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1. 发明申请

US20060261708A1 Piezoelectric element, liquid-jet head using piezoelectric element and liquid-jet apparatus 有权
公开(公告)号：US20060261708A1
公开(公告)日：2006-11-23
申请号：US11391331
申请日：2006-03-29
申请人： Xin-Shan Li , Koji Sumi , Masami Murai , Tsutomu Nishiwaki
发明人： Xin-Shan Li , Koji Sumi , Masami Murai , Tsutomu Nishiwaki
IPC分类号： H01L41/00
CPC分类号： B41J2/1646 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1642 , B41J2002/14241 , B41J2002/14419 , B41J2202/03 , H01L41/0973 , H01L41/1876
摘要： Disclosed are a piezoelectric element in which crystallinity of a piezoelectric layer is improved, and which has uniform characteristics of the piezoelectric layer, a liquid-jet head using the piezoelectric element as well as a liquid-jet apparatus. The piezoelectric element includes: a lower electrode provided to one surface side of a substrate; a piezoelectric layer which is made of a piezoelectric material containing lead (Pb), zirconium (Zr) and titanium (Ti), and which is provided above the lower electrode; and an upper electrode provided above the piezoelectric layer, and in the piezoelectric element, a relative permittivity of the piezoelectric layer is 750 to 1500 and a coercive electric field of the piezoelectric layer is 10 to 40 kV/cm.

2. 发明授权

US07514854B2 Piezoelectric element, liquid-jet head using piezoelectric element and liquid-jet apparatus 有权
标题翻译：压电元件，使用压电元件的液体喷头和液体喷射装置
公开(公告)号：US07514854B2
公开(公告)日：2009-04-07
申请号：US11391331
申请日：2006-03-29
申请人： Xin-Shan Li , Koji Sumi , Masami Murai , Tsutomu Nishiwaki
发明人： Xin-Shan Li , Koji Sumi , Masami Murai , Tsutomu Nishiwaki
IPC分类号： H01L41/18
CPC分类号： B41J2/1646 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1642 , B41J2002/14241 , B41J2002/14419 , B41J2202/03 , H01L41/0973 , H01L41/1876
摘要： Disclosed are a piezoelectric element in which crystallinity of a piezoelectric layer is improved, and which has uniform characteristics of the piezoelectric layer, a liquid-jet head using the piezoelectric element as well as a liquid-jet apparatus. The piezoelectric element includes: a lower electrode provided to one surface side of a substrate; a piezoelectric layer which is made of a piezoelectric material containing lead (Pb), zirconium (Zr) and titanium (Ti), and which is provided above the lower electrode; and an upper electrode provided above the piezoelectric layer, and in the piezoelectric element, a relative permittivity of the piezoelectric layer is 750 to 1500 and a coercive electric field of the piezoelectric layer is 10 to 40 kV/cm.
摘要翻译：公开了一种压电元件的结晶度提高，压电体层的特性均匀，使用该压电元件的液体喷射头以及液体喷射装置的压电元件。压电元件包括：设置在基板的一个表面侧的下电极; 由包含铅（Pb），锆（Zr）和钛（Ti）的压电材料制成并且设置在下电极上的压电层; 以及设置在压电层上方的上电极，压电元件的压电层的相对介电常数为750〜1500，压电层的矫顽电场为10〜40kV / cm。

3. 发明授权

US06551652B2 Process for producing a piezoelectric element using a first SOL and a second SOL having a lead content greater than the first SOL 失效
标题翻译：使用具有大于第一SOL的铅含量的第一SOL和第二SOL制造压电元件的方法
公开(公告)号：US06551652B2
公开(公告)日：2003-04-22
申请号：US09451147
申请日：1999-11-30
申请人： Hong Qiu , Soichi Moriya , Hiroyuki Kamei , Koji Sumi , Masami Murai , Tsutomu Nishiwaki
发明人： Hong Qiu , Soichi Moriya , Hiroyuki Kamei , Koji Sumi , Masami Murai , Tsutomu Nishiwaki
IPC分类号： B05D512
CPC分类号： C23C18/1254 , C23C18/1216 , C23C18/1225 , H01L41/1876 , H01L41/318 , Y10T29/42
摘要： A piezoelectric element having a piezoelectric film where the difference in the quantity of lead along the thickness of the film is minimized. The film is obtained by first applying, at least once, a first sol for use in forming a PZT film on a substrate having a lower electrode formed thereon. Second, applying a second sol having the greater lead content than the first sol. Third, subjecting these films to heat treatment at a predetermined temperature at least once. The second sol has a composition capable of forming a piezoelectric film having a Perovskite structure expressed generally by AxByO3, and the content of material constituting the A site of the first sol is greater than what constitutes the A site of the second sol.
摘要翻译：具有压电膜的压电元件，其中沿着膜的厚度的铅的量的差最小化。通过首先在其上形成有下电极的基板上施加至少一次用于形成PZT膜的第一溶胶来获得膜。其次，应用比第一溶胶具有更大铅含量的第二溶胶。第三，使这些膜在预定温度下进行至少一次的热处理。第二溶胶具有能够形成具有通常由AxByO3表示的钙钛矿结构的压电膜的组合物，构成第一溶胶的A位置的材料的含量大于构成第二溶胶的A位置的材料的含量。

4. 发明授权

US07357490B2 Actuator device, liquid jet head and liquid jet apparatus 有权
标题翻译：致动器装置，液体喷射头和液体喷射装置
公开(公告)号：US07357490B2
公开(公告)日：2008-04-15
申请号：US11056207
申请日：2005-02-14
申请人： Maki Ito , Xin-Shan Li , Masami Murai
发明人： Maki Ito , Xin-Shan Li , Masami Murai
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , H01L41/0973
摘要： Provided are an actuator device, a liquid jet head and a liquid jet apparatus, which can improve reliability by preventing peeling-off of respective films forming a vibration plate. The vibration plate has a first oxide film (elastic film 50) formed on the one surface of a passage-forming substrate 10, and a second oxide film (insulation film 55) formed on the first oxide film 50 by use of a sputtering method. In only a part of an interface between the first and second oxide films 50 and 55, an altered layer is formed which has a first element that is a constituent element other than oxygen included in the first oxide film 50 and a second element that is a constituent element other than oxygen included in the second oxide film 55, and which is a layer in which a proportion of the first element is lower than that in the first oxide film 50 and a proportion of the second element is lower than that in the second oxide film 55. A proportion of the altered layer in the entire interface between the first and second oxide films 50 and 55 is not more than 10%.
摘要翻译：提供了致动器装置，液体喷射头和液体喷射装置，其可以通过防止形成振动板的各个膜的剥离来提高可靠性。振动板具有形成在通道形成基板10的一个表面上的第一氧化膜（弹性膜50）和通过溅射法形成在第一氧化物膜50上的第二氧化膜（绝缘膜55）。在第一和第二氧化物膜50和55之间的界面的仅一部分中，形成改变的层，其具有作为第一氧化膜50中包含的除了氧以外的构成元素的第一元素，第二元素是第二氧化膜55中包含的除了氧以外的构成元素，其中第一元素的比例低于第一氧化物膜50中的比例和第二元素的比例低于第二元素氧化膜55。在第一和第二氧化物膜50和55之间的整个界面中的改变层的比例不大于10％。

5. 发明申请

US20070084033A1 Method of manufacturing actuator device and liquid-jet apparatus 有权
标题翻译：致动器装置和液体喷射装置的制造方法
公开(公告)号：US20070084033A1
公开(公告)日：2007-04-19
申请号：US10582112
申请日：2004-12-09
申请人： Maki Ito , Masami Murai , Xin-Shan Li , Toshinao Shinbo
发明人： Maki Ito , Masami Murai , Xin-Shan Li , Toshinao Shinbo
IPC分类号： H04R17/00 , H01G7/00
CPC分类号： B41J2/1629 , B41J2/161 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , Y10T29/42 , Y10T29/435 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49346 , Y10T29/49401
摘要： A method of manufacturing an actuator device configured to prevent separation of a vibration plate and to enhance durability and reliability, and a liquid-jet apparatus are provided. The method includes the steps of forming a vibration plate on one surface of a substrate, and forming a piezoelectric element having a lower electrode, a piezoelectric layer, and an upper electrode on the vibration plate. The step of forming a vibration plate at least includes an insulation film forming step of forming an insulation film made of zirconium oxide by forming a zirconium layer on the one surface side of the substrate in accordance with a sputtering method and subjecting the zirconium layer to thermal oxidation by inserting the substrate formed with the zirconium layer to a thermal oxidation furnace heated to a temperature greater than or equal to 700° C. at a speed greater than or equal to 200 mm/min.
摘要翻译：一种制造致动器装置的方法，该致动器装置被配置为防止振动板的分离并提高耐久性和可靠性，以及液体喷射装置。该方法包括以下步骤：在基板的一个表面上形成振动板，并在振动板上形成具有下电极，压电层和上电极的压电元件。形成振动板的步骤至少包括：绝缘膜形成步骤，通过根据溅射方法在基板的一个表面侧上形成锆层，并将锆层热处理形成由氧化锆制成的绝缘膜通过将形成有锆层的基板通过以大于或等于200mm / min的速度加热至大于或等于700℃的温度的热氧化炉来进行氧化。

6. 发明授权

US07562451B2 Method of manufacturing actuator device for ink jet head 有权
标题翻译：制造用于喷墨头的致动器装置的方法
公开(公告)号：US07562451B2
公开(公告)日：2009-07-21
申请号：US10582112
申请日：2004-12-09
申请人： Maki Ito , Masami Murai , Xin-Shan Li , Toshinao Shinbo
发明人： Maki Ito , Masami Murai , Xin-Shan Li , Toshinao Shinbo
IPC分类号： B23P17/00 , H01L41/00 , H03H9/00
CPC分类号： B41J2/1629 , B41J2/161 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , Y10T29/42 , Y10T29/435 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49346 , Y10T29/49401
摘要： A method of manufacturing an actuator device configured to prevent separation of a vibration plate and to enhance durability and reliability, and a liquid-jet apparatus are provided. The method includes the steps of forming a vibration plate on one surface of a substrate, and forming a piezoelectric element having a lower electrode, a piezoelectric layer, and an upper electrode on the vibration plate. The step of forming a vibration plate at least includes an insulation film forming step of forming an insulation film made of zirconium oxide by forming a zirconium layer on the one surface side of the substrate in accordance with a sputtering method and subjecting the zirconium layer to thermal oxidation by inserting the substrate formed with the zirconium layer to a thermal oxidation furnace heated to a temperature greater than or equal to 700° C. at a speed greater than or equal to 200 mm/min.
摘要翻译：一种制造致动器装置的方法，该致动器装置被配置为防止振动板的分离并提高耐久性和可靠性，以及液体喷射装置。该方法包括以下步骤：在基板的一个表面上形成振动板，并在振动板上形成具有下电极，压电层和上电极的压电元件。形成振动板的步骤至少包括：绝缘膜形成步骤，通过根据溅射方法在基板的一个表面侧上形成锆层，并将锆层热处理形成由氧化锆制成的绝缘膜通过将形成有锆层的基板通过以大于或等于200mm / min的速度加热至大于或等于700℃的温度的热氧化炉来进行氧化。

7. 发明授权

US06883901B2 Piezoelectric element, liquid jetting head, and method for manufacturing thereof 有权
标题翻译：压电元件，液体喷射头及其制造方法
公开(公告)号：US06883901B2
公开(公告)日：2005-04-26
申请号：US10348340
申请日：2003-01-22
申请人： Masami Murai , Xin-Shan Li
发明人： Masami Murai , Xin-Shan Li
IPC分类号： B41J2/045 , B05B17/04 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/16 , H01L21/28 , H01L41/08 , H01L41/09 , H01L41/187 , H01L41/22 , H01L41/318 , H01L41/319 , H01L41/39 , H01L41/43
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2002/14491 , H01L41/1876 , H01L41/318 , H01L41/319 , Y10T29/42 , Y10T29/49155
摘要： The present invention provides a piezoelectric element having consistently high piezoelectric characteristics, and a method for manufacturing a liquid jetting head in which this element is used, by obtaining a degree of orientation that is suitable for a piezoelectric thin film, stably and with good reproducibility. A Ti film is formed on a layered bottom electrode 42, piezoelectric material layers constituting a piezoelectric thin film 43 is formed a plurality of cycles of layer formation, and a top electrode 44 is formed on the piezoelectric thin film 43 to produce a piezoelectric element 40. When the piezoelectric material layers are formed, the annealing temperature of the first cycle of layer formation is set higher than the annealing temperature of the other cycles of layer formation. In addition, the annealing time of the first cycle of layer formation is made longer than the annealing time of the other cycles of layer formation. The degree of orientation in the 100 plane is thereby increased, and the bottom electrode can be prevented from undergoing oxidation or Pd diffusion.
摘要翻译：本发明提供了一种具有一致的高压电特性的压电元件，以及通过以适当的压电薄膜获得适合于压电薄膜的取向度制造具有该元件的液体喷射头的方法，并具有良好的再现性。在层叠的底部电极42上形成Ti膜，构成压电薄膜43的压电材料层形成多个层的形成循环，在压电薄膜43上形成顶部电极44，制作压电元件40 。当形成压电材料层时，层形成的第一循环的退火温度被设定为高于层形成的其它循环的退火温度。此外，层形成的第一循环的退火时间比层形成的其它循环的退火时间长。因此，100平面中的取向度增加，并且可以防止底部电极发生氧化或Pd扩散。

8. 发明申请

US20050078153A1 Piezoelectric element, liquid jetting head, and method for manufacturing thereof 有权
标题翻译：压电元件，液体喷射头及其制造方法
公开(公告)号：US20050078153A1
公开(公告)日：2005-04-14
申请号：US10911709
申请日：2004-08-05
申请人： Masami Murai , Xin-Shan Li
发明人： Masami Murai , Xin-Shan Li
IPC分类号： B41J2/045 , B05B17/04 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/16 , H01L21/28 , H01L41/08 , H01L41/09 , H01L41/187 , H01L41/22 , H01L41/318 , H01L41/319 , H01L41/39 , H01L41/43
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2002/14491 , H01L41/1876 , H01L41/318 , H01L41/319 , Y10T29/42 , Y10T29/49155
摘要： The present invention provides a piezoelectric element having consistently high piezoelectric characteristics, and a method for manufacturing a liquid jetting head in which this element is used, by obtaining a degree of orientation that is suitable for a piezoelectric thin film, stably and with good reproducibility. A Ti film is formed on a layered bottom electrode 42, piezoelectric material layers constituting a piezoelectric thin film 43 is formed a plurality of cycles of layer formation, and a top electrode 44 is formed on the piezoelectric thin film 43 to produce a piezoelectric element 40. When the piezoelectric material layers are formed, the annealing temperature of the first cycle of layer formation is set higher than the annealing temperature of the other cycles of layer formation. In addition, the annealing time of the first cycle of layer formation is made longer than the annealing time of the other cycles of layer formation. The degree of orientation in the 100 plane is thereby increased, and the bottom electrode can be prevented from undergoing oxidation or Pd diffusion.
摘要翻译：本发明提供了一种具有一致的高压电特性的压电元件，以及通过以适当的压电薄膜获得适合于压电薄膜的取向度制造具有该元件的液体喷射头的方法，并具有良好的再现性。在层叠的底部电极42上形成Ti膜，构成压电薄膜43的压电材料层形成多个层的形成循环，在压电薄膜43上形成顶部电极44，制作压电元件40 当形成压电材料层时，层形成的第一循环的退火温度被设定为高于其它层形成循环的退火温度。此外，层形成的第一循环的退火时间比层形成的其它循环的退火时间长。因此，100平面中的取向度增加，并且可以防止底部电极发生氧化或Pd扩散。

9. 发明授权

US07479728B2 Piezoelectric element, method of manufacturing the same, liquid-jet head, method of manufacturing the same, and liquid-jet apparatus 有权
标题翻译：压电元件，制造方法，液体喷射头，其制造方法和液体喷射装置
公开(公告)号：US07479728B2
公开(公告)日：2009-01-20
申请号：US11365854
申请日：2006-03-02
申请人： Masami Murai , Xin-Shan Li
发明人： Masami Murai , Xin-Shan Li
IPC分类号： B41J2/45
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1632 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , H01L41/0477 , H01L41/0973 , H01L41/318 , H01L41/319
摘要： The present invention is to provide a piezoelectric element, a method of manufacturing the same, a liquid-jet head, a method of manufacturing the same, and a liquid-jet apparatus, all of which prevent an inter-layer detachment in a lower electrode. A method of manufacturing a piezoelectric element, comprising the steps of: forming, on a substrate, a lower electrode configured of a plurality of layers which includes a metal layer with a limit thickness of 20 nm at least in its uppermost layer, the metal layer essentially containing iridium; forming a multi-layered piezoelectric layers by means of performing a piezoelectric film forming step a plurality times, the piezoelectric film forming step including an applying step of applying a piezoelectric precursor film onto the lower electrode, a drying step of drying the piezoelectric precursor film which has been applied thereon through the applying step, a degreasing step of degreasing the piezoelectric precursor film which has been dried through the drying step, and a baking step of making the piezoelectric precursor film, which has been degreased through the degreasing step, into a piezoelectric film by baking and crystallizing the piezoelectric precursor film; and forming an upper electrode on the piezoelectric layer.
摘要翻译：本发明提供一种压电元件及其制造方法，液体喷射头及其制造方法以及液体喷射装置，所有这些都防止下电极中的层间分离。一种制造压电元件的方法，包括以下步骤：至少在其最上层，在基板上形成由多个层构成的下电极，所述多个层包括极限厚度为20nm的金属层，所述金属层基本上含有铱; 通过多次进行压电膜形成步骤形成多层压电层，所述压电膜形成步骤包括将压电前体膜施加到下电极的施加步骤，干燥步骤，干燥压电前体膜，通过涂布工序涂敷在其上的脱脂工序，对通过干燥工序进行了干燥的压电体前体膜进行脱脂脱脂工序，以及将通过脱脂工序脱脂的压电体前体膜形成为压电体的压电体通过烘烤和结晶压电前体膜的膜; 以及在所述压电层上形成上电极。

10. 发明授权

US07328490B2 Method for manufacturing a liquid jetting head 有权
标题翻译：液体喷射头的制造方法
公开(公告)号：US07328490B2
公开(公告)日：2008-02-12
申请号：US10911709
申请日：2004-08-05
申请人： Masami Murai , Xin-Shan Li
发明人： Masami Murai , Xin-Shan Li
IPC分类号： H04R17/10
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2002/14491 , H01L41/1876 , H01L41/318 , H01L41/319 , Y10T29/42 , Y10T29/49155
摘要： A method for manufacturing a liquid jetting head includes manufacturing a piezoelectric element having consistently high piezoelectric characteristics that obtains a degree of orientation that is suitable for a piezoelectric thin film, that is stable, and that has good reproducibility. A Ti film is formed on a layered bottom electrode, piezoelectric material layers constituting a piezoelectric thin film are formed in a plurality of cycles of layer formation, and a top electrode is formed on the piezoelectric thin film to produce a piezoelectric element. When the piezoelectric material layers are formed, the annealing temperature of the first cycle of layer formation is set higher than the annealing temperature of the other cycles of layer formation. In addition, the annealing time of the first cycle of layer formation is made longer than the annealing time of the other cycles of layer formation. The degree of orientation in the 100 plane is thereby increased, and the bottom electrode can be prevented from undergoing oxidation or Pd diffusion.
摘要翻译：制造液体喷射头的方法包括制造具有一致的高压电特性的压电元件，其获得适合于压电薄膜的取向度，其是稳定的并且具有良好的再现性。在层叠的底部电极上形成Ti膜，在多层形成循环中形成构成压电薄膜的压电材料层，并且在压电薄膜上形成顶部电极以制造压电元件。当形成压电材料层时，层形成的第一循环的退火温度被设定为高于层形成的其它循环的退火温度。此外，层形成的第一循环的退火时间比层形成的其它循环的退火时间长。因此，100平面中的取向度增加，并且可以防止底部电极发生氧化或Pd扩散。

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