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1. 发明授权

US08698257B2 Resonator and production method thereof 有权
标题翻译：谐振器及其制作方法
公开(公告)号：US08698257B2
公开(公告)日：2014-04-15
申请号：US13377898
申请日：2010-06-30
申请人： Tomohide Kamiyama , Tomohiro Iwasaki , Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
发明人： Tomohide Kamiyama , Tomohiro Iwasaki , Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
IPC分类号： H01L29/84
CPC分类号： H03H3/0072 , B81B2201/016 , B81B2201/0271 , B81B2203/019 , B81C1/00142 , B81C1/0015 , H03H9/02338 , H03H9/2463 , H03H2009/02291 , H03H2009/02511
摘要： A resonator using the MEMS technology is provided which improves the accuracy of a shape of electrodes so as avoid a short circuit that would otherwise be caused between input and output electrodes to thereby increase the reliability thereof. A resonator includes a substrate 101, an insulation layer 102 formed selectively on the substrate 101 as a sacrificial surface, a beam 103 formed on the substrate 101 via a space, a first support portion 104A formed on the insulation layer 102 of the same material as that of the beam 103, and electrodes formed with a space defined between the beam 103 and themselves for signals to be inputted thereinto and outputted therefrom. A sectional area of the beam 103 and a sectional area of the first support portion 104A are substantially equal in a section which is perpendicular to a longitudinal direction of the beam 103.
摘要翻译：提供了使用MEMS技术的谐振器，其提高了电极形状的精度，以避免在输入和输出电极之间将产生的短路，从而增加其可靠性。谐振器包括基板101，作为牺牲表面的基板101上选择性地形成的绝缘层102，经由空间形成在基板101上的光束103，形成在绝缘层102上的相同材料的第一支撑部分104A 光束103的光束，以及形成有在光束103和其之间的空间的电极，用于输入信号并从其输出的信号。梁103的截面积和第一支撑部分104A的截面面积在垂直于梁103的纵向方向的截面中基本相等。

2. 发明申请

US20120091547A1 RESONATOR AND PRODUCTION METHOD THEREOF 有权
标题翻译：谐振器及其生产方法
公开(公告)号：US20120091547A1
公开(公告)日：2012-04-19
申请号：US13377898
申请日：2010-06-30
申请人： Tomohide Kamiyama , Tomohiro Iwasaki , Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
发明人： Tomohide Kamiyama , Tomohiro Iwasaki , Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
IPC分类号： H01L29/84 , H01L21/02
CPC分类号： H03H3/0072 , B81B2201/016 , B81B2201/0271 , B81B2203/019 , B81C1/00142 , B81C1/0015 , H03H9/02338 , H03H9/2463 , H03H2009/02291 , H03H2009/02511
摘要： A resonator using the MEMS technology is provided which improves the accuracy of a shape of electrodes so as avoid a short circuit that would otherwise be caused between input and output electrodes to thereby increase the reliability thereof. A resonator includes a substrate 101, an insulation layer 102 formed selectively on the substrate 101 as a sacrificial surface, a beam 103 formed on the substrate 101 via a space, a first support portion 104A formed on the insulation layer 102 of the same material as that of the beam 103, and electrodes formed with a space defined between the beam 103 and themselves for signals to be inputted thereinto and outputted therefrom. A sectional area of the beam 103 and a sectional area of the first support portion 104A are substantially equal in a section which is perpendicular to a longitudinal direction of the beam 103.
摘要翻译：提供了使用MEMS技术的谐振器，其提高了电极形状的精度，以避免在输入和输出电极之间将产生的短路，从而增加其可靠性。谐振器包括基板101，作为牺牲表面的基板101上选择性地形成的绝缘层102，经由空间形成在基板101上的光束103，形成在绝缘层102上的相同材料的第一支撑部分104A 光束103的光束，以及形成有在光束103和其之间的空间的电极，用于输入信号并从其输出的信号。梁103的截面积和第一支撑部分104A的截面面积在垂直于梁103的纵向方向的截面中基本相等。

3. 发明申请

US20070085633A1 Device including piezoelectric thin film and method for producing the same 失效
标题翻译：包括压电薄膜的装置及其制造方法
公开(公告)号：US20070085633A1
公开(公告)日：2007-04-19
申请号：US11580139
申请日：2006-10-13
申请人： Hiroshi Nakatsuka , Keiji Onishi , Takehiko Yamakawa , Tomohiro Iwasaki , Tomohide Kamiyama
发明人： Hiroshi Nakatsuka , Keiji Onishi , Takehiko Yamakawa , Tomohiro Iwasaki , Tomohide Kamiyama
IPC分类号： H03H9/54
CPC分类号： H03H9/173 , H01H57/00 , H01H2057/006 , H03H3/02 , H03H2003/021
摘要： An acoustic resonator according to the present invention includes a substrate 105, a support section 104 provided on the substrate 105, a lower electrode 103 provided on the support section 104, a piezoelectric body 101 provided on the lower electrode 103, and an upper electrode 102 provided on the piezoelectric body 101. The lower electrode 103, the piezoelectric body 101 and the upper electrode 102 form a vibration section 107. The support section 104 for supporting the vibration section 107 is shaped such that at least one portion of a vertical cross-section thereof has a curvature.
摘要翻译：根据本发明的声谐振器包括基板105，设置在基板105上的支撑部分104，设置在支撑部分104上的下电极103，设置在下电极103上的压电体101和上电极102 设置在压电体101上。下电极103，压电体101和上电极102形成振动部107。用于支撑振动部分107的支撑部分104成形为使得其垂直横截面的至少一部分具有曲率。

4. 发明申请

US20090133237A1 PIEZOELECTRIC DEVICE AND METHOD OF MANUFACTURING PIEZOELECTRIC RESONATORS 审中-公开
标题翻译：压电元件及制造压电谐振器的方法
公开(公告)号：US20090133237A1
公开(公告)日：2009-05-28
申请号：US12338189
申请日：2008-12-18
申请人： Keiji ONISHI , Hiroshi Nakatsuka , Takehiko Yamakawa , Tomohiro Iwasaki , Tomohide Kamiyama
发明人： Keiji ONISHI , Hiroshi Nakatsuka , Takehiko Yamakawa , Tomohiro Iwasaki , Tomohide Kamiyama
IPC分类号： H01L41/24
CPC分类号： H03H9/132 , H03H3/02 , H03H9/0514 , H03H9/13 , H03H9/172 , H03H9/175 , H03H2003/025 , Y10T29/42
摘要： A piezoelectric resonator comprises a piezoelectric material layer 101, a first electrode 102 formed on one major surface of the piezoelectric material layer 101, and having a cross-section in the shape of a trapezoid whose longer side contacts the piezoelectric material layer 101, and a second electrode 103 formed on the other major surface of the piezoelectric material layer 101, and having a cross-section in the shape of a trapezoid whose longer side contacts the piezoelectric material layer 101.
摘要翻译：压电谐振器包括压电材料层101，形成在压电材料层101的一个主表面上的第一电极102，并且具有长边接触压电材料层101的梯形形状的横截面，以及第二电极103形成在压电材料层101的另一个主表面上，并且具有长边与压电材料层101接触的梯形形状的横截面。

5. 发明授权

US07639103B2 Piezoelectric filter, antenna duplexer, and communications apparatus employing piezoelectric resonator 失效
标题翻译：压电滤波器，天线双工器以及采用压电谐振器的通信装置
公开(公告)号：US07639103B2
公开(公告)日：2009-12-29
申请号：US11812013
申请日：2007-06-14
申请人： Takehiko Yamakawa , Tomohide Kamiyama , Tomohiro Iwasaki , Hiroshi Nakatsuka , Keiji Onishi
发明人： Takehiko Yamakawa , Tomohide Kamiyama , Tomohiro Iwasaki , Hiroshi Nakatsuka , Keiji Onishi
IPC分类号： H03H9/15 , H03H9/54 , H03H9/70
CPC分类号： H03H9/588 , H03H3/04 , H03H9/587 , H03H2003/023 , H03H2003/0414
摘要： A piezoelectric filter comprises a substrate and a plurality of piezoelectric resonators provided on the same substrate. Each piezoelectric resonator comprises a cavity formed in the substrate, a lower electrode formed on the substrate, covering the cavity, a piezoelectric material layer formed on the lower electrode, and an upper electrode formed on the piezoelectric material layer. At least one of the piezoelectric resonators has a cavity formed of a plurality of cells.
摘要翻译：压电滤波器包括基板和设置在同一基板上的多个压电谐振器。每个压电谐振器包括形成在基板中的空腔，形成在基板上的覆盖空腔的下电极，形成在下电极上的压电材料层和形成在压电材料层上的上电极。至少一个压电谐振器具有由多个单元形成的空腔。

6. 发明授权

US07417360B2 Piezoelectric resonator and method for producing the same 失效
标题翻译：压电谐振器及其制造方法
公开(公告)号：US07417360B2
公开(公告)日：2008-08-26
申请号：US11580032
申请日：2006-10-13
申请人： Tomohide Kamiyama , Keiji Onishi , Hiroshi Nakatsuka , Takehiko Yamakawa , Tomohiro Iwasaki
发明人： Tomohide Kamiyama , Keiji Onishi , Hiroshi Nakatsuka , Takehiko Yamakawa , Tomohiro Iwasaki
IPC分类号： H01L41/053
CPC分类号： H03H3/02 , H03H9/02118 , H03H9/0514 , H03H9/132 , H03H9/172 , H03H9/564 , H03H9/568 , H03H9/706
摘要： An upper electrode is provided on one main surface of a piezoelectric layer, and a lower electrode is provided on the other main surface thereof. A vibration section is an area in which the lower electrode, the piezoelectric layer and the upper electrode overlap in a vertical projection direction. Line electrodes for respectively connecting the lower electrode and the upper electrode to input/output electrodes are provided on the one main surface and the other main surface of the piezoelectric layer. The vibration section is placed on (connected to) the substrate via the support section. The support section is provided on an area of the piezoelectric layer excluding the area on which the vibration section is provided and the area on which the input/output electrodes and the line electrodes are provided.
摘要翻译：上电极设置在压电层的一个主表面上，下电极设置在另一个主表面上。振动部是下部电极，压电体层和上部电极在垂直方向上重叠的区域。用于将下电极和上电极分别连接到输入/输出电极的线电极设置在压电层的一个主表面和另一个主表面上。振动部分经由支撑部分放置在（连接到）基板上。支撑部设置在除了设置振动部的区域以外的压电层的区域和设置有输入输出电极和线电极的区域。

7. 发明授权

US07893793B2 Film bulk acoustic wave resonator and method for manufacturing the same 失效
标题翻译：薄膜体声波谐振器及其制造方法
公开(公告)号：US07893793B2
公开(公告)日：2011-02-22
申请号：US11844809
申请日：2007-08-24
申请人： Tomohiro Iwasaki , Keiji Onishi , Hiroshi Nakatsuka , Takehiko Yamakawa , Tomohide Kamiyama
发明人： Tomohiro Iwasaki , Keiji Onishi , Hiroshi Nakatsuka , Takehiko Yamakawa , Tomohide Kamiyama
IPC分类号： H03H9/15 , H03H9/54 , H03H9/70
CPC分类号： H03H9/177 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/564 , H03H9/605
摘要： A film bulk acoustic wave resonator including a piezoelectric body 1, and a first electrode 2 and a second electrode 3 that are provided respectively on the main surfaces of the piezoelectric body, the piezoelectric body being applied an electric field through the first and the second electrodes so as to generate a resonant vibration. A first mass load material portion 4 having an annular shape is provided outside the planar region of the first electrode on the main surface of the piezoelectric body, a mass load effect thereof being larger than that of the first electrode. The outer periphery of the first electrode and the inner periphery of the first mass load material portion are spaced apart from each other, whereby the first electrode and the first mass load material portion are electrically insulated from each other. The first mass load material portion has a laminated structure including a first auxiliary electrode layer 2a and a load material layer 4a formed on the auxiliary electrode layer. The first auxiliary electrode is formed with the same material to have the same thickness as the first electrode. Energy loss can be reduced, while the first mass load material portion can be formed easily with high precision.
摘要翻译：一种包括分别设置在压电体的主表面上的压电体1和第一电极2和第二电极3的薄膜体声波谐振器，压电体通过第一和第二电极施加电场以产生共振振动。具有环状的第一质量负荷材料部分4设置在压电体的主表面上的第一电极的平面区域的外侧，其质量负载效应大于第一电极的质量负载效应。第一电极的外周和第一质量负载材料部的内周彼此间隔开，由此第一电极和第一质量负载材料部彼此电绝缘。第一质量负载材料部分具有包括形成在辅助电极层上的第一辅助电极层2a和负载材料层4a的叠层结构。第一辅助电极由相同的材料形成，以具有与第一电极相同的厚度。能够容易地以高精度形成第一质量负荷材料部，能够减少能量损失。

8. 发明授权

US07719390B2 Dual mode piezoelectric filter, method of manufacturing the same, high frequency circuit component and communication device using the same 有权
标题翻译：双模式压电滤波器，其制造方法，高频电路元件及使用其的通信装置
公开(公告)号：US07719390B2
公开(公告)日：2010-05-18
申请号：US12019330
申请日：2008-01-24
申请人： Tomohiro Iwasaki , Hiroshi Nakatsuka , Keiji Onishi , Takehiko Yamakawa , Tomohide Kamiyama
发明人： Tomohiro Iwasaki , Hiroshi Nakatsuka , Keiji Onishi , Takehiko Yamakawa , Tomohide Kamiyama
IPC分类号： H03H9/54 , H03H9/205 , H03H9/70 , H03H3/02
CPC分类号： H03H9/564 , H03H3/04 , H03H9/0207 , H03H2003/0428 , Y10T29/42
摘要： A dual mode piezoelectric filter includes a piezoelectric material layer composed of a piezoelectric thin film of the high-cut type formed on a substrate, a first electrode and a second electrode formed on one of the major surfaces of the piezoelectric material layer with a gap provided therebetween, a third electrode formed on the other major surface of the piezoelectric material layer opposite to the first electrode, the second electrode, and the gap, and an interelectrode mass load element formed in the gap or at a position opposite to the gap on a surface of the piezoelectric material layer. The relationships (ρ1×h1)≦(ρa×ha) and (ρ2×h2)≦(ρa×ha) are satisfied, where h1 is the thickness and ρ1 is the density of the first electrode, h2 is the thickness and ρ2 is the density of the second electrode, and ha is the thickness and ρa is the density of the interelectrode mass load element. A filter characteristic with a smooth passband and low losses is obtained.
摘要翻译：双模式压电滤波器包括由形成在基板上的高切割类型的压电薄膜构成的压电材料层，第一电极和形成在压电材料层的一个主表面上的间隔设置的第二电极其间形成在压电材料层的与第一电极，第二电极和间隙相反的另一个主表面上的第三电极，以及形成在间隙中或与间隙相对的位置处的电极间质量负载元件压电材料层的表面。满足关系（＆rgr; 1×h1）＆nlE;（＆rgr; a×ha）和（＆rgr; 2×h2）＆nlE;（＆rgr; a×ha），其中h1是厚度，＆rgr; 1是密度的第一个电极，h2是厚度，＆rgr; 2是第二个电极的密度，ha是厚度，而a是电极间质量负载元件的密度。获得具有平滑通带和低损耗的滤波器特性。

9. 发明申请

US20070296523A1 Piezoelectric filter, antenna duplexer, and communications apparatus employing piezoelectric resonator 失效
标题翻译：压电滤波器，天线双工器以及采用压电谐振器的通信装置
公开(公告)号：US20070296523A1
公开(公告)日：2007-12-27
申请号：US11812013
申请日：2007-06-14
申请人： Takehiko Yamakawa , Tomohide Kamiyama , Tomohiro Iwasaki , Hiroshi Nakatsuka , Keiji Onishi
发明人： Takehiko Yamakawa , Tomohide Kamiyama , Tomohiro Iwasaki , Hiroshi Nakatsuka , Keiji Onishi
IPC分类号： H03H9/70 , H03H9/58
CPC分类号： H03H9/588 , H03H3/04 , H03H9/587 , H03H2003/023 , H03H2003/0414
摘要： A piezoelectric filter comprises a substrate and a plurality of piezoelectric resonators provided on the same substrate. Each piezoelectric resonator comprises a cavity formed in the substrate, a lower electrode formed on the substrate, covering the cavity, a piezoelectric material layer formed on the lower electrode, and an upper electrode formed on the piezoelectric material layer. At least one of the piezoelectric resonators has a cavity formed of a plurality of cells.
摘要翻译：压电滤波器包括基板和设置在同一基板上的多个压电谐振器。每个压电谐振器包括形成在基板中的空腔，形成在基板上的覆盖空腔的下电极，形成在下电极上的压电材料层和形成在压电材料层上的上电极。至少一个压电谐振器具有由多个单元形成的空腔。

10. 发明授权

US07623007B2 Device including piezoelectric thin film and a support having a vertical cross-section with a curvature 失效
标题翻译：装置包括压电薄膜和具有曲率的垂直横截面的支撑件
公开(公告)号：US07623007B2
公开(公告)日：2009-11-24
申请号：US11580139
申请日：2006-10-13
申请人： Hiroshi Nakatsuka , Keiji Onishi , Takehiko Yamakawa , Tomohiro Iwasaki , Tomohide Kamiyama
发明人： Hiroshi Nakatsuka , Keiji Onishi , Takehiko Yamakawa , Tomohiro Iwasaki , Tomohide Kamiyama
IPC分类号： H03H9/05 , H03H9/54 , H03H9/70 , H01H57/00 , H02N2/00
CPC分类号： H03H9/173 , H01H57/00 , H01H2057/006 , H03H3/02 , H03H2003/021
摘要： An acoustic resonator includes a substrate, a support section provided on the substrate, a lower electrode provided on the support section, a piezoelectric body provided on the lower electrode, and an upper electrode provided on the piezoelectric body. The lower electrode, the piezoelectric body and the upper electrode form a vibration section. The support section for supporting the vibration section is shaped such that at least one portion of a vertical cross-section thereof has a curvature.
摘要翻译：声谐振器包括基板，设置在基板上的支撑部分，设置在支撑部分上的下电极，设置在下电极上的压电体和设置在压电体上的上电极。下电极，压电体和上电极形成振动部。用于支撑振动部分的支撑部分成形为使得其垂直横截面的至少一部分具有曲率。

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