专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

CA2095068A1 LASER MACHINING APPARATUS 未知
公开(公告)号：CA2095068A1
公开(公告)日：1993-10-29
申请号：CA2095068
申请日：1993-04-28
申请人： MITSUBISHI ELECTRIC CORP
发明人： ZUMOTO NOBUYUKI , YAGI TOSHINORI , IZUMO MASAO , TANAKA MASAAKI
IPC分类号： B23K26/06 , H01L21/00 , H05K3/00 , B23K26/08
摘要： A laser machining apparatus comprises a mask, a reflecting mirror and an imaging optical system. The laser light reflected by the mask and also by the reflecting mirror passes through the mask and images on the work for machining the work. The laser machining apparatus comprises means for causing said mask to move in parallel with said work for machining the work. This laser machining apparatus is able to machine a work having a large surface using small apertured mask. Another type of laser machining apparatus comprises a mask and a platform and an imaging optical system. The mask and the work are puts in the same plane of the platform and driven so that the image of the mask is mapped on the work via the imaging optical system. The laser machining apparatus is able to machine a large area at low price and high accuracy.

2. 发明专利

DE4313796A1 未知
公开(公告)号：DE4313796A1
公开(公告)日：1993-11-04
申请号：DE4313796
申请日：1993-04-27
申请人： MITSUBISHI ELECTRIC CORP
发明人： ZUMOTO NOBUYUKI , YAGI TOSHINORI , IZUMO MASAO , TANAKA MASAAKI
IPC分类号： B23K26/06 , H01L21/00 , H05K3/00 , G02B17/08
摘要： A laser machining apparatus comprises a mask, a reflecting mirror and an imaging optical system. The laser light reflected by the mask and also by the reflecting mirror passes through the mask and images on the work for machining the work. The laser machining apparatus comprises means for causing said mask to move in parallel with said work for machining the work. This laser machining apparatus is able to machine a work having a large surface using small apertured mask. Another type of laser machining apparatus comprises a mask and a platform and an imaging optical system. The mask and the work are puts in the same plane of the platform and driven so that the image of the mask is mapped on the work via the imaging optical system. The laser machining apparatus is able to machine a large area at low price and high accuracy.

3. 发明专利

DE4106423A1 未知
公开(公告)号：DE4106423A1
公开(公告)日：1991-10-31
申请号：DE4106423
申请日：1991-02-26
申请人： MITSUBISHI ELECTRIC CORP
发明人： ZUMOTO NOBUYUKI , YAGI TOSHINORI , MYOI YASUHITO , UCHIYAMA YOSHIE , TANAKA MASAAKI , MIYAMOTO TERUO , IZUMO MASAO
IPC分类号： B23K26/06 , G03F1/00 , G03F7/20 , H05K3/00

4. 发明专利

DE4217811C2 未知
公开(公告)号：DE4217811C2
公开(公告)日：1996-01-25
申请号：DE4217811
申请日：1992-05-29
申请人： MITSUBISHI ELECTRIC CORP
发明人： ZUMOTO NOBUYUKI , YAGI TOSHINORI , MYOI YASUHITO , MIYAMOTO TERUO , TANAKA MASAAKI , IZUMO MASAO
IPC分类号： B23K26/382 , B23K26/066 , G03F1/00 , G03F1/68 , G03F7/20 , H01S3/101 , H05K3/00 , B23K26/06 , G02B5/08
摘要： An optical processing apparatus utilizing multiple reflections of a light beam between a mask and a reflector has improved uniformity in the distribution of the light beam over a surface of the mask. In one form, the reflector is disposed in a face-to-face relation with respect to the mask with an angle of inclination relative thereto. In another form, the reflector has a flat or curved taper surface for decreasing an angle of reflection of the light beam at the mask surface at an initial stage, and a flat surface disposed in parallel with the mask surface. In a further form, the reflector is curved in a direction of transmission of the light beam. In a yet further form, an angle of incidence of the light beam is properly adjusted such that a portion of the light beam, which is first reflected from the mask and escapes outwardly from the reflector, is minimized.

5. 发明专利

CA2037063A1 Optical Machining Apparatus 未知
公开(公告)号：CA2037063A1
公开(公告)日：1991-10-29
申请号：CA2037063
申请日：1991-02-26
申请人： MITSUBISHI ELECTRIC CORP
发明人： ZUMOTO NOBUYUKI , YAGI TOSHINORI , MYOI YASUHITO , UCHIYAMA YOSHIE , TANAKA MASAAKI , MIYAMOTO TERUO , IZUMO MASAO
IPC分类号： B23K26/06 , G03F1/00 , G03F7/20 , H05K3/00

6. 发明专利

DE19520213C2 未知
公开(公告)号：DE19520213C2
公开(公告)日：1997-05-15
申请号：DE19520213
申请日：1995-06-01
申请人： MITSUBISHI ELECTRIC CORP
发明人： NAKATANI HAJIME , SUGITATSU ATSUSHI , IZUMO MASAO , MINAGAWA TADAO , MINAMITANI YASUSHI , MATSUSHITA YOSHIFUMI , YAGI TOSHINORI , ZUMOTO NOBUYUKI
IPC分类号： B23K26/064 , B23K26/00 , B23K26/066 , H05K3/00 , H05K3/46 , B23K26/06
摘要： An optical processing apparatus for processing optically a workpiece (7) by using a light beam (B). The apparatus is capable of automatically adjusting a imaging magnification to a predetermined value and at the same time maintaining constant a imaging magnification regardless of exchange of masks (3; 100) and workpieces (7) and for ensuring an extended use life of a mask with satisfactory mask function. The apparatus includes a light source system (1) for generating a light beam (B) for illuminating a mask (3; 100) having a predetermined pattern, a imaging lens (5) for copying a pattern image of the mask (3; 100) onto a workpiece (7), a mask moving mechanism (4) for moving the mask in a direction perpendicular to an optical axis (L) of the imaging lens (5), a workpiece moving mechanism for moving the workpiece in a direction perpendicular to the optical axis (L) of the imaging lens (5), a imaging magnification changing mechanism for changing inter-mask/lens/workpiece distance between the mask, the imaging lens and the workpiece, and a central control unit (9) which is comprised of an actual imaging magnification arithmetic module (91) for determining an actual imaging magnification value (M') in terms of a ratio between the copied pattern image and a predetermined pattern, a magnification decision module (92) for making decision whether or not a difference between the actual imaging magnification value and a desired imaging magnification value is smaller than a permissible value, an optical-axis displacement control module (93) responsive to indication that the difference exceeds a permissible value ( delta ) to thereby arithmetically determine on the basis of the actual and desired imaging magnification values the inter-mask/lens/workpiece distance at which the actual imaging magnification value (M') becomes equal to the desired imaging magnification value (M) for controlling thereby the imaging magnification changing mechanism so that the inter-mask/lens/workpiece distance coincides with the arithmetically determined distance, and a displacement control module for controlling the mask moving mechanism and the workpiece moving mechanism.

7. 发明专利

DE4313796C2 未知
公开(公告)号：DE4313796C2
公开(公告)日：1996-01-25
申请号：DE4313796
申请日：1993-04-27
申请人： MITSUBISHI ELECTRIC CORP
发明人： ZUMOTO NOBUYUKI , YAGI TOSHINORI , IZUMO MASAO , TANAKA MASAAKI
IPC分类号： B23K26/06 , H01L21/00 , H05K3/00 , G02B17/08
摘要： A laser machining apparatus comprises a mask, a reflecting mirror and an imaging optical system. The laser light reflected by the mask and also by the reflecting mirror passes through the mask and images on the work for machining the work. The laser machining apparatus comprises means for causing said mask to move in parallel with said work for machining the work. This laser machining apparatus is able to machine a work having a large surface using small apertured mask. Another type of laser machining apparatus comprises a mask and a platform and an imaging optical system. The mask and the work are puts in the same plane of the platform and driven so that the image of the mask is mapped on the work via the imaging optical system. The laser machining apparatus is able to machine a large area at low price and high accuracy.

8. 发明专利

DE19520213A1 The method and appts for optical processing of workpieces 未知
公开(公告)号：DE19520213A1
公开(公告)日：1995-12-07
申请号：DE19520213
申请日：1995-06-01
申请人： MITSUBISHI ELECTRIC CORP
发明人： NAKATANI HAJIME , SUGITATSU ATSUSHI , IZUMO MASAO , MINAGAWA TADAO , MINAMITANI YASUSHI , MATSUSHITA YOSHIFUMI , YAGI TOSHINORI , ZUMOTO NOBUYUKI
IPC分类号： B23K26/064 , B23K26/00 , B23K26/066 , H05K3/00 , H05K3/46 , B23K26/06
摘要： The appts. comprises: (a) a light source (1); (b) a mask (3); (c) a lens (5) for projecting the mask pattern onto a workpiece (7); (d) mechanisms (4,6) for moving respectively the mask and the workpiece perpendicular to the axis (L), mechanisms (51,61) for altering the image magnification; and (e) a central control unit (9). This unit includes a computer module for determining the actual image magnification, a magnification decision module, a module for controlling the mechanisms (51,61), and a module for controlling the mechanisms (4,6). Image magnification (with the use of a test pattern) is determined by a sequence of procedural steps in which displacement of the workpiece, pattern observation, and computation alternate with one another.

9. 发明专利

CA2037063C OPTICAL MACHINING APPARATUS 未知
公开(公告)号：CA2037063C
公开(公告)日：1995-01-17
申请号：CA2037063
申请日：1991-02-26
申请人： MITSUBISHI ELECTRIC CORP
发明人： ZUMOTO NOBUYUKI , YAGI TOSHINORI , MYOI YASUHITO , UCHIYAMA YOSHIE , TANAKA MASAAKI , MIYAMOTO TERUO , IZUMO MASAO
IPC分类号： B23K26/06 , G03F1/00 , G03F7/20 , H05K3/00
摘要： An optical machining apparatus for irradiating light from a light source onto a surface to be machined, to form a grooves in said surface, comprises a mask disposed in the path of light from said light source to said surface, and having reflective parts for reflecting the light from said light source on a first surface on which it receives the light from said light source, and reflection member for returning the light reflected at the reflective parts of the mask toward the mask. In another form, the optical machining apparatus comprises a plurality of converging means for converging the light from the light source onto said surface.

10. 发明专利

CA2149949C OPTICAL PROCESSING METHOD AND APPARATUS FOR CARRYING OUT THE SAME 未知
公开(公告)号：CA2149949C
公开(公告)日：1998-10-27
申请号：CA2149949
申请日：1995-05-23
申请人： MITSUBISHI ELECTRIC CORP
发明人： NAKATANI HAJIME , SUGITATSU ATSUSHI , IZUMO MASAO , MINAGAWA TADAO , MINAMITANI YASUSHI , MATSUSHITA YOSHIFUMI , YAGI TOSHINORI , ZUMOTO NOBUYUKI
IPC分类号： B23K26/064 , B23K26/00 , B23K26/066 , H05K3/00 , H05K3/46
摘要： An optical processing apparatus for processing optically a workpiece by using a light beam. The apparatus is capable of automatically adjusting an imaging magnification to a predetermined value and at the same time maintaining constant an imaging magnification regardless of exchange of masks and workpiece and for ensuring an extended use life of a mask with satisfactory mask function. The apparatus includes a light source system for generating a light beam for illuminating a mask having a predetermined pattern, an imaging lens for copying a pattern image of the mask onto a workpiece, a mask-moving mechanism for moving the mask in a direction perpendicular to an optical axis of the imaging lens, a workpiece-moving mechanism for moving the workpiece in a direction perpendicular to the optical axis of the imaging lens, an imaging-magnification changing mechanism for changing inter-mask/lens/workpiece distance between the mask, the imaging lens and the workpiece, and a central control unit which is comprised of an actual-imaging magnification arithmetic module for determining an actual-imaging magnification value in terms of a ratio between the copied-pattern image and a predetermined pattern, a magnification-decision module for making decision whether or not a difference between the actual-imaging magnification value and a desired-imaging magnification value is smaller than a permissible value, an optical-axis displacement control module responsive to indication that the difference exceeds a permissible value thereby to arithmetically determine on the basis of the actual and desired imaging magnification values the inter-mask/lens/workpiece distance at which the actual-imaging magnification value becomes equal to the desired imaging magnification value for controlling thereby the imaging-magnification changing mechanism so that the inter-mask/lens/workpiece distance coincides with the arithmetically-determined distance, and a displacement control module for controlling the mask-moving mechanism and the workpiece-moving mechanism.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式