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    • 1. 发明申请
    • SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME
    • 半导体结构及其形成方法
    • WO2013078950A1
    • 2013-06-06
    • PCT/CN2012/084694
    • 2012-11-15
    • LI, YuanGUO, Lei
    • LI, YuanGUO, Lei
    • H01L27/00
    • H01L33/0062H01L33/007H01L33/16H01L33/20
    • A semiconductor structure and a method for forming the same are provided. The semiconductor structure comprises: a substrate (100); and a plurality of zigzag structures (200) formed on a surface of the substrate (100), in which each zigzag structure (200) has a first long side (202) and a first short side (204), the first long side (202) of one zigzag structure (200) is adjacent to the first short side (204) of another zigzag structure (200) adjacent to the one zigzag structure (200), each first long side (202) defines a first surface (300) of each zigzag structure (200), each first short side (204) defines a second surface (302) of each zigzag structure, and each first surface (300) is a growth surface for a compound semiconductor layer.
    • 提供半导体结构及其形成方法。 半导体结构包括:衬底(100); 以及形成在所述基板(100)的表面上的多个锯齿形结构(200),其中每个锯齿形结构(200)具有第一长边(202)和第一短边(204),所述第一长边 一个之字形结构(200)的第一表面(202)与邻近一个之字形结构(200)的另一个锯齿形结构(200)的第一短边(204)相邻,每个第一长边(202)限定第一表面(300) 每个Z字形结构(200)的每个第一短边(204)限定每个锯齿形结构的第二表面(302),并且每个第一表面(300)是化合物半导体层的生长表面。
    • 4. 发明申请
    • SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING SAME
    • 半导体结构及其形成方法
    • WO2013117155A1
    • 2013-08-15
    • PCT/CN2013/071398
    • 2013-02-05
    • GUO, LeiLI, Yuan
    • GUO, LeiLI, Yuan
    • H01L21/20H01L33/00H01L29/02H01L21/02
    • H01L29/1075H01L21/0237H01L21/02439H01L21/02521H01L21/02639H01L21/02647H01L29/2003
    • A method for forming a semiconductor structure is provided. The method comprises steps of: providing a substrate (100); forming a first single crystal semiconductor layer (200) on the substrate (100); etching the first single crystal semiconductor layer (200) to form a plurality of holes or trenches extending to a top surface of the substrate (100), or etching the first single crystal semiconductor layer (200) and the substrate (100) to form a plurality of holes or trenches extending into the substrate (100); etching the substrate (100) through the plurality of holes or trenches to form a porous structure in a region under the top surface of the substrate (100), thus forming a patterned structure on the porous structure; and depositing a single crystal semiconductor material to form a second single crystal semiconductor layer (300) on the patterned structure.
    • 提供一种形成半导体结构的方法。 该方法包括以下步骤:提供衬底(100); 在所述基板(100)上形成第一单晶半导体层(200); 蚀刻第一单晶半导体层(200)以形成延伸到衬底(100)的顶表面的多个孔或沟槽,或蚀刻第一单晶半导体层(200)和衬底(100)以形成 多个孔或沟槽延伸到衬底(100)中; 通过所述多个孔或沟槽蚀刻所述衬底(100)以在所述衬底(100)的顶表面下方的区域中形成多孔结构,从而在所述多孔结构上形成图案化结构; 以及沉积单晶半导体材料以在所述图案化结构上形成第二单晶半导体层(300)。
    • 5. 发明申请
    • SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING SAME
    • 半导体结构及其形成方法
    • WO2013117153A1
    • 2013-08-15
    • PCT/CN2013/071388
    • 2013-02-05
    • GUO, LeiLI, Yuan
    • GUO, LeiLI, Yuan
    • H01L21/02
    • H01L29/1075H01L21/0237H01L21/02439H01L21/02521H01L21/02639H01L21/02647H01L21/0265H01L29/2003
    • A method for forming a semiconductor structure is provided. The method comprises steps of: providing a substrate (100); forming a first single crystal semiconductor layer (200) on the substrate (100); etching the first single crystal semiconductor layer (200) to form a plurality of holes or trenches extending to a top surface of the substrate (100), or etching the first single crystal semiconductor layer (200) and the substrate (100) to form a plurality of holes or trenches extending into the substrate (100); etching the substrate (100) through the plurality of holes or trenches to form a plurality of supporting structures (1001) in a region under the top surface of the substrate (100), thus forming a patterned structure; and depositing a single crystal semiconductor material to form a second single crystal semiconductor layer (300) on the patterned structure.
    • 提供一种形成半导体结构的方法。 该方法包括以下步骤:提供衬底(100); 在所述基板(100)上形成第一单晶半导体层(200); 蚀刻第一单晶半导体层(200)以形成延伸到衬底(100)的顶表面的多个孔或沟槽,或蚀刻第一单晶半导体层(200)和衬底(100),以形成 多个孔或沟槽延伸到衬底(100)中; 通过所述多个孔或沟槽蚀刻所述衬底(100)以在所述衬底(100)的顶表面下方的区域中形成多个支撑结构(1001),从而形成图案化结构; 以及沉积单晶半导体材料以在所述图案化结构上形成第二单晶半导体层(300)。
    • 7. 发明申请
    • GROUP III-V SEMICONDUCTOR DC TRANSFORMER AND METHOD FOR FORMING SAME
    • 第III-V族半导体直流变压器及其形成方法
    • WO2013159693A1
    • 2013-10-31
    • PCT/CN2013/074556
    • 2013-04-23
    • GUO, LeiZHAO, Dongjing
    • GUO, LeiZHAO, Dongjing
    • H02M3/02H01L31/18
    • H01L31/173H02M3/04Y02E10/56
    • A group III-V semiconductor DC transformer and a method for forming the same are provided. The group III-V semiconductor DC transformer comprises: an isolation layer (3) with a material of transparent insulating dielectric; a plurality of group III-V semiconductor light emitting diodes (1) formed on one surface of the isolation layer (3) for emitting a working light with specified wavelength to convert an electric energy into an optical energy; a plurality of group III-V semiconductor photovoltaic cells (2) formed on one surface of the isolation layer (3) for absorbing the working light to convert the optical energy into the electric energy, in which a working light spectrum of each group III-V semiconductor light emitting diode (1) is matched with that of each group III-V semiconductor photovoltaic cell (2), and the isolation layer (3) is transparent to the working light.
    • 提供III-V族半导体DC变压器及其形成方法。 III-V族半导体DC变压器包括:具有透明绝缘介电材料的隔离层(3); 多个III-V族半导体发光二极管(1),形成在所述隔离层(3)的一个表面上,用于发射具有特定波长的工作光以将电能转换为光能; 形成在隔离层(3)的一个表面上的用于吸收工作光以将光能转换成电能的多个III-V族半导体光伏电池(2),其中每组III- V型半导体发光二极管(1)与各III-V族半导体光伏电池(2)的配合,隔离层(3)对于工作光是透明的。
    • 9. 发明申请
    • STRAINED GE-ON-INSULATOR STRUCTURE AND METHOD FOR FORMING THE SAME
    • 应变导电绝缘体结构及其形成方法
    • WO2012119418A1
    • 2012-09-13
    • PCT/CN2011/078946
    • 2011-08-25
    • TSINGHUA UNIVERSITYWANG, JingXU, JunGUO, Lei
    • WANG, JingXU, JunGUO, Lei
    • H01L21/336H01L21/20
    • H01L21/76283H01L21/76251H01L29/7843H01L29/7846H01L29/7848H01L29/78684
    • A strained Ge-on-insulator structure is provided, comprising: a silicon substrate (1100), in which an oxide insulating layer (1200) is formed on a surface of the silicon substrate (1100); a Ge layer (1300) formed on the oxide insulating layer (1200), in which a first passivation layer (1400) is formed between the Ge layer (1300) and the oxide insulating layer (1200); a gate stack (1600, 1700) formed on the Ge layer (1300), a channel region formed below the gate stack (1600, 1700), and a source (1800) and a drain (1800) formed on sides of the channel region; and a plurality of shallow trench isolation structures (1900) extending into the silicon substrate (1100) and filled with an insulating dielectric material to produce a strain in the channel region. Further, a method for forming the strained Ge-on-insulator structure is also provided.
    • 提供了一种应变绝缘体上的结构,包括:在硅衬底(1100)的表面上形成氧化物绝缘层(1200)的硅衬底(1100); 形成在氧化物绝缘层(1200)上的Ge层(1300),其中在Ge层(1300)和氧化物绝缘层(1200)之间形成第一钝化层(1400); 形成在Ge层(1300)上的栅极堆叠(1600,1700),形成在栅极叠层(1600,1700)下方的沟道区域,以及形成在沟道区域侧面上的源极(1800)和漏极(1800) ; 以及多个浅沟槽隔离结构(1900),其延伸到硅衬底(1100)中并且填充有绝缘介电材料以在沟道区域中产生应变。 此外,还提供了用于形成应变的绝缘体上Ge的结构的方法。