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    • 1. 发明授权
    • Flexible row redundancy system
    • 灵活的行冗余系统
    • US07774660B2
    • 2010-08-10
    • US12131307
    • 2008-06-02
    • Louis L. HsuGregory J. FredemanRajiv V. JoshiToshiaki Kirihata
    • Louis L. HsuGregory J. FredemanRajiv V. JoshiToshiaki Kirihata
    • G11C29/00
    • G11C29/808
    • A row redundancy system is provided for replacing faulty wordlines of a memory array having a plurality of banks. The row redundancy system includes a remote fuse bay storing at least one faulty address corresponding to a faulty wordline of the memory array; a row fuse array for storing row fuse information corresponding to at least one bank of the memory array; and a copy logic module for copying at least one faulty address stored in the remote fuse bay into the row fuse array; wherein the copy logic module is programmed to copy the at least one faulty address into the row fuse information stored in the row fuse array corresponding to a predetermined number of banks in accordance with a selectable repair field size.
    • 提供了一种用于替换具有多个存储体的存储器阵列的有缺陷的字线的行冗余系统。 行冗余系统包括存储与存储器阵列的故障字线相对应的至少一个故障地址的远程熔丝架; 用于存储对应于所述存储器阵列的至少一个组的行熔丝信息的行熔丝阵列; 以及复制逻辑模块,用于将存储在所述远程保险丝盒中的至少一个故障地址复制到所述行保险丝阵列中; 其中所述复制逻辑模块被编程为根据可选择的修复字段大小将所述至少一个故障地址复制到对应于预定数量的存储体的行熔丝阵列中的行熔丝信息。
    • 2. 发明授权
    • Column redundancy architecture system for an embedded DRAM
    • 用于嵌入式DRAM的列冗余架构系统
    • US06445626B1
    • 2002-09-03
    • US09821443
    • 2001-03-29
    • Louis L. HsuRajiv V. JoshiGregory J. Fredeman
    • Louis L. HsuRajiv V. JoshiGregory J. Fredeman
    • G11C700
    • G11C29/848G11C29/846G11C2207/104
    • A column redundancy architecture system for an embedded DRAM (eDRAM) having a wide data bandwidth and wide internal bus width is disclosed which provides column redundancy to defective datalines of the eDRAM. Internally generated column addresses of defective columns of each micro cell block are stored in a memory device during eDRAM array testing. Two redundancy reroute mechanisms are disclosed. The first redundancy reroute mechanism selects at least one defective dataline of the eDRAM and directly replaces the defective dataline(s) with at least one redundancy dataline. The second redundancy reroute mechanism discards the defective dataline column and replaces it with an adjacent dataline column. The dataline columns following the defective dataline column are then replaced with the next adjacent dataline columns including a redundancy dataline column.
    • 公开了一种具有宽数据带宽和宽内部总线宽度的嵌入式DRAM(eDRAM)的列冗余架构系统,其为eDRAM的缺陷数据库提供列冗余。 在eDRAM阵列测试期间,每个微单元块的内部生成的列地址存储在存储器件中。 公开了两种冗余重路由机制。 第一个冗余重路由机制选择eDRAM的至少一个有缺陷的数据库,并用至少一个冗余数据线直接替换有缺陷的数据库。 第二个冗余重路由机制丢弃有缺陷的数据列,并用相邻的数据列替换它。 随后,数据线列中的数据栏将被替换为包含冗余数据列的下一个相邻的数据列。
    • 3. 发明申请
    • FLEXIBLE ROW REDUNDANCY SYSTEM
    • 灵活的冗余系统
    • US20080229144A1
    • 2008-09-18
    • US12131307
    • 2008-06-02
    • Louis L. HsuGregory J. FredemanRajiv V. JoshiToshiaki Kirihata
    • Louis L. HsuGregory J. FredemanRajiv V. JoshiToshiaki Kirihata
    • G06F11/00
    • G11C29/808
    • A row redundancy system is provided for replacing faulty wordlines of a memory array having a plurality of banks. The row redundancy system includes a remote fuse bay storing at least one faulty address corresponding to a faulty wordline of the memory array; a row fuse array for storing row fuse information corresponding to at least one bank of the memory array; and a copy logic module for copying at least one faulty address stored in the remote fuse bay into the row fuse array; wherein the copy logic module is programmed to copy the at least one faulty address into the row fuse information stored in the row fuse array corresponding to a predetermined number of banks in accordance with a selectable repair field size.
    • 提供了一种用于替换具有多个存储体的存储器阵列的有缺陷的字线的行冗余系统。 行冗余系统包括存储与存储器阵列的故障字线相对应的至少一个故障地址的远程熔丝架; 用于存储对应于所述存储器阵列的至少一个组的行熔丝信息的行熔丝阵列; 以及复制逻辑模块,用于将存储在所述远程保险丝盒中的至少一个故障地址复制到所述行保险丝阵列中; 其中所述复制逻辑模块被编程为根据可选择的修复字段大小将所述至少一个故障地址复制到对应于预定数量的存储体的行熔丝阵列中的行熔丝信息。
    • 4. 发明授权
    • Flexible row redundancy system
    • 灵活的行冗余系统
    • US07404113B2
    • 2008-07-22
    • US11031138
    • 2005-01-07
    • Louis L. HsuGregory J. FredemanRajiv V. JoshiToshiaki Kirihata
    • Louis L. HsuGregory J. FredemanRajiv V. JoshiToshiaki Kirihata
    • G11C29/00
    • G11C29/808
    • A row redundancy system is provided for replacing faulty wordlines of a memory array having a plurality of banks. The row redundancy system includes a remote fuse bay storing at least one faulty address corresponding to a faulty wordline of the memory array; a row fuse array for storing row fuse information corresponding to at least one bank of the memory array; and a copy logic module for copying at least one faulty address stored in the remote fuse bay into the row fuse array; the copy logic module is programmed to copy the at least one faulty address into the row fuse information stored in the row fuse array corresponding to a predetermined number of banks in accordance with a selectable repair field size.
    • 提供了一种用于替换具有多个存储体的存储器阵列的有缺陷的字线的行冗余系统。 行冗余系统包括存储与存储器阵列的故障字线相对应的至少一个故障地址的远程熔丝架; 用于存储对应于所述存储器阵列的至少一个组的行熔丝信息的行熔丝阵列; 以及复制逻辑模块,用于将存储在所述远程保险丝盒中的至少一个故障地址复制到所述行保险丝阵列中; 复制逻辑模块被编程为根据可选择的修复字段大小将至少一个故障地址复制到存储在对应于预定数量的存储体的行熔丝阵列中的行熔丝信息中。
    • 5. 发明授权
    • Flexible row redundancy system
    • 灵活的行冗余系统
    • US07093171B2
    • 2006-08-15
    • US10115348
    • 2002-04-03
    • Louis L. HsuGregory J. FredemanRajiv V. JoshiToshiaki Kirihata
    • Louis L. HsuGregory J. FredemanRajiv V. JoshiToshiaki Kirihata
    • G11C29/00
    • G11C29/808
    • A row redundancy system is provided for replacing faulty wordlines of a memory array having a plurality of banks. The row redundancy system includes a remote fuse bay storing at least one faulty address corresponding to a faulty wordline of the memory array; a row fuse array for storing row fuse information corresponding to at least one bank of the memory array; and a copy logic module for copying at least one faulty address stored in the remote fuse bay into the row fuse array; the copy logic module is programmed to copy the at least one faulty address into the row fuse information stored in the row fuse array corresponding to a predetermined number of banks in accordance with a selectable repair field size.
    • 提供了一种用于替换具有多个存储体的存储器阵列的有缺陷的字线的行冗余系统。 行冗余系统包括存储与存储器阵列的故障字线相对应的至少一个故障地址的远程熔丝架; 用于存储对应于所述存储器阵列的至少一个组的行熔丝信息的行熔丝阵列; 以及复制逻辑模块,用于将存储在所述远程保险丝盒中的至少一个故障地址复制到所述行保险丝阵列中; 复制逻辑模块被编程为根据可选择的修复字段大小将至少一个故障地址复制到存储在对应于预定数量的存储体的行熔丝阵列中的行熔丝信息中。
    • 6. 发明授权
    • Techniques for impeding reverse engineering
    • 阻止逆向工程的技术
    • US07994042B2
    • 2011-08-09
    • US11924735
    • 2007-10-26
    • Louis L. HsuRajiv V. JoshiDavid W. Kruger
    • Louis L. HsuRajiv V. JoshiDavid W. Kruger
    • H01L21/00
    • H01L21/76816H01L21/76825H01L21/76831H01L21/76834H01L23/573H01L27/02H01L27/0203H01L2924/0002H01L2924/00
    • Anti-reverse engineering techniques are provided. In one aspect, a method for forming at least one feature in an insulating layer is provided. The method comprises the following steps. Ions are selectively implanted in the insulating layer so as to form at least one implant region within the insulating layer, the implanted ions being configured to alter an etch rate through the insulating layer within the implant region. The insulating layer is etched to, at the same time, form at least one void both within the implant region and outside of the implant region, wherein the etch rate through the insulating layer within the implant region is different from an etch rate through the insulating layer outside of the implant region. The void is filled with at least one conductor material to form the feature in the insulating layer.
    • 提供了反逆向工程技术。 一方面,提供了一种在绝缘层中形成至少一个特征的方法。 该方法包括以下步骤。 离子选择性地植入绝缘层中,以在绝缘层内形成至少一个注入区域,所述注入离子被配置为改变通过植入区域内的绝缘层的蚀刻速率。 蚀刻绝缘层,同时在植入区域内和植入区域外部形成至少一个空隙,其中通过绝缘层在植入区域内的蚀刻速率与通过绝缘体的蚀刻速率不同 在植入区域外侧。 空隙填充有至少一种导体材料以在绝缘层中形成特征。
    • 10. 发明授权
    • Refractory metal capped low resistivity metal conductor lines and vias
    • 耐火金属封盖的低电阻金属导线和通孔
    • US5300813A
    • 1994-04-05
    • US841967
    • 1992-02-26
    • Rajiv V. JoshiJerome J. CuomoHormazdyar M. DalalLouis L. Hsu
    • Rajiv V. JoshiJerome J. CuomoHormazdyar M. DalalLouis L. Hsu
    • H01L21/28H01L21/312H01L21/316H01L21/318H01L21/768H01L23/498H01L23/522H01L23/532H01L29/440H01L29/460
    • H01L21/76843H01L21/76838H01L21/7684H01L21/76847H01L21/76849H01L21/76852H01L21/76877H01L23/49866H01L23/53223H01L23/53228H01L23/53233H01L23/53238H01L2924/0002H01L2924/09701Y10S148/015Y10S257/915Y10S438/959
    • A contact structure for a semiconductor device having a first refractory metal layer formed only at the bottom of a contact hole. The first refractory metal is selected from a group comprising titanium (Ti), titanium alloys or compounds such as Ti/TiN, tungsten (W), titanium/tungsten (Ti/W) alloys, or chromium (Cr) or tantalum (Ta) and their alloys or some other suitable material. A low resistivity layer comprising a single, binary or ternary metalization is deposited over the first refractory metal layer in the contact hole by a method such as PVD using evaporation or collimated sputtering. The low resistivity layer has side walls which taper inwardly toward one another with increasing height of the layer and the low resistivity layer does not contact the side walls of the contact hole. The low resistivity layer may be Al.sub.x Cu.sub.y (x+y=1; x.gtoreq.0, y.gtoreq.0), ternary alloys such as Al-Pd-Cu or multicomponent alloys such as Al-Pd-Nb-Au. A second refractory metal layer is deposited over the low resistivity layer. The second refractory metal layer may be tungsten, cobalt, nickel, molybdenum or alloys/compounds such as Ti/TiN. The first and second refractory metal layers completely encapsulate the low resistivity layer. The first and second refractory metal layers can comprise an alloy containing silicon with a higher incorporated silicon content near the top of the contact hold present as a distinct or graded composition than at a location closer to the bottom of the contact hole.
    • 一种用于半导体器件的接触结构,其具有仅在接触孔的底部形成的第一难熔金属层。 第一难熔金属选自钛(Ti),钛合金或Ti / TiN,钨(W),钛/钨(Ti / W)合金或铬(Cr)或钽(Ta) 及其合金或其他合适的材料。 包含单一二元或三元金属化的低电阻率层通过诸如使用蒸发或准直溅射的PVD的方法沉积在接触孔中的第一难熔金属层上。 低电阻率层具有随着层的高度逐渐向内逐渐向内逐渐变细的侧壁,低电阻层不接触接触孔的侧壁。 低电阻率层可以是AlxCuy(x + y = 1; x> = 0,y> = 0),诸如Al-Pd-Cu的三元合金或诸如Al-Pd-Nb-Au的多组分合金。 在低电阻率层上沉积第二难熔金属层。 第二耐火金属层可以是钨,钴,镍,钼或诸如Ti / TiN的合金/化合物。 第一和第二难熔金属层完全封装低电阻率层。 第一和第二难熔金属层可以包含含有硅的合金,其中接合保持层的顶部附近具有更高的掺入硅含量,作为不同或分级的组成,而不是靠近接触孔底部的位置。