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    • 2. 发明申请
    • Fabrication method of thin film transistor substrate for X-ray detector
    • X射线检测器用薄膜晶体管基板的制造方法
    • US20030096441A1
    • 2003-05-22
    • US10330126
    • 2002-12-30
    • LG.Philips LCD Co., LTD
    • Ik Soo Kim
    • H01L021/00H01L021/84H01L027/12H01L031/0392H01L027/01
    • H01L29/66765H01L29/4908
    • A method of fabricating a thin film transistor substrate for an X-ray detector reduces the number of steps in etching processes using masks. In the method, a gate line, a gate pad and a gate electrode of a thin film transistor are simultaneously formed on a certain substrate. A gate insulating layer is entirely coated, and then a semiconductor layer of the thin film transistor is formed. A data pad, a data line, source and drain electrodes of the thin film transistor and a ground electrode are simultaneously formed. An electrode for a charging capacitor is formed, and then an insulating film for the charging capacitor is formed. An electrode for preventing an etching of the insulating film for the charging capacitor is formed. A protective film for protecting the thin film transistor is formed. Contact holes are formed in the protective film. Finally, a pixel electrode is provided. Accordingly, the data pad and the data line are formed of a molybdenum metal and at the same layer, and the molybdenum layers of the data pad and the gate pad are connected to the driver IC chip using the wire bonding technique. As a result, the present method is capable of reducing nine-step mask etching processes in the prior art to a seven-step mask etching processes.
    • 制造用于X射线检测器的薄膜晶体管衬底的方法减少了使用掩模的蚀刻工艺中的步骤数。 在该方法中,在一定的衬底上同时形成薄膜晶体管的栅极线,栅极焊盘和栅电极。 完全涂覆栅极绝缘层,然后形成薄膜晶体管的半导体层。 同时形成薄膜晶体管的数据焊盘,数据线,源极和漏极以及接地电极。 形成用于充电电容器的电极,然后形成用于充电电容器的绝缘膜。 形成用于防止用于充电电容器的绝缘膜的蚀刻的电极。 形成用于保护薄膜晶体管的保护膜。 在保护膜中形成接触孔。 最后,提供像素电极。 因此,数据焊盘和数据线由钼金属形成,在相同的层上,数据焊盘和栅极焊盘的钼层使用引线接合技术连接到驱动器IC芯片。 结果,本方法能够将现有技术中的九步掩模蚀刻工艺减少到七步掩模蚀刻工艺。