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1. 发明授权

US06891313B1 Electrode contact for a piezoceramic actuator and method for producing same 失效
标题翻译：用于压电陶瓷致动器的电极接触件及其制造方法
公开(公告)号：US06891313B1
公开(公告)日：2005-05-10
申请号：US10049181
申请日：2000-08-02
申请人： Lothar Henneken , Armin Glock , Juergen Hackenberg
发明人： Lothar Henneken , Armin Glock , Juergen Hackenberg
IPC分类号： H01L41/047 , H01L41/083 , H01L41/22 , H02N2/04 , H01L41/08
CPC分类号： H01L41/0471 , H01L41/297
摘要： A piezoceramic actuator includes a monolithic stack of thin piezoceramic films having internal electrodes arranged between the films, and rail-like elements electrochemically shaped onto the internal electrodes on outer sides of the stack. The internal electrodes can thereby be interconnected, via a suitable conductive element, in electrically conductive fashion at a certain distance from the side edges of the piezoceramic films so that these films form a continuous planar electrically conductive ribbon.
摘要翻译：压电陶瓷致动器包括具有布置在膜之间的内部电极的薄压电陶瓷膜的单片堆叠，以及电化学形成在堆叠的外侧上的内部电极上的轨道状元件。因此，内部电极可以通过合适的导电元件以与压电陶瓷膜的侧边缘一定距离的导电方式相互连接，使得这些膜形成连续的平面导电带。

2. 发明申请

US20060169751A1 Method for depositing an adhesion-promoting layer on a metallic layer of a chip 审中-公开
公开(公告)号：US20060169751A1
公开(公告)日：2006-08-03
申请号：US11394983
申请日：2006-03-31
申请人： Lothar Henneken , Silvan Hippchen
发明人： Lothar Henneken , Silvan Hippchen
IPC分类号： B23K1/20 , B23K31/02
CPC分类号： H01L24/05 , H01L24/03 , H01L2224/02166 , H01L2224/0346 , H01L2224/05022 , H01L2224/05027 , H01L2224/05083 , H01L2224/05124 , H01L2224/05155 , H01L2224/05562 , H01L2224/05624 , H01L2224/05644 , H01L2224/05647 , H01L2924/00013 , H01L2924/0002 , H01L2924/01012 , H01L2924/01013 , H01L2924/01014 , H01L2924/0102 , H01L2924/01023 , H01L2924/01028 , H01L2924/01029 , H01L2924/0103 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/10253 , H01L2924/30105 , H01L2924/30107 , H01L2924/00014 , H01L2224/13099 , H01L2224/05099 , H01L2224/13599 , H01L2224/05599 , H01L2224/29099 , H01L2224/29599 , H01L2924/00 , H01L2224/05552
摘要： A method for depositing an adhesion-promoting layer on a spatially bounded metallic layer of a silicon chip is provided. The adhesion-promoting layer is deposited, using at least one wet-chemical process. During the wet-chemical process, the concentration of an inhibitor of a multi-component process bath is checked in at least approximately continuous manner and adjusted to a constant value. The adjustment of the inhibitor concentration is independent of the adjustment of the concentrations of other process-bath components.

3. 发明授权

US06573639B1 Piezoelectric actuator 失效
标题翻译：压电执行器
公开(公告)号：US06573639B1
公开(公告)日：2003-06-03
申请号：US09937459
申请日：2001-12-31
申请人： Rudolf Heinz , Lothar Henneken
发明人： Rudolf Heinz , Lothar Henneken
IPC分类号： H01L4108
CPC分类号： H01L41/0472 , H01L41/0478
摘要： A piezoelectric actuator has a plurality of disks made of piezoelectric material, arranged to form a stack in a stack direction, a plurality of flat inside electrodes arranged in alternation with the disks made of piezoelectric material, and at least two outside electrodes applied to the outside of the stack along the stack direction, the inside electrodes each being connected in alternation to one of the outside electrodes by a contact zone. The outside electrodes are applied to the outside of the stack in the form of a coating of an elastic, electrically conductive polymer material.
摘要翻译：压电致动器具有多个由压电材料构成的盘，其被布置为沿堆叠方向形成堆叠;多个平面内部电极，与由压电材料制成的盘交替布置;以及至少两个外部电极施加到外部沿着堆叠方向的堆叠，内部电极各自通过接触区域交替地与外部电极中的一个连接。外部电极以弹性导电聚合物材料的涂层的形式施加到堆叠的外部。

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