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    • 6. 发明授权
    • Method, structures and method of designing reduced delamination integrated circuits
    • 减少分层集成电路的设计方法,结构和方法
    • US09245083B2
    • 2016-01-26
    • US13272395
    • 2011-10-13
    • Mark C. H. LamoreyDavid B. Stone
    • Mark C. H. LamoreyDavid B. Stone
    • H01L23/48G06F17/50H01L21/768H01L23/522
    • G06F17/5077H01L21/76883H01L23/522H01L2224/11H01L2924/0002H01L2924/00
    • An integrated circuit wire structure. The structure includes a set of interconnect levels over a semiconductor substrate, each interconnect level of the set of interconnect levels comprising operational wires embedded in an interlevel dielectric layer; a dielectric barrier layer on an uppermost interconnect level of the set of interconnect levels and a bonding pad on the passivation layer; a stress reduction zone surrounding a perimeter of the bonding pad and extending into the set of interconnect levels; elongated fill wires in each of the interconnect levels in the stress reduction zone, the elongated fill wires not connected to any of the non-ground operational wires; and the elongated fill wires of each interconnect level of each set of interconnect levels physically connected to elongated fill wires of immediately upper and lower interconnect levels of the set of fill levels.
    • 集成电路线结构。 该结构包括半导体衬底上的一组互连电平,该组互连电平的每个互连电平包括嵌入在层间电介质层中的操作线; 在所述一组互连级别的最上层互连层上的绝缘阻挡层和所述钝化层上的接合焊盘; 围绕所述焊盘的周边并延伸到所述一组互连级别的应力减小区; 在应力减小区域中的每个互连级别中的细长填充线,所述细长填充线不连接到任何非接地操作线; 并且每组互连级别的每个互连级别的细长填充线物理地连接到该组填充级别的立即上部和下部互连级别的细长填充线。
    • 9. 发明申请
    • METHOD, STRUCTURES AND METHOD OF DESIGNING REDUCED DELAMINATION INTEGRATED CIRCUITS
    • 方法,结构和设计减少分层集成电路的方法
    • US20150206835A1
    • 2015-07-23
    • US13272395
    • 2011-10-13
    • Mark C. H. LamoreyDavid B. Stone
    • Mark C. H. LamoreyDavid B. Stone
    • H01L23/528G06F17/50H01L21/768
    • G06F17/5077H01L21/76883H01L23/522H01L2224/11H01L2924/0002H01L2924/00
    • An integrated circuit wire structure. The structure includes a set of interconnect levels over a semiconductor substrate, each interconnect level of the set of interconnect levels comprising operational wires embedded in an interlevel dielectric layer; a dielectric barrier layer on an uppermost interconnect level of the set of interconnect levels and a bonding pad on the passivation layer; a stress reduction zone surrounding a perimeter of the bonding pad and extending into the set of interconnect levels; elongated fill wires in each of the interconnect levels in the stress reduction zone, the elongated fill wires not connected to any of the non-ground operational wires; and the elongated fill wires of each interconnect level of each set of interconnect levels physically connected to elongated fill wires of immediately upper and lower interconnect levels of the set of fill levels.
    • 集成电路线结构。 该结构包括半导体衬底上的一组互连电平,该组互连电平的每个互连电平包括嵌入在层间电介质层中的操作线; 在所述一组互连级别的最上层互连层上的绝缘阻挡层和所述钝化层上的接合焊盘; 围绕所述焊盘的周边并延伸到所述一组互连级别的应力减小区; 在应力减小区域中的每个互连级别中的细长填充线,所述细长填充线不连接到任何非接地操作线; 并且每组互连级别的每个互连级别的细长填充线物理地连接到该组填充级别的立即上部和下部互连级别的细长填充线。