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    • 8. 发明授权
    • Micro-cavity MEMS device and method of fabricating same
    • 微腔MEMS器件及其制造方法
    • US07394332B2
    • 2008-07-01
    • US11217163
    • 2005-09-01
    • Louis C. HsuLowrence A. ClevengerTimothy J. DaltonCarl J. RadensKeith Kwong Hon WongChih-Chao Yang
    • Louis C. HsuLowrence A. ClevengerTimothy J. DaltonCarl J. RadensKeith Kwong Hon WongChih-Chao Yang
    • H01P1/10
    • H01H50/005H01H2050/007Y10T29/4902Y10T29/49105Y10T29/49147
    • A MEM switch is described having a free moving element within in micro-cavity, and guided by at least one inductive element. The switch consists of an upper inductive coil; an optional lower inductive coil, each having a metallic core preferably made of permalloy; a micro-cavity; and a free-moving switching element preferably also made of magnetic material. Switching is achieved by passing a current through the upper coil, inducing a magnetic field in the coil element. The magnetic field attracts the free-moving magnetic element upwards, shorting two open wires and thus, closing the switch. When the current flow stops or is reversed, the free-moving magnetic element drops back by gravity to the bottom of the micro-cavity and the wires open. When the chip is not mounted with the correct orientation, gravity cannot be used. In such an instance, a lower coil becomes necessary to pull the free-moving switching element back and holding it at its original position.
    • 描述了一种MEM开关,其具有在微腔内的自由移动元件,并由至少一个电感元件引导。 开关由上感应线圈组成; 可选的下感应线圈,每个具有优选由坡莫合金制成的金属芯; 微腔; 以及优选也由磁性材料制成的自由移动的开关元件。 通过使电流通过上部线圈来实现切换,从而在线圈元件中产生磁场。 磁场向上吸引自由移动的磁性元件,短路两根开放的电线,从而闭合开关。 当电流停止或反转时,自由移动的磁性元件通过重力返回到微腔的底部并且电线打开。 当芯片未正确安装时,重力不能使用。 在这种情况下,需要下部线圈将自由移动的开关元件拉回并将其保持在其原始位置。