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1. 发明授权

US06400168B2 Method for fabricating probe tip portion composed by coaxial cable 有权
标题翻译：用于制造由同轴电缆组成的探针尖端部分的方法
公开(公告)号：US06400168B2
公开(公告)日：2002-06-04
申请号：US09886033
申请日：2001-06-22
申请人： Kouji Matsunaga , Hirobumi Inoue , Masao Tanehashi , Toru Taura , Masahiko Nikaidou , Yuuichi Yamagishi , Satoshi Hayakawa
发明人： Kouji Matsunaga , Hirobumi Inoue , Masao Tanehashi , Toru Taura , Masahiko Nikaidou , Yuuichi Yamagishi , Satoshi Hayakawa
IPC分类号： G01R3102
CPC分类号： G01R1/06738 , G01R1/06772 , Y10T29/49123
摘要： In a tip portion structure basically having a substrate, a plate spring, and a ground block, the substrate is attached to a signal line on a back surface of the substrate and is contacted on the tip with the signal electrode of the DUT placed on a device stage. The plate spring is made of a resilient material, placed on the front side of the substrate, and positioned to apply a pressure to the substrate. The ground block is positioned between the signal line and the device stage functioned as a ground electrode of the DUT. Alternatively, the tip portion structure further may have a ground plate or a ground surface formed of a conductive thin plate covering entirely the front surface of the substrate, and shaped to surround the signal line in cooperation with the ground block. A plurality of the signal lines may be arranged in parallel on the same plane of the substrate. Another tip portion structure is based on a coaxial cable to be cut from the center at a plane perpendicular to the axial direction thereof along one or more oblique plane. A metal ring fitted over a periphery of the coaxial outer conductor may be used.
摘要翻译：在基本上具有基板，板簧和接地块的尖端部分结构中，将基板附着到基板的背面上的信号线上，并将其与被放置在基板上的DUT的信号电极接触设备阶段板簧由弹性材料制成，放置在基片的正面，并定位成对基片施加压力。接地块位于作为DUT接地电极的信号线和器件级之间。或者，尖端部分结构还可以具有由完全覆盖基板的前表面的导电薄板形成的接地板或接地表面，并且成形为与接地块一起包围信号线。多个信号线可以平行布置在基板的同一平面上。另一个尖端部分结构是基于同轴电缆，沿着一个或多个倾斜平面在垂直于其轴向方向的平面处从中心切割。可以使用安装在同轴外导体周边上的金属环。

2. 发明授权

US06229321B1 Process for manufacturing high frequency multichip module enabling independent test of bare chip 有权
标题翻译：制造高频多芯片模块的工艺，可实现裸芯片的独立测试
公开(公告)号：US06229321B1
公开(公告)日：2001-05-08
申请号：US09238268
申请日：1999-01-27
申请人： Kouji Matsunaga , Hirobumi Inoue , Masao Tanehashi , Masahiko Nikaidou , Toru Taura , Yuuichi Yamagishi , Satoshi Hayakawa
发明人： Kouji Matsunaga , Hirobumi Inoue , Masao Tanehashi , Masahiko Nikaidou , Toru Taura , Yuuichi Yamagishi , Satoshi Hayakawa
IPC分类号： G01R3102
CPC分类号： H01L22/20 , G01R1/06772 , G01R31/2851 , G01R31/318513 , H01L2224/48091 , H01L2224/48227 , H01L2224/49171 , H01L2924/01019 , H01L2924/1423 , H01L2924/15153 , H01L2924/15165 , H01L2924/19041 , H01L2924/00014 , H01L2924/00
摘要： A process for manufacturing a high frequency multichip module includes a reception inspection step which includes steps of preparing a vertical-type probe, setting the high frequency bare chip on a device stage, and measuring high frequency characteristics of the high frequency bare chip using the vertical-type probe. The prepared vertical-type probe has a center conductor and ground conductors arranged at both sides of the tip portion of the center conductor in the vertical direction in which the probe is pressed to electrodes of the high frequency bare chip. The high frequency bare chip has a ground electrode disposed at the opposite side of the chip from the signal electrodes on the upper surface of a device stage. Then, only a good product is fed to the next step. After the reception inspection, the process goes to a component mounting step. Preferably, the process goes to the next step when the high frequency multichip modules passes at least on of a performance test and visual inspection after the component mounting step.
摘要翻译：一种制造高频多芯片模块的方法，包括接收检查步骤，包括准备垂直型探针，在器件载物台上设置高频裸芯片，以及使用垂直方向测量高频裸芯片的高频特性型探针。所制备的垂直型探针具有中心导体和布置在中心导体的尖端部分的两侧的接地导体，该垂直方向上的探针被压到高频裸芯片的电极上。高频裸芯片具有设置在与器件级的上表面上的信号电极的芯片相对侧的接地电极。然后，只有一个好的产品被送入下一步。在接收检查之后，处理进行到组件安装步骤。优选地，当高频多芯片模块在部件安装步骤之后至少进行性能测试和目视检查时，该过程进行到下一步骤。

3. 发明授权

US06242930B1 High-frequency probe capable of adjusting characteristic impedance in end part and having the end part detachable 有权
标题翻译：高频探头能够调节端部的特性阻抗，并使端部可拆卸
公开(公告)号：US06242930B1
公开(公告)日：2001-06-05
申请号：US09196953
申请日：1998-11-20
申请人： Kouji Matsunaga , Hirobumi Inoue , Masao Tanehashi , Toru Taura , Masahiko Nikaidou , Yuuichi Yamagishi , Satoshi Hayakawa , Hironori Tsugane
发明人： Kouji Matsunaga , Hirobumi Inoue , Masao Tanehashi , Toru Taura , Masahiko Nikaidou , Yuuichi Yamagishi , Satoshi Hayakawa , Hironori Tsugane
IPC分类号： G01R3102
CPC分类号： G01R1/06772
摘要： In a high-frequency probe having a detachable end according to the present invention, parts relating to replacement of an end unit are three parts, that is, an end unit, a probe body, and a pressure block. The end unit comprises a coaxial cable, two slender plate-like ground plates. The coaxial cable is linear in the direction of the end of the high-frequency probe. The ground plates sandwich the coaxial cable. The probe body has an end unit support surface, a circuit board, an end unit arrangement surface and an end part guide. The end unit support surface forms a perpendicular surface used for fixing the end unit to a predetermined position in the end side of the central block in a central part of a surface of the body block. The circuit board connects the end unit to a coaxial connector. The end unit arrangement surface forms a plane in an end side of the body block. And further the guide groove positions and fixes the ground plate in the end part. It is capable to supply positioning pins and a positioning pin holes in mutual contact surfaces for positioning. The present invention makes it possible to adjust characteristic impedance of the probe end part by providing an elastically-shaped part for securing contact pressure and using a pipe or the ground plate in an exposed part of the coaxial inner conductor for performing gap adjustment.
摘要翻译：在根据本发明的具有可拆卸端部的高频探头中，与端部单元的更换相关的部件是端部单元，探针主体和压力块三部分。端部单元包括同轴电缆，两个细长的板状接地板。同轴电缆在高频探头端部的方向是线性的。接地板夹着同轴电缆。探头主体具有端部单元支撑表面，电路板，端部单元布置表面和端部引导件。端部单元支撑表面形成垂直表面，用于将端部单元固定在主体块的表面的中心部分中的中心块的端侧中的预定位置。电路板将端部单元连接到同轴连接器。端部单元布置表面在主体块的端侧形成平面。此外，引导槽定位并将接地板固定在端部。能够在相互接触的表面上提供定位销和定位销孔，用于定位。本发明通过提供一种用于确保接触压力的弹性形状部分并且在同轴内部导体的暴露部分中使用管道或接地板来进行间隙调节，可以调节探针端部的特性阻抗。

4. 发明授权

US06281691B1 Tip portion structure of high-frequency probe and method for fabrication probe tip portion composed by coaxial cable 有权
标题翻译：高频探头的尖端部分结构和由同轴电缆组成的探针尖端部分的制造方法
公开(公告)号：US06281691B1
公开(公告)日：2001-08-28
申请号：US09328362
申请日：1999-06-09
申请人： Kouji Matsunaga , Hirobumi Inoue , Masao Tanehashi , Toru Taura , Masahiko Nikaidou , Yuuichi Yamagishi , Satoshi Hayakawa
发明人： Kouji Matsunaga , Hirobumi Inoue , Masao Tanehashi , Toru Taura , Masahiko Nikaidou , Yuuichi Yamagishi , Satoshi Hayakawa
IPC分类号： G01R3102
CPC分类号： G01R1/06738 , G01R1/06772 , Y10T29/49123
摘要： In a tip portion structure basically having a substrate, a plate spring, and a ground block, the substrate is attached to a signal line on a back surface of the substrate and is contacted on the tip with the signal electrode of the DUT placed on a device stage. The plate spring is made of a resilient material, placed on the front side of the substrate, and positioned to apply a pressure to the substrate. The ground block is positioned between the signal line and the device stage functioned as a ground electrode of the DUT. Alternatively, the tip portion structure further may have a ground plate or a ground surface formed of a conductive thin plate covering entirely the front surface of the substrate, and shaped to surround the signal line in cooperation with the ground block . A plurality of the signal lines may be arranged in parallel on the same plane of the substrate. Another tip portion structure is based on a coaxial cable to be cut from the center at a plane perpendicular to the axial direction thereof along one or more oblique plane. A metal ring fitted over a periphery of the coaxial outer conductor may be used.
摘要翻译：在基本上具有基板，板簧和接地块的尖端部分结构中，将基板附着到基板的背面上的信号线上，并将其与被放置在基板上的DUT的信号电极接触设备阶段板簧由弹性材料制成，放置在基片的正面，并定位成对基片施加压力。接地块位于作为DUT接地电极的信号线和器件级之间。或者，尖端部分结构还可以具有由完全覆盖基板的前表面的导电薄板形成的接地板或接地表面，并且成形为与接地块一起包围信号线。多个信号线可以平行布置在基板的同一平面上。另一个尖端部分结构是基于同轴电缆，沿着一个或多个倾斜平面在垂直于其轴向方向的平面处从中心切割。可以使用安装在同轴外导体周边上的金属环。

5. 发明授权

US06310483B1 Longitudinal type high frequency probe for narrow pitched electrodes 有权
标题翻译：用于窄间距电极的纵向型高频探头
公开(公告)号：US06310483B1
公开(公告)日：2001-10-30
申请号：US09183883
申请日：1998-10-30
申请人： Toru Taura , Hirobumi Inoue , Masao Tanehashi , Kouji Matsunaga , Yuuichi Yamagishi , Satoshi Hayakawa , Hironori Tsugane
发明人： Toru Taura , Hirobumi Inoue , Masao Tanehashi , Kouji Matsunaga , Yuuichi Yamagishi , Satoshi Hayakawa , Hironori Tsugane
IPC分类号： G01R3102
CPC分类号： G01R1/06772
摘要： A high-frequency probe according to the present invention comprises a probe chip that has an end part that is pressed to an electrode and is covered by a electrically conductive outer enclosure, and slides in a vertical direction by an inner surface of this electrically conductive outer enclosure inside this electrically conductive outer enclosure. A signal conductive pattern is fixed inside this probe chip and is connected with a inner conductor having elasticity. The inner conductor can be bent in the vertical direction at a central part of a hole having an opening, which is sufficiently long in the vertical direction, in the center space of a ground conductor, which is fixed to an end part of the main block, when the inner conductor is pressed due to contact of the end part. In addition, the high-frequency probe has a thin shape of a maximum thickness in a transverse direction which is perpendicular to the vertical direction that is a direction of the probe being pressed to a device electrode. The maximum thickness is substantially equal to a pitch between device electrodes, and can be formed in the construction of unifying a plurality of high-frequency probes.
摘要翻译：根据本发明的高频探针包括探针芯片，其具有被压到电极并被导电外壳覆盖的端部，并且通过该导电外壳的内表面在垂直方向上滑动封装在该导电外壳内。信号导电图案固定在该探针芯片内，并与具有弹性的内部导体连接。内导体可以在具有开口的中心部分的垂直方向上弯曲，该中心部分在接地导体的中心空间中在垂直方向上足够长，该接地导体的中心空间固定到主块的端部当内导体由于端部的接触被按压时。此外，高频探头具有垂直于被探针被压向器件电极的方向的垂直方向的横向上的最大厚度的薄形状。最大厚度基本上等于器件电极之间的间距，并且可以在统一多个高频探针的结构中形成。

6. 发明授权

US06486688B2 Semiconductor device testing apparatus having a contact sheet and probe for testing high frequency characteristics 失效
标题翻译：具有用于测试高频特性的接触片和探头的半导体器件测试装置
公开(公告)号：US06486688B2
公开(公告)日：2002-11-26
申请号：US09956073
申请日：2001-09-20
申请人： Toru Taura , Hirobumi Inoue , Michinobu Tanioka , Takahiro Kimura , Kouji Matsunaga
发明人： Toru Taura , Hirobumi Inoue , Michinobu Tanioka , Takahiro Kimura , Kouji Matsunaga
IPC分类号： G01R1073
CPC分类号： G01R31/2886 , G01R1/06772
摘要： A semiconductor device testing apparatus that has a laminate structure composed of a contact sheet having a first opening, an elastic sheet having a second opening and a base plate having a third opening. A supply voltage is applied to an external terminal located on a peripheral portion of the contact sheet. A probe of a probe portion is contacted to a signal electrode of a semiconductor device through the third, second and first openings.
摘要翻译：一种半导体器件测试装置，其具有由具有第一开口的接触片，具有第二开口的弹性片和具有第三开口的底板组成的层叠结构。电源电压被施加到位于接触片的周边部分上的外部端子。探针部分的探针通过第三，第二和第一开口与半导体器件的信号电极接触。

7. 发明申请

US20100155779A1 Field Effect Transistor 审中-公开
标题翻译：场效应晶体管
公开(公告)号：US20100155779A1
公开(公告)日：2010-06-24
申请号：US11992755
申请日：2006-09-28
申请人： Yasuhiro Murase , Kazuki Ota , Yasuhiro Okamoto , Kouji Matsunaga , Hironobu Miyamoto
发明人： Yasuhiro Murase , Kazuki Ota , Yasuhiro Okamoto , Kouji Matsunaga , Hironobu Miyamoto
IPC分类号： H01L29/78
CPC分类号： H01L29/7787 , H01L29/2003 , H01L29/405 , H01L29/66462
摘要： In a field effect transistor, a Group III nitride semiconductor layer structure containing a hetero junction, a source electrode 101 and a drain electrode 103 formed apart from each other over the Group III nitride semiconductor layer structure, and a gate electrode 102 disposed between these electrodes, are provided. Over the surface of the Group III nitride semiconductor layer structure, a SiO2 film 122 containing oxygen as a constitutive element is provided, in contact with both side faces of the gate electrode 102. Over the surface of the Group III nitride semiconductor layer structure, a SiN film 121 is provided so as to cover the region between the SiO2 film 122 and the source electrode 101, and the region between the SiO2 film 122 and the drain electrode 103. The SiN film 121 is composed of a material different from that composing the SiO2 film 122, and contains nitrogen as a constitutive element.
摘要翻译：在场效应晶体管中，包含异质结的III族氮化物半导体层结构，在III族氮化物半导体层结构上彼此分开形成的源电极101和漏极103以及设置在这些电极之间的栅极102 ，提供。在III族氮化物半导体层结构的表面上，提供含有氧作为构成元素的SiO 2膜122，与栅电极102的两个侧面接触。在III族氮化物半导体层结构的表面上， SiN膜121被设置为覆盖SiO 2膜122和源电极101之间的区域以及SiO 2膜122和漏电极103之间的区域。SiN膜121由与不同于构成 SiO 2膜122，并且含有氮作为构成元素。

8. 发明授权

US06821088B2 Centrifugal blower having noise-reduction structure 有权
标题翻译：具有降噪结构的离心式鼓风机
公开(公告)号：US06821088B2
公开(公告)日：2004-11-23
申请号：US10097231
申请日：2002-03-13
申请人： Masaharu Sakai , Kouji Matsunaga
发明人： Masaharu Sakai , Kouji Matsunaga
IPC分类号： F04D2942
CPC分类号： F04D29/422
摘要： In a predetermined range from a nose portion toward a scroll finish side in a scroll casing of a centrifugal blower, a first clearance dimension on a side of a suction port between an outer periphery of a centrifugal fan and a side plate of the scroll casing is set smaller than a second clearance dimension on a side opposite to the suction port between the outer periphery of the centrifugal fan and the side plate of the scroll casing. In addition, in the vicinity of the nose portion, a first wall part of the scroll casing on the side of the suction port protrudes toward a scroll finish side, from a second wall part of the scroll casing on the side opposite to the suction port.
摘要翻译：在离心式鼓风机的涡旋壳体中从鼻部向涡旋端面侧的预定范围内，离心风扇的外周与涡旋壳体的侧板之间的吸入口侧的第一间隙尺寸为在与离心风扇的外周和涡旋壳体的侧板之间的吸入口相对的一侧上小于第二间隙尺寸。此外，在鼻部附近，涡旋壳体的吸入口侧的第一壁部从涡旋壳体的与吸引口相反的一侧的第二壁部朝向涡旋端面突出。

9. 发明授权

US06755046B2 Vehicle air conditioner with heat pump refrigerant cycle 有权
标题翻译：车用空调带热泵制冷循环
公开(公告)号：US06755046B2
公开(公告)日：2004-06-29
申请号：US10404730
申请日：2003-04-01
申请人： Shin Nishida , Masaaki Kawakubo , Kouji Matsunaga
发明人： Shin Nishida , Masaaki Kawakubo , Kouji Matsunaga
IPC分类号： F25B1300
CPC分类号： F25B9/008 , B60H1/00921 , B60H2001/00178 , B60H2001/00957 , B60H2001/3298 , F25B1/10 , F25B13/00 , F25B40/00 , F25B2309/061 , F25B2313/02321 , F25B2313/02331 , F25B2313/02341 , F25B2313/02344 , F25B2313/0314 , F25B2313/0315 , F25B2341/0012 , F25B2600/2513 , F25B2700/1931
摘要： In a vehicle air conditioner with a heat pump refrigerant cycle, an interior heat exchanger of the refrigerant cycle is disposed in an air conditioning case to heat air in a heating operation and to cool air in a cooling operation. Further, a cooling heat exchanger for cooling air by evaporating the refrigerant is disposed so that a part of refrigerant circulating in the refrigerant cycle flows into the cooling heat exchanger at least in the heating operation. In addition, a decompression unit for decompressing refrigerant flowing to the cooling heat exchanger is disposed, and the decompression unit is opened even in the cooling operation. Accordingly, dehumidifying capacity of the air conditioner can be improved while the refrigerant cycle has a simple structure.
摘要翻译：在具有热泵制冷剂循环的车辆用空调机中，将制冷剂循环的内部热交换器设置在空调箱中，以在制热运转中加热空气，并在制冷运转中冷却空气。此外，通过使制冷剂蒸发而冷却空气的冷却热交换器被配置成使得在制冷剂循环中的制冷剂的一部分至少在加热运转中流入冷却热交换器。此外，设置用于对流入冷却用热交换器的制冷剂进行减压的减压单元，即使在制冷运转中，减压单元也被打开。因此，在制冷剂循环具有简单的结构的情况下，能够提高空气调节器的除湿能力。

10. 发明申请

US20070274833A1 Centrifugal blower 审中-公开
标题翻译：离心式鼓风机
公开(公告)号：US20070274833A1
公开(公告)日：2007-11-29
申请号：US11888080
申请日：2007-07-31
申请人： Masaharu Sakai , Kouji Matsunaga , Yasushi Mitsuishi
发明人： Masaharu Sakai , Kouji Matsunaga , Yasushi Mitsuishi
IPC分类号： F01D1/02
CPC分类号： F04D29/30 , F04D29/4233
摘要： A centrifugal multi-blade fan has multiple blades about a rotational shaft and draws in air along the rotational shaft and then blows the air approximately perpendicular to the rotational shaft to reduce wind noise. A scroll casing encloses the multi-blade fan and defines a scroll-shaped airflow passage for directing the air blown from the multi-blade fan. The scroll casing has an intake opening and an outlet opening at a scroll end, in a downstream scroll casing portion. The scroll casing expands such that a flow passage cross-sectional area on the airflow downstream side is larger than that on an airflow upstream side. A ratio of a blade length to a diameter of the multi-blade fan is greater than or equal to 0.12, and an outer scroll casing radius, relative to the rotational axis, increases as a logarithmic spiral, its expansion angle being from 3.3° to 4.8°.
摘要翻译：离心式多叶片风扇具有围绕旋转轴的多个叶片，并沿着旋转轴吸入空气，然后大致垂直于旋转轴吹送空气以减少风噪声。涡旋壳体包围多叶片风扇并且限定用于引导从多叶片风扇吹出的空气的涡旋状气流通道。涡旋壳体在下游涡旋壳体部分中具有在涡旋端处的进气开口和出口。涡旋壳体膨胀，使得气流下游侧的流路横截面积大于气流上游侧的流路截面积。叶片长度与多叶片风扇的直径的比率大于或等于0.12，并且相对于旋转轴线的外涡旋壳体半径随着对数螺旋而增加，其膨胀角为3.3°至 4.8°。

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