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    • 6. 发明专利
    • FLUIDIC GAS SHUTTING APPARATUS
    • JPH06123645A
    • 1994-05-06
    • JP27126492
    • 1992-10-09
    • MATSUSHITA ELECTRIC IND CO LTDTOKYO GAS CO LTDOSAKA GAS CO LTDTOHO GAS KK
    • UEKI KOICHITAKEMURA KOICHIUEKI TAKASHISAKAI KATSUTOOKAMURA SHIGENORISATO YASUOKIMURA YUKIO
    • G01F1/20
    • PURPOSE:To measure the flow rate of a fluid with a single sensor without being influenced by the temperature of the fluid, by automatically adjusting the width of a jetting nozzle of a fluidic oscillator element to be an optimum value in accordance with the oscillating frequency. CONSTITUTION:The width of a jet flow of a fluidic oscillator element 2 is set at a default value beforehand. When a gas is started to be used, the element 25 oscillates the fluid by the Coanda effect. The oscillating frequency of the fluid is detected at 26. A width controlling means 27 detects whether the oscillating frequency is not smaller than a predetermined value. If the frequency is not smaller than a predetermined value, a width variable means 28 is urged, so that the width of a jetting nozzle of the element 25 is automatically varied. At the same time, the position of the variable means 28 is detected at 27b. When the position becomes a set value, the variable means 28 is stopped to be moved and held at the position. The flow rate is obtained at 29 from the detected oscillating frequency at 26, and an integrated value of the flow rate of the used gas is obtained by an integrated flow rate operating means 30. A judging means 31 judges the using state of the gas from the flow rate and the integrated flow rate. If the using state is abnormal, the judging means 31 activates a shutting means 33, thereby, to stop the supply of gas.