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    • 4. 发明授权
    • Positive resist composition
    • 正抗蚀剂组成
    • US5843616A
    • 1998-12-01
    • US419604
    • 1995-04-10
    • Kunishige EdamatsuYuji YoshidaKazuhiko HashimotoHaruyoshi Osaki
    • Kunishige EdamatsuYuji YoshidaKazuhiko HashimotoHaruyoshi Osaki
    • G03F7/022C08G8/24G03F7/004G03F7/023H01L21/027
    • C08G8/24G03F7/0236
    • A positive resist composition sensitive to radiations such as ultraviolet rays, far ultraviolet rays, which comprises; an o-quinonediazide compound; and a novolac resin(1) obtained by allowing an aromatic aldehyde of the formula(I) ##STR1## wherein R.sub.4 to R.sub.6 represents hydrogen, alkyl, cycloalkyl, alkoxy, alkenyl or aryl, k'0 represents an integer not smaller than 0 and p represents 1, 2 or 3, to react with a phenol compound of the formula (II) ##STR2## wherein R.sub.7 to R.sub.9 represents hydrogen, hydroxy, alkyl, cycloalkyl, alkoxy, alkenyl or aryl, provided that at least one of R.sub.7 to R.sub.9 is cycloalkyl having 6 or less carbon atoms, in the presence of an acid catalyst to obtain a reaction product(1) containing low molecular weight ingredients; and, then, allowing the reaction product(1) to further react with a phenol compound(1) and formaldehyde.
    • 对紫外线,远紫外线等辐射敏感的正性抗蚀剂组合物,其包含: 邻醌二叠氮化合物; 和通过使式(I)的芳香醛(I)得到的酚醛清漆树脂(1),其中R4至R6表示氢,烷基,环烷基,烷氧基,烯基或芳基,k'0表示不小于 与式(II)的酚化合物反应,其中R 7至R 9表示氢,羟基,烷基,环烷基,烷氧基,烯基或芳基,条件是 在酸催化剂的存在下,R7至R9中的至少一个是具有6个或更少个碳原子的环烷基,得到含有低分子量成分的反应产物(1); 然后使反应产物(1)进一步与酚化合物(1)和甲醛反应。