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    • 1. 发明专利
    • DE69709413T2
    • 2002-08-01
    • DE69709413
    • 1997-07-23
    • MITSUBISHI ELECTRIC CORP
    • SAKUMA HIROKAZUOKAMURO TAKASHISATO YOSHIMITSUNAKASHIMA TOSHIRONAKAJIMA HAJIME
    • G01B9/02G01B11/00
    • A length measuring device of this invention is provided with: a light emitting portion for emitting laser light having a frequency f; an interference system for receiving the laser light, for generating reference light having a frequency (f + f1), for outputting the reference light straight, for generating detection light having a frequency (f + f2), and for outputting the detection light at a predetermined tilt angle; a moving detection portion for reflecting the reference light and the detection light toward the interference system; a light receiving portion for converting a reference interference wave, which is generated by the interference system, into a first sinusoidal wave electrical signal according to the aforementioned laser light and for converting a detection interference wave, which is generated from an optical-path-length difference between the reflected reference light and the reflected detection light, into a second sinusoidal wave electrical signal; a signal processing portion for generating a first cosinusoidal wave signal from the aforementioned first sinusoidal wave signal, for generating a second cosinusoidal wave signal from the aforementioned second sinusoidal wave signal, and for A/D-converting the aforementioned first sinusoidal wave signal and the aforementioned first cosinusoidal wave signal, and the aforementioned second sinusoidal wave signal and the aforementioned second cosinusoidal wave signal; and an operation portion for obtaining an electrical angle of the reference interference wave according to a ratio between the aforementioned A/D-converted first sinusoidal wave data and the aforementioned A/D-converted first cosinusoidal wave data, for obtaining an electrical angle of the detection interference wave according to a ratio between the aforementioned A/D-converted second sinusoidal wave data and the aforementioned A/D-converted second cosinusoidal wave data, for obtaining a phase difference between the reference interference wave and the detection interference wave from the aforementioned two electrical angles, and for detecting a position of the moving detection portion according to this phase difference and a wavelength of the laser light. Thus, the length measuring device of this invention can achieve the high-resolution detection of position data.
    • 3. 发明专利
    • DE69709413D1
    • 2002-01-31
    • DE69709413
    • 1997-07-23
    • MITSUBISHI ELECTRIC CORP
    • SAKUMA HIROKAZUOKAMURO TAKASHISATO YOSHIMITSUNAKASHIMA TOSHIRONAKAJIMA HAJIME
    • G01B9/02G01B11/00
    • A length measuring device of this invention is provided with: a light emitting portion for emitting laser light having a frequency f; an interference system for receiving the laser light, for generating reference light having a frequency (f + f1), for outputting the reference light straight, for generating detection light having a frequency (f + f2), and for outputting the detection light at a predetermined tilt angle; a moving detection portion for reflecting the reference light and the detection light toward the interference system; a light receiving portion for converting a reference interference wave, which is generated by the interference system, into a first sinusoidal wave electrical signal according to the aforementioned laser light and for converting a detection interference wave, which is generated from an optical-path-length difference between the reflected reference light and the reflected detection light, into a second sinusoidal wave electrical signal; a signal processing portion for generating a first cosinusoidal wave signal from the aforementioned first sinusoidal wave signal, for generating a second cosinusoidal wave signal from the aforementioned second sinusoidal wave signal, and for A/D-converting the aforementioned first sinusoidal wave signal and the aforementioned first cosinusoidal wave signal, and the aforementioned second sinusoidal wave signal and the aforementioned second cosinusoidal wave signal; and an operation portion for obtaining an electrical angle of the reference interference wave according to a ratio between the aforementioned A/D-converted first sinusoidal wave data and the aforementioned A/D-converted first cosinusoidal wave data, for obtaining an electrical angle of the detection interference wave according to a ratio between the aforementioned A/D-converted second sinusoidal wave data and the aforementioned A/D-converted second cosinusoidal wave data, for obtaining a phase difference between the reference interference wave and the detection interference wave from the aforementioned two electrical angles, and for detecting a position of the moving detection portion according to this phase difference and a wavelength of the laser light. Thus, the length measuring device of this invention can achieve the high-resolution detection of position data.
    • 8. 发明公开
    • LENGTH MEASURING INSTRUMENT
    • 长度测量仪
    • EP1016849A4
    • 2000-10-04
    • EP97932993
    • 1997-07-23
    • MITSUBISHI ELECTRIC CORP
    • SAKUMA HIROKAZUOKAMURO TAKASHISATO YOSHIMITSUNAKASHIMA TOSHIRONAKAJIMA HAJIME
    • G01B9/02G01B11/00
    • G01B9/0207G01B9/02002G01B2290/45
    • A length measuring instrument is provided with a light emitting section which emits a laser beam having a frequency f, an interference system which generates and emits a reference beam having a frequency f+f1 in a straight line and a detection beam having a frequency f+f2 at a prescribed inclination angle upon receiving the laser beam, a movement detecting section which reflects the reference and detection beams toward the interference system, a light receiving section which converts a reference interference wave generated by the interference system into a first sine-wave electric signal and a detection interference wave produced by the difference in optical path length between the reflected reference and detection beams into a second sine-wave electric signal, a signal processing section which respectively generates first and second cosine-wave signals from the first and second sine-wave signals and A/D-converts the four signals, and an arithmetic section which finds the electrical angle of the reference interference wave, the electrical angle of the detection interference wave and the phase difference between the reference and detection interference waves from the two electrical angles, and determines the position of the moving detecting section based on the phase difference and the wavelength of the laser beam.