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    • 3. 发明申请
    • MONOLITHIC TRI-AXIS AMR SENSOR AND MANUFACTURING METHOD THEREOF
    • 单轴三轴传感器及其制造方法
    • US20120206137A1
    • 2012-08-16
    • US13194329
    • 2011-07-29
    • Yongyao CaiChongwon ByunYang ZhaoLeyue Jiang
    • Yongyao CaiChongwon ByunYang ZhaoLeyue Jiang
    • G01R33/02
    • G01R33/096G01R33/0206
    • A monolithic tri-axis anisotropic magnetoresistive (AMR) sensor and the method of manufacturing of the AMR sensor are presented. In one embodiment, the monolithic tri-axis AMR sensor includes (a) a substrate, (b) a first horizontal direction sensor disposed on the substrate, (c) a second horizontal direction sensor disposed on the substrate, (d) a third horizontal direction sensor disposed on the substrate, and (e) a flux concentrator disposed on the third horizontal direction sensor, wherein the flux concentrator is in cooperation with the third horizontal direction sensor to realize a function of a Z-axis sensor, such that the Z-axis direction can be effectively measured. The integration of the tri-axis AMR sensor is therefore accomplished. In addition, the integrated tri-axis AMR sensor has low production cost and improved reliability.
    • 介绍了一种单片三轴各向异性磁阻(AMR)传感器及其制造方法。 在一个实施例中,单片三轴AMR传感器包括(a)基板,(b)设置在基板上的第一水平方向传感器,(c)设置在基板上的第二水平方向传感器,(d)第三水平 设置在所述基板上的方向传感器,以及(e)设置在所述第三水平方向传感器上的集流器,其中所述集流器与所述第三水平方向传感器配合,以实现Z轴传感器的功能,使得Z 轴方向可以有效测量。 因此实现了三轴AMR传感器的集成。 另外,三轴AMR传感器的生产成本低,可靠性提高。
    • 4. 发明授权
    • Single chip tri-axis accelerometer
    • 单片三轴加速度计
    • US07424826B2
    • 2008-09-16
    • US11271035
    • 2005-11-10
    • Yaping HuaLeyue JiangYongyao CaiAlbert LeungYang Zhao
    • Yaping HuaLeyue JiangYongyao CaiAlbert LeungYang Zhao
    • G01P15/00
    • G01P15/18G01P15/006
    • Single chip 3-axis thermal accelerometer devices include a substrate, at least one cavity etched in the substrate, a fluid disposed in the cavity, a bridge structure suspended over an opening of the cavity, and a plurality of heater elements and temperature sensing elements disposed on the bridge structure. The substrate has a substantially planar surface defined by X and Y coordinate axes, and the bridge structure is suspended over the opening of the cavity in the X-Y plane. In one embodiment, the bridge structure is configured to position at least two of the temperature sensing elements out of the X-Y plane. The heater and temperature sensing elements are disposed on the bridge structure in optimized arrangements for providing reduced temperature coefficients and for producing output voltages having reduced DC offset and drift.
    • 单芯片3轴热加速度计装置包括衬底,在衬底中蚀刻的至少一个腔,设置在空腔中的流体,悬挂在空腔的开口上的桥结构,以及多个加热器元件和温度感测元件, 在桥梁结构上。 衬底具有由X和Y坐标轴限定的基本平坦的表面,并且桥结构悬挂在X-Y平面中的空腔的开口上。 在一个实施例中,桥结构被配置为将至少两个温度感测元件定位在X-Y平面之外。 加热器和温度感测元件以优化的布置设置在桥结构上,以提供降低的温度系数并且用于产生具有降低的DC偏移和漂移的输出电压。
    • 6. 发明申请
    • Single chip tri-axis accelerometer
    • 单片三轴加速度计
    • US20070101813A1
    • 2007-05-10
    • US11271035
    • 2005-11-10
    • Yaping HuaLeyue JiangYongyao CaiAlbert LeungYang Zhao
    • Yaping HuaLeyue JiangYongyao CaiAlbert LeungYang Zhao
    • G01P15/00
    • G01P15/18G01P15/006
    • Single chip 3-axis thermal accelerometer devices include a substrate, at least one cavity etched in the substrate, a fluid disposed in the cavity, a bridge structure suspended over an opening of the cavity, and a plurality of heater elements and temperature sensing elements disposed on the bridge structure. The substrate has a substantially planar surface defined by X and Y coordinate axes, and the bridge structure is suspended over the opening of the cavity in the X-Y plane. In one embodiment, the bridge structure is configured to position at least two of the temperature sensing elements out of the X-Y plane. The heater and temperature sensing elements are disposed on the bridge structure in optimized arrangements for providing reduced temperature coefficients and for producing output voltages having reduced DC offset and drift.
    • 单芯片3轴热加速度计装置包括衬底,在衬底中蚀刻的至少一个腔,设置在空腔中的流体,悬挂在空腔的开口上的桥结构,以及多个加热器元件和温度感测元件, 在桥梁结构上。 衬底具有由X和Y坐标轴限定的基本平坦的表面,并且桥结构悬挂在X-Y平面中的空腔的开口上。 在一个实施例中,桥结构被配置为将至少两个温度感测元件定位在X-Y平面之外。 加热器和温度感测元件以优化的布置设置在桥结构上,以提供降低的温度系数并且用于产生具有降低的DC偏移和漂移的输出电压。
    • 10. 发明授权
    • Plasma oil-free ignition system in oxygen enriched environment
    • 富氧等离子体无油点火系统
    • US09181919B2
    • 2015-11-10
    • US13808108
    • 2012-02-16
    • Lu ZhengJianwen ZhangYang ZhaoYuehua Li
    • Lu ZhengJianwen ZhangYang ZhaoYuehua Li
    • F02P23/00F23Q7/02F23D1/00
    • F02P23/00F23D1/00F23D2207/00F23Q7/02Y02E20/322Y02E20/344
    • A plasma oil-free ignition system in oxygen enriched environment comprises a plasma generator and a burner. The plasma oil-free ignition system comprises a sleeve group coaxially arranged with the burner, and the sleeve group comprises multiple coaxially sleeved sleeves. Annular spaces are formed between adjacent sleeves and between the sleeves and the burner. Oxygen ducts are arranged on the sleeves, and oxygen ducts are arranged on the burner. Plasmas jetted by the plasma generators form a local high temperature zone filled with high temperature plasma and pulverized coal air flow. A certain amount of oxygen is fed to the burner through the oxygen duct therein to form local oxygen enriched zones in the annular spaces and the subsequent adjacent spaces through which air flows, thus realizing oxygen enriched combustion of volatile matters or coke or mixture thereof, and combustion the pulverized coal air flow more intensely to release more heat so as to ignite the primary air pulverized coal air flow quickly and burn the pulverized coal air flow stably. The invention has simple structure, is applicable to different coal types, especially applicable to the plasma oil-free ignition system in oxygen enriched environment of coal types with low volatile matters.
    • 富氧环境中的等离子体无油点火系统包括等离子体发生器和燃烧器。 等离子体无油点火系统包括与燃烧器同轴布置的套筒组,并且套筒组包括多个同轴套筒套筒。 环形空间形成在相邻的套筒之间以及袖子和燃烧器之间。 氧气管布置在套管上,氧气管布置在燃烧器上。 由等离子体发生器喷射的等离子体形成充满高温等离子体和粉煤气流的局部高温区。 通过其中的氧气管将一定量的氧气供给到燃烧器,以在空气流动的环形空间和随后的相邻空间中形成局部富氧区,从而实现挥发性物质或焦炭或其混合物的富氧燃烧,以及 燃煤粉煤气流量更大,释放更多的热量,从而快速点燃一次空气粉煤气流,稳定地燃烧粉煤气流。 本发明结构简单,适用于不同类型的煤炭,特别适用于低挥发性煤炭类型的富氧环境中的等离子体无油点火系统。