会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 9. 发明专利
    • Gel polymer electrolyte comprising ionic liquid and electrochromic device using the same
    • AU2005248272B2
    • 2008-05-08
    • AU2005248272
    • 2005-04-18
    • LG CHEMICAL LTD
    • OH JAE-SEUNGKIM SANG-HOKWON WON-JONGLEE BYOUNG-BAEPARK JAE-DUKMUN SU-JIN
    • C09K9/00C09K9/02G02F1/00G02F1/15G02F1/153
    • The present invention related to a multiple fluid supplying apparatus for carrier of semiconductor wafer polishing system which comprises a rotary union at a driving side and a rotary union at a following side. The rotary union at a driving side comprises a central rotation axle; a fluid supplying tube body being disposed coaxially with the central rotation axle, being fixedly supported, and being formed with a plurality of fluid paths at an inside thereof; a sealing housing being disposed coaxially on an outer circumference of the fluid supplying tube body so as to be rotatably supported; and a sealing unit for maintaining air-tightness between the fluid supplying tube body and the sealing housing. The rotary union at a following side comprises a central rotation axle; a sealing housing being disposed coaxially along a circumference of the central rotation axle, one end thereof being fixed to an inside of the spindle so as to support the central rotation axle to be rotated stably; and a sealing unit for maintaining air-tightness between the central rotation axle and the sealing housing. According to the present invention, 1) lowering sealing performance by a rolling phenomenon occurring between both ends of a central rotation axle when it rotates is prevented, 2) operational fluid is supplied smoothly to each carrier, and 3) high sealing performance is maintained while simplifying a contact portion between a rotational body and a non-rotational body into a single-layered sealing structure.