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1. 发明授权

US08450820B2 Radiation detector 有权
标题翻译：辐射检测器
公开(公告)号：US08450820B2
公开(公告)日：2013-05-28
申请号：US13006305
申请日：2011-01-13
申请人： Lis Karen Nanver , Thomas Ludovicus Maria Scholtes , Agata {hacek over (S)}akić , Cornelis Sander Kooijman , Gerard Nicolaas Anne van Veen
发明人： Lis Karen Nanver , Thomas Ludovicus Maria Scholtes , Agata {hacek over (S)}akić , Cornelis Sander Kooijman , Gerard Nicolaas Anne van Veen
IPC分类号： H01L31/0224
CPC分类号： H01L31/1185 , H01J37/244 , H01L31/022408 , H01L31/105
摘要： The invention discloses a process for manufacturing a radiation detector for detecting e.g. 200 eV electrons. This makes the detector suited for e.g. use in an Scanning Electron Microscope. The detector is a PIN photodiode with a thin layer of pure boron connected to the p+-diffusion layer. The boron layer is connected to an electrode with an aluminium grid to form a path of low electrical resistance between each given point of the boron layer and the electrode. The invention addresses forming the aluminium grid on the boron layer without damaging the boron layer. To that end the grid of aluminium is formed by covering the boron layer completely with a layer of aluminium and then removing part of the layer of aluminium by etching, the etching comprising a first step (304) of dry etching, the step of dry etching defining the grid but leaving a thin layer of aluminium on the part of the boron layer to be exposed, followed by a second step (308) of wet etching, the step of wet etching completely removing the aluminium from the part of the boron layer to be exposed.
摘要翻译：本发明公开了一种用于制造辐射探测器的方法， 200 eV电子。这使得检测器适合于例如。用于扫描电子显微镜。检测器是PIN光电二极管，具有连接到p +扩散层的纯硼薄层。硼层与具有铝格栅的电极连接，以在硼层的每个给定点和电极之间形成低电阻的路径。本发明涉及在硼层上形成铝格栅而不损坏硼层。为此，通过用一层铝完全覆盖硼层，然后通过蚀刻去除铝的一部分来形成铝格栅，该蚀刻包括干蚀刻的第一步骤（304），干蚀刻步骤限定栅格，但在待暴露的硼层的一部分上留下薄的铝层，随后进行湿式蚀刻的第二步骤（308），将从硼层的一部分完全除去铝的步骤被暴露

2. 发明申请

US20110169116A1 Radiation Detector 有权
标题翻译：辐射检测器
公开(公告)号：US20110169116A1
公开(公告)日：2011-07-14
申请号：US13006305
申请日：2011-01-13
申请人： Lis Karen Nanver , Thomas Ludovicus Maria Scholtes , Agata Sakic , Cornelis Sander Kooijman , Gerard Nicolaas Anne van Veen
发明人： Lis Karen Nanver , Thomas Ludovicus Maria Scholtes , Agata Sakic , Cornelis Sander Kooijman , Gerard Nicolaas Anne van Veen
IPC分类号： H01L31/0224 , H01L31/18
CPC分类号： H01L31/1185 , H01J37/244 , H01L31/022408 , H01L31/105
摘要： The invention discloses a process for manufacturing a radiation detector for detecting e.g. 200 eV electrons. This makes the detector suited for e.g. use in an Scanning Electron Microscope. The detector is a PIN photodiode with a thin layer of pure boron connected to the p+-diffusion layer. The boron layer is connected to an electrode with an aluminium grid to form a path of low electrical resistance between each given point of the boron layer and the electrode. The invention addresses forming the aluminium grid on the boron layer without damaging the boron layer. To that end the grid of aluminium is formed by covering the boron layer completely with a layer of aluminium and then removing part of the layer of aluminium by etching, the etching comprising a first step (304) of dry etching, the step of dry etching defining the grid but leaving a thin layer of aluminium on the part of the boron layer to be exposed, followed by a second step (308) of wet etching, the step of wet etching completely removing the aluminium from the part of the boron layer to be exposed.
摘要翻译：本发明公开了一种用于制造辐射探测器的方法， 200 eV电子。这使得检测器适合于例如。用于扫描电子显微镜。检测器是PIN光电二极管，具有连接到p +扩散层的纯硼薄层。硼层与具有铝格栅的电极连接，以在硼层的每个给定点和电极之间形成低电阻的路径。本发明涉及在硼层上形成铝格栅而不损坏硼层。为此，通过用一层铝完全覆盖硼层，然后通过蚀刻去除铝的一部分来形成铝格栅，该蚀刻包括干蚀刻的第一步骤（304），干蚀刻步骤限定栅格，但在待暴露的硼层的一部分上留下薄的铝层，随后进行湿式蚀刻的第二步骤（308），将从硼层的一部分完全除去铝的步骤被暴露

3. 发明授权

US08748816B2 Clustering of multi-modal data 有权
标题翻译：多模态数据的聚类
公开(公告)号：US08748816B2
公开(公告)日：2014-06-10
申请号：US13546863
申请日：2012-07-11
申请人： Cornelis Sander Kooijman , Sander Richard Marie Stoks
发明人： Cornelis Sander Kooijman , Sander Richard Marie Stoks
IPC分类号： H01J37/28 , H01J37/244
CPC分类号： G01N23/203 , G01N23/2206 , G01N23/2252 , G01N2223/402 , G01N2223/418 , G01N2223/616 , H01J37/28 , H01J2237/221 , H01J2237/2445 , H01J2237/24475 , H01J2237/2611
摘要： Information from multiple detectors acquiring different types of information is combined to determine one or more properties of a sample more efficiently than the properties could be determined using a single type of information from a single type of detector. In some embodiments, information is collected simultaneously from the different detectors which can greatly reduce data acquisition time. In some embodiments, information from different points on the sample are grouped based on information from one type of detector and information from the second type of detector related to these points is combined, for example, to create a single spectrum from a second detector of a region of common composition as determined by the first detector. In some embodiments, the data collection is adaptive, that is, the data is analyzed during collection to determine whether sufficient data has been collected to determine a desired property with the desired confidence.
摘要翻译：获取不同类型信息的多个检测器的信息被组合以确定样本的一个或多个属性，而不是使用来自单一类型的检测器的单一类型的信息来确定属性。在一些实施例中，从不同的检测器同时收集信息，这可以大大减少数据采集时间。在一些实施例中，来自样本上不同点的信息基于来自一种类型的检测器的信息被分组，并且来自与这些点相关的第二类型的检测器的信息被组合，例如，从第二检测器由第一检测器确定的共同组成的区域。在一些实施例中，数据收集是自适应的，即，在收集期间分析数据以确定是否已经收集了足够的数据以确定具有期望置信度的所需属性。

4. 发明授权

US08334512B2 Detector system for use with transmission electron microscope spectroscopy 有权
标题翻译：用于透射电子显微镜光谱的检测器系统
公开(公告)号：US08334512B2
公开(公告)日：2012-12-18
申请号：US13217013
申请日：2011-08-24
申请人： Uwe Luecken , Frank Jeroen Pieter Schuurmans , Cornelis Sander Kooijman
发明人： Uwe Luecken , Frank Jeroen Pieter Schuurmans , Cornelis Sander Kooijman
IPC分类号： H01J47/00 , G01N23/00
CPC分类号： H01J37/244 , H01J37/05 , H01J37/26 , H01J2237/05 , H01J2237/24455 , H01J2237/2446 , H01J2237/24485 , H01J2237/2802 , H01J2237/2817
摘要： A detector system for a transmission electron microscope includes a first detector for recording a pattern and a second detector for recording a position of a feature of the pattern. The second detector is preferably a position sensitive detector that provides accurate, rapid position information that can be used as feedback to stabilize the position of the pattern on the first detector. In one embodiment, the first detector detects an electron energy loss electron spectrum, and the second detector, positioned behind the first detector and detecting electrons that pass through the first detector, detects the position of the zero-loss peak and adjusts the electron path to stabilize the position of the spectrum on the first detector.
摘要翻译：用于透射电子显微镜的检测器系统包括用于记录图案的第一检测器和用于记录图案的特征位置的第二检测器。第二检测器优选地是位置敏感检测器，其提供精确，快速的位置信息，其可以用作反馈以稳定图案在第一检测器上的位置。在一个实施例中，第一检测器检测电子能量损失电子光谱，并且第二检测器位于第一检测器后面并检测通过第一检测器的电子，检测零损耗峰值的位置并调整电子通路稳定第一检测器上的光谱位置。

5. 发明申请

US20110049382A1 PATTERN MODIFICATION SCHEMES FOR IMPROVED FIB PATTERNING 有权
标题翻译：改进FIB图案的图案修改方案
公开(公告)号：US20110049382A1
公开(公告)日：2011-03-03
申请号：US12870816
申请日：2010-08-28
申请人： Tom Miller , Gene Mirro , Cornelis Sander Kooijman , Hendrik Jan De Vos
发明人： Tom Miller , Gene Mirro , Cornelis Sander Kooijman , Hendrik Jan De Vos
IPC分类号： H01J3/14
CPC分类号： H01J3/26 , H01J37/1472 , H01J37/1477 , H01J37/3026 , H01J2237/1504 , H01J2237/1518 , H01J2237/1526 , H01J2237/30416 , H01J2237/3045 , H01J2237/30461
摘要： An improved method of directing a charged particle beam that compensates for the time required for the charged particles to traverse the system by altering one or more of the deflector signals. According to one embodiment of the invention, a digital filter is applied to the scan pattern prior to digital-to-analog (D/A) conversion in order to reduce or eliminate over-shoot effects that can result from TOF errors. In other embodiments, analog filters or the use of signal amplifiers with a lower bandwidth can also be used to compensate for TOF errors. By altering the scan pattern, over-shoot effects can be significantly reduced or eliminated.
摘要翻译：引导带电粒子束的改进方法，其补偿带电粒子通过改变一个或多个偏转器信号而穿过系统所需的时间。根据本发明的一个实施例，在数模（D / A）转换之前，将数字滤波器应用于扫描图案，以便减少或消除可能由TOF误差引起的过拍影响。在其他实施例中，也可以使用模拟滤波器或具有较低带宽的信号放大器的使用来补偿TOF误差。通过改变扫描图案，可以显着减少或消除超拍效果。

6. 发明申请

US20100230590A1 Compact Scanning Electron Microscope 审中-公开
标题翻译：紧凑型扫描电子显微镜
公开(公告)号：US20100230590A1
公开(公告)日：2010-09-16
申请号：US12303711
申请日：2007-06-07
申请人： Mart Petrus Maria Bierhoff , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Steven Berger , Ben Jacobus Marie Bormans , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus W. G. Persoon
发明人： Mart Petrus Maria Bierhoff , Bart Buijsse , Cornelis Sander Kooijman , Hugo Van Leeuwen , Hendrik Gezinus Tappel , Colin August Sanford , Sander Richard Marie Stoks , Steven Berger , Ben Jacobus Marie Bormans , Koen Arnoldus Wilhelmus Driessen , Johannes Antonius Hendricus W. G. Persoon
IPC分类号： H01J37/28 , H01J37/143
CPC分类号： H01J37/26 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/20 , H01J37/21 , H01J37/226 , H01J37/244 , H01J37/261 , H01J37/28 , H01J37/302 , H01J2237/1405 , H01J2237/162 , H01J2237/1825 , H01J2237/188 , H01J2237/2003 , H01J2237/2006
摘要： A compact electron microscope is robust, simple to operate, and preferably requires no special utilities. Imaging can begin shortly after a sample is inserted. A preferred simplified design includes permanent magnets for focusing, lack a vacuum controller and vacuum gauge, and uses a backscattered electron detector and no secondary electron detector.
摘要翻译：紧凑的电子显微镜是坚固的，操作简单，并且优选不需要特殊的用途。插入样品后即可开始成像。优选的简化设计包括用于聚焦的永磁体，缺少真空控制器和真空计，并且使用背散射电子检测器并且不使用二次电子检测器。

7. 发明申请

US20130037714A1 Charged-Particle Microscopy Imaging Method 有权
标题翻译：带电粒子显微镜成像方法
公开(公告)号：US20130037714A1
公开(公告)日：2013-02-14
申请号：US13572206
申请日：2012-08-10
申请人： Faysal Boughorbel , Berend Helmerus Lich , Cornelis Sander Kooijman , Eric Gerardus Theodoor Bosch , Alan Frank de Jong
发明人： Faysal Boughorbel , Berend Helmerus Lich , Cornelis Sander Kooijman , Eric Gerardus Theodoor Bosch , Alan Frank de Jong
IPC分类号： H01J37/26
CPC分类号： H01J37/222 , G01N23/22 , G01N2223/423 , H01J37/28 , H01J2237/226
摘要： Charged-particle microscopy includes irradiating a sample in N measurement sessions, each having an associated beam parameter (P) value; Detecting radiation emitted during each measurement session, associating a measurand (M) with each measurement session, thus providing a data set (S) of data pairs {Pn, Mn}, where n is an integer in the range 1≦n≦N, and processing the set (S) by: Defining a Point Spread Function (K) having a kernel value Kn for each value of n; Defining a spatial variable (V); Defining an imaging quantity (Q) having for each value of n a value Qn that is a three-dimensional convolution of Kn and V, such that Qn=Kn*V; For each value of n, determining a minimum divergence min D(Mn∥Kn*V) between Mn and Qn, solving for V while applying constraints on the values Kn.
摘要翻译：带电粒子显微术包括在N个测量会话中照射样品，每个测量会话具有相关的光束参数（P）值; 检测在每个测量会话期间发射的辐射，将被测量（M）与每个测量会话相关联，从而提供数据对{Pn，Mn}的数据集（S），其中n是范围1＆nlE; n＆nlE; N，并通过以下方式处理集合（S）：定义每个n值具有内核值Kn的点扩展函数（K）; 定义空间变量（V）; 定义对于n的每个值具有作为Kn和V的三维卷积的值Qn的成像量（Q），使得Qn = Kn * V; 对于n的每个值，确定Mn和Qn之间的最小发散最小值D（Mn∥Kn* V），在对Kn进行约束的同时求解V。

8. 发明申请

US20130015351A1 CLUSTERING OF MULTI-MODAL DATA 有权
标题翻译：多模态数据的聚类
公开(公告)号：US20130015351A1
公开(公告)日：2013-01-17
申请号：US13546863
申请日：2012-07-11
申请人： Cornelis Sander Kooijman , Sander Richard Marie Stoks
发明人： Cornelis Sander Kooijman , Sander Richard Marie Stoks
IPC分类号： G01N23/203
CPC分类号： G01N23/203 , G01N23/2206 , G01N23/2252 , G01N2223/402 , G01N2223/418 , G01N2223/616 , H01J37/28 , H01J2237/221 , H01J2237/2445 , H01J2237/24475 , H01J2237/2611
摘要： Information from multiple detectors acquiring different types of information is combined to determine one or more properties of a sample more efficiently than the properties could be determined using a single type of information from a single type of detector. In some embodiments, information is collected simultaneously from the different detectors which can greatly reduce data acquisition time. In some embodiments, information from different points on the sample are grouped based on information from one type of detector and information from the second type of detector related to these points is combined, for example, to create a single spectrum from a second detector of a region of common composition as determined by the first detector. In some embodiments, the data collection is adaptive, that is, the data is analyzed during collection to determine whether sufficient data has been collected to determine a desired property with the desired confidence.
摘要翻译：获取不同类型信息的多个检测器的信息被组合以确定样本的一个或多个属性，而不是使用来自单一类型的检测器的单一类型的信息来确定属性。在一些实施例中，从不同的检测器同时收集信息，这可以大大减少数据采集时间。在一些实施例中，来自样本上不同点的信息基于来自一种类型的检测器的信息被分组，并且来自与这些点相关的第二类型的检测器的信息被组合，例如，从第二检测器由第一检测器确定的共同组成的区域。在一些实施例中，数据收集是自适应的，即，在收集期间分析数据以确定是否已经收集了足够的数据以确定具有期望置信度的所需属性。

9. 发明授权

US08288724B2 Dark field detector for use in an electron microscope 有权
标题翻译：用于电子显微镜的暗场探测器
公开(公告)号：US08288724B2
公开(公告)日：2012-10-16
申请号：US12630687
申请日：2009-12-03
申请人： Cornelis Sander Kooijman , Gerardus Nicolaas Anne van Veen , Albertus Aemillius Seyno Sluijterman
发明人： Cornelis Sander Kooijman , Gerardus Nicolaas Anne van Veen , Albertus Aemillius Seyno Sluijterman
IPC分类号： G01N23/207 , G01N23/20 , G01N23/00
CPC分类号： H01J37/244 , H01J37/28 , H01J2237/2441 , H01J2237/24455 , H01J2237/24465 , H01J2237/24475 , H01J2237/24495 , H01J2237/2802
摘要： The invention relates to a dark-field detector for an electron microscope. The detector comprises a photodiode for detecting the scattered electrons, with an inner electrode and an outer electrode. As a result of the resistive behavior of the surface layer the current induced by a scattered electron, e.g. holes, are divided over the electrodes, so that a current I1 and I2 is induced, the sum of the current proportional to the energy of the impinging electron and the normalized ratio a function of the radial position where the electron impinges.
摘要翻译：本发明涉及一种用于电子显微镜的暗场检测器。检测器包括用于检测散射电子的光电二极管，内电极和外电极。作为表面层的电阻行为的结果，由散射电子，例如，电极分开，使得电流I1和I2被感应，电流与入射电子的能量成比例的和和归一化比率是电子撞击的径向位置的函数。

10. 发明申请

US20110266440A1 SEM Imaging Method 有权
标题翻译： SEM成像方法
公开(公告)号：US20110266440A1
公开(公告)日：2011-11-03
申请号：US13098300
申请日：2011-04-29
申请人： Faysal Boughorbel , Cornelis Sander Kooijman , Berend Helmerus Lich , Eric Gerardus Theodoor Bosch
发明人： Faysal Boughorbel , Cornelis Sander Kooijman , Berend Helmerus Lich , Eric Gerardus Theodoor Bosch
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： H01J37/222 , H01J37/28 , H01J2237/226 , H01J2237/2611
摘要： A method of investigating a sample using Scanning Electron Microscopy (SEM), comprising the following steps: Irradiating a surface (S) of the sample using a probing electron beam in a plurality (N) of measurement sessions, each measurement session having an associated beam parameter (P) value that is chosen from a range of such values and that differs between measurement sessions; Detecting stimulated radiation emitted by the sample during each measurement session, associating a measurand (M) therewith and noting the value of this measurand for each measurement session, thus allowing compilation of a data set (D) of data pairs (Pi, Mi), where 1≦i≦N, wherein: A statistical Blind Source Separation (BSS) technique is employed to automatically process the data set (D) and spatially resolve it into a result set (R) of imaging pairs (Qk, Lk), in which an imaging quantity (Q) having value Qk is associated with a discrete depth level Lk referenced to the surface S.
摘要翻译：一种使用扫描电子显微镜（SEM）研究样品的方法，包括以下步骤：在多个（N）个测量会话中使用探测电子束照射样品的表面（S），每个测量会话具有相关联的束参数（P）值，其从这样的值的范围中选择并且在测量会话之间不同; 在每个测量会话期间检测由样本发射的受激辐射，将被测量（M）与其相关联并注意每个测量会话的该被测量的值，从而允许编辑数据对（Pi，Mi）的数据集（D）其中：采用统计盲分离（BSS）技术来自动处理数据集（D），并将其空间解析为成像对（Qk，Lk）的结果集（R），其中具有值Qk的成像量（Q）与参考表面S的离散深度级Lk相关联。

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