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    • 2. 发明专利
    • Mos transistor with laser-patterned metal gate and method for forming the transistor
    • 具有激光图案的金属栅的MOS晶体管和形成晶体管的方法
    • JP2006261664A
    • 2006-09-28
    • JP2006064769
    • 2006-03-09
    • Kovio Incコヴィオ インコーポレイテッド
    • CHOI CRISWELLROCKENBERGER JOERGJ DEVIN MACKENZIEGUDEMAN CHRISTOPHER
    • H01L29/786H01L21/288H01L21/336H01L29/423H01L29/49
    • H01L21/32131H01L21/28123H01L21/84H01L27/1292H01L29/66757
    • PROBLEM TO BE SOLVED: To provide a MOS transistor having a laser-patterned metal gate and its manufacturing method. SOLUTION: A dielectric thin film is located on an electrically functioning substrate including an inorganic semiconductor. A method of forming a layer of a metal content material thereon comprises processes of laser-patterning the metal gate from a metal content material layer, and forming a source terminal and a drain terminal within the inorganic semiconductor located near the metal gate. The transistor generally comprises the electrically functioning substrate, the dielectric thin film located on at least one part of the electrically functioning substrate, the metal gate which is located on the laser-patterned dielectric thin film, and the source terminal and the drain terminal which include doped inorganic semiconductor layers located near the metal gate. A MOS thin film transistor having a reliable electric characteristic is provided promptly, efficiency, and/or at low cost. COPYRIGHT: (C)2006,JPO&NCIPI
    • 解决的问题:提供具有激光图案化金属栅极的MOS晶体管及其制造方法。 解决方案:电介质薄膜位于包括无机半导体的电功能衬底上。 在其上形成金属含量材料层的方法包括从金属含量材料层激光图案化金属栅极的工艺,以及在位于金属栅极附近的无机半导体内形成源极端子和漏极端子的工艺。 晶体管通常包括电功能衬底,位于电功能衬底的至少一部分上的电介质薄膜,位于激光图案化电介质薄膜上的金属栅极,以及源极端子和漏极端子,其包括 掺杂的无机半导体层位于金属栅极附近。 能够及时,高效,低成本地提供具有可靠电特性的MOS薄膜晶体管。 版权所有(C)2006,JPO&NCIPI
    • 3. 发明专利
    • Printed dopant layer
    • 印花ANT层
    • JP2008103686A
    • 2008-05-01
    • JP2007211891
    • 2007-08-15
    • Kovio Incコヴィオ インコーポレイテッド
    • ARVIND KAMATHCLEEVES JAMES MONTAGUEROCKENBERGER JOERGSMITH PATRICKZUERCHER FABIO
    • H01L21/336H01L21/225H01L21/288H01L21/316H01L21/3205H01L29/417H01L29/423H01L29/49H01L29/786
    • H01L21/2254H01L21/02532H01L21/02623H01L27/1285H01L27/1292H01L29/66757H01L29/7869
    • PROBLEM TO BE SOLVED: To provide a method of forming an electronic device such as a MOS transistor and the like wherein relatively reduced cost and time-saving processing technology is achieved. SOLUTION: The method of forming an electronic device such as a MOS transistor and the like includes the steps of forming a plurality of semiconductor islands 31, 35 on a substrate 10, printing a first dielectric layer 60 on or over a first subset 31 of the semiconductor islands, and optionally printing a second dielectric layer 65 on or over a second subset 35 of the semiconductor islands. The first dielectric layer 60 contains a first dopant, and the (optional) second dielectric layer 65 includes a second dopant different from the first dopant. The dielectric layers 60, 65, semiconductor islands 31, 35 and the substrate 10 are sufficiently annealed to diffuse the first dopant into the first subset 31 of semiconductor islands and, if present, the second dopant into the second subset 35 of semiconductor islands. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种形成诸如MOS晶体管等的电子器件的方法,其中实现了相对降低的成本和节省时间的处理技术。 解决方案:形成诸如MOS晶体管等的电子器件的方法包括在衬底10上形成多个半导体岛31,35的步骤,在第一子集上或第一子集上印刷第一介电层60 31,并且可选地在半导体岛的第二子集35上或之上打印第二介电层65。 第一介电层60包含第一掺杂剂,并且(任选的)第二介电层65包括不同于第一掺杂剂的第二掺杂剂。 电介质层60,65,半导体岛31,35和衬底10被充分退火以将第一掺杂剂扩散到半导体岛的第一子集31中,如果存在,则将第二掺杂剂扩散到半导体岛的第二子集35中。 版权所有(C)2008,JPO&INPIT