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    • 2. 发明申请
    • Tungsten sputtering target and method of manufacturing the target
    • 钨溅射靶和制造目标的方法
    • US20050029094A1
    • 2005-02-10
    • US10363257
    • 2001-09-03
    • Koichi WatanabeYoichiro YabeTakashi IshigamiTakashi WatanabeHitoshi AoyamaYasuo KohsakaYukinobu Suzuki
    • Koichi WatanabeYoichiro YabeTakashi IshigamiTakashi WatanabeHitoshi AoyamaYasuo KohsakaYukinobu Suzuki
    • C23C14/34C23C14/00
    • C23C14/3414
    • The tungsten sputtering target of the present invention is characterized in that a half band width of a peak corresponding to a crystal plane (110) of the target is 0.35 or less when a surface of the target to be sputtered is analyzed by X-ray diffraction. Further, the method of manufacturing the tungsten sputtering target of the present invention is characterized by comprising the steps of: pressing a high purity tungsten powder to form a pressed compact; sintering the pressed compact to form a sintered body; working the sintered body to obtain a shape of a target; subjecting the target to a grinding work of at least one of rotary grinding and polishing; and subjecting the target to a finishing work of at least one of etching and reverse sputtering. According to the above structure, there can be provided a tungsten sputtering target and method of manufacturing the target capable of improving the in-plain uniformity in thickness of the W thin film formed on a substrate, and capable of effectively reducing the generation of the particles.
    • 本发明的钨溅射靶的特征在于,当通过X射线衍射分析待溅射靶的表面时,对应于靶的晶面(110)的峰的半带宽为0.35以下 。 此外,本发明的钨溅射靶的制造方法的特征在于包括以下步骤:将高纯度钨粉按压以形成压制成型体; 烧结压制成型体的烧结体; 加工烧结体以获得靶的形状; 使目标进行旋转研磨和抛光中的至少一个的研磨工作; 并对靶进行蚀刻和反溅镀中的至少一种的精加工。 根据上述结构,可以提供一种钨溅射靶和能够提高形成在基板上的W薄膜的厚度均匀性均匀化的靶的方法,能够有效地减少粒子的产生 。
    • 10. 发明申请
    • Sintered Electrode for Cold Cathode Tube, Cold Cathode Tube Comprising this Sintered Electrode for Cold Cathode Tube, and Liquid Crystal Display Device
    • 用于冷阴极管的烧结电极,包含用于冷阴极管的烧结电极的冷阴极管和液晶显示装置
    • US20080192176A1
    • 2008-08-14
    • US10570495
    • 2005-05-02
    • Hitoshi Aoyama
    • Hitoshi Aoyama
    • H05B37/02G02F1/13357
    • H01J61/09H01J61/067Y10T428/12292
    • There are provided (1) a sintered electrode for a cold cathode tube, comprising a cylindrical side wall part, a bottom part provided at one end of the side wall part, and an opening provided at another end of the side wall part, characterized in that the surface roughness (Sm) of the inner surface of the electrode is not more than 100 μm, (2) a cold cathode tube characterized by comprising: a hollow tubular light transparent bulb into which a discharge medium has been sealed; a fluorescent material layer provided on the inner wall surface of the tubular light transparent bulb; and a pair of the above sintered electrodes for a cold cathode tube provided respectively on both ends of the tubular light transparent bulb, and (3) a liquid crystal display device characterized by comprising: the above cold cathode tube; a light guide body disposed closely to the cold cathode tube; a reflector disposed on one surface side of the light guide body; and a liquid crystal display panel disposed on another surface side of the light guide body.According to the present invention, a cold cathode tube, which is low in operating voltage, can significantly suppress mercury consumption and has a prolonged service life, can be provided at low cost.
    • 提供(1)一种用于冷阴极管的烧结电极,包括圆筒形侧壁部分,设置在侧壁部分一端的底部和设置在侧壁部分另一端的开口,其特征在于, 电极内表面的表面粗糙度(Sm)不大于100微米,(2)冷阴极管,其特征在于包括:中空管状透明灯泡,放电介质已经被密封在其中; 荧光材料层,设置在管状透光灯泡的内壁面上; 以及一对上述冷阴极管用烧结电极,分别设置在管状透明灯泡的两端,(3)液晶显示装置,其特征在于,包括:上述冷阴极管; 靠近冷阴极管设置的导光体; 反射器,设置在所述导光体的一个表面侧; 以及设置在导光体的另一表面侧的液晶显示面板。 根据本发明,可以以低成本提供低操作电压的冷阴极管,可以显着抑制汞消耗并延长使用寿命。