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    • 5. 发明授权
    • Method for fabricating GaN substrate
    • 制造GaN衬底的方法
    • US06211089B1
    • 2001-04-03
    • US09400294
    • 1999-09-21
    • Chin Kyo KimJae Hyung Yi
    • Chin Kyo KimJae Hyung Yi
    • H01L21302
    • H01L21/02008H01L21/30621H01L21/3245
    • Disclosed is a method for fabricating a smoothly surfaced GaN substrate. A GaN substrate is polished with diamond slurries and then, with boron carbide plates. The irreversible damaged layer which is caused by the mechanical polishing is removed by reactive ion etching, after which the GaN substrate is thermally treated to revive the recoverable damaged layer which is owed to the reactive ion etching. The resulting GaN substrate has a sufficiently smooth surface to allow subsequent thin films of high quality to grow thereon. Based on the GaN substrate of the present invention, blue light elements with excellent properties can be fabricated.
    • 公开了一种用于制造平滑表面的GaN衬底的方法。 用金刚石浆料抛光GaN衬底,然后用碳化硼板抛光。 通过反应离子蚀刻除去由机械抛光引起的不可逆损伤层,然后对GaN衬底进行热处理以恢复可归因于反应离子蚀刻的可恢复损伤层。 所得的GaN衬底具有足够光滑的表面,以允许后续的高质量薄膜在其上生长。 基于本发明的GaN衬底,可以制造具有优异性能的蓝光元件。