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1. 发明专利

JP2009112945A Ultrapure water production method and apparatus, and washing method and apparatus for electronic component members 有权
标题翻译：超声波水生产方法和装置，以及电子元件成员的洗涤方法和装置
公开(公告)号：JP2009112945A
公开(公告)日：2009-05-28
申请号：JP2007288734
申请日：2007-11-06
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： HOTTA HITOSHI , FUKUI NAGAO , MORITA HIROSHI
IPC分类号： C02F1/42 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide an ultrapure water production apparatus which can stably produce ultrapure water having a boron concentration of 1 ng/L or less, and an ultrapure water production method and a washing method and apparatus for electronic component members using the ultrapure water production apparatus. SOLUTION: In the ultrapure water production apparatus where a mixed bed deionizer 16 with an anion exchange resin and a cation exchange resin is installed as the last-stage deionizer, an anion exchange resin the boron content of which has been confirmed to be equal to or less than the prescribed value is used as the anion exchange resin. Preferably the prescribed value is 50 μg/L-anion exchange resin (in a wet state). COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决的问题：提供一种能够稳定地制造硼浓度为1ng / L以下的超纯水的超纯水制造装置，以及超纯水制造方法以及使用电子部件的洗涤方法和装置超纯水生产设备。解决方案：在具有阴离子交换树脂和阳离子交换树脂的混合床去离子器16作为最后阶段的去离子器的超纯水生产装置中，其中硼含量已被确认为的阴离子交换树脂等于或小于规定值用作阴离子交换树脂。优选规定值为50μg/ L-阴离子交换树脂（处于湿态）。版权所有（C）2009，JPO＆INPIT

2. 发明专利

JP2008285665A Process for producing anion exchange resin, anion exchange resin, mixed bed resin, and process for producing ultra-pure water for cleaning electronic device/material 有权
标题翻译：用于生产阴离子交换树脂，阴离子交换树脂，混合树脂树脂的方法和用于生产用于清洁电子设备/材料的超纯水的方法
公开(公告)号：JP2008285665A
公开(公告)日：2008-11-27
申请号：JP2008105849
申请日：2008-04-15
申请人： Kurita Water Ind Ltd , Mitsubishi Chemicals Corp , 三菱化学株式会社 , 栗田工業株式会社
发明人： FUKUI NAGAO , MIZUNIWA TETSUO , TOKUNAGA KAZUHIKO
IPC分类号： C08F8/00 , B01J41/14 , C02F1/42
摘要： PROBLEM TO BE SOLVED: To provide an anion exchange resin which gives off only controlled amounts of residual impurities, decomposed substances and elutes. SOLUTION: The manufacturing process of the anion exchange resin comprises the steps (a)-(e) as follows: (a) a step to obtain a crosslinked copolymer by copolymerizing a monovinyl aromatic monomer with a crosslinkable aromatic monomer, (b) a step to make the content of specific eluting compounds to 1 g of the crosslinked copolymer not more than 400 μg, (c) a step to halo-alkylate the crosslinked copolymer, (d) a step to remove the specific eluting compounds from the halo-alkylated crosslinked copolymer and (e) a step to react the halo-alkylated crosslinked copolymer with an amine compound. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供阴离子交换树脂，其仅释放受控量的残留杂质，分解物质和洗脱液。阴离子交换树脂的制造方法包括如下步骤（a） - （e）：（a）通过使单乙烯基芳族单体与可交联的芳族单体共聚获得交联共聚物的步骤（b ）使1g交联共聚物的特定洗脱化合物的含量不超过400μg的步骤，（c）将交联共聚物卤烷基化的步骤，（d）从卤代烷基化交联共聚物和（e）使卤代烷基化交联共聚物与胺化合物反应的步骤。版权所有（C）2009，JPO＆INPIT

3. 发明专利

JP2012154634A Breakthrough time prediction method of non-regenerative ion-exchange resin device and maintenance method 有权
标题翻译：非再生离子交换树脂装置的延迟时间预测方法及维护方法
公开(公告)号：JP2012154634A
公开(公告)日：2012-08-16
申请号：JP2011011063
申请日：2011-01-21
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： ISHIZUKA SATOSHI , FUKUI NAGAO , HORII SHIGEKI , MIYAMOTO SHINGO
IPC分类号： G01N30/00 , C02F1/42 , G01N30/64 , G01N30/88
摘要： PROBLEM TO BE SOLVED: To provide a breakthrough time prediction method of non-regenerative ion-exchange resin device with high prediction accuracy, and a maintenance method for an ion-exchange resin device based on the method.SOLUTION: A method to predict breakthrough time of a non-regenerative ion-exchange resin device 2 with a column filled with an ion-exchange resin includes: a step for arranging the non-regenerative ion-exchange resin device 2 in parallel with small-sized resin columns 3A and 3B with smaller columns than the column filled with ion-exchange resins identical to the ion-exchange resin; a step for running processed water through the small-sized resin columns 3A and 3B; and a step for predicting the breakthrough time of the non-regenerative ion-exchange resin device 2 based on data of the processed water of the small-sized resin columns.
摘要翻译：要解决的问题：提供一种具有高预测精度的非再生离子交换树脂装置的突破性时间预测方法，以及基于该方法的离子交换树脂装置的维护方法。解决方案：用填充有离子交换树脂的柱来预测非再生离子交换树脂装置2的穿透时间的方法包括：并行地布置非再生离子交换树脂装置2的步骤具有比填充有与离子交换树脂相同的离子交换树脂的柱更小的柱的小尺寸树脂柱3A和3B; 通过小型树脂柱3A和3B运行加工水的步骤; 以及基于小型树脂柱的处理水的数据来预测非再生离子交换树脂装置2的突破时间的步骤。版权所有（C）2012，JPO＆INPIT

4. 发明专利

JP2011161418A Washing method for ultrapure water production system 有权
标题翻译：超声波水生产系统的洗涤方法
公开(公告)号：JP2011161418A
公开(公告)日：2011-08-25
申请号：JP2010030286
申请日：2010-02-15
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： FUKUI NAGAO , MORITA HIROSHI
IPC分类号： C02F1/44 , B01D65/00 , B08B3/08 , B08B9/027 , C02F1/20 , C02F1/42 , C02F9/00
摘要： PROBLEM TO BE SOLVED: To provide a washing method for ultrapure water production system, removing metal impurities from an ultrapure water production system with high efficiency and shortening washing time. SOLUTION: Hydrochloric acid is added into a primary pure water tank 21, circulated in a heat exchanger 23, an ultraviolet ray oxidation treatment apparatus 24, bypass lines 30, 31, 32, a flow path 6a, a use point 4 and a flow path 6b by a pump 22 in the order and then placed under an immersed state. Subsequently, the inside of the tank 21 is filled with primary pure water. Next, the primary pure water is passed in the same order, and washing liquid is discharged from the terminal of the flow path 6b to the system outside. In performing pickling, a degassing apparatus 25, an ion exchange resin tower 26, and a UF apparatus 27 are bypassed. By bypassing the UF apparatus 27, extrusion washing time of hydrochloric acid-containing liquid is shortened. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了提供超纯水生产系统的洗涤方法，从超纯水生产系统中以高效率和缩短洗涤时间去除金属杂质。解决方案：将盐酸加入初级纯水槽21中，在热交换器23中循环，紫外线氧化处理装置24，旁通管线30,31,32，流路6a，使用点4和通过泵22按顺序流过流路6b，然后放置在浸没状态。随后，罐21的内部填充有初级纯水。接下来，一次纯水以相同的顺序通过，洗涤液从流路6b的端子排出到系统外部。在进行酸洗时，旁路脱气装置25，离子交换树脂塔26和UF装置27。通过绕开UF装置27，含盐酸液体的挤出洗涤时间缩短。版权所有（C）2011，JPO＆INPIT

5. 发明专利

JP2008264670A Method for manufacturing anion exchange resin, anion exchange, mixed bed resin and method for manufacturing ultrapure water for cleaning electric appliance/material 审中-公开
标题翻译：阴离子交换树脂，阴离子交换树脂，混合树脂树脂的制造方法以及用于制造用于清洁电器/材料的超声波水的方法
公开(公告)号：JP2008264670A
公开(公告)日：2008-11-06
申请号：JP2007110654
申请日：2007-04-19
申请人： Kurita Water Ind Ltd , Mitsubishi Chemicals Corp , 三菱化学株式会社 , 栗田工業株式会社
发明人： FUKUI NAGAO , MIZUNIWA TETSUO , TOKUNAGA KAZUHIKO , YASUTOMI MASAKO
IPC分类号： B01J41/12 , B01J47/04 , C02F1/42 , C08J5/20
摘要： PROBLEM TO BE SOLVED: To provide an anion exchange resin which develops little eluate and hardly deteriorates the even degree of the surface of a silicon wafer. SOLUTION: The method for manufacturing the anion exchange resin includes the process of contacting a water-soluble polymer containing an anionic dissociation group, while the amount of contact of the water-soluble polymer is 0.01-10 mmol/L as the amount of the anionic dissociation group of the water-soluble to the anion exchange of 1 litter, and the even degree Rms of the surface of the wafer is 4 Å or less which is requested by a silicon wafer test for the obtained anion exchange resin. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供几乎不产生洗脱液的阴离子交换树脂，并且几乎不劣化硅晶片的表面的均匀度。解决方案：阴离子交换树脂的制造方法包括使含有阴离子解离基的水溶性聚合物接触的方法，水溶性聚合物的接触量为0.01〜10mmol / L，的阴离子解离基团与1重量的阴离子交换的阴离子解离基团，并且晶片表面的均匀度Rms为所得阴离子交换树脂的硅晶片试验所要求的4或更小。版权所有（C）2009，JPO＆INPIT

6. 发明专利

JP2012205994A Ion exchanger 有权
标题翻译：离子交换器
公开(公告)号：JP2012205994A
公开(公告)日：2012-10-25
申请号：JP2011072519
申请日：2011-03-29
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： FUKUI NAGAO , ISHIZUKA SATOSHI , MIYAZAKI YOICHI
IPC分类号： C02F1/42 , B01J49/00
摘要： PROBLEM TO BE SOLVED: To provide an ion exchanger which can surely prevent an anion exchange resin and a cation exchange resin from being reversely regenerated and can produce deionized water of high water quality even immediately after regeneration.SOLUTION: During regeneration, a valve 12 is closed and valves 7, 10 are opened and an alkaline solution is supplied from an upper supply/discharge pipe 3 and further an acid solution is supplied from a third communication pipe 8. The alkaline solution flows through a water collection/delivery member 4, an inactive resin 22, an anion exchange resin 21, a glass bead 23, a water collection/delivery member 6, a communication pipe 5 and a valve 7 in order to regenerate the anion exchange resin 21. The acid solution flows through a water collection/delivery member 9, an inactive resin 32, an alkali exchange resin 31, a water collection/delivery member 14, a glass bead 33 and a lower supply/discharge pipe 13 in order to regenerate the cation exchange resin 31.
摘要翻译：要解决的问题：提供一种离子交换剂，其可以确实地防止阴离子交换树脂和阳离子交换树脂反向再生，并且即使在再生之后立即也能够产生高水质的去离子水。解决方案：在再生期间，关闭阀12并打开阀门7,10，并且从上部供给/排出管3供给碱性溶液，并且还从第三连通管8供给酸溶液。碱性溶液流过收集/释放构件4，惰性树脂22，阴离子交换树脂21，玻璃珠23，集水/排出构件6，连通管5和阀7，以便再生阴离子交换树脂21。酸溶液流过收集/输送构件9，非活性树脂32，碱交换树脂31，收水/输送构件14，玻璃珠33和下供排管13，以便再生阳离子交换树脂31.版权所有（C）2013，JPO＆INPIT

7. 发明专利

JP2012205993A Ion exchange apparatus and column body thereof 有权
标题翻译：离子交换装置及其柱体
公开(公告)号：JP2012205993A
公开(公告)日：2012-10-25
申请号：JP2011072518
申请日：2011-03-29
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： FUKUI NAGAO , ISHIZUKA SATOSHI , MIYAZAKI YOICHI
IPC分类号： B01J47/02 , B01J49/00 , C02F1/42
摘要： PROBLEM TO BE SOLVED: To provide an ion exchange apparatus, in the column body of which an anion exchange resin and a cation exchange resin can surely be prevented from being regenerated reversely and high-quality deionized water can be produced even immediately after the regeneration is performed and to provide the column body of the ion exchange apparatus.SOLUTION: When the regeneration is performed, valves 12, 17 are closed, valves 7, 10 are opened, an alkaline solution is supplied through an upper supply/discharge pipeline 3 and an acidic solution is supplied through a third communication pipeline 8. The alkaline solution is made to flow through a collection/delivery water member 4, an inactive resin 22, the anion exchange resin 21, a collection/delivery water member 6, a communication pipeline 5 and the valve 7 in this order to regenerate the anion exchange resin 21. The acidic solution is made to flow through a collection/delivery water member 9, an inactive resin 32, the cation exchange resin 31, a collection/delivery water member 14 and a lower supply/discharge pipeline 13 in this order to regenerate the cation exchange resin 31. When a rinsing is performed after the regeneration is performed, water is supplied through the pipelines 5, 13, waste cleaning water is discharged through the pipelines 3, 8 and simultaneously the valve 17 is opened and the waste cleaning water is also discharged through a withdrawal pipe 18 at the top of the column body to promote the withdrawal of a chemical in the top thereof.
摘要翻译：要解决的问题：为了提供一种离子交换装置，可以确定地防止阴离子交换树脂和阳离子交换树脂反向再生的柱体中，甚至可以立即产生高品质的去离子水进行再生并提供离子交换装置的柱体。解决方案：当进行再生时，关闭阀12,17，打开阀门7,10，通过上部供给/排放管线3供给碱性溶液，通过第三连通配管8供给酸性溶液使碱性溶液依次流过收集/输送水构件4，惰性树脂22，阴离子交换树脂21，收集/输送水构件6，连通管线5和阀7，以再生阴离子交换树脂21.使酸性溶液依次流过收集/输送水部件9，非活性树脂32，阳离子交换树脂31，收集/输送水部件14和下部供应/排出管线13 以再生阳离子交换树脂31.当进行再生后进行漂洗时，通过管线5,13供给水，废水通过管道3,8排出，同时阀 e 17打开，废水清洗水也通过柱体顶部的抽出管18排出，以促进化学品在其顶部的排出。版权所有（C）2013，JPO＆INPIT

8. 发明专利

JP2011189317A Ion exchange device 有权
标题翻译：离子交换装置
公开(公告)号：JP2011189317A
公开(公告)日：2011-09-29
申请号：JP2010059390
申请日：2010-03-16
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： FUKUI NAGAO , MIYAZAKI YOICHI , KITAMI KATSUNOBU
IPC分类号： C02F1/42
摘要： PROBLEM TO BE SOLVED: To provide an ion exchange device which can prevent scale deposition onto an anion exchange resin in a column, can surely prevent an anion-exchange resin and a cation-exchange resin from being reversely regenerated, and can stably produce deionized water of high water quality even immediately after regeneration, and a column for the ion exchange device. SOLUTION: After raw water containing hardness components is passed through a hardness component removing means 1 to remove the hardness components, the water is supplied to an ion exchange column 2 to be brought into contact with the anion-exchange resin 31, then to be brought into contact with the cation-exchange resin 21. The inside of the ion exchange column 2 is divided into upper and lower two chambers by an impervious partition plate 2a, and the water brought into contact with the anion-exchange resin 31 in the lower chamber is passed through external piping and then introduced into the upper chamber. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了提供能够防止在柱中的阴离子交换树脂上的结垢的离子交换装置，可以可靠地防止阴离子交换树脂和阳离子交换树脂的反向再生，并且可以稳定地即使在再生后立即生成高水质的去离子水，也可以生成离子交换装置用的柱。解决方案：将含有硬度成分的原水通过硬度成分除去装置1以除去硬度成分后，将水供给到离子交换柱2以与阴离子交换树脂31接触，然后与阳离子交换树脂21接触。离子交换柱2的内部由不透水隔板2a分成上下两个室，水与阴离子交换树脂31接触下腔通过外部管道，然后引入上腔室。版权所有（C）2011，JPO＆INPIT

9. 发明专利

JP2005294377A Method and apparatus for supplying ozone water 有权
标题翻译：供应臭氧水的方法和装置
公开(公告)号：JP2005294377A
公开(公告)日：2005-10-20
申请号：JP2004104505
申请日：2004-03-31
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： FUKUI NAGAO , IDA JUNICHI , MORITA HIROSHI
IPC分类号： C02F1/02 , B08B3/08 , C01B13/10 , C02F1/32 , C02F1/34 , C02F1/36 , C02F1/70 , C02F1/72 , C02F1/78 , C03C23/00 , H01L21/027 , H01L21/304
CPC分类号： C02F1/78 , B08B3/08 , B08B2203/005 , C01B13/10 , C02F1/02 , C02F1/32 , C02F1/34 , C02F1/36 , C02F1/70 , C02F1/722 , C02F2201/782 , C02F2209/23 , C03C23/0075
摘要： PROBLEM TO BE SOLVED: To provide an ozone water supplying method and an ozone water supplying apparatus for stably supplying the ozone water of the predetermined ozone concentration to use points in a wet cleaning process for electronic materials such as a semiconductor and liquid crystal and in a surface processing process.
SOLUTION: The ozone water including ozone decomposition control substance is supplied to use points, and ozone concentration is lowered to the predetermined concentration with a concentration adjusting means at the areas near the use points. The ozone water supplying apparatus comprises an ozone dissolving apparatus for adjusting the ozone water by dissolving the ozone gas into the pure water, a means for supplying the ozone decomposition control substance to the pure water or ozone water, an ozone water transferring pipe for transferring the ozone water adjusted by the ozone dissolving apparatus to the use points, and a concentration adjusting means provided to the area near the use points to lower the concentration of the ozone water transferred with the ozone water transferring pipe to the predetermined ozone concentration.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了提供臭氧水供应方法和臭氧供水装置，用于将预定臭氧浓度的臭氧水稳定地供给到用于诸如半导体和液晶的电子材料的湿式清洗工艺中的使用点并在表面处理过程中。解决方案：将含臭氧分解控制物质的臭氧水供应到使用点，并且在使用点附近的区域用浓度调节装置将臭氧浓度降低至预定浓度。臭氧水供给装置包括臭氧溶解装置，用于通过将臭氧气体溶解到纯水中来调节臭氧水，将臭氧分解控制物质供应到纯水或臭氧水的装置，用于将臭氧水输送到纯水或臭氧水的臭氧水输送管通过臭氧溶解装置调节的臭氧水到使用点，以及设置在使用点附近的区域的浓度调节装置，以将臭氧水输送管转移的臭氧水的浓度降低到预定的臭氧浓度。版权所有（C）2006，JPO＆NCIPI

10. 发明专利

JP2012205989A Pure water producing apparatus 有权
标题翻译：纯水生产设备
公开(公告)号：JP2012205989A
公开(公告)日：2012-10-25
申请号：JP2011072514
申请日：2011-03-29
申请人： Kurita Water Ind Ltd , 栗田工業株式会社
发明人： FUKUI NAGAO , MIYAZAKI YOICHI
IPC分类号： C02F1/42 , B01D61/02 , B01J39/04 , B01J41/04 , B01J49/00 , C02F1/32 , C02F1/44
摘要： PROBLEM TO BE SOLVED: To provide a pure water producing apparatus which produces pure water by RO treatment and then by ion exchange treatment and in which ion exchange treatment water of high quality can be obtained from an ion exchanger.SOLUTION: The pure water producing apparatus comprises a RO device and the ion exchanger through which treated water by the RO device is made to pass. In the ion exchanger, water is made to pass through an anion exchange resin and a cation exchange resin in this order and pH of water at anion exchange resin outlet is 9 or more (preferably 9.5 or more).

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