专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06616853B1 Method for reducing leaching in metal-coated MEMS 有权
标题翻译：金属涂层MEMS中减少浸出的方法
公开(公告)号：US06616853B1
公开(公告)日：2003-09-09
申请号：US09799916
申请日：2001-03-05
申请人： Bevan Staple , David Miller , Lilac Muller
发明人： Bevan Staple , David Miller , Lilac Muller
IPC分类号： H01L2100
CPC分类号： B81C1/00476 , B81B2201/042 , B81C2201/0133 , G02B6/3518
摘要： A method is provided for preventing dopant leaching from a doped structural film during fabrication of a microelectromechanical system. A microstructure that includes the doped structural film, sacrificial material, and metallic material is produced with a combination of deposition, patterning, and etching techniques. The sacrificial material is dissolved with a release solution that has a substance destructive to the sacrificial material. This substance also acts as an electrolyte, forming a galvanic cell with the doped structural film and metallic material acting as electrodes. The effects of the galvanic cell are suppressed by including a nonionic detergent mixed in the release solution.
摘要翻译：提供了一种在微电子机械系统的制造期间防止掺杂的结构膜的掺杂剂浸出的方法。包括掺杂的结构膜，牺牲材料和金属材料的微结构通过沉积，图案化和蚀刻技术的组合来生产。牺牲材料用具有对牺牲材料具有破坏性的物质的释放溶液溶解。该物质还用作电解质，形成具有掺杂结构膜和金属材料作为电极的原电池。通过包括混合在脱模溶液中的非离子洗涤剂来抑制原电池的影响。

2. 发明授权

US06625342B2 Systems and methods for overcoming stiction using a lever 有权
公开(公告)号：US06625342B2
公开(公告)日：2003-09-23
申请号：US09898988
申请日：2001-07-03
申请人： Bevan Staple , David Paul Anderson , Lilac Muller
发明人： Bevan Staple , David Paul Anderson , Lilac Muller
IPC分类号： G02B626
CPC分类号： G02B6/358 , B81B3/0016 , B81B2201/047 , B81B2203/0181 , G02B6/29307 , G02B6/2931 , G02B6/3518 , G02B6/352 , G02B6/3546 , G02B6/3548 , G02B6/3556 , G02B6/3558 , G02B6/356 , G02B6/3566 , G02B6/357 , G02B6/3584 , G02B6/3598 , G02B26/0841 , Y10T307/977
摘要： A microstructure is provided including a base layer underlying a first and second structural plates. Operation of the microstructure is capable of overcoming stiction. Methods of operation include providing an edge of the first structural plate in contact with a contact point. A second structural plate is deflected in a way that overcomes stiction between the first structural plate and the contact point. Such deflection can include providing a prying force to lift the first structural plate or a hammering force to disturb any stiction related forces at the contact point.

3. 发明授权

US06525352B1 Method to reduce release time of micromachined devices 有权
标题翻译：减少微加工设备的释放时间的方法
公开(公告)号：US06525352B1
公开(公告)日：2003-02-25
申请号：US09837362
申请日：2001-04-18
申请人： Lilac Muller , Bevan Staple
发明人： Lilac Muller , Bevan Staple
IPC分类号： H01L2714
CPC分类号： B81C1/00547
摘要： A method for fabricating a micromachined device with a fast release step is provided. A first undoped sacrificial layer is deposited on a structural layer. A doped sacrificial layer is deposited on the first undoped sacrificial layer. A second undoped sacrificial layer is deposited on the doped sacrificial layer to produce a layered structure. An etchant is then applied to the layered structure.
摘要翻译：提供了一种用于制造具有快速释放步骤的微加工装置的方法。第一未掺杂的牺牲层沉积在结构层上。掺杂的牺牲层沉积在第一未掺杂的牺牲层上。第二未掺杂的牺牲层沉积在掺杂牺牲层上以产生分层结构。然后将蚀刻剂施加到分层结构。

4. 发明授权

US06859580B2 Systems and methods for overcoming stiction using a lever 失效
标题翻译：使用杠杆克服静摩擦的系统和方法
公开(公告)号：US06859580B2
公开(公告)日：2005-02-22
申请号：US10632662
申请日：2003-08-01
申请人： Bevan Staple , David Paul Anderson , Lilac Muller
发明人： Bevan Staple , David Paul Anderson , Lilac Muller
IPC分类号： G02B6/34 , G02B6/35 , G02B26/08
CPC分类号： G02B6/358 , B81B3/0016 , B81B2201/047 , B81B2203/0181 , G02B6/29307 , G02B6/2931 , G02B6/3518 , G02B6/352 , G02B6/3546 , G02B6/3548 , G02B6/3556 , G02B6/3558 , G02B6/356 , G02B6/3566 , G02B6/357 , G02B6/3584 , G02B6/3598 , G02B26/0841 , Y10T307/977
摘要： A microstructure is provided including a base layer underlying a first and second structural plates. Operation of the microstructure is capable of overcoming stiction. Methods of operation include providing an edge of the first structural plate in contact with a contact point. A second structural plate is deflected in a way that overcomes stiction between the first structural plate and the contact point. Such deflection can include providing a prying force to lift the first structural plate or a hammering force to disturb any stiction related forces at the contact point.
摘要翻译：提供了包括第一和第二结构板下面的基底层的微结构。微结构的操作能够克服粘性。操作方法包括提供与接触点接触的第一结构板的边缘。第二结构板以克服第一结构板和接触点之间的静摩擦的方式偏转。这种偏转可以包括提供用于提升第一结构板的撬力力或锤击力以扰乱接触点处的任何相关的力。

5. 发明申请

US20080262338A1 METHOD AND APPARATUS FOR ELECTROMAGNETIC NAVIGATION OF A MAGNETIC STIMULATION PROBE 有权
标题翻译：磁刺激探针电磁导航的方法与装置
公开(公告)号：US20080262338A1
公开(公告)日：2008-10-23
申请号：US12104550
申请日：2008-04-17
申请人： Yvan Paitel , Steven L. Hartmann , Lilac Muller
发明人： Yvan Paitel , Steven L. Hartmann , Lilac Muller
IPC分类号： A61B5/05
CPC分类号： A61B5/06 , A61B5/055 , A61B5/743 , A61B6/032 , A61B6/037 , A61B34/20 , A61B90/36 , A61B2034/107 , A61B2034/2051 , A61B2090/376 , A61B2090/397 , A61N2/00
摘要： A system and method is disclosed that can be used to track and navigate an instrument relative to a patient. The system can include an electromagnetic tracking system to track an electromagnetic stimulation probe, such as a transcranial magnetic stimulation probe. The system can, according to various embodiments, provide a tracking device on the probe, track the coil of the probe, provide a field relative to the probe, and determine the position of the patient based upon the field produced by the probe.
摘要翻译：公开了可用于跟踪和导航仪器相对于患者的系统和方法。该系统可以包括用于跟踪电磁刺激探针（例如经颅磁刺激探针）的电磁跟踪系统。根据各种实施例，该系统可以在探针上提供跟踪装置，跟踪探针的线圈，提供相对于探针的场，并且基于由探针产生的场确定患者的位置。

6. 发明申请

US20050269898A1 Systems and methods for overcoming stiction 有权
标题翻译：用于克服静止的系统和方法
公开(公告)号：US20050269898A1
公开(公告)日：2005-12-08
申请号：US11166764
申请日：2005-06-23
申请人： David Miller , Lilac Muller , Robert Anderson
发明人： David Miller , Lilac Muller , Robert Anderson
IPC分类号： B81B3/00 , G02B6/35 , G02B26/08 , H02N1/00 , H02N2/00
CPC分类号： G02B6/352 , B81B2201/042 , B81C1/00968 , G02B6/3512 , G02B6/3518 , G02B6/3548 , G02B6/356 , G02B6/3564 , G02B6/3568 , G02B6/357 , G02B6/3584 , G02B26/0841 , H02N1/002 , H02N1/006
摘要： An electromechanical system includes a structural plate in contact with a stop and an actuator activated by a force for creating a movement of the stop relative to the structural plate, wherein the movement is sufficient to overcome stiction forces between the structural plate and the stop.
摘要翻译：机电系统包括与止动器接触的结构板和由用于产生止动件相对于结构板的运动的力而致动的致动器，其中该运动足以克服结构板和止动件之间的静摩擦力。

7. 发明授权

US08543189B2 Method and apparatus for electromagnetic navigation of a magnetic stimulation probe 有权
标题翻译：磁刺激探头的电磁导航方法及装置
公开(公告)号：US08543189B2
公开(公告)日：2013-09-24
申请号：US12104550
申请日：2008-04-17
申请人： Yvan Paitel , Steven L. Hartmann , Lilac Muller
发明人： Yvan Paitel , Steven L. Hartmann , Lilac Muller
IPC分类号： A61B5/05
CPC分类号： A61B5/06 , A61B5/055 , A61B5/743 , A61B6/032 , A61B6/037 , A61B34/20 , A61B90/36 , A61B2034/107 , A61B2034/2051 , A61B2090/376 , A61B2090/397 , A61N2/00
摘要： A system and method is disclosed that can be used to track and navigate an instrument relative to a patient. The system can include an electromagnetic tracking system to track an electromagnetic stimulation probe, such as a transcranial magnetic stimulation probe. The system can, according to various embodiments, provide a tracking device on the probe, track the coil of the probe, provide a field relative to the probe, and determine the position of the patient based upon the field produced by the probe.
摘要翻译：公开了可用于跟踪和导航仪器相对于患者的系统和方法。该系统可以包括用于跟踪电磁刺激探针（例如经颅磁刺激探针）的电磁跟踪系统。根据各种实施例，该系统可以在探针上提供跟踪装置，跟踪探针的线圈，提供相对于探针的场，并且基于由探针产生的场确定患者的位置。

8. 发明授权

US06798114B2 Systems and methods for overcoming stiction 失效
公开(公告)号：US06798114B2
公开(公告)日：2004-09-28
申请号：US10719181
申请日：2003-11-20
申请人： David Miller , Lilac Muller , Robert L. Anderson
发明人： David Miller , Lilac Muller , Robert L. Anderson
IPC分类号： H02N200
CPC分类号： G02B6/352 , B81B2201/042 , B81C1/00968 , G02B6/3512 , G02B6/3518 , G02B6/3548 , G02B6/356 , G02B6/3564 , G02B6/3568 , G02B6/357 , G02B6/3584 , G02B26/0841 , H02N1/002 , H02N1/006
摘要： A number of methods and systems for overcoming stiction are provided. The systems include electro-mechanical systems capable of exerting a variety of forces upon areas prone to stiction. The systems can be MEMS arrays or other types of devices where stiction related forces occur. The methods include a variety of ways of causing movement in areas prone to stiction forces. Such movement can be vibrational in nature and is sufficient to overcome stiction, allowing a trapped element to be moveed to a desired location.

9. 发明授权

US06778304B1 Bistable micromirror with contactless stops 失效
标题翻译：具有非接触式止动器的双稳态微镜
公开(公告)号：US06778304B1
公开(公告)日：2004-08-17
申请号：US10705390
申请日：2003-11-10
申请人： Lilac Muller
发明人： Lilac Muller
IPC分类号： G02B2608
CPC分类号： B81B3/0016 , B81B2201/042 , G02B26/0841 , Y10S359/90 , Y10S359/904
摘要： A microstructure for steering light is provided that mitigates stiction. A substrate is provided on which a structural linkage is connected to support a structural film. The structural film includes a reflective coating. A hold electrode is connected with the substrate at a position laterally beyond an orthogonal projection of the structural film on the substrate. It is configured to hold the structural film electrostatically in a tilted position with respect to the substrate upon application of a potential difference between the structural film and the hold electrode. Because of its positioning with respect to the structural film, it is ensured that the structural film is not in contact with the substrate when the structural film is being held by the hold electrode.
摘要翻译：提供了用于转向灯的微结构，其减轻了静电。提供了一个其上连接有结构连杆以支撑结构膜的基底。结构膜包括反射涂层。保持电极在横向超过结构膜在基板上的正交投影的位置处与基板连接。构造成在施加结构膜和保持电极之间的电位差时，将结构膜静电地保持在相对于基板的倾斜位置。由于其相对于结构膜的定位，当结构膜被保持电极保持时，确保结构膜不与基板接触。

10. 发明授权

US06657759B2 Bistable micromirror with contactless stops 有权
标题翻译：具有非接触式止动器的双稳态微镜
公开(公告)号：US06657759B2
公开(公告)日：2003-12-02
申请号：US09899004
申请日：2001-07-03
申请人： Lilac Muller
发明人： Lilac Muller
IPC分类号： G02B2608
CPC分类号： B81B3/0016 , B81B2201/042 , G02B26/0841 , Y10S359/90 , Y10S359/904
摘要： A microstructure for steering light is provided that mitigates stiction. A substrate is provided on which a structural linkage is connected to support a structural film. The structural film includes a reflective coating. A hold electrode is connected with the substrate at a position laterally beyond an orthogonal projection of the structural film on the substrate. It is configured to hold the structural film electrostatically in a tilted position with respect to the substrate upon application of a potential difference between the structural film and the hold electrode. Because of its positioning with respect to the structural film, it is ensured that the structural film is not in contact with the substrate when the structural film is being held by the hold electrode.
摘要翻译：提供了用于转向灯的微结构，其减轻了静电。提供了一个其上连接有结构连杆以支撑结构膜的基底。结构膜包括反射涂层。保持电极在横向超过结构膜在基板上的正交投影的位置处与基板连接。构造成在施加结构膜和保持电极之间的电位差时，将结构膜静电地保持在相对于基板的倾斜位置。由于其相对于结构膜的定位，当结构膜被保持电极保持时，确保结构膜不与基板接触。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式