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    • 3. 发明申请
    • VAPOR DEPOSITION APPARATUS AND SUSCEPTOR
    • 蒸气沉积装置和SUSCEPTOR
    • US20120017832A1
    • 2012-01-26
    • US13010598
    • 2011-01-20
    • Wei-Cheng CHENZong-Lin LeeKung-Ming LiangYung-Hsin Shie
    • Wei-Cheng CHENZong-Lin LeeKung-Ming LiangYung-Hsin Shie
    • C23C16/06C23C16/511C23C16/448
    • C23C16/4584
    • A vapor deposition apparatus includes a susceptor, a gas supply unit, a heating unit and a rotation unit. The susceptor has a first substrate-holding portion and a second substrate-holding portion. The first substrate-holding portion has a first depth, and the second substrate-holding portion has a second depth that is larger than the first depth. The gas supply unit supplies precursors to the susceptor. The heating unit is used to heat the susceptor. The rotation unit can rotate the susceptor so that the heating unit can uniformly heat the susceptor. Because the second depth is larger than the first depth, the substrate held in the second substrate-holding portion can not directly contact the susceptor with a higher temperature and thus its temperature is lower than the second substrate-holding portion, so as to maintain the uniformity of the properties of the manufactured chips.
    • 气相沉积设备包括基座,气体供应单元,加热单元和旋转单元。 基座具有第一基板保持部和第二基板保持部。 第一基板保持部分具有第一深度,并且第二基板保持部分具有大于第一深度的第二深度。 气体供应单元向基座提供前体。 加热单元用于加热基座。 旋转单元可以旋转基座,使得加热单元可以均匀地加热基座。 由于第二深度大于第一深度,所以保持在第二基板保持部中的基板不能与较高温度的基座直接接触,因此其温度低于第二基板保持部,以便保持 所制造的芯片的性能的均匀性。