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1. 发明授权

US06883902B2 Piezoelectric liquid-jet head having a superconductor layer 失效
标题翻译：具有超导体层的压电液体喷射头
公开(公告)号：US06883902B2
公开(公告)日：2005-04-26
申请号：US10614700
申请日：2003-07-08
申请人： Li Xin-Shan , Tsutomu Nishiwaki
发明人： Li Xin-Shan , Tsutomu Nishiwaki
IPC分类号： B41J2/045 , B41J2/055 , B41J2/14
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2202/03
摘要： A piezoelectric liquid-jet head apparatus, which provides a nearly uniform piezoelectric element and enables ejection of liquid at maximum output, is disclosed. The piezoelectric liquid-jet head has a piezoelectric element 300 provided on one surface of a passage forming substrate 10 via a vibration plate. The piezoelectric liquid jet head includes: a zirconium oxide layer 101 formed on the surface of the passage forming substrate 10; a cerium oxide layer 102 formed on the zirconium oxide layer 101; a superconductor layer 103 formed on the cerium oxide layer 102 and composed of a yttrium-barium-copper-oxygen-based material (YBCO); a lower electrode 60 formed on the superconductor layer 103 and composed of strontium ruthenate; and a piezoelectric layer 70 which is a single crystal epitaxially grown on the lower electrode 60.
摘要翻译：公开了一种压电喷墨头装置，其提供几乎均匀的压电元件并且能够以最大输出喷射液体。压电液体喷射头具有通过振动板设置在通道形成基板10的一个表面上的压电元件300。压电液体喷射头包括：形成在通道形成基板10的表面上的氧化锆层101; 形成在氧化锆层101上的氧化铈层102; 形成在氧化铈层102上并由钇 - 钡 - 铜 - 氧 - 基材料（YBCO）组成的超导体层103; 形成在超导体层103上并由钌酸锶组成的下电极60; 以及在下电极60上外延生长的单晶的压电体层70。

2. 发明申请

US20120026250A1 METHOD OF MANUFACTURING A LIQUID JET HEAD AND A LIQUID JET APPARATUS 有权
标题翻译：液体喷射头和液体喷射装置的制造方法
公开(公告)号：US20120026250A1
公开(公告)日：2012-02-02
申请号：US13253896
申请日：2011-10-05
申请人： Shiro Yazaki , Setsuya Iwashita , Eiju Hirai , Tsutomu Nishiwaki
发明人： Shiro Yazaki , Setsuya Iwashita , Eiju Hirai , Tsutomu Nishiwaki
IPC分类号： B41J2/045 , B23P17/00
CPC分类号： B41J2/164 , B41J2/04 , B41J2/055 , B41J2/14233 , B41J2/161 , B41J2/1629 , B41J2/1631 , B41J2/1645 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , Y10T29/42 , Y10T29/49401
摘要： A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.
摘要翻译：制造液体喷射头的方法包括在通道形成基板上沉积下电极膜并将下电极膜图案化成预定图案，在通道形成基板上形成压电层，在导电材料上形成中间膜所述压电层在所述中间膜上形成保护膜，并且使用所述保护膜作为掩模，通过将所述压电层与所述中间膜一起蚀刻成预定图案，剥离所述保护膜并沉积上电极膜在通道形成基板上并将上电极膜图案化成预定图案。

3. 发明申请

US20090213188A1 METHOD OF MANUFACTURING AN ACTUATOR APPARATUS, A METHOD OF MANUFACTURING A LIQUID JET HEAD AND A LIQUID JET APPARATUS 审中-公开
标题翻译：制造执行器装置的方法，制造液体喷射头和液体喷射装置的方法
公开(公告)号：US20090213188A1
公开(公告)日：2009-08-27
申请号：US12370898
申请日：2009-02-13
申请人： Masato Shimada , Kazushige Hakeda , Tsutomu Nishiwaki , Eiju Hirai
发明人： Masato Shimada , Kazushige Hakeda , Tsutomu Nishiwaki , Eiju Hirai
IPC分类号： C23F1/02 , B41J2/045
CPC分类号： B41J2/161 , B41J2/1629 , B41J2/1631 , B41J2/1646 , B41J2002/14241 , B41J2002/14419
摘要： A method of manufacturing an actuator apparatus includes forming, on the base plate, a test pattern that is electrically discontinuous with the electrodes of the piezoelectric element and has the same layer as the lower electrode, the test pattern having the lower electrode with the upper electrode and the piezoelectric material layer removed by etching, and measuring electric resistance of the lower electrode of the test pattern to acquire the etch amount of the lower electrode when the piezoelectric element is formed.
摘要翻译：一种制造致动器装置的方法包括在基板上形成与压电元件的电极不连续的测试图案，并且具有与下电极相同的层，测试图案具有具有上电极的下电极并且通过蚀刻去除压电材料层，并且测量测试图案的下电极的电阻以获得当形成压电元件时下电极的蚀刻量。

4. 发明授权

US06639340B1 Method for manufacturing piezoelectric element, and piezoelectric element, ink-jet recording head and printer 有权
标题翻译：制造压电元件的方法，压电元件，喷墨记录头和打印机
公开(公告)号：US06639340B1
公开(公告)日：2003-10-28
申请号：US09549209
申请日：2000-04-13
申请人： Hong Qiu , Koji Sumi , Souichi Moriya , Masato Shimada , Tsutomu Nishiwaki
发明人： Hong Qiu , Koji Sumi , Souichi Moriya , Masato Shimada , Tsutomu Nishiwaki
IPC分类号： H01L4108
CPC分类号： H01L41/0805 , H01L41/0973 , H01L41/1875 , H01L41/318
摘要： Provided is a method for manufacturing a piezoelectric element that has excellent piezoelectric characteristics and can be made into a thicker film. A piezoelectric thin film is crystallized by a process in which piezoelectric precursor films 4021 through 4025 containing the metal elements of a piezoelectric ceramic are coated with a material, dried, pyrolyzed, and then heat-treated under prescribed conditions in a diffusion furnace. With this method, a piezoelectric thin film can be made into a thicker film without initiating cracking.
摘要翻译：提供一种压电元件的制造方法，该压电元件具有优异的压电特性，并且可以制成较厚的膜。压电薄膜通过将包含压电陶瓷的金属元素的压电前体膜4021至4025涂覆材料干燥，热解，然后在扩散炉中在规定条件下进行热处理的方法结晶化。利用该方法，可以将压电薄膜制成较厚的膜而不引起开裂。

5. 发明授权

US06402304B1 Piezoelectric actuator, ink jet printing head, printer, method for manufacturing piezoelectric actuator, and method for manufacturing ink jet printing head 失效
标题翻译：压电致动器，喷墨打印头，打印机，压电致动器的制造方法以及喷墨打印头的制造方法
公开(公告)号：US06402304B1
公开(公告)日：2002-06-11
申请号：US09372990
申请日：1999-08-12
申请人： Hong Qiu , Koji Sumi , Masato Shimada , Tsutomu Nishiwaki , Masanori Okuyama , Zhi Quiang Wei
发明人： Hong Qiu , Koji Sumi , Masato Shimada , Tsutomu Nishiwaki , Masanori Okuyama , Zhi Quiang Wei
IPC分类号： B41J2045
CPC分类号： B41J2/1646 , B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1645 , B41J2002/14387 , H01L41/0805 , H01L41/0973 , H01L41/317
摘要： A piezoelectric actuator, made of a substrate and a piezoelectric film layer resistant to erosion is provided. The area of the piezoelectric actuator can be enlarged, and has a flat top surface. The present invention further provides an ink jet printing head, a printer, a method for manufacturing a piezoelectric actuator, and a method for manufacturing an ink jet printing head. The piezoelectric actuator includes a piezoelectric film disposed between a lower electrode and an upper electrode. Columnar crystal grains of piezoelectric ceramic which compose the piezoelectric actuator are random-oriented in a film thickness direction, and have a mean diameter in the range of 100 nm to 15,000 nm. The method for manufacturing the actuator includes the step of forming precursor films, which are composed of metal and oxygen, over a lower electrode, providing a hydrothermal treatment by dipping the precursor films in an alkaline solution, which as 2 M[mol/l] or less, more preferably 0.1 M[mol/l] or less, concentration of a given alkaline solute, and promoting the crystallization under certain conditions.
摘要翻译：提供了一种由基片制成的压电致动器和耐腐蚀的压电薄膜层。压电致动器的面积可以扩大，并且具有平坦的顶表面。本发明还提供一种喷墨打印头，打印机，压电致动器的制造方法以及喷墨打印头的制造方法。压电致动器包括设置在下电极和上电极之间的压电膜。构成压电致动器的压电陶瓷的柱状晶粒在膜厚度方向上是随机取向的，并且具有在100nm至15,000nm范围内的平均直径。制造致动器的方法包括在下电极上形成由金属和氧构成的前体膜的步骤，通过将前体膜浸入碱溶液中进行水热处理，碱溶液为2M [mol / l] 或更低，更优选0.1M [mol / l]或更低，给定碱性溶质的浓度，并且在某些条件下促进结晶。

6. 发明授权

US06378996B1 Ink-jet recording head and ink-jet recording apparatus 失效
标题翻译：喷墨记录头和喷墨记录装置
公开(公告)号：US06378996B1
公开(公告)日：2002-04-30
申请号：US09712842
申请日：2000-11-15
申请人： Masato Shimada , Akira Matsuzawa , Yoshinao Miyata , Tsutomu Nishiwaki
发明人： Masato Shimada , Akira Matsuzawa , Yoshinao Miyata , Tsutomu Nishiwaki
IPC分类号： B41J2045
CPC分类号： B41J2/1629 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1645 , B41J2/1646 , B41J2002/14241 , B41J2002/1437 , B41J2002/14419 , B41J2002/14491
摘要： Disclosed are an ink-jet recording head in which rigidity of a compartment wall is improved and pressure generating chambers are arranged in a high density, a manufacturing method and an ink-jet recording apparatus thereof. An ink-jet recording head includes: a passage-forming substrate 10 having at least silicon layer that consists of single crystal silicon and pressure generating chambers 12 defined thereon, which communicate with a nozzle orifice 21; and a piezoelectric element 300 for generating a pressure change in the pressure generating chamber 12, the piezoelectric element 300 being provided in a region opposite the pressure generating chamber 12 via a vibration plate, which constitutes a portion of the pressure generating chamber 12. The ink-jet recording head further includes a joining plate 20 joined to the passage-forming substrate 10 on the surface where the piezoelectric element 300 is formed, and the nozzle orifice 21 is provided on the joining plate 20.
摘要翻译：公开了一种喷墨记录头，其中室壁的刚性得到改善，并且压力发生室以高密度排列，其制造方法和喷墨记录装置。喷墨记录头包括：通道至少具有由限定在其上的单晶硅和压力发生室12构成的硅层的衬底10，其与喷嘴孔21连通; 以及用于在压力发生室12中产生压力变化的压电元件300，压电元件300经由构成压力产生室12的一部分的振动板设置在与压力产生室12相对的区域中。油墨喷墨记录头还包括在形成压电元件300的表面上连接到通道形成基板10的接合板20，并且喷嘴孔21设置在接合板20上。

7. 发明授权

US06332672B1 Ink jet recording head including a cap member sealing piezoelectric vibrators 失效
标题翻译：喷墨记录头包括密封压电振动器的盖构件
公开(公告)号：US06332672B1
公开(公告)日：2001-12-25
申请号：US09069991
申请日：1998-04-30
申请人： Shiro Yazaki , Shinri Sakai , Tsutomu Nishiwaki
发明人： Shiro Yazaki , Shinri Sakai , Tsutomu Nishiwaki
IPC分类号： B41J2045
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/1425 , B41J2002/14387
摘要： An ink jet recording head comprises: a passage form substrate having, a diaphragm forming a part of a pressure generating chamber communicating with a nozzle aperture and at least the upper surface of which acts as a lower electrode, and a piezoelectric vibrator including a piezoelectric material layer formed on the surface of the diaphragm, an upper electrode formed on the surface of the piezoelectric material layer and a piezoelectric active part formed in an area opposite to the pressure generating chamber; a cap member joined to the side of the piezoelectric material layer of the passage formed substrate for sealing space in a state in which space to extent that a movement is not prevented is secured; and a flexible portion for absorbing the change of pressure in the space of the cap member.
摘要翻译：一种喷墨记录头，包括：通道形式基板，具有形成与喷嘴孔连通并且至少其上表面用作下电极的压力发生室的一部分的隔膜，以及包括压电材料的压电振动器形成在所述隔膜的表面上的上层电极，形成在所述压电体层的表面上的上电极和与所述压力发生室相反的区域形成的压电有源部; 确保在没有防止移动的空间的状态下连接到通道形成基板的压电材料层侧的密封空间的盖构件; 以及用于吸收盖构件的空间中的压力变化的柔性部分。

8. 发明授权

US07992972B2 Method of manufacturing liquid jet head, method of manufacturing piezoelectric element and liquid jet apparatus 有权
标题翻译：制造液体喷头的方法，制造压电元件的方法和液体喷射装置
公开(公告)号：US07992972B2
公开(公告)日：2011-08-09
申请号：US12405984
申请日：2009-03-17
申请人： Toshinao Shinbo , Kazushige Hakeda , Koji Sumi , Tsutomu Nishiwaki
发明人： Toshinao Shinbo , Kazushige Hakeda , Koji Sumi , Tsutomu Nishiwaki
IPC分类号： B41J2/045
CPC分类号： B41J2/1629 , B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1631 , B41J2/1632 , Y10T29/42 , Y10T29/49401
摘要： A method of manufacturing a piezoelectric element includes a piezoelectric layer forming step of sequentially and repeatedly performing a heat treatment step of applying a piezoelectric material containing lead to a lower electrode film at a relative humidity in the range of 30% to 50% Rh and then performing a heat treatment to form a piezoelectric precursor film and a crystallization step of firing the piezoelectric precursor film to form a piezoelectric film on the lower electrode film, thereby forming a piezoelectric layer.
摘要翻译：制造压电元件的方法包括：压电层形成工序，依次重复地进行热处理工序，在相对湿度为30〜50％Rh的范围内，将含有铅的压电材料涂布在下电极膜上，进行热处理以形成压电前体膜和烧结压电前体膜以在下电极膜上形成压电膜的结晶步骤，从而形成压电层。

9. 发明授权

US07725996B2 Method for producing actuator device 有权
标题翻译：制造执行装置的方法
公开(公告)号：US07725996B2
公开(公告)日：2010-06-01
申请号：US11501032
申请日：2006-08-09
申请人： Xin-Shan Li , Tsutomu Nishiwaki
发明人： Xin-Shan Li , Tsutomu Nishiwaki
IPC分类号： H02N2/00 , H04R17/00 , H04R31/00
CPC分类号： H04R17/00 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1635 , B41J2/1646 , B41J2002/14241 , H04R31/00 , Y10T29/42 , Y10T29/49204 , Y10T29/49224 , Y10T29/49401
摘要： A method for producing an actuator device, comprising the steps of: forming a vibration plate on a substrate; and forming a piezoelectric element composed of a lower electrode, a piezoelectric layer, and an upper electrode on the vibration plate, wherein in the step of forming the piezoelectric element, the upper electrode is formed on the piezoelectric layer by sputtering, a temperature of 25 to 250 (° C.) and a pressure of 0.4 to 1.5 (Pa) are used during the sputtering, and upon the sputtering, the upper electrode having a thickness of 30 to 100 (nm), stress of 0.3 to 2.0 (GPa), and specific resistance of 2.0 (×10−7 Ω·m) or less is formed.
摘要翻译：一种制造致动器装置的方法，包括以下步骤：在基板上形成振动板; 以及在振动板上形成由下电极，压电层和上电极组成的压电元件，其中在形成压电元件的步骤中，通过溅射在压电层上形成上电极，温度为25 在溅射期间使用至250（℃）和0.4至1.5（Pa）的压力，并且在溅射时，上电极的厚度为30至100（nm），应力为0.3至2.0（GPa），形成电阻2.0（×10-7＆OHgr·m）以下。

10. 发明申请

US20060261708A1 Piezoelectric element, liquid-jet head using piezoelectric element and liquid-jet apparatus 有权
公开(公告)号：US20060261708A1
公开(公告)日：2006-11-23
申请号：US11391331
申请日：2006-03-29
申请人： Xin-Shan Li , Koji Sumi , Masami Murai , Tsutomu Nishiwaki
发明人： Xin-Shan Li , Koji Sumi , Masami Murai , Tsutomu Nishiwaki
IPC分类号： H01L41/00
CPC分类号： B41J2/1646 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1642 , B41J2002/14241 , B41J2002/14419 , B41J2202/03 , H01L41/0973 , H01L41/1876
摘要： Disclosed are a piezoelectric element in which crystallinity of a piezoelectric layer is improved, and which has uniform characteristics of the piezoelectric layer, a liquid-jet head using the piezoelectric element as well as a liquid-jet apparatus. The piezoelectric element includes: a lower electrode provided to one surface side of a substrate; a piezoelectric layer which is made of a piezoelectric material containing lead (Pb), zirconium (Zr) and titanium (Ti), and which is provided above the lower electrode; and an upper electrode provided above the piezoelectric layer, and in the piezoelectric element, a relative permittivity of the piezoelectric layer is 750 to 1500 and a coercive electric field of the piezoelectric layer is 10 to 40 kV/cm.

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