02E10/50
    • PROBLEM TO BE SOLVED: To provide a silicon-based thin film production method and a silicon-based thin film production apparatus, which can produce a silicon-based thin film of cluster free or of a minimal cluster while inhibiting decrease in film production speed.SOLUTION: A silicon-based thin film production apparatus is an apparatus in which a material gas containing Si is supplied to the inside of a vacuum chamber in which a substrate 101 is housed and a high-frequency power is supplied to a discharge electrode 106 provided in a plasma generation part 103 to produce a silicon-based thin film on the substrate 101 by generating plasma of the material gas. The silicon-based thin film production apparatus comprises a cluster removal part 104 arranged between the substrate 101 and the discharge electrode 106. The cluster removal part 104 includes a plurality of openings in such a way that an opening ratio is 50% and over. The openings communicate the plasma generation part side and the substrate side. An opening width of the opening is not more than twice a mean free path of an Si nanocluster under a pressure in film production, and a length of the opening is not less than twice the opening width.
    • 要解决的问题:为了提供硅基薄膜制造方法和硅基薄膜制造装置,其可以在抑制薄膜的降低的同时产生无簇或最小簇的硅基薄膜 生产速度。 解决方案:硅基薄膜制造装置是将含有Si的原料气体供给到容纳基板101的真空室的内部并将高频电力供给到放电的装置 设置在等离子体产生部103中的电极106,通过产生原料气体的等离子体,在基板101上产生硅系薄膜。 硅基薄膜制造装置包括布置在基板101和放电电极106之间的簇去除部分104.簇除去部分104包括多个开口,使得开口率为50%以上。 开口与等离子体生成部侧和基板侧连通。 开口的开口宽度不超过膜生产中压力下的Si纳米簇的平均自由程的两倍,并且开口长度不小于开口宽度的两倍。 版权所有(C)2013,JPO&INPIT
    • 8. 发明专利
    • Method of manufacturing solar cell
    • 制造太阳能电池的方法
    • JP2010109280A
    • 2010-05-13
    • JP2008282098
    • 2008-10-31
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • SASAGAWA EISHIRONAWATA YOSHIICHIYAMANE TSUKASAYAMASHITA NOBUKI
    • H01L31/04
    • Y02E10/50
    • PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell capable of stabilizing generation performance of the solar cell and improving a yield in manufacturing the same.
      SOLUTION: A method of manufacturing a solar cell comprising the steps of: a gas discharge process S2, in which the internal gas of a container is discharged to increase the degree of vacuum while being closed after being subjected to air opening for maintenance; a film formation process S4, in which the inside of the discharged container is filled with a gas mixture that mixes an inert gas with a mixing gas containing oxygen atoms at a predetermined concentration, and a voltage is applied between a target arranged in the container and a substrate to manufacture a film constituting a solar cell on the substrate; and an initial film formation process S3, in which, prior to the deposition process S4, the gas mixture whose incoming gas concentration in the gas mixture is made to be lower than a predetermined concentration is supplied into the container and a film is formed only for a predetermined period on the substrate.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 解决的问题:提供一种能够稳定太阳能电池的发电性能并提高其制造成品率的太阳能电池的制造方法。 解决方案:一种制造太阳能电池的方法,包括以下步骤:气体放电过程S2,其中排出容器的内部气体以在经受开启维护之后关闭时增加真空度 ; 成膜方法S4,其中排出的容器的内部填充有将惰性气体与含有氧原子的混合气体以预定浓度混合的气体混合物,并且在布置在容器中的靶材和 在基板上制造构成太阳能电池的膜的基板; 以及初始成膜工序S3,其中在沉积工艺S4之前将气体混合物中的进气浓度低于预定浓度的气体混合物供应到容器中,并且仅形成膜 在基板上的预定周期。 版权所有(C)2010,JPO&INPIT
    • 9. 发明专利
    • Method and system for manufacturing thin film
    • 用于制造薄膜的方法和系统
    • JP2008056949A
    • 2008-03-13
    • JP2006231594
    • 2006-08-29
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • MASHIMA HIROSHITAKANO GIYOUMITAKEUCHI YOSHIAKIYAMANE TSUKASA
    • C23C16/52H01L21/205H01L31/04
    • Y02E10/50
    • PROBLEM TO BE SOLVED: To provide a method and a system for manufacturing a thin film capable of suppressing variance in quality of products for each batch. SOLUTION: The method for manufacturing a thin film using an apparatus 1 for manufacturing a thin film has a step of depositing a thin film 113 on a substrate 8 by executing (a) the film deposition batch treatment L. The step (a) includes a step (a1) of holding the substrate 8 by opposing electrodes 2, a step (a2) of introducing a gas L containing a raw material of the thin film 113 in a film deposition chamber 6, and a step (a3) of depositing the thin film 113 on the substrate 8 by applying the high frequency power 105 between a discharge electrode 3 and the opposing electrodes 2 while introducing the gas L. The step (a) is executed after the self-cleaning N of the apparatus 1 for manufacturing the thin film and before the next self-cleaning N'. In the step (a3), the high frequency power 105 is controlled based on the number L of the film deposition batch treatments to be executed by the apparatus 1 for manufacturing the thin film from the self-cleaning N to the film deposition batch treatment L. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供能够抑制每批次的产品质量变化的薄膜的制造方法和系统。 解决方案:使用用于制造薄膜的装置1制造薄膜的方法具有通过执行(a)成膜批处理L在基板8上沉积薄膜113的步骤。步骤(a )包括通过对置电极2保持基板8的步骤(a1),将含有薄膜113的原料的气体L引入成膜室6的步骤(a2),以及步骤(a3) 在引入气体L的同时,通过在放电电极3和相对电极2之间施加高频电力105,将薄膜113沉积在基板8上。步骤(a)在用于 制造薄膜,然后再进行下一次自清洁N'。 在步骤(a3)中,基于由自清洁N到成膜批处理L的薄膜制造装置1执行的成膜分批处理的数量L,控制高频功率105 版权所有(C)2008,JPO&INPIT
    • 10. 发明专利
    • Device and method for evaluating photoelectric conversion layer
    • 用于评估光电转换层的装置和方法
    • JP2007285810A
    • 2007-11-01
    • JP2006112097
    • 2006-04-14
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • SASAGAWA EISHIROFUJIYAMA TAIZOYAMANE TSUKASA
    • G01B11/06H01L31/04
    • Y02E10/50
    • PROBLEM TO BE SOLVED: To inspect film thickness distribution and film quality of each of a plurality of stacked cell layers in a solar battery. SOLUTION: A device for evaluating a photoelectric conversion layer includes an application part 3 for applying a first beam absorbed by an amorphous film and a second beam absorbed by a crystalline film to a thin film, a detection part 2 for receiving transmitted beams of the first and second beams transmitted by the thin film, and a control part 7 for calculating film thicknesses of amorphous film components and of crystalline film components in the thin film based on the transmitted beams of the first and second beams. Where a crystalline film is stacked on an amorphous film of a substrate 11, the application part 3 applies the first and second beams as first and second application beams to the crystalline film and the amorphous film, respectively. The detection part 2 receives the first and second transmitted beams of the first and second application beams, respectively. The control part 7 calculates the first film thickness of the amorphous film based on the first transmitted beam while calculating the second film thickness of the crystalline film based on the second transmitted beam. The control part 7 evaluates the film quality of the crystalline film based on the first and second film thicknesses, and on an original film thickness of the amorphous film prior to the formation of the crystalline film. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:检查太阳能电池中的多个层叠电池层中的每一个的膜厚分布和膜质量。 解决方案:用于评估光电转换层的装置包括用于将由非晶膜吸收的第一光束和由晶体膜吸收的第二光束施加到薄膜的施加部分3,用于接收透射光束的检测部分2 的第一和第二光束透射的第一和第二光束;以及控制部分7,用于基于第一和第二光束的透射光束计算薄膜中的非晶膜部件和晶体膜部件的膜厚度。 在结晶膜堆叠在基板11的非晶膜上的情况下,施加部分3分别将第一和第二光束作为第一和第二施加光束施加到结晶膜和非晶膜。 检测部分2分别接收第一和第二施加光束的第一和第二透射光束。 控制部7基于第二透射光来计算基于第一透射光的非晶质膜的第一膜厚,同时计算结晶膜的第二膜厚。 控制部7基于第一膜厚度和第二膜厚度以及在形成结晶膜之前的非晶膜的原始膜厚度来评价结晶膜的膜质量。 版权所有(C)2008,JPO&INPIT