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    • 9. 发明授权
    • Manufacturing method of image sensor of vertical type
    • 垂直型图像传感器的制造方法
    • US07883913B2
    • 2011-02-08
    • US12638121
    • 2009-12-15
    • Jong Man Kim
    • Jong Man Kim
    • H01L21/00
    • H01L27/1469H01L27/14621H01L27/1463H01L27/14634H01L27/14636
    • A manufacturing method of an image sensor of vertical type is provided that includes: forming an insulation layer with a metal wiring and a contact plug therein on a first substrate; bonding a second substrate having an image sensing unit over the insulation layer; forming a trench in the second substrate to divide the image sensing unit for each pixel; forming a PTI by gap-filling the trench with insulating material; forming a first material layer over the PTI, the image sensing unit, and the insulation layer; and forming a second material layer over the first material layer and performing a deuterium annealing process thereon. The crystal defects of the substrate generated when performing the trench etching on the donor substrate to define unit pixels are cured by performing the deuterium annealing process, making it possible to improve the sensitivity and illumination characteristics of the image sensor of vertical type.
    • 提供垂直型图像传感器的制造方法,其包括:在第一基板上形成具有金属布线的绝缘层和接触插塞; 将具有图像感测单元的第二基板结合在所述绝缘层上; 在所述第二基板中形成沟槽,以分割每个像素的图像感测单元; 通过用绝缘材料间隙填充沟槽来形成PTI; 在PTI,图像感测单元和绝缘层上形成第一材料层; 以及在所述第一材料层上形成第二材料层并在其上进行氘退火处理。 通过执行氘退火处理来使通过施主衬底进行沟槽蚀刻而形成单位像素而产生的衬底的晶体缺陷被固化,从而可以提高垂直型图像传感器的灵敏度和照明特性。