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1. 发明授权

US07912100B2 Femtosecond laser processing system with process parameters, controls and feedback 有权
标题翻译：飞秒激光加工系统具有工艺参数，控制和反馈
公开(公告)号：US07912100B2
公开(公告)日：2011-03-22
申请号：US12339744
申请日：2008-12-19
申请人： Lawrence Shah , James M. Bovatsek , Alan Y. Arai , Tadashi Yamamoto , Rajesh S. Patel , Donald J. Harter
发明人： Lawrence Shah , James M. Bovatsek , Alan Y. Arai , Tadashi Yamamoto , Rajesh S. Patel , Donald J. Harter
IPC分类号： H01S3/30
CPC分类号： H01S3/10038 , G01J11/00 , H01S3/0014 , H01S3/005 , H01S3/0057 , H01S3/0064 , H01S3/0078 , H01S3/06754 , H01S3/10023 , H01S3/10061 , H01S3/102 , H01S3/1024 , H01S3/108 , H01S3/109 , H01S3/1305 , H01S3/1618
摘要： A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.
摘要翻译：飞秒激光激光处理系统，具有飞秒激光，变频光学，光束操纵光学，目标运动控制，处理室，诊断系统和系统控制模块。基于飞秒激光的激光加工系统允许在微加工中利用独特的热控制，并且该系统具有更大的输出光束稳定性，连续可变的重复率和独特的时间波束整形能力。

2. 发明授权

US08279903B2 Femtosecond laser processing system with process parameters, controls and feedback 有权
标题翻译：飞秒激光加工系统具有工艺参数，控制和反馈
公开(公告)号：US08279903B2
公开(公告)日：2012-10-02
申请号：US13025408
申请日：2011-02-11
申请人： Lawrence Shah , James M. Bovatsek , Alan Y. Arai , Tadashi Yamamoto , Rajesh S. Patel , Donald J. Harter
发明人： Lawrence Shah , James M. Bovatsek , Alan Y. Arai , Tadashi Yamamoto , Rajesh S. Patel , Donald J. Harter
IPC分类号： H01S3/13
CPC分类号： H01S3/10038 , G01J11/00 , H01S3/0014 , H01S3/005 , H01S3/0057 , H01S3/0064 , H01S3/0078 , H01S3/06754 , H01S3/10023 , H01S3/10061 , H01S3/102 , H01S3/1024 , H01S3/108 , H01S3/109 , H01S3/1305 , H01S3/1618
摘要： A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.
摘要翻译：飞秒激光激光处理系统，具有飞秒激光，变频光学，光束操纵光学，目标运动控制，处理室，诊断系统和系统控制模块。基于飞秒激光的激光加工系统允许在微加工中利用独特的热控制，并且该系统具有更大的输出光束稳定性，连续可变的重复率和独特的时间波束整形能力。

3. 发明授权

US08644356B2 Femtosecond laser processing system with process parameters controls and feedback 有权
标题翻译：飞秒激光加工系统具有过程参数控制和反馈
公开(公告)号：US08644356B2
公开(公告)日：2014-02-04
申请号：US13611271
申请日：2012-09-12
申请人： Lawrence Shah , James M. Bovatsek , Alan Y. Arai , Tadashi Yamamoto , Rajesh S. Patel , Donald J. Harter
发明人： Lawrence Shah , James M. Bovatsek , Alan Y. Arai , Tadashi Yamamoto , Rajesh S. Patel , Donald J. Harter
IPC分类号： H01S3/10
CPC分类号： H01S3/10038 , G01J11/00 , H01S3/0014 , H01S3/005 , H01S3/0057 , H01S3/0064 , H01S3/0078 , H01S3/06754 , H01S3/10023 , H01S3/10061 , H01S3/102 , H01S3/1024 , H01S3/108 , H01S3/109 , H01S3/1305 , H01S3/1618
摘要： A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.
摘要翻译：飞秒激光激光处理系统，具有飞秒激光，变频光学，光束操纵光学，目标运动控制，处理室，诊断系统和系统控制模块。基于飞秒激光的激光加工系统允许在微加工中利用独特的热控制，并且该系统具有更大的输出光束稳定性，连续可变的重复率和独特的时间波束整形能力。

4. 发明授权

US07486705B2 Femtosecond laser processing system with process parameters, controls and feedback 有权
标题翻译：飞秒激光加工系统具有工艺参数，控制和反馈
公开(公告)号：US07486705B2
公开(公告)日：2009-02-03
申请号：US10813269
申请日：2004-03-31
申请人： Lawrence Shah , James M Bovatsek , Alan Y Arai , Tadashi Yamamoto , Rajesh S. Patel , Donald J. Harter
发明人： Lawrence Shah , James M Bovatsek , Alan Y Arai , Tadashi Yamamoto , Rajesh S. Patel , Donald J. Harter
IPC分类号： H01S3/10
CPC分类号： H01S3/10038 , G01J11/00 , H01S3/0014 , H01S3/005 , H01S3/0057 , H01S3/0064 , H01S3/0078 , H01S3/06754 , H01S3/10023 , H01S3/10061 , H01S3/102 , H01S3/1024 , H01S3/108 , H01S3/109 , H01S3/1305 , H01S3/1618
摘要： A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.
摘要翻译：飞秒激光激光处理系统，具有飞秒激光，变频光学，光束操纵光学，目标运动控制，处理室，诊断系统和系统控制模块。基于飞秒激光的激光加工系统允许在微加工中利用独特的热控制，并且该系统具有更大的输出光束稳定性，连续可变的重复率和独特的时间波束整形能力。

5. 发明申请

US20090097515A1 YB: AND ND: MODE-LOCKED OSCILLATORS AND FIBER SYSTEMS INCORPORATED IN SOLID-STATE SHORT PULSE LASER SYSTEMS 有权
标题翻译： YB：和ND：在固态短脉冲激光系统中并入的模式锁定振荡器和光纤系统
公开(公告)号：US20090097515A1
公开(公告)日：2009-04-16
申请号：US12340036
申请日：2008-12-19
申请人： Donald J. HARTER , Gyu C. Cho , Zhenlin Liu , Martin E. Fermann , Xinhua Gu , Salvatore F. Nati , Lawrence Shah , Ingmar Hartl , Mark Bendett
发明人： Donald J. HARTER , Gyu C. Cho , Zhenlin Liu , Martin E. Fermann , Xinhua Gu , Salvatore F. Nati , Lawrence Shah , Ingmar Hartl , Mark Bendett
IPC分类号： H01S3/10
CPC分类号： H01S3/1106 , H01S3/005 , H01S3/0057 , H01S3/0064 , H01S3/0085 , H01S3/0092 , H01S3/06712 , H01S3/06725 , H01S3/0675 , H01S3/06754 , H01S3/06758 , H01S3/094003 , H01S3/094019 , H01S3/094042 , H01S3/094076 , H01S3/09415 , H01S3/1086 , H01S3/109 , H01S3/11 , H01S3/1118 , H01S3/1305 , H01S3/1611 , H01S3/1618 , H01S3/1643 , H01S3/235
摘要： The invention describes classes of robust fiber laser systems usable as pulse sources for Nd: or Yb: based regenerative amplifiers intended for industrial settings. The invention modifies adapts and incorporates several recent advances in FCPA systems to use as the input source for this new class of regenerative amplifier.
摘要翻译：本发明描述了可用作用于工业设置的用于基于Nd：或Yb：的再生放大器的脉冲源的鲁棒光纤激光器系统。本发明修改了适应性，并结合了FCPA系统中的几个最新进展，用作这种新型再生放大器的输入源。

6. 发明授权

US08509270B2 Yb: and Nd: mode-locked oscillators and fiber systems incorporated in solid-state short pulse laser systems 有权
公开(公告)号：US08509270B2
公开(公告)日：2013-08-13
申请号：US13332950
申请日：2011-12-21
申请人： Donald J. Harter , Gyu C. Cho , Zhenlin Liu , Martin E. Fermann , Xinhu Gu , Salvatore F. Nati , Lawrence Shah , Ingmar Hartl , Mark Bendett
发明人： Donald J. Harter , Gyu C. Cho , Zhenlin Liu , Martin E. Fermann , Xinhu Gu , Salvatore F. Nati , Lawrence Shah , Ingmar Hartl , Mark Bendett
IPC分类号： H01S3/10 , H01S3/30
CPC分类号： H01S3/1106 , H01S3/005 , H01S3/0057 , H01S3/0064 , H01S3/0085 , H01S3/0092 , H01S3/06712 , H01S3/06725 , H01S3/0675 , H01S3/06754 , H01S3/06758 , H01S3/094003 , H01S3/094019 , H01S3/094042 , H01S3/094076 , H01S3/09415 , H01S3/1086 , H01S3/109 , H01S3/11 , H01S3/1118 , H01S3/1305 , H01S3/1611 , H01S3/1618 , H01S3/1643 , H01S3/235
摘要： The invention describes classes of robust fiber laser systems usable as pulse sources for Nd: or Yb: based regenerative amplifiers intended for industrial settings. The invention modifies adapts and incorporates several recent advances in FCPA systems to use as the input source for this new class of regenerative amplifier.

7. 发明授权

US08855151B2 YB: and ND: mode-locked oscilltors and fiber systems incorporated in solid-state short pulse laser systems 有权
标题翻译： YB：和ND：固态短脉冲激光系统中嵌入的锁模振荡器和光纤系统
公开(公告)号：US08855151B2
公开(公告)日：2014-10-07
申请号：US13935679
申请日：2013-07-05
申请人： Donald J. Harter , Gyu C. Cho , Zhenlin Liu , Martin E. Fermann , Xinhua Gu , Salvatore F. Nati , Lawrence Shah , Ingmar Hartl , Mark Bendett
发明人： Donald J. Harter , Gyu C. Cho , Zhenlin Liu , Martin E. Fermann , Xinhua Gu , Salvatore F. Nati , Lawrence Shah , Ingmar Hartl , Mark Bendett
IPC分类号： H01S3/30 , H01S3/10 , H01S3/00 , H01S3/067 , H01S3/11 , H01S3/23 , H01S3/109 , H01S3/094 , H01S3/108 , H01S3/16
CPC分类号： H01S3/1106 , H01S3/005 , H01S3/0057 , H01S3/0064 , H01S3/0085 , H01S3/0092 , H01S3/06712 , H01S3/06725 , H01S3/0675 , H01S3/06754 , H01S3/06758 , H01S3/094003 , H01S3/094019 , H01S3/094042 , H01S3/094076 , H01S3/09415 , H01S3/1086 , H01S3/109 , H01S3/11 , H01S3/1118 , H01S3/1305 , H01S3/1611 , H01S3/1618 , H01S3/1643 , H01S3/235
摘要： The invention describes classes of robust fiber laser systems usable as pulse sources for Nd: or Yb: based regenerative amplifiers intended for industrial settings. The invention modifies adapts and incorporates several recent advances in FCPA systems to use as the input source for this new class of regenerative amplifier.
摘要翻译：本发明描述了可用作用于工业设置的用于基于Nd：或Yb：的再生放大器的脉冲源的鲁棒光纤激光器系统。本发明修改了适应性，并结合了FCPA系统中的几个最新进展，用作这种新型再生放大器的输入源。

8. 发明授权

US07508853B2 Yb: and Nd: mode-locked oscillators and fiber systems incorporated in solid-state short pulse laser systems 有权
标题翻译： Yb：和Nd：锁模振荡器和光纤系统并入固态短脉冲激光系统
公开(公告)号：US07508853B2
公开(公告)日：2009-03-24
申请号：US11005218
申请日：2004-12-07
申请人： Donald J. Harter , Gyu C. Cho , Zhenlin Liu , Martin E. Fermann , Xinhua Gu , Salvatore F. Nati , Lawrence Shah , Ingmar Hartl , Mark Bendett
发明人： Donald J. Harter , Gyu C. Cho , Zhenlin Liu , Martin E. Fermann , Xinhua Gu , Salvatore F. Nati , Lawrence Shah , Ingmar Hartl , Mark Bendett
IPC分类号： H01S3/30 , H01S3/13
CPC分类号： H01S3/1106 , H01S3/005 , H01S3/0057 , H01S3/0064 , H01S3/0085 , H01S3/0092 , H01S3/06712 , H01S3/06725 , H01S3/0675 , H01S3/06754 , H01S3/06758 , H01S3/094003 , H01S3/094019 , H01S3/094042 , H01S3/094076 , H01S3/09415 , H01S3/1086 , H01S3/109 , H01S3/11 , H01S3/1118 , H01S3/1305 , H01S3/1611 , H01S3/1618 , H01S3/1643 , H01S3/235
摘要： The invention describes classes of robust fiber laser systems usable as pulse sources for Nd: or Yb: based regenerative amplifiers intended for industrial settings. The invention modifies adapts and incorporates several recent advances in FCPA systems to use as the input source for this new class of regenerative amplifier.
摘要翻译：本发明描述了可用作用于工业设置的用于基于Nd：或Yb：的再生放大器的脉冲源的鲁棒光纤激光器系统。本发明修改了适应性，并结合了FCPA系统中的几个最新进展，用作这种新型再生放大器的输入源。

9. 发明申请

US20050226287A1 Femtosecond laser processing system with process parameters, controls and feedback 有权
标题翻译：飞秒激光加工系统具有工艺参数，控制和反馈
公开(公告)号：US20050226287A1
公开(公告)日：2005-10-13
申请号：US10813269
申请日：2004-03-31
申请人： Lawrence Shah , James Bovatsek , Alan Arai , Tadashi Yamamoto , Rajesh Patel , Donald Harter
发明人： Lawrence Shah , James Bovatsek , Alan Arai , Tadashi Yamamoto , Rajesh Patel , Donald Harter
IPC分类号： G01J11/00 , H01S3/00 , H01S3/067 , H01S3/10 , H01S3/102 , H01S3/109 , H01S3/13 , H01S3/16 , H01S3/23
CPC分类号： H01S3/10038 , G01J11/00 , H01S3/0014 , H01S3/005 , H01S3/0057 , H01S3/0064 , H01S3/0078 , H01S3/06754 , H01S3/10023 , H01S3/10061 , H01S3/102 , H01S3/1024 , H01S3/108 , H01S3/109 , H01S3/1305 , H01S3/1618
摘要： A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.
摘要翻译：飞秒激光激光处理系统，具有飞秒激光，变频光学，光束操纵光学，目标运动控制，处理室，诊断系统和系统控制模块。基于飞秒激光的激光加工系统允许在微加工中利用独特的热控制，并且该系统具有更大的输出光束稳定性，连续可变的重复率和独特的时间波束整形能力。

10. 发明授权

US09321126B2 Laser-based material processing apparatus and methods 有权
标题翻译：激光材料加工设备及方法
公开(公告)号：US09321126B2
公开(公告)日：2016-04-26
申请号：US13037614
申请日：2011-03-01
申请人： Jingzhou Xu , Jin Young Sohn , Gyu Cheon Cho , Lawrence Shah
发明人： Jingzhou Xu , Jin Young Sohn , Gyu Cheon Cho , Lawrence Shah
IPC分类号： B23K26/00
CPC分类号： B23K26/00 , Y02P40/57
摘要： Various embodiments may be used for laser-based modification of target material of a workpiece while advantageously achieving improvements in processing throughput and/or quality. Embodiments of a method of processing may include focusing and directing laser pulses to a region of the workpiece at a pulse width sufficiently short so that material is efficiently removed by nonlinear optical absorption from the region and a quantity of heat affected zone and thermal stress on the material within the region, proximate to the region, or both is reduced relative to a quantity obtainable using a laser with longer pulses. In at least one embodiment, an ultrashort pulse laser system may include at least one of a fiber amplifier or fiber laser. Various embodiments are suitable for at least one of dicing, cutting, scribing, and forming features on or within a composite material.
摘要翻译：各种实施例可以用于对工件的目标材料进行基于激光的修改，同时有利地实现处理生产量和/或质量的改善。一种处理方法的实施例可以包括将激光脉冲聚焦并且以足够短的脉冲宽度将激光脉冲引导到工件的区域，使得通过来自该区域的非线性光学吸收和一定数量的热影响区域和区域内的材料，邻近区域或两者都相对于使用具有较长脉冲的激光可获得的量减少。在至少一个实施例中，超短脉冲激光系统可以包括光纤放大器或光纤激光器中的至少一个。各种实施例适合于在复合材料上或复合材料内的切割，切割，划线和成形特征中的至少一个。

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